JP2018524820A5 - - Google Patents

Info

Publication number

JP2018524820A5

JP2018524820A5 JP2018503538A JP2018503538A JP2018524820A5 JP 2018524820 A5 JP2018524820 A5 JP 2018524820A5 JP 2018503538 A JP2018503538 A JP 2018503538A JP 2018503538 A JP2018503538 A JP 2018503538A JP 2018524820 A5 JP2018524820 A5 JP 2018524820A5

Authority

JP

Japan

Prior art keywords

another embodiment

metal chalcogenide

nanocrystals

nanocrystal

ligand

Prior art date

2016-07-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 239000002159 nanocrystal Substances 0.000 description 188
• 229910052751 metal Inorganic materials 0.000 description 154
• 239000002184 metal Substances 0.000 description 154
• 150000004770 chalcogenides Chemical class 0.000 description 144
• 239000010410 layer Substances 0.000 description 78
• YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 72
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 66
• 239000003446 ligand Substances 0.000 description 64
• 239000000243 solution Substances 0.000 description 57
• 239000010408 film Substances 0.000 description 47
• 238000010521 absorption reaction Methods 0.000 description 42
• 239000000203 mixture Substances 0.000 description 42
• 239000011669 selenium Substances 0.000 description 40
• 238000000034 method Methods 0.000 description 26
• 239000011248 coating agent Substances 0.000 description 25
• 238000000576 coating method Methods 0.000 description 25
• 238000004519 manufacturing process Methods 0.000 description 25
• 239000013110 organic ligand Substances 0.000 description 24
• VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 22
• CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 20
• 239000008188 pellet Substances 0.000 description 20
• KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 18
• 230000031700 light absorption Effects 0.000 description 18
• 230000004044 response Effects 0.000 description 17
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
• 239000012528 membrane Substances 0.000 description 16
• 239000002243 precursor Substances 0.000 description 16
• 230000015572 biosynthetic process Effects 0.000 description 14
• 229910052753 mercury Inorganic materials 0.000 description 14
• 230000003287 optical effect Effects 0.000 description 14
• WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 13
• 238000003786 synthesis reaction Methods 0.000 description 13
• QGLWBTPVKHMVHM-KTKRTIGZSA-N (z)-octadec-9-en-1-amine Chemical compound CCCCCCCC\C=C/CCCCCCCCN QGLWBTPVKHMVHM-KTKRTIGZSA-N 0.000 description 12
• ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 12
• 239000000463 material Substances 0.000 description 12
• 239000002105 nanoparticle Substances 0.000 description 12
• 239000012071 phase Substances 0.000 description 12
• 229910052717 sulfur Inorganic materials 0.000 description 12
• 239000006228 supernatant Substances 0.000 description 12
• 238000001514 detection method Methods 0.000 description 11
• -1 mercury chalcogenides Chemical class 0.000 description 11
• 239000007787 solid Substances 0.000 description 11
• 239000002904 solvent Substances 0.000 description 11
• 239000000758 substrate Substances 0.000 description 11
• WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
• 229910004262 HgTe Inorganic materials 0.000 description 9
• 238000006243 chemical reaction Methods 0.000 description 9
• 239000007788 liquid Substances 0.000 description 9
• ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 9
• 239000004065 semiconductor Substances 0.000 description 9
• XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 8
• 229910052797 bismuth Inorganic materials 0.000 description 8
• 229910052793 cadmium Inorganic materials 0.000 description 8
• 229910052745 lead Inorganic materials 0.000 description 8
• 229910052757 nitrogen Inorganic materials 0.000 description 8
• 229910052711 selenium Inorganic materials 0.000 description 8
• 229910052718 tin Inorganic materials 0.000 description 8
• 230000007704 transition Effects 0.000 description 8
• WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 7
• LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 7
• QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 7
• 239000005642 Oleic acid Substances 0.000 description 7
• ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 7
• 229910052787 antimony Inorganic materials 0.000 description 7
• 238000005266 casting Methods 0.000 description 7
