US9431296B2 - Structure and method to form liner silicide with improved contact resistance and reliablity - Google Patents
Structure and method to form liner silicide with improved contact resistance and reliablity Download PDFInfo
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- US9431296B2 US9431296B2 US14/315,514 US201414315514A US9431296B2 US 9431296 B2 US9431296 B2 US 9431296B2 US 201414315514 A US201414315514 A US 201414315514A US 9431296 B2 US9431296 B2 US 9431296B2
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- 238000000034 method Methods 0.000 title claims description 34
- 229910021332 silicide Inorganic materials 0.000 title claims description 15
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims description 15
- 125000006850 spacer group Chemical group 0.000 claims abstract description 57
- 239000000463 material Substances 0.000 claims description 139
- 239000004065 semiconductor Substances 0.000 claims description 127
- 239000000758 substrate Substances 0.000 claims description 33
- 239000004020 conductor Substances 0.000 claims description 26
- 239000007772 electrode material Substances 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052718 tin Inorganic materials 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 230000005669 field effect Effects 0.000 claims description 5
- 229910000943 NiAl Inorganic materials 0.000 claims description 4
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910004166 TaN Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
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- 238000005137 deposition process Methods 0.000 description 8
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- 239000010703 silicon Substances 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
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- 238000000151 deposition Methods 0.000 description 5
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- 230000015556 catabolic process Effects 0.000 description 1
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- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000013404 process transfer Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823871—Complementary field-effect transistors, e.g. CMOS interconnection or wiring or contact manufacturing related aspects
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
- H01L23/53223—Additional layers associated with aluminium layers, e.g. adhesion, barrier, cladding layers
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53257—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a refractory metal
- H01L23/53266—Additional layers associated with refractory-metal layers, e.g. adhesion, barrier, cladding layers
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
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- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present application relates to semiconductor structures and methods of fabricating the same, and more particularly to contact structures with improved contact resistance and reliability and methods of forming the same.
- FETs Field Effect Transistors
- lithographic techniques are used to define contact openings in a dielectric material that surrounds the transistor for the electrical contacts.
- the contact openings are then filled with a metal filler to form electrical contacts.
- source/drain regions increased contact resistance to the source region and the drain region (hereinafter collectively referred to as “source/drain regions”) jeopardizes device performance, especially for the 32 nm technology node and beyond.
- a liner silicide has been employed to reduce the contact resistance between the metal filler and the source/drain regions.
- a NiPt silicide liner has been shown to provide good on-resistance (R on ) for both n-type FETs (nFETs) and p-type FETs (PFETs).
- R on on-resistance
- PFET p-type FET
- the present disclosure provides a contact structure with improved contact resistance and reliability.
- this can be achieved by forming an inner spacer between a contact liner and dielectric layers laterally surrounding the contact structure.
- the inner spacer severs as a barrier to prevent diffusion of metals from the contact liner into the dielectric layers and it also mitigates on-resistance (R on ) degradation.
- a method of forming a semiconductor structure includes first forming a plurality of contact openings through a contact level dielectric layer and a portion of an interlevel dielectric (ILD) layer.
- the plurality of contact openings expose portions of an epitaxial source region and an epitaxial drain region of at least one semiconductor device.
- a contact liner material layer is formed on the inner spacer and bottom surfaces of the plurality of contact openings. The bottom portions of the liner material layer in the plurality of contact openings react with exposed portions of the epitaxial source region and the epitaxial drain region to form liner silicide portions.
- a contact conductor layer is formed to fill remaining volumes of the plurality of contact openings.
- a semiconductor structure in another aspect of the present application, includes at least one semiconductor device.
- the at least one semiconductor device includes a functional gate structure and an epitaxial source region and an epitaxial drain region located on opposite sides of the functional gate structure.
- the function gate structure, the epitaxial source region and the epitaxial drain region are laterally surrounded by an interlevel dielectric (ILD) layer.
- the semiconductor structure further includes a plurality of source/drain contact structures extending through a contact level dielectric layer and a portion of the ILD layer and in contact with portions of the epitaxial source region and the epitaxial drain region.
- Each of the plurality of source/drain contact structures includes an inner spacer located on sidewalls of each of a plurality of source/drain contact openings that is laterally surrounded by the contact level dielectric layer and the portion of the ILD layer, a contact liner having a first portion in contact with the inner spacer and a second portion in contact with the portions of the epitaxial source and drain regions, and a contact conductor filling in a remaining volume of each of the plurality of source/drain contact openings.
