JP2011523910A5 - - Google Patents
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- Publication number
- JP2011523910A5 JP2011523910A5 JP2011509948A JP2011509948A JP2011523910A5 JP 2011523910 A5 JP2011523910 A5 JP 2011523910A5 JP 2011509948 A JP2011509948 A JP 2011509948A JP 2011509948 A JP2011509948 A JP 2011509948A JP 2011523910 A5 JP2011523910 A5 JP 2011523910A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- conveyor
- substrate support
- rotary actuator
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 159
- 238000007650 screen-printing Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims 5
- 238000007639 printing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITUD20080112 ITUD20080112A1 (it) | 2008-05-21 | 2008-05-21 | Sistema di stampa serigrafica di nuova generazione |
| ITUD2008A000112 | 2008-05-21 | ||
| ITUD2008A000262 | 2008-12-18 | ||
| ITUD2008A000262A IT1392752B1 (it) | 2008-12-18 | 2008-12-18 | Sistema di stampa serigrafica di nuova generazione |
| PCT/EP2009/056024 WO2009141319A1 (en) | 2008-05-21 | 2009-05-18 | Next generation screen printing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011523910A JP2011523910A (ja) | 2011-08-25 |
| JP2011523910A5 true JP2011523910A5 (enExample) | 2012-07-05 |
Family
ID=40886196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011509948A Pending JP2011523910A (ja) | 2008-05-21 | 2009-05-18 | 次世代型スクリーン印刷システム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8215473B2 (enExample) |
| EP (1) | EP2297777A1 (enExample) |
| JP (1) | JP2011523910A (enExample) |
| KR (1) | KR20110020272A (enExample) |
| CN (1) | CN102037555B (enExample) |
| TW (1) | TWI397146B (enExample) |
| WO (1) | WO2009141319A1 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1394647B1 (it) * | 2009-06-22 | 2012-07-05 | Applied Materials Inc | Sistema di visione migliorato per l'allineamento di uno schema di stampa serigrafica |
| EP2359410A4 (en) * | 2008-12-10 | 2014-09-24 | Applied Materials Inc | IMPROVED VISIBILITY SYSTEM FOR ALIGNMENT OF SCREEN PRINT PATTERNS |
| JP5553803B2 (ja) * | 2011-08-01 | 2014-07-16 | 株式会社日立製作所 | パネルの印刷装置 |
| JP5803015B2 (ja) * | 2011-08-31 | 2015-11-04 | Jukiオートメーションシステムズ株式会社 | 搬送装置、処理装置及び搬送方法 |
| KR101137995B1 (ko) | 2011-10-12 | 2012-04-23 | 주식회사 에스제이이노테크 | 웨이퍼 위치 교체 장치 |
| DE102012205252A1 (de) | 2012-03-30 | 2013-10-02 | JRT Photovoltaics GmbH & Co. KG | Bearbeitungsstation für flächige Substrate und Verfahren zum Bearbeiten von flächigen Substraten |
| DE102012205249A1 (de) * | 2012-03-30 | 2013-10-02 | JRT Photovoltaics GmbH & Co. KG | Bearbeitungsstation für flächige Substrate und Verfahren zum Bearbeiten von flächigen Substraten |
| CN102642385B (zh) * | 2012-04-30 | 2014-06-11 | 华南理工大学 | 全自动多相机丝网印刷设备的定位基准标定方法及装置 |
| CN102700237B (zh) * | 2012-05-09 | 2015-08-26 | 华南理工大学 | 一种具有双平台的全自动视觉硅片印刷装置 |
| KR20170135982A (ko) | 2012-09-10 | 2017-12-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 이송 디바이스 및 기판들을 이동시키는 방법 |
