JP2011523492A5 - - Google Patents
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- Publication number
- JP2011523492A5 JP2011523492A5 JP2011507537A JP2011507537A JP2011523492A5 JP 2011523492 A5 JP2011523492 A5 JP 2011523492A5 JP 2011507537 A JP2011507537 A JP 2011507537A JP 2011507537 A JP2011507537 A JP 2011507537A JP 2011523492 A5 JP2011523492 A5 JP 2011523492A5
- Authority
- JP
- Japan
- Prior art keywords
- firing
- additive
- composition
- thick film
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 claims 10
- 239000000654 additive Substances 0.000 claims 8
- 230000000996 additive effect Effects 0.000 claims 6
- 238000010304 firing Methods 0.000 claims 6
- 229910044991 metal oxide Inorganic materials 0.000 claims 6
- 150000004706 metal oxides Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 229910052684 Cerium Inorganic materials 0.000 claims 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052797 bismuth Inorganic materials 0.000 claims 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- 229910052748 manganese Inorganic materials 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 239000000843 powder Substances 0.000 claims 2
- 229910052707 ruthenium Inorganic materials 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 229910004205 SiNX Inorganic materials 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4838508P | 2008-04-28 | 2008-04-28 | |
| US61/048,385 | 2008-04-28 | ||
| PCT/US2009/041333 WO2009134646A1 (en) | 2008-04-28 | 2009-04-22 | Conductive compositions and processes for use in the manufacture of semiconductor devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011523492A JP2011523492A (ja) | 2011-08-11 |
| JP2011523492A5 true JP2011523492A5 (enExample) | 2012-06-07 |
Family
ID=40909874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011507537A Pending JP2011523492A (ja) | 2008-04-28 | 2009-04-22 | 導電性組成物、および半導体デバイスの製造における使用方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20090266409A1 (enExample) |
| EP (1) | EP2274748A1 (enExample) |
| JP (1) | JP2011523492A (enExample) |
| KR (1) | KR20110003382A (enExample) |
| CN (1) | CN102017011A (enExample) |
| TW (1) | TW201005755A (enExample) |
| WO (1) | WO2009134646A1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8076777B2 (en) * | 2008-06-26 | 2011-12-13 | E. I. Du Pont De Nemours And Company | Glass compositions used in conductors for photovoltaic cells |
| CN102356434A (zh) * | 2009-03-19 | 2012-02-15 | E.I.内穆尔杜邦公司 | 用于太阳能电池电极的导体浆料 |
| KR101144810B1 (ko) | 2009-07-06 | 2012-05-11 | 엘지전자 주식회사 | 태양전지용 전극 페이스트, 이를 이용한 태양전지, 및 태양전지의 제조방법 |
| JP5137923B2 (ja) | 2009-09-18 | 2013-02-06 | 株式会社ノリタケカンパニーリミテド | 太陽電池用電極ペースト組成物 |
| TW201114876A (en) * | 2009-10-29 | 2011-05-01 | Giga Solar Materials Corp | Conductive paste with surfactants |
| US20110180138A1 (en) * | 2010-01-25 | 2011-07-28 | Hitachi Chemical Company, Ltd. | Paste composition for electrode and photovoltaic cell |
| US9390829B2 (en) | 2010-01-25 | 2016-07-12 | Hitachi Chemical Company, Ltd. | Paste composition for electrode and photovoltaic cell |
| US20110180139A1 (en) * | 2010-01-25 | 2011-07-28 | Hitachi Chemical Company, Ltd. | Paste composition for electrode and photovoltaic cell |