- FIG. 1A is a top-down view of an exemplary semiconductor structure after forming a plurality of fin-defining mask structures in an nFinFET region and a pFinFET region on a semiconductor substrate according to one embodiment of the present application.
- FIG. 1B is a cross-sectional view of the exemplary semiconductor structure of FIG. 1A along line B-B′.
- FIG. 2A is a top-down view of the exemplary semiconductor structure of FIG. 1A after patterning a top semiconductor layer of the semiconductor substrate to form a plurality of semiconductor fins in the nFinFET region and the pFinFET region.
- FIG. 2B is a cross-sectional view of the exemplary semiconductor structure of FIG. 2A along line B-B′.
- FIG. 3 is a cross-sectional view of the exemplary semiconductor structure of FIGS. 2A-2B after forming a first sacrificial gate structure over a portion of each of the semiconductor fins in the nFinFET region and a second sacrificial gate structure over a portion of each of the semiconductor fins in the pFinFET region.
- FIG. 4 is a cross-sectional view of the exemplary semiconductor structure of FIG. 3 after forming a first source region and a first drain region on opposite sides of the first sacrificial gate structure in the nFinFET region and a second source region and a second drain region on opposite sides of the second sacrificial gate structure in the pFinFET region.
- FIG. 5 is a cross-sectional view of the exemplary semiconductor structure of FIG. 4 after forming an interlevel dielectric (ILD) layer over the first and second sacrificial gate structures, the first and second source/drain regions, and a substrate including a buried insulator layer and a handle substrate.
- ILD interlevel dielectric
- FIG. 6 is a cross-sectional view of the exemplary semiconductor structure of FIG. 5 after forming a first gate cavity in the nFinFET region and a second gate cavity in the pFinFET region.
- FIG. 7 is a cross-sectional view of the exemplary semiconductor structure of FIG. 6 after forming a gate dielectric layer on bottom surfaces and sidewalls of the first and second gate cavities and a topmost surface of the ILD layer and a first work function material layer over the gate dielectric layer.
- FIG. 8 is a cross-sectional view of the exemplary semiconductor structure of FIG. 7 after removing a portion of the first work function material layer from the pFinFET region.
- FIG. 9 is a cross-sectional view of the exemplary semiconductor structure of FIG. 8 after forming a second work function material layer over an exposed portion of the gate dielectric layer and a remaining portion of the first work function material layer.
- FIG. 10 is a cross-sectional view of the exemplary semiconductor structure of FIG. 9 after removing a portion of the second work function material layer from the nFinFET region.
- FIG. 11 is a cross-sectional view of the exemplary semiconductor structure of FIG. 10 after filling remaining volumes of the first and second gate cavities with a gate electrode material layer.
- FIG. 12 is a cross-sectional view of the exemplary semiconductor structure of FIG. 11 after removing portions of the gate electrode material layer, the first work function material layer portion, the second work function material layer portion and the gate dielectric layer that are located above the topmost surface of the ILD layer to provide a first functional gate stack in the nFinFET region and a second functional gate stack in the pFinFET region.
- FIG. 13 is a cross-sectional view of the exemplary semiconductor structure of FIG. 12 after forming an etch stop layer over the ILD layer and the first and second functional gate stacks and a contact level dielectric layer over the etch stop layer.
- FIG. 14 is a cross-sectional view of the exemplary semiconductor structure of FIG. 13 after forming first contact openings through the contact level dielectric layer, the etch stop layer and an upper portion of the ILD layer to expose portions of the first and second source/drain regions and second contact openings through the contact level dielectric layer and the etch stop layer to expose portions of the first and second gate electrodes.
- FIG. 15 is a cross-sectional view of the exemplary semiconductor structure of FIG. 14 after forming an inner spacer on sidewalls of each of the first and second contact openings.
- FIG. 16 is a cross-sectional view of the exemplary semiconductor structure of FIG. 15 after forming a contact liner material layer on the inner spacer, bottom surfaces of the first and second contact openings and a topmost surface of the contact level dielectric layer and filling remaining volumes of the first and second contact openings with a contact conductor material layer.
- FIG. 17 is a cross-sectional view of the exemplary semiconductor structure of FIG. 16 after forming source/drain contact structures and gate contact structures.
- the exemplary semiconductor structure includes a semiconductor substrate 8 and a plurality of fin-defining mask structures 16 A, 16 B formed thereon.
