JP2018050032A - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
- Publication number
- JP2018050032A JP2018050032A JP2017145115A JP2017145115A JP2018050032A JP 2018050032 A JP2018050032 A JP 2018050032A JP 2017145115 A JP2017145115 A JP 2017145115A JP 2017145115 A JP2017145115 A JP 2017145115A JP 2018050032 A JP2018050032 A JP 2018050032A
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- region
- passivation film
- doping
- type region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 127
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 44
- 239000004065 semiconductor Substances 0.000 claims abstract description 333
- 238000002161 passivation Methods 0.000 claims abstract description 264
- 238000009792 diffusion process Methods 0.000 claims abstract description 238
- 239000000758 substrate Substances 0.000 claims abstract description 151
- 239000003989 dielectric material Substances 0.000 claims abstract description 4
- 239000002019 doping agent Substances 0.000 claims description 131
- 230000008569 process Effects 0.000 claims description 69
- 239000013078 crystal Substances 0.000 claims description 49
- 230000004888 barrier function Effects 0.000 claims description 26
- 230000007423 decrease Effects 0.000 claims description 8
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 26
- 230000005684 electric field Effects 0.000 description 25
- 239000007789 gas Substances 0.000 description 22
- 239000000969 carrier Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 229910052814 silicon oxide Inorganic materials 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- 230000002829 reductive effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 230000006798 recombination Effects 0.000 description 7
- 238000005215 recombination Methods 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000005516 deep trap Effects 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 230000036961 partial effect Effects 0.000 description 5
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005019 vapor deposition process Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229920001002 functional polymer Polymers 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 150000007523 nucleic acids Chemical group 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 108020004707 nucleic acids Proteins 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0368—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors
- H01L31/03682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table
- H01L31/03685—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table including microcrystalline silicon, uc-Si
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0368—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors
- H01L31/03682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
- H01L31/1824—Special manufacturing methods for microcrystalline Si, uc-Si
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/545—Microcrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
100 太陽電池
110 ベース領域
130 前面電界領域
20 制御パッシベーション膜
202 第1ドーピング部分
204 第2ドーピング部分
206 未ドーピング部分
20a 第1制御パッシベーション膜
20b 第2制御パッシベーション膜
24 前面パッシベーション膜
26 反射防止膜
30 半導体層
302 多結晶部分
304 非晶質部分
30a 第1半導体層
30b 第2半導体層
32 第1導電型領域
320 第1拡散領域
322 ドーパント層
324 レーザ
324a レンズ
324b レンズ
324c レンズ
34 第2導電型領域
340 第2拡散領域
36 バリア領域
40 後面パッシベーション膜
42 電極
42a フィンガ電極
42b バスバー電極
44 電極
44a フィンガ電極
44b バスバー電極
46 コンタクトホール
461 第1コンタクトホール
462 第2コンタクトホール
Claims (20)
- 半導体基板と、
前記半導体基板の一面上に形成され、誘電物質で構成される制御パッシベーション膜と、
前記制御パッシベーション膜上に形成され、第1導電型を有する第1導電型領域及び前記第1導電型と反対の第2導電型を有する第2導電型領域を有する半導体層と、を有し、
前記半導体基板において、前記第1導電型領域に対応する部分で部分的に前記制御パッシベーション膜に隣接して形成され、前記第1導電型領域より低いドーピング濃度を有する第1拡散領域及び前記第2導電型領域に対応する部分で部分的に前記制御パッシベーション膜に隣接して形成される第2拡散領域のうち少なくとも一つを有する拡散領域を有する、太陽電池。 - 前記制御パッシベーション膜が、非晶質構造のみからなる非晶質膜であるか、部分的に結晶化された部分を有する非晶質膜である、請求項1に記載の太陽電池。
- 前記半導体基板又は前記半導体層上に位置する絶縁膜をさらに有し、
前記制御パッシベーション膜が前記絶縁膜より薄い厚さを有し、
前記制御パッシベーション膜が前記絶縁膜より高いドーピング濃度を有する部分を有する、請求項1に記載の太陽電池。 - 前記制御パッシベーション膜が、前記第1導電型領域と前記第1拡散領域との間に部分的に位置する第1ドーピング部分及び前記第2導電型領域と前記第2拡散領域との間に部分的に位置する第2ドーピング部分のうち少なくとも一つを有する、請求項1に記載の太陽電池。
- 前記第1ドーピング部分又は前記第2ドーピング部分が、部分的に他の部分より高いドーピング濃度を有する高濃度ドーピング部分を有する、請求項4に記載の太陽電池。
- 前記第1導電型領域若しくは前記第2導電型領域、前記制御パッシベーション膜、並びに前記拡散領域をこれらの厚さ方向に見るとき、前記半導体基板の内部に向かって、ドーピング濃度が連続的に減少するドーピング濃度を有し、
前記第1導電型領域又は前記第2導電型領域のドーピング濃度勾配の絶対値より拡散領域のドーピング濃度勾配の絶対値がさらに大きい、請求項1に記載の太陽電池。 - 前記拡散領域の厚さが前記第1導電型領域及び前記第2導電型領域の厚さより大きい、請求項1に記載の太陽電池。
- 前記拡散領域が、前記第1拡散領域及び前記第2拡散領域をそれぞれ有し、
前記制御パッシベーション膜が前記第1ドーピング部分及び前記第2ドーピング部分を有する、請求項4に記載の太陽電池。 - 前記第1拡散領域と前記第2拡散領域とが互いに離隔され、前記第1拡散領域と前記第2拡散領域との間にベース領域が位置し、
前記第1導電型領域と前記第2導電型領域との間にバリア領域が備えられ、
前記制御パッシベーション膜において、前記半導体基板と前記バリア領域との間にドーピングされない未ドーピング部分が位置する、請求項8に記載の太陽電池。 - 前記半導体基板が前記第2導電型を有するベース領域を有し、
前記第2拡散領域の厚さが前記第1拡散領域の厚さより大きい、請求項8に記載の太陽電池。 - 前記半導体基板が前記第2導電型を有するベース領域を有し、
前記第1拡散領域及び前記第2拡散領域をこれらの厚さ方向に見るとき、前記第1拡散領域のドーピング濃度勾配の絶対値より前記第2拡散領域のドーピング濃度勾配の絶対値が小さい、請求項8に記載の太陽電池。 - 前記半導体層が、ナノメートルレベルの結晶粒の大きさを有する多結晶構造を有する多結晶部分を有する、請求項1に記載の太陽電池。
- 前記第1導電型領域若しくは前記第2導電型領域、前記制御パッシベーション膜並びに前記第1拡散領域若しくは前記第2拡散領域に向かって、第1導電型ドーパント若しくは第2導電型ドーパントのドーピング濃度が連続的に減少するドーピングプロファイルを有し、
前記制御パッシベーション膜又は前記制御パッシベーション膜に隣接した前記第1導電型領域又は前記第2導電型領域の部分が第1ドーピングプロファイルを有し、前記制御パッシベーション膜に隣接した前記第1拡散領域又は前記第2拡散領域の部分が、前記第1ドーピングプロファイルとは異なる第2ドーピングプロファイルを有し、
前記第2ドーピングプロファイルの第2濃度勾配の絶対値が前記第1ドーピングプロファイルの第1濃度勾配の絶対値より小さい、請求項1に記載の太陽電池。 - 前記第1拡散領域又は前記第2拡散領域の厚さが100nm乃至300nmであるか、
前記第1拡散領域又は前記第2拡散領域の厚さが、前記第1導電型領域又は前記第2導電型領域の厚さと同じか、それより小さい、請求項13に記載の太陽電池。 - 半導体基板と、
前記半導体基板上に形成される制御パッシベーション膜と、
前記制御パッシベーション膜上に形成される半導体層と、を有し、