• 229910052798 chalcogen Inorganic materials 0.000 description 7
• 150000001787 chalcogens Chemical class 0.000 description 7
• QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 7
• 230000005693 optoelectronics Effects 0.000 description 7
• 229910052714 tellurium Inorganic materials 0.000 description 7
• 150000003573 thiols Chemical class 0.000 description 7
• RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 7
• YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 description 6
• OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
• NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 6
• 230000004888 barrier function Effects 0.000 description 6
• 238000005119 centrifugation Methods 0.000 description 6
• 239000000843 powder Substances 0.000 description 6
• WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 6
• 238000012360 testing method Methods 0.000 description 6
• 229910004298 SiO 2 Inorganic materials 0.000 description 5
• 150000001412 amines Chemical class 0.000 description 5
• 239000004020 conductor Substances 0.000 description 5
• 239000003792 electrolyte Substances 0.000 description 5
• 238000005516 engineering process Methods 0.000 description 5
• VYBFJKPXWYJWMF-UHFFFAOYSA-N hexane octane Chemical compound CCCCCC.CCCCCC.CCCCCCCC.CCCCCCCC VYBFJKPXWYJWMF-UHFFFAOYSA-N 0.000 description 5
• 238000000527 sonication Methods 0.000 description 5
• 239000011593 sulfur Substances 0.000 description 5
• 239000010409 thin film Substances 0.000 description 5
• 238000005406 washing Methods 0.000 description 5
• 229910004613 CdTe Inorganic materials 0.000 description 4
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
• REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 description 4
• 229910002665 PbTe Inorganic materials 0.000 description 4
• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
• WRYNUJYAXVDTCB-UHFFFAOYSA-M acetyloxymercury Chemical compound CC(=O)O[Hg] WRYNUJYAXVDTCB-UHFFFAOYSA-M 0.000 description 4
• 238000000231 atomic layer deposition Methods 0.000 description 4
• HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 4
• 238000013461 design Methods 0.000 description 4
• 238000002329 infrared spectrum Methods 0.000 description 4
• 238000001459 lithography Methods 0.000 description 4
• 238000002156 mixing Methods 0.000 description 4
• 229910000073 phosphorus hydride Inorganic materials 0.000 description 4
• OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 4
• 238000012546 transfer Methods 0.000 description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
• DHBXNPKRAUYBTH-UHFFFAOYSA-N 1,1-ethanedithiol Chemical compound CC(S)S DHBXNPKRAUYBTH-UHFFFAOYSA-N 0.000 description 3
• FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 description 3
• QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
• 238000002441 X-ray diffraction Methods 0.000 description 3
• UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 3
• 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
• 239000010949 copper Substances 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
• 229910052737 gold Inorganic materials 0.000 description 3
• 239000010931 gold Substances 0.000 description 3
• 238000005286 illumination Methods 0.000 description 3
• 238000002347 injection Methods 0.000 description 3
• 239000007924 injection Substances 0.000 description 3
• 239000007791 liquid phase Substances 0.000 description 3
• 239000011159 matrix material Substances 0.000 description 3
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
• 238000001000 micrograph Methods 0.000 description 3
• 229920000139 polyethylene terephthalate Polymers 0.000 description 3
• 239000005020 polyethylene terephthalate Substances 0.000 description 3
• 230000008569 process Effects 0.000 description 3
• SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 3
• 238000001228 spectrum Methods 0.000 description 3
• 238000004528 spin coating Methods 0.000 description 3
• 239000011550 stock solution Substances 0.000 description 3
• QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
• QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
• PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
• FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
• BDAGIHXWWSANSR-UHFFFAOYSA-N Formic acid Chemical compound OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
• 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
• NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
• UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
• 229910005642 SnTe Inorganic materials 0.000 description 2
• KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 2
• 239000006096 absorbing agent Substances 0.000 description 2
• 238000000862 absorption spectrum Methods 0.000 description 2
• 229910045601 alloy Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
• 238000013459 approach Methods 0.000 description 2
• YZXBAPSDXZZRGB-DOFZRALJSA-N arachidonic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O YZXBAPSDXZZRGB-DOFZRALJSA-N 0.000 description 2
• 230000005540 biological transmission Effects 0.000 description 2
• 230000000903 blocking effect Effects 0.000 description 2
• 150000007942 carboxylates Chemical class 0.000 description 2
• 230000008859 change Effects 0.000 description 2
• 150000001875 compounds Chemical class 0.000 description 2
• 239000011258 core-shell material Substances 0.000 description 2
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• 238000010438 heat treatment Methods 0.000 description 2
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• 239000012535 impurity Substances 0.000 description 2
• AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
• 238000003331 infrared imaging Methods 0.000 description 2
• 239000002070 nanowire Substances 0.000 description 2
• 229940049964 oleate Drugs 0.000 description 2
• 150000003003 phosphines Chemical class 0.000 description 2
• 238000005424 photoluminescence Methods 0.000 description 2
• 229920001223 polyethylene glycol Polymers 0.000 description 2
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• IYKVLICPFCEZOF-UHFFFAOYSA-N selenourea Chemical compound NC(N)=[Se] IYKVLICPFCEZOF-UHFFFAOYSA-N 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 2
• 239000010703 silicon Substances 0.000 description 2
• MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 2
• GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 description 1
• VWVRASTUFJRTHW-UHFFFAOYSA-N 2-[3-(azetidin-3-yloxy)-4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound O=C(CN1C=C(C(OC2CNC2)=N1)C1=CN=C(NC2CC3=C(C2)C=CC=C3)N=C1)N1CCC2=C(C1)N=NN2 VWVRASTUFJRTHW-UHFFFAOYSA-N 0.000 description 1
• JVKRKMWZYMKVTQ-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-N-(2-oxo-3H-1,3-benzoxazol-6-yl)acetamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C=NN(C=1)CC(=O)NC1=CC2=C(NC(O2)=O)C=C1 JVKRKMWZYMKVTQ-UHFFFAOYSA-N 0.000 description 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 1
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• 229910013684 LiClO 4 Inorganic materials 0.000 description 1
• 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
• 239000002202 Polyethylene glycol Substances 0.000 description 1
• BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
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• UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
• PLZVEHJLHYMBBY-UHFFFAOYSA-N Tetradecylamine Chemical compound CCCCCCCCCCCCCCN PLZVEHJLHYMBBY-UHFFFAOYSA-N 0.000 description 1
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• 229960000583 acetic acid Drugs 0.000 description 1
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• 150000001450 anions Chemical class 0.000 description 1
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• 235000021342 arachidonic acid Nutrition 0.000 description 1
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• VTXVGVNLYGSIAR-UHFFFAOYSA-N decane-1-thiol Chemical compound CCCCCCCCCCS VTXVGVNLYGSIAR-UHFFFAOYSA-N 0.000 description 1
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• HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 1
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• QJAOYSPHSNGHNC-UHFFFAOYSA-N octadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCS QJAOYSPHSNGHNC-UHFFFAOYSA-N 0.000 description 1
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• 238000003860 storage Methods 0.000 description 1
• PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
• TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
• 238000001931 thermography Methods 0.000 description 1
• 229910052723 transition metal Inorganic materials 0.000 description 1
• 150000003624 transition metals Chemical class 0.000 description 1
• TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
• ZMBHCYHQLYEYDV-UHFFFAOYSA-N trioctylphosphine oxide Chemical compound CCCCCCCCP(=O)(CCCCCCCC)CCCCCCCC ZMBHCYHQLYEYDV-UHFFFAOYSA-N 0.000 description 1