- the semiconductor substrate 8 can be a bulk substrate including a bulk semiconductor material throughout or a semiconductor-on-insulator (SOI) substrate.
- SOI semiconductor-on-insulator
- the semiconductor substrate 8 is an SOI substrate including a handle substrate 10 , a buried insulator layer 12 and a top semiconductor layer 14 .
- the handle substrate 10 can include a semiconductor material, such as, for example, Si, Ge, SiGe, SiC, SiGeC, and III/V compound semiconductors.
- the handle substrate 10 provides mechanical support to the buried insulator layer 12 and the top semiconductor layer 14 .
- the thickness of the handle substrate 10 can be from 30 ⁇ m to about 2 mm, although less and greater thicknesses can also be employed.
- the buried insulator layer 12 includes a dielectric material such as silicon oxide, silicon nitride, silicon oxynitride, or a combination thereof.
- the thickness of the buried insulator layer 12 can be from 50 nm to 200 nm, with a thickness from 100 nm to 150 nm being more typical.
- the top semiconductor layer 14 can include a semiconductor material such as, for example, Si, Ge, SiGe, SiC, SiGeC, and III/V compound semiconductors such as, for example, InAs, GaAs, and InP.
- the semiconductor materials of the top semiconductor layer 14 and the handle substrate 10 may be the same or different.
- each of the handle substrate 10 and the top semiconductor layer 14 comprises a single crystalline semiconductor material, such as, for example, single crystalline silicon.
- the top semiconductor layer 14 may or may not be doped with p-type dopants and/or n-type dopants. Examples of p-type dopants include, but are not limited to, boron, aluminum, gallium and indium.
- n-type dopants include, but are not limited to, antimony, arsenic and phosphorous.
- the thickness of the top semiconductor layer 14 can be from 10 nm to 200 nm, with a thickness from 30 nm to 70 nm being more typical.
- a first plurality of fin-defining mask structures 16 A is formed in a first device region 100
- a second plurality of fin-defining mask structure 16 B is formed in a second device region 200 .
- the first device region 100 defines an nFinFET region
- the second device region 200 defines a pFinFET region.
- the fin-defining mask structures 16 A, 16 B are mask structures that cover the regions of the top semiconductor layer 14 that are subsequently converted into semiconductor fins.
- the fin-defining mask structures 16 A, 16 B can include a dielectric material such as, for example, silicon nitride, silicon oxide, or silicon oxynitride.
- the fin-defining mask structures 16 A, 16 B can be formed, for example, by first depositing a blanket hard mask layer (not shown) on the top semiconductor layer 14 .
- the hard mask layer can be deposited, for example, by chemical vapor deposition (CVD).
- the thickness of the hard mask layer can be from 5 nm to 100 nm, although lesser and greater thicknesses can also be employed.
- the hard mask layer can be subsequently patterned to form the fin-defining mask structures 16 A, 16 B by lithography and etching processes.
- the lithographic step includes applying a photoresist layer (not shown) atop the hard mask layer, exposing the photoresist layer to a desired pattern of radiation, and developing the exposed photoresist layer utilizing a conventional resist developer.
- the etching process comprises dry etching and/or wet chemical etching.
- suitable dry etching processes that can be used in the present disclosure include reactive ion etch (RIE), ion beam etching, plasma etching or laser ablation. Typically, a RIE process is used.
- the etching process transfers the pattern from the patterned photoresist layer to the hard mask layer, utilizing the top semiconductor layer 14 as an etch stop.
- the patterned photoresist layer can be removed utilizing a conventional resist stripping process such as, for example, ashing.
- the fin-defining mask structures 16 A, 16 B that are formed in each of the first device region 100 (i.e., nFinFET region) and the second device region 200 (i.e., pFinFET region) are arranged in parallel and spaced apart in a widthwise direction with each fin-defining mask structure laterally extends along a lengthwise direction.
- the top semiconductor layer 14 is patterned to form a plurality of semiconductor fins 18 n , 18 p in the nFinFET region and pFinFET region using fin-defining mask structures 16 A, 16 B as an etch mask. Portions of the top semiconductor layer 14 that are not protected by the fin-defining mask structures 16 A, 16 B are removed, for example, using RIE. Remaining non-etched portions of the top semiconductor layer 14 in the nFinFET region are herein referred to as n-type semiconductor fins 18 n , while remaining non-etched portions of the top semiconductor layer 14 in the pFinFET region are herein referred to as p-type semiconductor fins 18 p.