前記半導体層が、ナノメートルレベルの結晶粒の大きさを有する多結晶構造を有する多結晶部分を有し、
前記半導体基板は、前記制御パッシベーション膜に隣接して形成され前記半導体層より低いドーピング濃度を有する拡散領域を有する、太陽電池。 - 前記半導体層の前記多結晶部分が300nm以下の結晶粒の大きさを有する多結晶構造を有するか、
前記多結晶部分の結晶粒の大きさが前記半導体層の厚さ以下である、請求項15に記載の太陽電池。 - 前記半導体層は、前記多結晶部分のみで構成されるか、前記多結晶部分と共に非晶質構造を有する非晶質部分をさらに有し、
前記半導体層において、前記多結晶部分が前記非晶質部分より多く有される、請求項15に記載の太陽電池。 - 半導体基板の一面上に制御パッシベーション膜を形成する段階と、
前記制御パッシベーション膜上に第1導電型ドーパントを有する第1導電型領域を形成する段階と、を有し、
前記第1導電型領域を形成する段階は、
真性半導体層を形成する工程と、
前記真性半導体層上に前記第1導電型ドーパントを有する第1ドーパント層を形成する工程と、
デフォーカスされたレーザを用いて前記第1ドーパント層に有された前記第1導電型ドーパントを前記真性半導体層にドーピングさせるドーピング工程と、を有し、
前記ドーピング工程において、前記半導体基板で、前記制御パッシベーション膜に隣接する部分に、前記第1導電型領域より低いドーピング濃度を有する第1拡散領域が形成される、太陽電池の製造方法。 - 前記ドーピング工程において、前記レーザをフォーカスさせた後、前記第1ドーパント層と前記レーザとの距離を変化させることによって、前記レーザがデフォーカスされるようにしたり、又は前記レーザをフォーカスさせた後、前記レーザのレンズの倍率を変更することによって前記レーザがデフォーカスされるようにする、請求項18に記載の太陽電池の製造方法。
- 前記第1導電型と反対の第2導電型を有する第2導電型ドーパントを有する第2導電型領域を形成する段階をさらに有し、
前記第2導電型領域は、前記第1導電型領域と異なるドーピング工程によって形成される、請求項18に記載の太陽電池の製造方法。
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2016-0119425 | 2016-09-19 | ||
KR10-2016-0119419 | 2016-09-19 | ||
KR20160119425 | 2016-09-19 | ||
KR1020160119419 | 2016-09-19 | ||
KR1020170006183A KR20180031543A (ko) | 2016-09-19 | 2017-01-13 | 태양 전지 및 이의 제조 방법 |
KR10-2017-0006183 | 2017-01-13 | ||
KR10-2017-0011969 | 2017-01-25 | ||
KR1020170011969 | 2017-01-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2018050032A true JP2018050032A (ja) | 2018-03-29 |
Family
ID=59030883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017145115A Pending JP2018050032A (ja) | 2016-09-19 | 2017-07-27 | 太陽電池及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10686087B2 (ja) |
EP (1) | EP3297043B1 (ja) |
JP (1) | JP2018050032A (ja) |
CN (1) | CN107845689B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023016700A (ja) * | 2021-07-22 | 2023-02-02 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びそのドープ領域構造、電池モジュール並びに光起電システム |
JP2023016702A (ja) * | 2021-07-22 | 2023-02-02 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びその不動態化接触構造、電池モジュール並びに光起電システム |
US12009440B2 (en) | 2021-07-22 | 2024-06-11 | Solarlab Aiko Europe Gmbh | Doped region structure and solar cell comprising the same, cell assembly, and photovoltaic system |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101867855B1 (ko) * | 2014-03-17 | 2018-06-15 | 엘지전자 주식회사 | 태양 전지 |
WO2018180486A1 (ja) * | 2017-03-29 | 2018-10-04 | パナソニック株式会社 | 太陽電池セル及び太陽電池セルの製造方法 |
CN112201701B (zh) | 2020-09-30 | 2024-05-03 | 浙江晶科能源有限公司 | 太阳能电池和光伏组件 |
CN112466961B (zh) * | 2020-11-19 | 2024-05-10 | 晶科绿能(上海)管理有限公司 | 太阳能电池及其制造方法 |
CN113471336B (zh) * | 2021-07-23 | 2023-05-02 | 常州时创能源股份有限公司 | 一种局部背场钝化接触电池及制备方法 |
CN116417536A (zh) * | 2021-12-29 | 2023-07-11 | 泰州隆基乐叶光伏科技有限公司 | 一种太阳能电池及其制备方法 |
