JP2013214764A - 多層構成素子の製造方法 - Google Patents
多層構成素子の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000919 ceramic Substances 0.000 claims abstract description 90
- 239000010949 copper Substances 0.000 claims abstract description 59
- 229910052802 copper Inorganic materials 0.000 claims abstract description 49
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000011230 binding agent Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 32
- 239000001301 oxygen Substances 0.000 claims abstract description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 8
- 230000009467 reduction Effects 0.000 claims abstract description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 45
- 239000002184 metal Substances 0.000 claims description 45
- 239000000843 powder Substances 0.000 claims description 16
- 239000000654 additive Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 13
- 230000000996 additive effect Effects 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 230000004907 flux Effects 0.000 claims description 4
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000000593 degrading effect Effects 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 10
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 10
- 238000005245 sintering Methods 0.000 description 6
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910000510 noble metal Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000013538 functional additive Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009283 thermal hydrolysis Methods 0.000 description 1
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Abstract
【解決手段】多層構成素子の製造方法であって、当該多層構成素子は、複数のセラミック層と、当該セラミック層の間に位置する、複数の銅含有内部電極とを有しており、当該内部電極は銅含有外部コンタクトに接続されており、結合材除去を300℃以下の温度で、窒素流内で、水蒸気を添加して実施し、ここで当該結合剤除去プロセスを完全に終了し、当該結合剤除去の間に酸素分圧のレベルは、セラミックが還元によって劣化し始める値Pminを下回らず、かつ、所与の温度で金属銅が酸化し始める値Pmaxを上回らない、構成素子の製造方法。
【選択図】図1
Description
Claims (13)
- 多層構成素子の製造方法であって、
当該多層構成素子は、複数のセラミック層と、当該セラミック層の間に位置する、複数の銅含有内部電極とを有しており、当該内部電極は銅含有外部コンタクトに接続されており、
結合材除去を300℃以下の温度で、窒素流内で、水蒸気を添加して実施し、ここで当該結合剤除去プロセスを完全に終了し、
当該結合剤除去の間に酸素分圧のレベルは、セラミックが還元によって劣化し始める値Pminを下回らず、かつ、所与の温度で金属銅が酸化し始める値Pmaxを上回らない、
ことを特徴とする、構成素子の製造方法。 - Pminは、Cu/Cu2Oの平衡点に相応し、
Pmaxは、Pb/PbOまたはPb/PbTiO3の平衡点に相応する、請求項1記載の方法。 - 前記外部コンタクトを製造するために、70質量%を上回る銅含有量と、ガラスフリットと、有機結合剤を有する、銅含有金属ペーストを使用する、請求項1または2記載の方法。
- 前記有機結合剤として、アクリル樹脂結合剤を使用する、請求項3記載の方法。
- 前記ガラスフラックスは、実質的にPbOおよびSiO2を含有している、請求項3または4記載の方法。
- 前記銅含有金属ペーストを700〜860℃の間で焼付けする、請求項3から5までのいずれか1項記載の方法。
- 前記銅含有金属ペーストの結合剤除去および焼付けを、金属銅から成る格子ベースの上で行う、請求項6記載の方法。
- 前記銅含有金属ペーストをシルクスクリーン印刷方法で被着させる、請求項3から7までのいずれか1項記載の方法。
- 前記セラミック層を製造するためにセラミック質量体を使用し、
前記内部電極層を製造するために、化学的に活性の添加物の成分を有する金属ペーストを使用し、
前記化学的に活性の添加物は、少なくとも、前記金属ペーストの金属成分を除いた自身の周辺の成分と化学的に反応する、請求項1から8までのいずれか1項記載の方法。 - 前記化学的に活性の添加物として、化学的に活性のセラミック粉体を使用する、請求項9記載の方法。
- 酸素、少なくともセラミック質量体の構成部分および金属ペーストまたはセラミック質量体内に含まれている結合剤または溶剤から前記周辺の成分を選択する、請求項9または10記載の方法。
- 鉛含有セラミック質量体を使用し、
前記化学的に活性な添加物とその周辺との間の化学的な反応の結果、酸素が遊離される、および/またはPbおよび/またはCuが結合される、請求項9から11までのいずれか1項記載の方法。 - 前記化学的に活性な添加物として、(Zr,Ti)O2,MgOおよびBaO2から選択された少なくとも1つの添加物を使用する、請求項9から12までのいずれか1項記載の方法。
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EP1668714B1 (de) | 2008-02-13 |
EP1863104B1 (de) | 2012-01-25 |
JP2007507865A (ja) | 2007-03-29 |
EP1668714A2 (de) | 2006-06-14 |
DE502004006205D1 (de) | 2008-03-27 |
US20120180310A1 (en) | 2012-07-19 |
US8776364B2 (en) | 2014-07-15 |
EP2264800A3 (de) | 2011-01-12 |
JP2012019245A (ja) | 2012-01-26 |
DE10345500B4 (de) | 2015-02-12 |
EP1863104A2 (de) | 2007-12-05 |
DE10345500A1 (de) | 2005-04-28 |
US9186870B2 (en) | 2015-11-17 |
EP1863104A3 (de) | 2007-12-12 |
US20070206341A1 (en) | 2007-09-06 |
WO2005034255A2 (de) | 2005-04-14 |
US7525241B2 (en) | 2009-04-28 |
EP2264800B1 (de) | 2014-05-07 |
JP5726237B2 (ja) | 2015-05-27 |
JP5709724B2 (ja) | 2015-04-30 |
US20090193636A1 (en) | 2009-08-06 |
EP2264800A2 (de) | 2010-12-22 |
WO2005034255A3 (de) | 2006-05-04 |
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