- Each of the semiconductor fins 18 n , 18 p that is formed may have a height ranging from 1 nm to 150 nm, with a height ranging from 10 nm to 50 nm being more typical.
- Each of the semiconductor fins 18 n , 18 p may have a width ranging from 5 nm to 40 nm, with a width ranging from 10 nm to 20 nm being more typical.
- Adjacent semiconductor fins 18 n , 18 p may be separated by a pitch ranging from 20 nm to 100 nm, with a pitch ranging from 30 nm to 50 nm being more typical.
- the fin-defining mask structures 16 A, 16 B can be subsequently removed selective to the semiconductor fins 18 n , 18 p .
- the removal of the fin-defining mask structures 16 A, 16 B can be effected by an etch, which can be a wet etch or a dry etch.
- the fin-defining mask structures 16 A, 16 B can be removed by a wet etch.
- a wet etch employing hot phosphoric acid can be employed to remove silicon nitride
- a wet etch employing hydrofluoric acid can be employed to remove silicon oxide.
- sacrificial gate structures including a first sacrificial gate structure 20 A formed over a portion of each of the semiconductor fins 18 n in the nFinFET region and a second sacrificial gate structure 20 B formed over a portion of each of the semiconductor fins 18 p in the pFinFET region are provided.
- the first sacrificial gate structure 20 A straddles the semiconductor fins 18 n in the nFinFET region, while the second sacrificial gate structure 20 B straddles the semiconductor fins 18 p in the pFinFET region.
- the term “sacrificial gate structure” as used herein refers to a placeholder structure for a functional gate structure to be subsequently formed.
- the “functional gate structure” as used herein refers to a permanent gate structure used to control output current (i.e., flow of carriers in the channel) of a semiconducting device through electrical fields.
- output current i.e., flow of carriers in the channel
- the present disclosure is not limited to such a number of sacrificial gate structures. Instead, a plurality of sacrificial gate structures can be formed in each of the nFinFET region and the pFinFET region.
- Each of the sacrificial gate structures 20 A, 20 B includes a sacrificial gate stack and a gate spacer 26 formed on sidewalls of the corresponding sacrificial gate stack.
- Each sacrificial gate stack includes, from bottom to top, a sacrificial gate material 22 and a sacrificial gate cap 24 and can be formed by first providing a material stack of a sacrificial gate material layer and a sacrificial gate cap layer (not shown) over the semiconductor fins 18 n , 18 p and the substrate (i.e., the buried insulator layer 12 and the handle substrate 10 ).
- a sacrificial gate dielectric such as silicon dioxide
- the sacrificial gate material layer may be composed of a semiconductor material that can be etched selectively to a material of the semiconductor fins 18 n , 18 p .
- Exemplary semiconductor materials that can be employed in the sacrificial gate material layer include, but are not limited to, silicon, germanium, a silicon germanium alloy, a silicon carbon alloy, or a compound semiconductor material.
- the sacrificial gate material layer is composed of polysilicon.
- the sacrificial gate material layer can be formed using CVD or plasma enhanced chemical vapor deposition (PECVD).
- PECVD plasma enhanced chemical vapor deposition
- the thickness of the sacrificial gate material layer, as measured above an upper surface of the semiconductor fins 18 n , 18 p can be from 50 nm to 300 nm, although lesser and greater thicknesses can also be employed.
- the sacrificial gate cap layer can include a dielectric material such as, for example, silicon oxide, silicon nitride, or silicon oxynitride.
- the sacrificial gate cap layer can be formed by a deposition process including, for example, CVD, PECVD, physical vapor deposition (PVD), atomic layer deposition (ALD) or sputtering.
- the sacrificial gate cap layer that is formed can have a thickness ranging from 25 nm to 100 nm, although lesser or greater thicknesses can also be employed.
- the material stack can then be patterned by lithography and etching to form the sacrificial gate stacks ( 22 , 24 ) in each of the sacrificial gate structure 20 A, 20 B.
- a photoresist layer (not shown) is applied over the topmost surface of the material stack and is lithographically patterned by lithographic exposure and development.
- the pattern in the photoresist layer is transferred into the material stack by an etch, which can be an anisotropic etch such as a RIE process.
- the remaining portions of the material stack after the pattern transfer constitute sacrificial gate stacks ( 22 , 24 ).