| CN103085447B (zh) * | 2013-01-18 | 2015-01-21 | 景德镇陶瓷学院 | 高速旋转式印花机及其旋转式印花方法 |
| PL2801790T3 (pl) * | 2013-01-30 | 2017-04-28 | Nittan Valve Co., Ltd. | Aparatura do badania elementów roboczych |
| CN103552366B (zh) * | 2013-11-08 | 2016-01-20 | 中国兵器工业集团第二一四研究所苏州研发中心 | 一种小尺寸ltcc片式电路四片同步侧印装置及方法 |
| JP5875573B2 (ja) | 2013-11-22 | 2016-03-02 | キヤノン株式会社 | 記録装置及びその気泡排出方法 |
| DE102014215022B3 (de) * | 2014-07-30 | 2015-09-03 | Ekra Automatisierungssysteme Gmbh | Drucksystem und Verfahren zum Bedrucken von Substraten |
| CN104275916A (zh) * | 2014-10-17 | 2015-01-14 | 杰锐光能(苏州)有限公司 | 带有两套印刷台面的直线传输式晶硅太阳能电池印刷机 |
| CN104354453B (zh) * | 2014-10-21 | 2017-02-08 | 苏州迈为科技股份有限公司 | 一种太阳能电池片的高效印刷方法及其装置 |
| CN104401767B (zh) * | 2014-11-14 | 2017-03-15 | 广州兴森快捷电路科技有限公司 | Pcb转角传输装置及方法 |
| CN112018011A (zh) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | 在生产太阳能电池基板上印刷的装置及传输该基板的方法 |
| EP3227929A1 (en) * | 2014-12-02 | 2017-10-11 | Applied Materials Italia Srl | Solar cell production apparatus for processing a substrate, and method for processing a substrate for the production of a solar cell |
| JP6517324B2 (ja) | 2015-08-03 | 2019-05-22 | 日鍛バルブ株式会社 | エンジンバルブの軸接部の探傷検査方法および装置 |
| DE102017204630A1 (de) * | 2017-03-20 | 2018-09-20 | Ekra Automatisierungssysteme Gmbh | Druckvorrichtung |
| CA3057323C (en) | 2017-03-23 | 2022-10-04 | Berkshire Grey, Inc. | Systems and methods for processing objects, including automated linear processing stations |
| GB2562503A (en) * | 2017-05-16 | 2018-11-21 | Asm Assembly Systems Singapore Pte Ltd | Workpiece transfer and printing |
| CN107187191B (zh) * | 2017-07-03 | 2019-11-12 | 东莞市科隆威自动化设备有限公司 | 一种硅片印刷机 |
| JP7029914B2 (ja) * | 2017-09-25 | 2022-03-04 | 東京エレクトロン株式会社 | 基板処理装置 |
| WO2019081041A1 (en) * | 2017-10-27 | 2019-05-02 | Applied Materials Italia S.R.L. | CONFIGURED APPARATUS FOR DETERMINING A STATE OF A DEPOSITION ARRANGEMENT, A SYSTEM FOR MANUFACTURING A SOLAR CELL, AND A METHOD FOR DETERMINING A STATUS OF A DEPOSIT ARRANGEMENT |
| US10790466B2 (en) * | 2018-12-11 | 2020-09-29 | Feng-wen Yen | In-line system for mass production of organic optoelectronic device and manufacturing method using the same system |
| CN111331156B (zh) * | 2018-12-19 | 2021-06-22 | 宝成工业股份有限公司 | 自动上下料装置 |
| CN110060946B (zh) * | 2019-04-26 | 2024-08-02 | 无锡奥特维科技股份有限公司 | 双工位导电胶涂覆装置及叠片组件生产装置 |
| US12131930B2 (en) | 2020-04-02 | 2024-10-29 | Applied Materials, Inc. | Inspection system |
| CN111688338A (zh) * | 2020-04-03 | 2020-09-22 | 绍兴永通印花有限公司 | 异花同步双幅印花机 |
| US12128446B1 (en) | 2023-06-30 | 2024-10-29 | Applied Materials, Inc. | High speed substrate sorter |
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| US4588343A (en) * | 1984-05-18 | 1986-05-13 | Varian Associates, Inc. | Workpiece lifting and holding apparatus |
| JPS61105853A (ja) * | 1984-10-30 | 1986-05-23 | Anelva Corp | オ−トロ−ダ− |
| JPS61113766A (ja) | 1984-11-09 | 1986-05-31 | Nissin Electric Co Ltd | エンドステ−シヨン |
