JP2013069807A - 半導体パッケージ及びその製造方法 - Google Patents

半導体パッケージ及びその製造方法 Download PDF

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Publication number
JP2013069807A
JP2013069807A JP2011206549A JP2011206549A JP2013069807A JP 2013069807 A JP2013069807 A JP 2013069807A JP 2011206549 A JP2011206549 A JP 2011206549A JP 2011206549 A JP2011206549 A JP 2011206549A JP 2013069807 A JP2013069807 A JP 2013069807A
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Prior art keywords
insulating layer
semiconductor chip
layer
wiring
semiconductor
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JP2011206549A
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Japanese (ja)
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JP2013069807A5 (enExample
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Kenta Uchiyama
健太 内山
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2011206549A priority Critical patent/JP2013069807A/ja
Priority to US13/607,906 priority patent/US9136220B2/en
Publication of JP2013069807A publication Critical patent/JP2013069807A/ja
Publication of JP2013069807A5 publication Critical patent/JP2013069807A5/ja
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    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
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JP2021520652A (ja) * 2018-05-18 2021-08-19 ロジャーズ ジャーマニー ゲーエムベーハーRogers Germany GmbH 電子モジュールとその製造方法
JP2023133675A (ja) * 2022-03-14 2023-09-27 住友電気工業株式会社 高周波装置の製造方法

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US20150279815A1 (en) * 2014-03-28 2015-10-01 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Substrate Having Conductive Columns
US10115648B2 (en) * 2015-11-23 2018-10-30 Samsung Electro-Mechanics Co., Ltd. Fan-out semiconductor package and electronic device including the same
US10068853B2 (en) * 2016-05-05 2018-09-04 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated fan-out package and method of fabricating the same
TWI751331B (zh) * 2017-05-10 2022-01-01 日商三井化學股份有限公司 半導體裝置的製造方法以及半導體裝置的中間體
US11705414B2 (en) * 2017-10-05 2023-07-18 Texas Instruments Incorporated Structure and method for semiconductor packaging
US11101186B2 (en) * 2018-03-16 2021-08-24 Advanced Semiconductor Engineering, Inc. Substrate structure having pad portions
CN109801894A (zh) * 2018-12-28 2019-05-24 华进半导体封装先导技术研发中心有限公司 芯片封装结构和封装方法
US11257747B2 (en) * 2019-04-12 2022-02-22 Powertech Technology Inc. Semiconductor package with conductive via in encapsulation connecting to conductive element
US11139179B2 (en) * 2019-09-09 2021-10-05 Advanced Semiconductor Engineering, Inc. Embedded component package structure and manufacturing method thereof
US11939212B2 (en) 2019-12-23 2024-03-26 Industrial Technology Research Institute MEMS device, manufacturing method of the same, and integrated MEMS module using the same
US11365117B2 (en) 2019-12-23 2022-06-21 Industrial Technology Research Institute MEMS device and manufacturing method of the same
TWI819644B (zh) * 2022-06-07 2023-10-21 華東科技股份有限公司 增進打線接合承受力之晶片封裝的凸塊結構

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