JP2018190983A5 - - Google Patents

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JP2018190983A5
JP2018190983A5 JP2018090417A JP2018090417A JP2018190983A5 JP 2018190983 A5 JP2018190983 A5 JP 2018190983A5 JP 2018090417 A JP2018090417 A JP 2018090417A JP 2018090417 A JP2018090417 A JP 2018090417A JP 2018190983 A5 JP2018190983 A5 JP 2018190983A5
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resistant layer
plasma resistant
conformal
chamber component
aspect ratio
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JP2018090417A
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JP6976215B2 (ja
JP2018190983A (ja
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JP2018090417A 2017-05-10 2018-05-09 チャンバコンポーネント用多層プラズマ腐食防護 Active JP6976215B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762504471P 2017-05-10 2017-05-10
US62/504,471 2017-05-10
US15/965,794 US10755900B2 (en) 2017-05-10 2018-04-27 Multi-layer plasma erosion protection for chamber components
US15/965,794 2018-04-27

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JP2018190983A JP2018190983A (ja) 2018-11-29
JP2018190983A5 true JP2018190983A5 (enExample) 2021-10-28
JP6976215B2 JP6976215B2 (ja) 2021-12-08

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US (1) US10755900B2 (enExample)
JP (1) JP6976215B2 (enExample)
KR (1) KR102341307B1 (enExample)
CN (2) CN108878246B (enExample)
TW (2) TWI753163B (enExample)

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