JP2018190983A - チャンバコンポーネント用多層プラズマ腐食防護 - Google Patents
チャンバコンポーネント用多層プラズマ腐食防護 Download PDFInfo
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Abstract
【解決手段】物品上に多層プラズマ耐性コーティングを形成する。形成方法は、メッキ又はALDを実施し物品上にコンフォーマルな第1のプラズマ耐性層150を形成するステップを含み、コンフォーマルな第1のプラズマ耐性層150は物品の表面上及び物品内の高アスペクト比構成の壁上に形成される。コンフォーマルな第1のプラズマ耐性コーティングは多孔率約0%で厚さ約200nm〜約1ミクロンを有する。次いで、電子ビームイオンアシスト堆積(EB−IAD)、プラズマ強化化学気相蒸着(PECVD)、エアロゾル堆積又はプラズマ溶射のうちの1つを実施し、表面の一領域でコンフォーマルな第1のプラズマ耐性層150を覆うが高アスペクト比構成の壁では覆わない第2のプラズマ耐性層152を形成する。
【選択図】図1B
Description
Claims (15)
- 物品であって、
本体内に表面と約1:1〜約300:1のアスペクト比を有する複数の高アスペクト比構成とを含む前記本体と、
前記複数の高アスペクト比構成の前記表面及び壁の上にあるコンフォーマルな第1のプラズマ耐性層であって、 多孔率約0%で厚さ約100nm〜約1ミクロンを有する前記第1のプラズマ耐性層と、
前記表面の一領域で前記コンフォーマルな第1のプラズマ耐性層を覆うが、前記複数の高アスペクト比構成の前記壁では覆わない第2のプラズマ耐性層であって、多孔率1%未満で厚さ約1〜10ミクロンを有する前記第2のプラズマ耐性層を備える物品。 - 前記物品はプラズマエッチングリアクタ用チャンバコンポーネントであり、前記物品は金属又は焼結セラミックのうちの少なくとも1つを含む請求項1に記載の物品。
- 前記第1のプラズマ耐性層はY2O3、Al2O3、Y3Al5O12、Er3Al5O12、Y5O4F7及びYF3からなる群から選択される原子層堆積(ALD)コーティングである請求項1に記載の物品。
- 前記第1のプラズマ耐性層はNiを含むメッキコーティングである請求項1に記載の物品。
- 前記第2のプラズマ耐性層はY3Al5O12、Y2O3、Al2O3、Er3Al5O12、Y5O4F7及びYF3からなる群から選択されるコンフォーマルプラズマ耐性層である請求項1に記載の物品。
- 前記物品は処理チャンバ用シャワーヘッドであり、前記複数の高アスペクト比構成は前記シャワーヘッド内の複数の孔である請求項1に記載の物品。
- 前記第1のプラズマ耐性層及び前記第2のプラズマ耐性層を含む前記物品の絶縁破壊電圧は、約1000〜1500ボルト/ミルである請求項1に記載の物品。
- 物品であって、
本体内に表面と高アスペクト比構成とを含む前記本体であって、前記高アスペクト比構成は約1:1〜約300:1のアスペクト比を有し、前記表面の一領域は約200〜300マイクロインチの表面粗さを有する本体と、
前記複数の高アスペクト比構成の前記表面の上及び壁の上にあり、多孔率約0%で厚さ約100nm〜約10ミクロンを有するコンフォーマルな第1のプラズマ耐性層であって、前記コンフォーマルな第1のプラズマ耐性層の表面は、前記表面の前記領域で前記表面粗さに基づく表面粗さを有する前記コンフォーマルな第1のプラズマ耐性層と、
前記表面の前記領域で前記コンフォーマルな第1のプラズマ耐性層を覆うが、前記複数の高アスペクト比構成の前記壁では覆わず、多孔率約1〜5%で厚さ約4〜20milを有する第2のプラズマ耐性層であって、前記コンフォーマルな第1のプラズマ耐性層の前記表面粗さは前記コンフォーマルな第1のプラズマ耐性層への前記第2のプラズマ耐性層の接着を容易にする前記第2のプラズマ耐性層とを備える物品。 - 前記表面の前記領域で前記第2のプラズマ耐性層を覆い、前記複数の高アスペクト比構成の前記壁で前記コンフォーマルな第1のプラズマ耐性層を覆う、厚さ約100nm〜約10μmで多孔率約0%を有するコンフォーマルな第3のプラズマ耐性層を更に備え、前記コンフォーマルな第3のプラズマ耐性層はY2O3、Al2O3、Y3Al5O12、Er3Al5O12、Y5O4F7及びYF3からなる群から選択される請求項8に記載の物品。
- 前記第1のプラズマ耐性層はY2O3、Al2O3、Y3Al5O12、Er3Al5O12、Y5O4F7及びYF3からなる群から選択される原子層堆積(ALD)コーティングである請求項8に記載の物品。
- 前記第1のプラズマ耐性層はNiを含むメッキコーティングである請求項8に記載の物品。
- 前記第2のプラズマ耐性層はY3Al5O12、Y2O3、Al2O3、Er3Al5O12、Y5O4F7及びYF3からなる群から選択される請求項8に記載の物品。
- 前記コンフォーマルな第1のプラズマ耐性層の前記表面は、約200〜300マイクロインチの前記表面粗さを有する請求項8に記載の物品。
- 方法であって、
メッキ又は原子層堆積(ALD)を実施し物品上にコンフォーマルな第1のプラズマ耐性層を形成するステップであって、前記コンフォーマルな第1のプラズマ耐性層は前記物品の表面上と、前記物品内の複数の高アスペクト比構成の壁上に形成され、前記複数の高アスペクト比構成は約1:1〜約300:1のアスペクト比を有し、前記コンフォーマルな第1のプラズマ耐性層は多孔率約0%で厚さ約100nm〜約10ミクロンを有するステップと、
電子ビームイオンアシスト堆積(EB−IAD)、プラズマ強化化学気相蒸着(PECVD)、エアロゾル堆積又はプラズマ溶射のうちの1つを実施し、前記表面の一領域で前記コンフォーマルな第1のプラズマ耐性層を覆うが、前記複数の高アスペクト比構成の前記壁では覆わない第2のプラズマ耐性層を形成するステップとを含む方法。 - 前記電気メッキ又は前記ALDを実施する前に、前記物品の前記表面の前記領域を約200〜300マイクロインチの表面粗さに粗面化するステップを更に含み、前記コンフォーマルな第1のプラズマ耐性層は約200〜300マイクロインチの前記表面粗さを有する請求項14に記載の方法。
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- 2018-05-09 KR KR1020180053225A patent/KR102341307B1/ko active IP Right Grant
- 2018-05-10 CN CN201810444173.0A patent/CN108878246B/zh active Active
- 2018-05-10 CN CN201820696272.3U patent/CN209104115U/zh not_active Withdrawn - After Issue
- 2018-05-10 TW TW107206105U patent/TWM574331U/zh unknown
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Also Published As
Publication number | Publication date |
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TW201903206A (zh) | 2019-01-16 |
CN108878246A (zh) | 2018-11-23 |
US10755900B2 (en) | 2020-08-25 |
CN108878246B (zh) | 2023-02-28 |
KR20180123983A (ko) | 2018-11-20 |
TWM574331U (zh) | 2019-02-11 |
TWI753163B (zh) | 2022-01-21 |
KR102341307B1 (ko) | 2021-12-17 |
CN209104115U (zh) | 2019-07-12 |
US20180330923A1 (en) | 2018-11-15 |
JP6976215B2 (ja) | 2021-12-08 |
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