JP2011146477A5 - - Google Patents
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- Publication number
- JP2011146477A5 JP2011146477A5 JP2010005017A JP2010005017A JP2011146477A5 JP 2011146477 A5 JP2011146477 A5 JP 2011146477A5 JP 2010005017 A JP2010005017 A JP 2010005017A JP 2010005017 A JP2010005017 A JP 2010005017A JP 2011146477 A5 JP2011146477 A5 JP 2011146477A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- wiring
- support
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 26
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 2
- 238000007788 roughening Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 4
- 238000005422 blasting Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 230000003746 surface roughness Effects 0.000 claims 2
- 238000009713 electroplating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010005017A JP5603600B2 (ja) | 2010-01-13 | 2010-01-13 | 配線基板及びその製造方法、並びに半導体パッケージ |
| US12/968,405 US8525356B2 (en) | 2010-01-13 | 2010-12-15 | Wiring substrate, manufacturing method thereof, and semiconductor package |
| TW099144418A TWI500373B (zh) | 2010-01-13 | 2010-12-17 | 配線基板、其製造方法、以及半導體封裝 |
| KR1020110000067A KR101764686B1 (ko) | 2010-01-13 | 2011-01-03 | 배선 기판, 그 제조 방법, 및 반도체 패키지 |
| US13/911,259 US8673744B2 (en) | 2010-01-13 | 2013-06-06 | Wiring substrate, manufacturing method thereof, and semiconductor package |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010005017A JP5603600B2 (ja) | 2010-01-13 | 2010-01-13 | 配線基板及びその製造方法、並びに半導体パッケージ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011146477A JP2011146477A (ja) | 2011-07-28 |
| JP2011146477A5 true JP2011146477A5 (enExample) | 2013-02-21 |
| JP5603600B2 JP5603600B2 (ja) | 2014-10-08 |
Family
ID=44257911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010005017A Active JP5603600B2 (ja) | 2010-01-13 | 2010-01-13 | 配線基板及びその製造方法、並びに半導体パッケージ |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8525356B2 (enExample) |
| JP (1) | JP5603600B2 (enExample) |
| KR (1) | KR101764686B1 (enExample) |
| TW (1) | TWI500373B (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5590985B2 (ja) * | 2010-06-21 | 2014-09-17 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| US8802554B2 (en) * | 2011-02-15 | 2014-08-12 | Marvell World Trade Ltd. | Patterns of passivation material on bond pads and methods of manufacture thereof |
| US10074600B2 (en) | 2012-03-30 | 2018-09-11 | Ati Technologies Ulc | Method of manufacturing interposer-based damping resistor |
| TWI562295B (en) | 2012-07-31 | 2016-12-11 | Mediatek Inc | Semiconductor package and method for fabricating base for semiconductor package |
| US10991669B2 (en) | 2012-07-31 | 2021-04-27 | Mediatek Inc. | Semiconductor package using flip-chip technology |
| US9177899B2 (en) | 2012-07-31 | 2015-11-03 | Mediatek Inc. | Semiconductor package and method for fabricating base for semiconductor package |
| EP2897447A4 (en) * | 2012-09-11 | 2016-05-25 | Meiko Electronics Co Ltd | METHOD FOR PRODUCING A SUBSTRATE WITH AN EMBEDDED COMPONENT AND SUBSTRATE PRODUCED IN THIS METHOD WITH AN EMBEDDED COMPONENT |