- Each gate spacer 26 can be formed by first depositing a conformal spacer material layer (not shown) on exposed surfaces of the sacrificial gate stacks ( 22 , 24 ) and the semiconductor fins 18 n , 18 p utilizing a conventional deposition process including, for example, CVD or ALD. Alternatively, a thermal growth process including oxidation and/or nitridation can be employed in forming the spacer material layer. Following the formation of the spacer material layer, horizontal portions of the spacer material layer are removed by an anisotropic etch, such as, for example, a RIE process. In one embodiment, the RIE process is continued so that vertical portions of the spacer material layer present on the sidewalls of the semiconductor fins 18 n , 18 p are removed. The remaining vertical portions of the spacer material layer constitute the gate spacer 26 .
- Materials used to form the gate spacer 26 may include a dielectric material such as, for example, silicon oxide, silicon nitride, or silicon oxynitride.
- the gate spacer 26 can have a thickness as measured at the bases ranging from 2 nm to 100 nm, with a thickness ranging from 6 nm to 10 nm being more typical.
- first source region and a first drain region are formed on opposite sides of the first sacrificial gate structure 20 A in the nFinFET region and a second source region and a second drain region (collectively referred to as second source/drain regions 34 ) are formed on opposite sides of the second sacrificial gate structure 20 B in the pFinFET region.
- the first source/drain regions 32 and the second source/drain regions 34 can be formed by utilizing block mask technology.
- a first mask layer (not shown) is first applied over the semiconductor fins 18 n , 18 p , the sacrificial gate structures 20 A, 20 B, and the substrate and lithographically patterned so that the patterned first mask layer covers the pFinFET region, while exposing the nFinFET region that would be subjected to the epitaxial deposition and ion implantation.
- the first mask layer may include any material that can be easily patterned and removed without damaging the underlying components.
- the first mask layer includes amorphous carbon with hydrogen content less than about 15 atomic %.
- the first source/drain regions 32 can be formed by epitaxially depositing a first semiconductor material over the exposed surfaces of semiconductor fins 18 n , but not on dielectric surfaces such as the surfaces of the sacrificial gate cap 24 , the gate spacer 26 and the buried insulator layer 12 .
- the first source/drain regions 32 is composed of SiC with the strain effect tuned to enhance the performance of nFinFETs formed in the nFinFET region.
- the first semiconductor material of the first source/drain regions 32 can be deposited as an intrinsic semiconductor material, or can be deposited with in-situ doping. If the first semiconductor material is deposited as an intrinsic semiconductor material, the first source/drain regions 32 can be subsequently doped (ex-situ) with an n-type dopant (e.g., P, As or Sb) utilizing ion implantation, gas phase doping, or dopant out diffusion from a sacrificial dopant source material. After the formation of the first source/drain regions 32 , the patterned mask layer can be removed, for example, by oxygen-based plasma etching.
- an n-type dopant e.g., P, As or Sb
- the second source/drain regions 34 can be formed by performing the processing steps described above with respect to the first source/drain regions 32 .
- a second semiconductor material is epitaxially deposited over the exposed surfaces of semiconductor fins 18 p , but not on dielectric surfaces such as the surfaces of the sacrificial gate cap 24 , the gate spacer 26 and the buried insulator layer 12 .
- the second semiconductor material is SiGe with the strain effect tuned to enhance the performance of pFinFETs formed in the pFinFET region.
- the second semiconductor material of the second source/drain regions 34 can be deposited as an intrinsic semiconductor material, or can be deposited with in-situ doping. If the second semiconductor material is deposited as an intrinsic semiconductor material, the second source/drain regions 32 can be subsequently doped (ex-situ) with a p-type dopant (e.g., B, Al, Ga or In) utilizing ion implantation, gas phase doping or dopant out diffusion from a sacrificial dopant source material. After the formation of the second source/drain regions 32 , the patterned second mask layer can be removed, for example, by oxygen-based plasma etching. The n-type dopants in the first source/drain regions 32 and p-type dopants in the second source/drain regions 34 can be activated subsequently using a rapid thermal process.
- a p-type dopant e.g., B, Al, Ga or In
- an interlevel dielectric (ILD) layer 36 is formed over the substrate, covering the first sacrificial gate structure 20 A, the second sacrificial gate structure 20 B, the first source/drain regions 32 , the second source/drain regions 34 , and the exposed portions of the buried insulator layer 12 .
- the ILD layer 36 includes a dielectric material that may be easily planarized.
- the ILD layer 36 can be a doped silicate glass, an undoped silicate glass (silicon oxide), an organosilicate glass (OSG), or a porous dielectric material.
- the ILD layer 36 can be formed by CVD, PVD or spin coating.