| DE3735284A1 (de) * | 1987-10-17 | 1989-04-27 | Leybold Ag | Vorrichtung nach dem karussell-prinzip zum beschichten von substraten |
| US4981074A (en) * | 1988-06-01 | 1991-01-01 | Hitachi Techno Engineering Co., Ltd. | Method and apparatus for screen printing |
| IT1252949B (it) | 1991-09-30 | 1995-07-06 | Gisulfo Baccini | Procedimento per la lavorazione di circuiti tipo green-tape e dispositivo adottante tale procedimento |
| ATE129359T1 (de) | 1992-08-04 | 1995-11-15 | Ibm | Verteilungseinrichtung mit gaszufuhr- abgabevorrichtung zum handhaben und speichern von abdichtbaren tragbaren unter druck stehenden behältern. |
| GB9323978D0 (en) | 1993-11-22 | 1994-01-12 | Dek Printing Machines Ltd | Alignment systems |
| US5379984A (en) * | 1994-01-11 | 1995-01-10 | Intevac, Inc. | Gate valve for vacuum processing system |
| JP3255783B2 (ja) | 1994-01-26 | 2002-02-12 | 松下電器産業株式会社 | スクリーン印刷機およびスクリーン印刷方法 |
| JPH0858062A (ja) * | 1994-08-19 | 1996-03-05 | Nippon Bunka Seiko Kk | Cd多色印刷装置 |
| US6086728A (en) * | 1994-12-14 | 2000-07-11 | Schwartz; Vladimir | Cross flow metalizing of compact discs |
| US5518599A (en) | 1994-12-14 | 1996-05-21 | Reflekt Technology, Inc. | Cross flow metalizing of compact discs |
| US6702540B2 (en) * | 1995-11-27 | 2004-03-09 | M2 Engineering Ab | Machine and method for manufacturing compact discs |
| US6054029A (en) * | 1996-02-23 | 2000-04-25 | Singulus Technologies Gmbh | Device for gripping, holdings and/or transporting substrates |
| US5863170A (en) * | 1996-04-16 | 1999-01-26 | Gasonics International | Modular process system |
| JP3310540B2 (ja) | 1996-05-22 | 2002-08-05 | 松下電器産業株式会社 | スクリーン印刷方法とその装置 |
| WO1997048258A1 (en) | 1996-06-14 | 1997-12-18 | Matsushita Electric Industrial Co., Ltd. | Screen printing method and screen printing apparatus |
| DE19642852A1 (de) * | 1996-10-17 | 1998-04-23 | Leybold Systems Gmbh | Vakuumbehandlungsanlage zum Aufbringen dünner Schichten auf dreidimensionale, schalenförmige oder prismatische Substrate |
| GB2323664A (en) | 1997-03-25 | 1998-09-30 | Dek Printing Machines Ltd | Viewing and imaging systems |
| US6032577A (en) | 1998-03-02 | 2000-03-07 | Mpm Corporation | Method and apparatus for transporting substrates |
| JPH11245370A (ja) | 1998-03-02 | 1999-09-14 | Matsushita Electric Ind Co Ltd | 電気ペーストのスクリーン印刷における基板とスクリーンマスクの位置合わせ方法 |
| DE19835154A1 (de) * | 1998-08-04 | 2000-02-10 | Leybold Systems Gmbh | Vorrichtung zur Beschichtung von Substraten in einer Vakuumkammer |
| IT1310555B1 (it) | 1999-04-02 | 2002-02-18 | Gisulfo Baccini | Apparecchiatura per la produzione di circuiti elettronici |
| IT1310557B1 (it) | 1999-04-02 | 2002-02-18 | Gisulfo Baccini | Apparecchiatura per la produzione di circuiti elettronicimultistrato |
| DE19945648C2 (de) | 1999-09-23 | 2001-08-02 | Steag Hamatech Ag | Vorrichtung zum Be- und Entladen von Substraten |