CN117153914A (zh) * | 2022-06-30 | 2023-12-01 | 浙江晶科能源有限公司 | 光伏电池及其制造方法、光伏组件 |
CN117253934A (zh) * | 2023-11-20 | 2023-12-19 | 隆基绿能科技股份有限公司 | 一种背接触电池及光伏组件 |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002299654A (ja) * | 2001-03-29 | 2002-10-11 | Toyota Motor Corp | 光起電力素子 |
JP2002368238A (ja) * | 2001-06-07 | 2002-12-20 | Toyota Motor Corp | タンデム型太陽電池およびその製造方法 |
JP2006080450A (ja) * | 2004-09-13 | 2006-03-23 | Sharp Corp | 太陽電池の製造方法 |
DE102010007695A1 (de) * | 2010-02-09 | 2011-08-11 | Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, 14109 | Rückseitenkontaktierte Solarzelle mit unstrukturierter Absorberschicht |
JP2011181606A (ja) * | 2010-02-26 | 2011-09-15 | Sharp Corp | 太陽電池素子およびその製造方法 |
JP2014204128A (ja) * | 2013-04-03 | 2014-10-27 | エルジー エレクトロニクス インコーポレイティド | 太陽電池 |
KR20150029202A (ko) * | 2013-09-09 | 2015-03-18 | 엘지전자 주식회사 | 태양 전지 |
JP2015144149A (ja) * | 2014-01-31 | 2015-08-06 | シャープ株式会社 | 光電変換装置および光電変換装置の製造方法 |
WO2015148571A1 (en) * | 2014-03-28 | 2015-10-01 | Sunpower Corporation | Metallization of solar cells |
JP2015201648A (ja) * | 2014-04-08 | 2015-11-12 | エルジー エレクトロニクス インコーポレイティド | 太陽電池及びその製造方法 |
WO2015183703A1 (en) * | 2014-05-30 | 2015-12-03 | Sunpower Corporation | Relative dopant concentration levels in solar cells |
JP2015233140A (ja) * | 2014-06-09 | 2015-12-24 | エルジー エレクトロニクス インコーポレイティド | 太陽電池の製造方法 |
JP2016018998A (ja) * | 2014-07-07 | 2016-02-01 | エルジー エレクトロニクス インコーポレイティド | 太陽電池 |
JP2016046525A (ja) * | 2014-08-20 | 2016-04-04 | エルジー エレクトロニクス インコーポレイティド | 太陽電池及びその製造方法 |
WO2016072415A1 (ja) * | 2014-11-07 | 2016-05-12 | シャープ株式会社 | 光電変換素子 |
WO2016107661A1 (de) * | 2014-12-30 | 2016-07-07 | Merck Patent Gmbh | Laserdotierung von halbleiter |
JP2016127294A (ja) * | 2014-12-31 | 2016-07-11 | エルジー エレクトロニクス インコーポレイティド | 太陽電池モジュール及びその製造方法 |
US20160268455A1 (en) * | 2015-03-13 | 2016-09-15 | Natcore Technology, Inc. | Laser processed back contact heterojunction solar cells |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011517120A (ja) * | 2008-04-09 | 2011-05-26 | アプライド マテリアルズ インコーポレイテッド | ポリシリコンエミッタ太陽電池用簡易裏面接触 |
CN101705477B (zh) * | 2009-12-09 | 2012-08-22 | 新奥光伏能源有限公司 | 一种在线检测与在线修补薄膜产品晶化率的系统及方法 |
US20130052725A1 (en) | 2011-08-30 | 2013-02-28 | General Electric Company | System for optical based delivery of exogenous molecules to cells |
KR20140143278A (ko) * | 2013-06-05 | 2014-12-16 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
US9105769B2 (en) * | 2013-09-12 | 2015-08-11 | International Business Machines Corporation | Shallow junction photovoltaic devices |
KR101622090B1 (ko) * | 2013-11-08 | 2016-05-18 | 엘지전자 주식회사 | 태양 전지 |
US20150270421A1 (en) * | 2014-03-20 | 2015-09-24 | Varian Semiconductor Equipment Associates, Inc. | Advanced Back Contact Solar Cells |