| JP6092555B2 (ja) * | 2012-09-24 | 2017-03-08 | 新光電気工業株式会社 | 配線基板の製造方法 |
| US9035194B2 (en) * | 2012-10-30 | 2015-05-19 | Intel Corporation | Circuit board with integrated passive devices |
| US20140167900A1 (en) | 2012-12-14 | 2014-06-19 | Gregorio R. Murtagian | Surface-mount inductor structures for forming one or more inductors with substrate traces |
| US9165878B2 (en) * | 2013-03-14 | 2015-10-20 | United Test And Assembly Center Ltd. | Semiconductor packages and methods of packaging semiconductor devices |
| JP6291738B2 (ja) | 2013-07-25 | 2018-03-14 | 富士通株式会社 | 回路基板、回路基板の製造方法及び電子機器 |
| JP2015032649A (ja) * | 2013-08-01 | 2015-02-16 | イビデン株式会社 | 配線板の製造方法および配線板 |
| DE102013218404A1 (de) * | 2013-09-13 | 2015-03-19 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu seiner Herstellung |
| KR20150064445A (ko) * | 2013-12-03 | 2015-06-11 | 삼성전기주식회사 | 반도체 패키지용 코어리스 기판 및 그 제조 방법, 이를 이용한 반도체 패키지 제조 방법 |
| CN104701185B (zh) * | 2013-12-06 | 2018-01-02 | 碁鼎科技秦皇岛有限公司 | 封装基板、封装结构以及封装基板的制作方法 |
| JP5662551B1 (ja) * | 2013-12-20 | 2015-01-28 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
| US9679841B2 (en) * | 2014-05-13 | 2017-06-13 | Qualcomm Incorporated | Substrate and method of forming the same |
| JP2016039290A (ja) * | 2014-08-08 | 2016-03-22 | イビデン株式会社 | プリント配線板および半導体パッケージ |
| JP2016039302A (ja) * | 2014-08-08 | 2016-03-22 | イビデン株式会社 | プリント配線板とその製造方法および半導体パッケージ |
| JP5795415B1 (ja) | 2014-08-29 | 2015-10-14 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP6510884B2 (ja) * | 2015-05-19 | 2019-05-08 | 新光電気工業株式会社 | 配線基板及びその製造方法と電子部品装置 |
| US9691699B2 (en) * | 2015-11-03 | 2017-06-27 | Unimicron Technology Corp. | Circuit structure and method for manufacturing the same |
| KR102534940B1 (ko) * | 2016-07-28 | 2023-05-22 | 삼성전기주식회사 | 인쇄회로기판 |
| JP7271081B2 (ja) * | 2017-10-18 | 2023-05-11 | 日東電工株式会社 | 配線回路基板 |
| US10147721B1 (en) | 2017-12-20 | 2018-12-04 | Advanced Micro Devices, Inc. | Method and apparatus for dynamic calibration of on-die-precision-resistors |
| JP7448309B2 (ja) * | 2018-11-27 | 2024-03-12 | 日東電工株式会社 | 配線回路基板およびその製造方法 |
| JP2020202205A (ja) * | 2019-06-06 | 2020-12-17 | イビデン株式会社 | プリント配線板とプリント配線板の製造方法 |
| US12089329B2 (en) | 2019-12-04 | 2024-09-10 | Lg Innotek Co., Ltd. | Printed circuit board comprising via portions |
| JP2022047385A (ja) * | 2020-09-11 | 2022-03-24 | キオクシア株式会社 | プリント配線基板およびメモリシステム |
| JP7216139B2 (ja) * | 2021-04-20 | 2023-01-31 | Fict株式会社 | 回路基板の製造方法 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5835950A (ja) * | 1981-08-28 | 1983-03-02 | Hitachi Ltd | 半導体装置 |
| JPS59134840A (ja) * | 1982-12-02 | 1984-08-02 | Stanley Electric Co Ltd | オ−ミツク接続された金属電極の像および位置を照明により検知する方法およびシステム |
| JPH078447B2 (ja) * | 1987-08-06 | 1995-02-01 | 株式会社神戸製鋼所 | 薄板加工用ドリル |
| JPH03268316A (ja) * | 1990-03-16 | 1991-11-29 | Fujitsu Ltd | 半導体装置の製造方法 |
| US5627110A (en) * | 1994-10-24 | 1997-05-06 | Advanced Micro Devices, Inc. | Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used |
| JP3855320B2 (ja) | 1996-10-16 | 2006-12-06 | 株式会社トッパンNecサーキットソリューションズ | 半導体装置用基板の製造方法及び半導体装置の製造方法 |
| EP0952762B1 (en) * | 1996-12-19 | 2011-10-12 | Ibiden Co, Ltd. | Printed wiring board and method for manufacturing the same |