| JP5362615B2 (ja) * | 2010-02-22 | 2013-12-11 | Ｄｏｗａエレクトロニクス株式会社 | 銀粉及びその製造方法 |
| JP5351100B2 (ja) * | 2010-07-02 | 2013-11-27 | 株式会社ノリタケカンパニーリミテド | 太陽電池用導電性ペースト組成物 |
| CN102314956A (zh) * | 2010-07-09 | 2012-01-11 | 硕禾电子材料股份有限公司 | 导电铝胶及其制造方法、太阳能电池及其模块 |
| US9466738B2 (en) | 2010-10-28 | 2016-10-11 | Heracus Precious Metals North America Conshohocken LLC | Solar cell metallizations containing metal additive |
| US20120111399A1 (en) * | 2010-11-08 | 2012-05-10 | E. I. Du Pont De Nemours And Company | Solar cell electrode |
| WO2012064323A1 (en) * | 2010-11-09 | 2012-05-18 | E. I. Du Pont De Nemours And Company | Thick-film paste compositions with phosphonium surfactant |
| KR101595035B1 (ko) * | 2010-11-18 | 2016-02-17 | 주식회사 엘지화학 | 전극형성용 은 페이스트 조성물 및 이를 이용한 실리콘 태양전지 |
| JP5527901B2 (ja) * | 2011-01-19 | 2014-06-25 | 横浜ゴム株式会社 | 太陽電池集電電極形成用導電性組成物および太陽電池セル |
| CN102157220B (zh) * | 2011-02-28 | 2013-09-18 | 张振中 | 晶体硅太阳能电池正面栅线电极专用Ag浆 |
| US20120234384A1 (en) * | 2011-03-15 | 2012-09-20 | E.I. Du Pont Nemours And Company | Conductive metal paste for a metal-wrap-through silicon solar cell |
| US20120234383A1 (en) * | 2011-03-15 | 2012-09-20 | E.I.Du Pont De Nemours And Company | Conductive metal paste for a metal-wrap-through silicon solar cell |
| JP2012212615A (ja) * | 2011-03-31 | 2012-11-01 | Sony Corp | 光電変換素子の製造方法、光電変換素子および電子機器 |
| US9224517B2 (en) | 2011-04-07 | 2015-12-29 | Hitachi Chemical Company, Ltd. | Paste composition for electrode and photovoltaic cell |
| US20120260982A1 (en) * | 2011-04-14 | 2012-10-18 | Hitachi Chemical Company, Ltd. | Paste composition for electrode, photovoltaic cell element, and photovoltaic cell |
| US20140158196A1 (en) * | 2011-07-25 | 2014-06-12 | Yoshiaki Kurihara | Element and photovoltaic cell |
| KR20150125956A (ko) * | 2011-11-14 | 2015-11-10 | 히타치가세이가부시끼가이샤 | 전극용 페이스트 조성물, 태양 전지 소자 및 태양 전지 |
| CN103177789B (zh) * | 2011-12-20 | 2016-11-02 | 比亚迪股份有限公司 | 一种晶体硅太阳电池导电浆料及其制备方法 |
| CN103177793B (zh) * | 2011-12-26 | 2015-12-02 | 浙江昱辉阳光能源有限公司 | 太阳能电池正面电极用导电浆料及其制备方法 |
| CN102568699A (zh) * | 2012-01-04 | 2012-07-11 | 无锡卡利克斯科技有限公司 | 分离机管路预加热设备 |
| US20130183795A1 (en) * | 2012-01-16 | 2013-07-18 | E I Du Pont De Nemours And Company | Solar cell back side electrode |
| CN102898028B (zh) * | 2012-09-27 | 2015-07-15 | 广州市儒兴科技开发有限公司 | 一种晶体硅太阳电池正面银浆用玻璃粉及其制备方法 |
| EP2749545B1 (en) * | 2012-12-28 | 2018-10-03 | Heraeus Deutschland GmbH & Co. KG | Binary glass frits used in N-Type solar cell production |
| KR20140092488A (ko) * | 2012-12-29 | 2014-07-24 | 제일모직주식회사 | 태양전지 전극 형성용 조성물 및 이로부터 제조된 전극 |
| CN103077764B (zh) * | 2013-02-01 | 2016-05-11 | 李春生 | 一种太阳能电池正面电极用导电浆料 |
| US9236506B2 (en) * | 2013-02-05 | 2016-01-12 | E I Du Pont De Nemours And Company | Conductive silver paste for a metal-wrap-through silicon solar cell |
| JP6242198B2 (ja) | 2013-12-10 | 2017-12-06 | 京都エレックス株式会社 | 半導体デバイスの導電膜形成用導電性ペースト、および半導体デバイス、並びに半導体デバイスの製造方法 |
| EP2913139B1 (en) | 2014-02-26 | 2019-04-03 | Heraeus Precious Metals North America Conshohocken LLC | A glass comprising molybdenum and lead in a solar cell paste |
| CN106463198A (zh) * | 2014-05-19 | 2017-02-22 | 太阳化学公司 | 包含氧化铋的银浆和其在太阳能电池中的用途 |
| US9349883B2 (en) * | 2014-06-19 | 2016-05-24 | E I Du Pont De Nemours And Company | Conductor for a solar cell |