KR102286289B1 (ko) | 2014-11-26 | 2021-08-04 | 엘지전자 주식회사 | 태양 전지 |
-
2017
- 2017-05-19 US US15/600,042 patent/US10686087B2/en active Active
- 2017-06-08 EP EP17174988.0A patent/EP3297043B1/en active Active
- 2017-06-12 CN CN201710437172.9A patent/CN107845689B/zh active Active
- 2017-07-27 JP JP2017145115A patent/JP2018050032A/ja active Pending
Patent Citations (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002299654A (ja) * | 2001-03-29 | 2002-10-11 | Toyota Motor Corp | 光起電力素子 |
JP2002368238A (ja) * | 2001-06-07 | 2002-12-20 | Toyota Motor Corp | タンデム型太陽電池およびその製造方法 |
JP2006080450A (ja) * | 2004-09-13 | 2006-03-23 | Sharp Corp | 太陽電池の製造方法 |
DE102010007695A1 (de) * | 2010-02-09 | 2011-08-11 | Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, 14109 | Rückseitenkontaktierte Solarzelle mit unstrukturierter Absorberschicht |
JP2011181606A (ja) * | 2010-02-26 | 2011-09-15 | Sharp Corp | 太陽電池素子およびその製造方法 |
JP2014204128A (ja) * | 2013-04-03 | 2014-10-27 | エルジー エレクトロニクス インコーポレイティド | 太陽電池 |
KR20150029202A (ko) * | 2013-09-09 | 2015-03-18 | 엘지전자 주식회사 | 태양 전지 |
JP2015144149A (ja) * | 2014-01-31 | 2015-08-06 | シャープ株式会社 | 光電変換装置および光電変換装置の製造方法 |
JP2017511597A (ja) * | 2014-03-28 | 2017-04-20 | サンパワー コーポレイション | 太陽電池のメタライゼーション |
WO2015148571A1 (en) * | 2014-03-28 | 2015-10-01 | Sunpower Corporation | Metallization of solar cells |
JP2015201648A (ja) * | 2014-04-08 | 2015-11-12 | エルジー エレクトロニクス インコーポレイティド | 太陽電池及びその製造方法 |
WO2015183703A1 (en) * | 2014-05-30 | 2015-12-03 | Sunpower Corporation | Relative dopant concentration levels in solar cells |
JP2017517147A (ja) * | 2014-05-30 | 2017-06-22 | サンパワー コーポレイション | 太陽電池内の相対的ドーパント濃度レベル |
JP2015233140A (ja) * | 2014-06-09 | 2015-12-24 | エルジー エレクトロニクス インコーポレイティド | 太陽電池の製造方法 |
JP2016018998A (ja) * | 2014-07-07 | 2016-02-01 | エルジー エレクトロニクス インコーポレイティド | 太陽電池 |
JP2016046525A (ja) * | 2014-08-20 | 2016-04-04 | エルジー エレクトロニクス インコーポレイティド | 太陽電池及びその製造方法 |
WO2016072415A1 (ja) * | 2014-11-07 | 2016-05-12 | シャープ株式会社 | 光電変換素子 |
WO2016107661A1 (de) * | 2014-12-30 | 2016-07-07 | Merck Patent Gmbh | Laserdotierung von halbleiter |
JP2018508976A (ja) * | 2014-12-30 | 2018-03-29 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | 半導体のレーザードーピング |
JP2016127294A (ja) * | 2014-12-31 | 2016-07-11 | エルジー エレクトロニクス インコーポレイティド | 太陽電池モジュール及びその製造方法 |
US20160268455A1 (en) * | 2015-03-13 | 2016-09-15 | Natcore Technology, Inc. | Laser processed back contact heterojunction solar cells |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023016700A (ja) * | 2021-07-22 | 2023-02-02 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びそのドープ領域構造、電池モジュール並びに光起電システム |