| US5898227A (en) * | 1997-02-18 | 1999-04-27 | International Business Machines Corporation | Alignment targets having enhanced contrast |
| US6156243A (en) * | 1997-04-25 | 2000-12-05 | Hoya Corporation | Mold and method of producing the same |
| JPH1140908A (ja) | 1997-07-22 | 1999-02-12 | Ibiden Co Ltd | プリント配線板 |
| WO1999021224A1 (en) * | 1997-10-17 | 1999-04-29 | Ibiden Co., Ltd. | Package substrate |
| WO1999034654A1 (en) * | 1997-12-29 | 1999-07-08 | Ibiden Co., Ltd. | Multilayer printed wiring board |
| EP1583407B1 (en) * | 1998-02-26 | 2007-05-30 | Ibiden Co., Ltd. | Multilayer printed wiring board with filled viaholes |
| JP4797310B2 (ja) * | 2000-09-29 | 2011-10-19 | 住友ベークライト株式会社 | アライメントマーク |
| JP3546961B2 (ja) * | 2000-10-18 | 2004-07-28 | 日本電気株式会社 | 半導体装置搭載用配線基板およびその製造方法、並びに半導体パッケージ |
| JP2004047898A (ja) * | 2002-07-15 | 2004-02-12 | Sumitomo Bakelite Co Ltd | プリント配線板の製造方法及び多層プリント配線板の製造方法 |
| JP3987781B2 (ja) * | 2002-09-30 | 2007-10-10 | 日本特殊陶業株式会社 | 配線基板の製造方法 |
| JP2004200187A (ja) * | 2002-12-16 | 2004-07-15 | Nikon Corp | プリント配線板 |
| US20050067378A1 (en) * | 2003-09-30 | 2005-03-31 | Harry Fuerhaupter | Method for micro-roughening treatment of copper and mixed-metal circuitry |
| TW200806144A (en) * | 2004-02-04 | 2008-01-16 | Ibiden Co Ltd | Multilayer printed wiring board |
| JP2006186321A (ja) * | 2004-12-01 | 2006-07-13 | Shinko Electric Ind Co Ltd | 回路基板の製造方法及び電子部品実装構造体の製造方法 |
| JP2006216711A (ja) * | 2005-02-02 | 2006-08-17 | Ibiden Co Ltd | 多層プリント配線板 |
| JP4768994B2 (ja) * | 2005-02-07 | 2011-09-07 | ルネサスエレクトロニクス株式会社 | 配線基板および半導体装置 |
| JP2006278929A (ja) * | 2005-03-30 | 2006-10-12 | Shinko Electric Ind Co Ltd | フレキシブル回路基板の製造方法 |
| TWI294678B (en) * | 2006-04-19 | 2008-03-11 | Phoenix Prec Technology Corp | A method for manufacturing a coreless package substrate |
| US7911038B2 (en) * | 2006-06-30 | 2011-03-22 | Renesas Electronics Corporation | Wiring board, semiconductor device using wiring board and their manufacturing methods |
| JP5214139B2 (ja) * | 2006-12-04 | 2013-06-19 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP2008258520A (ja) * | 2007-04-09 | 2008-10-23 | Shinko Electric Ind Co Ltd | 配線基板の製造方法及び配線基板 |
| JP2009194321A (ja) * | 2008-02-18 | 2009-08-27 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法、半導体パッケージ |
| JP4256454B2 (ja) * | 2008-09-01 | 2009-04-22 | 新光電気工業株式会社 | 配線基板の製造方法及び配線基板 |
| JP5203108B2 (ja) * | 2008-09-12 | 2013-06-05 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| US8365402B2 (en) * | 2008-09-30 | 2013-02-05 | Ibiden Co., Ltd. | Method for manufacturing printed wiring board |
| JP5561460B2 (ja) * | 2009-06-03 | 2014-07-30 | 新光電気工業株式会社 | 配線基板および配線基板の製造方法 |
-
2010
- 2010-01-13 JP JP2010005017A patent/JP5603600B2/ja active Active
- 2010-12-15 US US12/968,405 patent/US8525356B2/en active Active
- 2010-12-17 TW TW099144418A patent/TWI500373B/zh active
-
2011
- 2011-01-03 KR KR1020110000067A patent/KR101764686B1/ko active Active
-
2013
- 2013-06-06 US US13/911,259 patent/US8673744B2/en active Active
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