- the thickness of the ILD layer 36 can be selected so that an entirety of the top surface of the ILD layer 36 is formed above top surfaces of the sacrificial gate cap 24 .
- the ILD layer 36 can be subsequently planarized, for example, by CMP and/or a recess etch.
- the sacrificial gate cap 24 can be employed as an etch stop. After the planarization, the ILD layer 36 has a topmost surface coplanar with the top surfaces of the sacrificial gate cap 24 .
- the sacrificial gate stacks ( 22 , 24 ) in the first and the second sacrificial gate structures 20 A, 20 B can be removed by at least one etch, which can be a dry etch and/or a wet etch.
- the at least one etch employed to remove the sacrificial gate stacks ( 22 , 24 ) is selective to the dielectric materials of the ILD layer 36 and the gate spacer 26 as well as the semiconductor material of the semiconductor fins 18 n , 18 p .
- a first gate cavity 38 A is formed in the nFinFET region.
- the first gate cavity 38 A occupies a volume from which the sacrificial gate stack ( 22 , 24 ) in the first sacrificial gate structure 20 A is removed.
- a second gate cavity 38 B is formed in the pFinFET region.
- the second gate cavity 38 B occupies a volume from which the sacrificial gate stack ( 22 , 24 ) in the second sacrificial gate structure 20 B is removed.
- a conformal gate dielectric layer 42 L is deposited on the bottom surfaces and sidewalls of the gate cavities 38 A, 38 B and the topmost surface of the ILD layer 36 .
- the gate dielectric layer 42 L can be a high dielectric constant (high-k) material layer having a dielectric constant greater than 8.0.
- Exemplary high-k materials include, but are not limited to, HfO 2 , ZrO 2 , La 2 O 3 , Al 2 O 3 , TiO 2 , SrTiO 3 , LaAlO 3 , Y 2 O 3 , HfO x N y , ZrO x N y , La 2 O x N y , Al 2 O x N y , TiO x N y , SrTiO x N y , LaAlO x N y , Y 2 O x N y , SiON, SiN x , a silicate thereof, and an alloy thereof.
- the gate dielectric layer 42 L is a hafnium oxide (HfO 2 ) layer.
- the gate dielectric layer 42 L can be formed by a conventional deposition process, including but not limited to, CVD, PVD, ALD, molecular beam epitaxy (MBE), ion beam deposition, electron beam deposition, and laser assisted deposition.
- the gate dielectric layer 42 L that is formed may have a thickness ranging from 0.9 nm to 6 nm, with a thickness ranging from 1.0 nm to 3 nm being more typical.
- the gate dielectric layer 42 L may have an effective oxide thickness on the order of or less than 1 nm.
- a conformal first work function material layer 44 L is subsequently formed over the gate dielectric layer 42 L employing CVD, sputtering or plating.
- the first work function material layer 44 L includes a first metal having a first work function suitable to tune the work function of nFinFETs in the nFinFET region.
- Exemplary first metals that can be employed in the first work function material layer 44 L include, but are not limited to La, Ti and Ta.
- the thickness of the first work function material layer 44 L can be from 3 nm to 15 nm, although lesser and greater thicknesses can also be employed.
- a portion of the first work function material layer 44 L is removed from the pFinFET region.
- a mask layer (not shown) is applied and lithographically patterned so that a patterned mask layer (not shown) covers the nFinFET region, while exposing a portion of the first work function material layer 44 L in the pFinFET region.
- the exposed portion of the first work function material layer 44 L is removed by an etch, which can be a wet etch or a dry etch. Removal of the exposed portion of the first work function material layer 44 L exposes a portion of the gate dielectric layer 42 L in the pFinFET region.
- the patterned mask layer can then be removed, for example, by oxygen-based plasma etching.
- the remaining portion of the first work function material layer 44 L in the nFinFET is herein referred to as a first work function material layer portion 44 .
- a conformal second work function material layer 46 L is formed over the exposed portion of the gate dielectric layer 42 L and the first work function material layer portion 44 employing CVD, sputtering or plating.
- the second work function material layer 46 L includes a second metal having a second work function suitable to tune the work function of pFinFETs in pFinFET region.
- Exemplary second metals that can be employed in the second work function material layer 46 L include, but are not limited to Al, TiN, TaN and WN.
- the thickness of the second work function material layer 46 L can be from 3 nm to 15 nm, although lesser and greater thicknesses can also be employed.
- a portion of the second work function material layer 46 L is removed from the nFinFET region.