JP2023016702A (ja) * | 2021-07-22 | 2023-02-02 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びその不動態化接触構造、電池モジュール並びに光起電システム |
JP7235916B2 (ja) | 2021-07-22 | 2023-03-08 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びそのドープ領域構造、電池モジュール並びに光起電システム |
JP7235917B2 (ja) | 2021-07-22 | 2023-03-08 | 浙江愛旭太陽能科技有限公司 | 太陽電池及びその不動態化接触構造、電池モジュール並びに光起電システム |
US12009440B2 (en) | 2021-07-22 | 2024-06-11 | Solarlab Aiko Europe Gmbh | Doped region structure and solar cell comprising the same, cell assembly, and photovoltaic system |
Also Published As
Publication number | Publication date |
---|---|
CN107845689B (zh) | 2020-11-06 |
CN107845689A (zh) | 2018-03-27 |
EP3297043B1 (en) | 2019-01-23 |
EP3297043A1 (en) | 2018-03-21 |
US10686087B2 (en) | 2020-06-16 |
US20180083149A1 (en) | 2018-03-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2018050032A (ja) | 太陽電池及びその製造方法 | |
US11462654B2 (en) | Solar cell and method of manufacturing the same | |
US10910502B2 (en) | Solar cell and method for manufacturing the same | |
CN107039536B (zh) | 太阳能电池及其制造方法 | |
JP6671888B2 (ja) | 太陽電池及びその製造方法 | |
JP6692865B2 (ja) | 太陽電池の製造方法 | |
US10340396B2 (en) | Method for manufacturing solar cell | |
JP2019068108A (ja) | 太陽電池及びその製造方法 | |
JP2018186278A (ja) | 太陽電池の製造方法 | |
KR101625876B1 (ko) | 태양 전지 및 이의 제조 방법 | |
KR102005571B1 (ko) | 태양 전지 및 이의 제조 방법 | |
KR101828422B1 (ko) | 태양 전지의 제조 방법 | |
KR20160122467A (ko) | 태양 전지의 제조 방법 | |
KR102397999B1 (ko) | 태양 전지 및 이의 제조 방법 | |
KR102024084B1 (ko) | 태양 전지 및 이의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170727 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180723 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180731 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20181031 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181114 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20190521 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190905 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20190905 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20190918 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20190924 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20191122 |
|
C211 | Notice of termination of reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C211 Effective date: 20191126 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20200310 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20200414 |
|
C23 | Notice of termination of proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C23 Effective date: 20201027 |
|
C03 | Trial/appeal decision taken |
Free format text: JAPANESE INTERMEDIATE CODE: C03 Effective date: 20201201 |
|
C30A | Notification sent |
Free format text: JAPANESE INTERMEDIATE CODE: C3012 Effective date: 20201201 |