| JP2002225221A (ja) * | 2001-02-02 | 2002-08-14 | Matsushita Electric Ind Co Ltd | スクリーン印刷機及びスクリーン印刷方法 |
| GB2377409A (en) | 2001-07-13 | 2003-01-15 | Dek Int Gmbh | Screen printing alignment and inspection apparatus having at least two workpiece imaging units |
| US7021450B2 (en) | 2002-04-17 | 2006-04-04 | Kraft Foods Holdings, Inc. | Device and method to correct uneven spacing of successive articles |
| DE10222119B4 (de) | 2002-05-17 | 2004-11-11 | Asys Automatisierungssysteme Gmbh | Vorrichtung und Verfahren zum Einstellen der relativen Lage zwischen einem zu bedruckenden Substrat und einem Druckmuster |
| US7988398B2 (en) * | 2002-07-22 | 2011-08-02 | Brooks Automation, Inc. | Linear substrate transport apparatus |
| DE10237038C1 (de) | 2002-08-08 | 2003-11-13 | Thieme Gmbh & Co Kg | Zentriereinrichtung für eine Siebdruckvorrichtung |
| JP4096359B2 (ja) | 2003-03-10 | 2008-06-04 | セイコーエプソン株式会社 | 製造対象物の製造装置 |
| GB2403003B (en) | 2003-06-19 | 2006-06-07 | Dek Int Gmbh | Inspection system for and method of inspecting deposits printed on workpieces |
| DE202005008581U1 (de) | 2005-05-25 | 2006-10-05 | Thieme Gmbh & Co. Kg | Aufnahme für zu bedruckendes Medium in einer Druckmaschine |
| US20060268290A1 (en) | 2005-05-25 | 2006-11-30 | Thieme Gmbh & Co. Kg | Printing table for flatbed printers |
| US7811016B2 (en) | 2005-05-25 | 2010-10-12 | Agfa Graphics Nv | Flatbed printing machine |
| JP4696861B2 (ja) * | 2005-11-11 | 2011-06-08 | パナソニック株式会社 | スクリーン印刷装置 |
| ITUD20050196A1 (it) | 2005-11-17 | 2007-05-18 | Gisulfo Baccini | Apparecchiatura per la produzione di celle fotovoltaiche sottili in silicio e di circuiti elettronici in materiale rigido e flessibile |
| TWI271367B (en) | 2005-11-24 | 2007-01-21 | Chunghwa Picture Tubes Ltd | Cassette and mechanical arm and process apparatus |
| JP4593461B2 (ja) | 2005-12-27 | 2010-12-08 | 東京エレクトロン株式会社 | 基板搬送システム |
| KR20070095148A (ko) * | 2006-03-20 | 2007-09-28 | 주식회사 탑 엔지니어링 | 칩 공급 유닛 로딩 장치 |
| DE102006015686C5 (de) | 2006-03-27 | 2013-05-29 | Thieme Gmbh & Co. Kg | Verfahren zum Transportieren von Druckgut und Drucktisch für Flachbettdruckmaschine |
| ITUD20070198A1 (it) * | 2007-10-24 | 2009-04-25 | Baccini S P A | Dispositivo di posizionamento per posizionare una o piu' piastre di circuiti elettronici, in un'unita' di deposizione del metallo, e relativo procedimento |
-
2009
- 2009-04-06 US US12/418,912 patent/US8215473B2/en not_active Expired - Fee Related
- 2009-05-18 WO PCT/EP2009/056024 patent/WO2009141319A1/en not_active Ceased
- 2009-05-18 JP JP2011509948A patent/JP2011523910A/ja active Pending
- 2009-05-18 CN CN2009801195714A patent/CN102037555B/zh not_active Expired - Fee Related
- 2009-05-18 EP EP09749809A patent/EP2297777A1/en not_active Withdrawn
- 2009-05-18 KR KR1020107028737A patent/KR20110020272A/ko not_active Ceased
- 2009-05-21 TW TW098116884A patent/TWI397146B/zh not_active IP Right Cessation
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