- a mask layer (not shown) is applied and lithographically patterned so that a patterned mask layer (not shown) covers the pFinFET region, while exposing a portion of the second work function material layer 46 L in the nFinFET region.
- the exposed portion of the second work function material layer 46 L is removed by an etch, which can be a wet etch or a dry etch.
- the patterned mask layer can then be removed, for example, by oxygen-based plasma etching.
- the remaining portion of the second work function material layer 46 L in the pFinFET region is herein referred to as a second work function material layer portion 46 .
- the gate electrode material layer 48 L can includes any conductive material including, for example, doped polysilicon, Al, Au, Ag, Cu or W.
- the gate electrode material layer 48 L can be formed by a conventional deposition process such as, for example, CVD, PVD and ALD.
- the thickness of the gate electrode material layer 48 L, as measured in a planar region of the gate electrode material layer 48 L above the topmost surface of the ILD layer 36 can be from 100 nm to 500 nm.
- portions of the gate electrode material layer 48 L, the first work function material layer portion 44 , the second work function material layer portion 46 and the gate dielectric layer 42 L that are located above the topmost surface of the ILD layer 36 are removed by employing a planarization process, such as, for example, CMP.
- the remaining portion of the gate dielectric layer 42 L in the nFinFET region constitutes a first gate dielectric 42 A, and the remaining portion of the gate dielectric layer 42 L in the pFinFET region constitutes a second gate dielectric 42 B.
- the remaining portion of the first work function material layer portion 44 in the nFinFET region constitutes a first work function material portion 44 A
- the remaining portion of the second work function material layer portion 46 in the pFinFET constitutes a second work function material portion 46 B
- the remaining portion of the gate electrode material layer 48 L in the nFinFET region constitutes a first gate electrode 48 A
- the remaining portion of the gate electrode material layer 48 L in the pFinFET constitutes a second gate electrode 48 B.
- the topmost surfaces of the first and second gate dielectrics ( 42 A, 42 B), the first and second work function material portions ( 44 A, 46 B) and the first and second gate electrodes ( 48 A, 48 B) are coplanar with the topmost surface of the ILD layer 36 .
- the functional gate stacks are formed within the first and second gate cavities ( 38 A, 38 B).
- the functional gate stacks includes a first functional gate stack ( 42 A, 44 A, 48 A) located in the nFinFET region and a second functional gate stack ( 42 B, 46 B, 48 B) located in the pFinFET region.
- Each functional gate stack overlies a channel region of each of semiconductor fins 18 n , 18 p .
- the first functional gate stack ( 42 A, 44 A, 48 A) and the gate spacer 26 located on each sidewall of the first functional gate stack together define a first functional gate stack 50 A.
- the second functional gate stack ( 42 B, 46 B, 48 B) and the gate spacer 26 located on each sidewall of the second functional gate stack together define a second functional gate structure 50 B.
- an etch stop layer 52 is deposited over the ILD layer 36 and the functional gate structures 50 A, 50 B utilizing a conventional deposition process such as, for example, CVD, PECVD, chemical solution deposition, or evaporation.
- the etch stop layer 52 is typically composed of a dielectric material such as, for example, silicon oxide, silicon nitride, silicon oxyntirde and silicon carbide.
- the thickness of the etch stop layer 52 can be from 5 nm to 30 nm, although lesser and greater thicknesses can be employed. In some embodiments of the present disclosure, the etch stop layer 52 is optional and can be omitted.
- the contact level dielectric layer 54 includes a dielectric material that is different, in terms of composition, from the dielectric material of the etch stop layer 52 .
- the contact level dielectric layer 54 may include silicon oxide.
- the thickness of the contact level dielectric layer 54 may be from 20 nm to 100 nm, although lesser and greater thicknesses.
- first contact openings 56 are formed through the contact level dielectric layer 54 , the etch stop layer 52 and an upper portion of the ILD layer 36 to expose portions of the first source/drain regions 32 and the second source/drain regions 34 .
- Second contact openings 58 are formed through the contact level dielectric layer 54 and the etch stop layer 52 to expose portions of the first gate electrode 48 A and the second gate electrode 48 B.
- the first contact openings 56 and the second contact openings 58 can be formed by lithography and etching.
- the lithographic process includes forming a photoresist layer (not shown) atop the contact level dielectric layer 54 , exposing the photoresist layer to a desired pattern of radiation and developing the exposed photoresist layer utilizing a conventional resist developer.