| JP5957546B2 (ja) * | 2015-01-07 | 2016-07-27 | 株式会社ノリタケカンパニーリミテド | 導電性組成物 |
| US10056508B2 (en) | 2015-03-27 | 2018-08-21 | Heraeus Deutschland GmbH & Co. KG | Electro-conductive pastes comprising a metal compound |
| WO2016156170A1 (en) | 2015-03-27 | 2016-10-06 | Heraeus Deutschland Gmbh & Co Kg | Electro-conductive pastes comprising an oxide additive |
| US10784383B2 (en) * | 2015-08-07 | 2020-09-22 | E I Du Pont De Nemours And Company | Conductive paste composition and semiconductor devices made therewith |
| US9859494B1 (en) * | 2016-06-29 | 2018-01-02 | International Business Machines Corporation | Nanoparticle with plural functionalities, and method of forming the nanoparticle |
| CN107274962A (zh) * | 2017-05-18 | 2017-10-20 | 江苏东昇光伏科技有限公司 | 一种太阳能电池用浆料及其制备方法 |
| KR102243472B1 (ko) * | 2018-12-17 | 2021-04-26 | 주식회사 경동원 | 전력반도체 접합용 소결 페이스트 조성물 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4070518A (en) * | 1976-10-15 | 1978-01-24 | E. I. Du Pont De Nemours And Company | Copper metallizations |
| US4375007A (en) * | 1980-11-26 | 1983-02-22 | E. I. Du Pont De Nemours & Co. | Silicon solar cells with aluminum-magnesium alloy low resistance contacts |
| SU1192295A1 (ru) * | 1984-03-30 | 1987-10-23 | Предприятие П/Я Г-4430 | Стекло |
| US5176853A (en) * | 1988-08-16 | 1993-01-05 | Delco Electronics Corporation | Controlled adhesion conductor |
| JPH04112410A (ja) * | 1990-08-31 | 1992-04-14 | Showa Denko Kk | 厚膜導体組成物 |
| JP3209089B2 (ja) * | 1996-05-09 | 2001-09-17 | 昭栄化学工業株式会社 | 導電性ペースト |
| JP3941201B2 (ja) * | 1998-01-20 | 2007-07-04 | 株式会社デンソー | 導体ペースト組成物及び回路基板 |
| JP2001028290A (ja) * | 1999-05-07 | 2001-01-30 | Ibiden Co Ltd | ホットプレート及び導体ペースト |
| JP2001203066A (ja) * | 1999-05-07 | 2001-07-27 | Ibiden Co Ltd | ホットプレート及び導体ペースト |
| JP4467287B2 (ja) * | 2003-11-17 | 2010-05-26 | 京セラ株式会社 | 太陽電池素子およびその製造方法 |
| JP4432604B2 (ja) * | 2004-04-30 | 2010-03-17 | 昭栄化学工業株式会社 | 導電性ペースト |
| US7176152B2 (en) * | 2004-06-09 | 2007-02-13 | Ferro Corporation | Lead-free and cadmium-free conductive copper thick film pastes |
| US7381353B2 (en) * | 2005-03-09 | 2008-06-03 | E.I. Du Pont De Nemours And Company | Black conductive thick film compositions, black electrodes, and methods of forming thereof |
| US7435361B2 (en) * | 2005-04-14 | 2008-10-14 | E.I. Du Pont De Nemours And Company | Conductive compositions and processes for use in the manufacture of semiconductor devices |
| US7556748B2 (en) * | 2005-04-14 | 2009-07-07 | E. I. Du Pont De Nemours And Company | Method of manufacture of semiconductor device and conductive compositions used therein |
| EP2015367A4 (en) * | 2006-04-25 | 2011-10-05 | Sharp Kk | ELECTROCONDUCTIVE PULP FOR SOLAR BATTERY ELECTRODE |
-
2009
- 2009-04-13 US US12/422,409 patent/US20090266409A1/en not_active Abandoned
- 2009-04-22 WO PCT/US2009/041333 patent/WO2009134646A1/en not_active Ceased
- 2009-04-22 JP JP2011507537A patent/JP2011523492A/ja active Pending
- 2009-04-22 CN CN2009801157430A patent/CN102017011A/zh active Pending
- 2009-04-22 KR KR1020107026563A patent/KR20110003382A/ko not_active Ceased
- 2009-04-22 EP EP09739448A patent/EP2274748A1/en not_active Withdrawn
- 2009-04-27 TW TW098113910A patent/TW201005755A/zh unknown
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