- the etching process includes a dry etch, such as, for example, RIE or a wet chemical etch that selectively removes exposed portions of the contact level dielectric layer 56 and portions of the etch stop layer 54 and ILD layer 36 located beneath the exposed portions of the contact level dielectric layer 56 .
- the remaining portions of the photoresist layer can be removed by a conventional resist striping process, such as, for example, ashing.
- an inner spacer 62 is formed on each sidewall of the first contact openings 56 and the second contact openings 58 .
- the inner spacer 62 can be formed by first forming a conformal inner spacer material layer (not shown) on sidewalls and bottom surfaces of the first contact openings 56 , sidewalls and bottom surfaces of the second contact openings 58 , and the topmost surface of the contact level dielectric layer 54 .
- the inner spacer material layer can include a metal that does not react with dielectric materials of the contact level dielectric layer 54 , the etch stop layer 52 and the ILD layer 36 .
- Exemplary metals that can be employed as the inner spacer material layer include, but are not limited to Ti/TiN, Ta, W, Pd, Ru, TaN, and WN.
- the inner spacer material layer is a bilayer of Ti/TiN.
- the inner spacer material layer can be formed utilizing a conventional deposition process including CVD or ALD.
- the thickness of the inner spacer material layer that is formed can be from 1 nm to 10 nm. Horizontal portions of the inner spacer material layer are removed by an anisotropic etch, such as, for example, RIE.
- each inner spacer 62 can serve as a barrier to prevent diffusion of metals in a contact liner material layer subsequently formed into the dielectric layers surrounding the first and the second contact openings 56 , 58 , thus improving the device reliability.
- a conformal contact liner material layer 64 L is formed on inner spacer 62 , bottom surfaces of the first and second contact openings 56 , 58 , and the topmost surface of the contact level dielectric layer 54 .
- the contact liner material layer 64 L may include a conductive material that can reduce contact resistance between contact conductors subsequently formed and source/drain regions.
- Exemplary conductive materials that can be employed as the contact liner material layer 64 L include, but are not limited to NiPt, Co, NiAl and W.
- the contact liner material layer 64 L is composed of NiPt.
- the contact liner material layer 64 L can be formed utilizing a conventional deposition process including CVD or ALD. The thickness of the contact liner material layer 64 L that is formed can be from 1 nm to 15 nm.
- bottom portions of the contact liner material layer 64 L that are in contact with the first source/drain regions 32 and the second source/drain regions 34 react with the underlying silicon in the first source/drain regions 32 and the second source/drain regions 34 to form liner silicide portions 65 .
- the liner silicide portions 65 reduce contact resistance between contact conductors subsequently formed and semiconductor materials of the first source/drain regions 32 and the second source/drain regions 34 .
- bottom portions of the contact liner material layer 64 L that are in contact with the first and second gate electrodes 48 A, 48 B also react with the polysilicon so as to form liner silicide portions (not shown) at an interface between the contact liner material layer 64 and each of the first and second gate electrodes 48 A, 48 B.
- the contact conductor material layer 66 L may include a metal such as, for example, Cu, Al, W, Ti, Ta or their alloys.
- the conductor material layer 66 L can be formed by a conventional deposition process such as, for example, CVD, PVD, ALD, or plating.
- the contact conductor material layer 66 L is deposited to a thickness so that a topmost surface of the contact conductor material layer 66 L is located above the topmost surface of the contact level dielectric layer 54 .
- an adhesion layer (not shown) is provided atop the contact liner material layer 64 L to improve the adhesion of the contact conductor material layer 66 L to the contact liner material layer 64 L.
- portions of the contact liner material layer 64 L and the contact conductor material layer 66 L that are located above the topmost surface of the contact level dielectric layer 54 are removed by employing a planarization process, such as, for example, CMP.
- the remaining portions of the contact liner material layer 64 L in the first contact openings 56 constitute first contact liners 64 A
- the remaining portions of the contact liner material layer 64 L in the second contact openings 58 constitute second contact liners 64 B
- the remaining portions of the conductor material layer 66 L in the first and the second contact openings 56 , 58 constitute contact conductor 66 .
- contact structures are formed within the first and second contact openings 56 , 58 .
- the contact structures include source/drain contact structures 72 ( 62 , 64 A, 65 , 66 ) in contact with the first source/drain regions 32 and the second source/drain regions 34 and gate contact structures 74 ( 62 . 64 B, 66 ) in contact with the first gate electrode 48 A and second gate electrode 48 B.
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