JP2013073994A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013073994A5 JP2013073994A5 JP2011210212A JP2011210212A JP2013073994A5 JP 2013073994 A5 JP2013073994 A5 JP 2013073994A5 JP 2011210212 A JP2011210212 A JP 2011210212A JP 2011210212 A JP2011210212 A JP 2011210212A JP 2013073994 A5 JP2013073994 A5 JP 2013073994A5
- Authority
- JP
- Japan
- Prior art keywords
- support plate
- layer
- metal layer
- connection pad
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 238000009713 electroplating Methods 0.000 claims 2
- 238000007747 plating Methods 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210212A JP5795225B2 (ja) | 2011-09-27 | 2011-09-27 | 配線基板の製造方法 |
| US13/616,348 US9210808B2 (en) | 2011-09-27 | 2012-09-14 | Wiring substrate and method of manufacturing the same |
| KR1020120101929A KR101867893B1 (ko) | 2011-09-27 | 2012-09-14 | 배선 기판 및 그 제조 방법 |
| TW101134128A TWI595813B (zh) | 2011-09-27 | 2012-09-18 | 配線基板及製造其之方法 |
| US14/922,972 US10117336B2 (en) | 2011-09-27 | 2015-10-26 | Method of manufacturing a wiring substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210212A JP5795225B2 (ja) | 2011-09-27 | 2011-09-27 | 配線基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013073994A JP2013073994A (ja) | 2013-04-22 |
| JP2013073994A5 true JP2013073994A5 (enExample) | 2014-08-14 |
| JP5795225B2 JP5795225B2 (ja) | 2015-10-14 |
Family
ID=47909996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011210212A Active JP5795225B2 (ja) | 2011-09-27 | 2011-09-27 | 配線基板の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9210808B2 (enExample) |
| JP (1) | JP5795225B2 (enExample) |
| KR (1) | KR101867893B1 (enExample) |
| TW (1) | TWI595813B (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9299649B2 (en) | 2013-02-08 | 2016-03-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | 3D packages and methods for forming the same |
| US8802504B1 (en) * | 2013-03-14 | 2014-08-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | 3D packages and methods for forming the same |
| KR20150002492A (ko) * | 2013-06-28 | 2015-01-07 | 쿄세라 서킷 솔루션즈 가부시키가이샤 | 배선 기판 |
| JP6131135B2 (ja) * | 2013-07-11 | 2017-05-17 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP6223909B2 (ja) * | 2013-07-11 | 2017-11-01 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| US9620446B2 (en) * | 2014-12-10 | 2017-04-11 | Shinko Electric Industries Co., Ltd. | Wiring board, electronic component device, and method for manufacturing those |
| KR102411996B1 (ko) * | 2015-05-29 | 2022-06-22 | 삼성전기주식회사 | 패키지 기판 및 그 제조 방법 |
| JP6623028B2 (ja) * | 2015-10-27 | 2019-12-18 | 新光電気工業株式会社 | インダクタ装置及びその製造方法 |
| KR102691326B1 (ko) * | 2016-12-21 | 2024-08-05 | 삼성전기주식회사 | 인쇄회로기판 및 패키지 |
| CN108231723B (zh) * | 2016-12-22 | 2020-08-07 | 中芯国际集成电路制造(上海)有限公司 | 封装结构及其形成方法 |
| US10986790B2 (en) | 2017-12-17 | 2021-04-27 | Timothy Glaude | System for infusing a gas or liquids into the roots of a plant |
| US12198992B2 (en) | 2019-03-25 | 2025-01-14 | Kyocera Corporation | Electronic element housing package and electronic apparatus |
| WO2021031125A1 (zh) * | 2019-08-20 | 2021-02-25 | 华为技术有限公司 | 线路嵌入式基板、芯片封装结构及基板制备方法 |
| JP2021093417A (ja) * | 2019-12-09 | 2021-06-17 | イビデン株式会社 | プリント配線板、及び、プリント配線板の製造方法 |
| US20230004243A1 (en) * | 2020-01-08 | 2023-01-05 | Panasonic Intellectual Property Management Co., Ltd. | Method for manufacturing wiring body, pattern plate, and wiring body |
| US11315862B2 (en) * | 2020-01-31 | 2022-04-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and manufacturing method thereof |
| KR102853086B1 (ko) | 2020-08-19 | 2025-09-02 | 삼성전자주식회사 | 반도체 패키지 |
| KR20220031398A (ko) * | 2020-09-04 | 2022-03-11 | 삼성전기주식회사 | 인쇄회로기판 |
| KR20230136737A (ko) * | 2021-01-26 | 2023-09-26 | 도요보 가부시키가이샤 | 적층체의 제조 방법, 적층체, 및 다층 적층체 |
| JP7711870B2 (ja) * | 2021-10-19 | 2025-07-23 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP7700986B2 (ja) * | 2021-10-19 | 2025-07-01 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| TWI831123B (zh) * | 2022-01-28 | 2024-02-01 | 巨擘科技股份有限公司 | 多層基板表面處理層結構 |
| JP2023125724A (ja) * | 2022-02-28 | 2023-09-07 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| WO2025047324A1 (ja) * | 2023-08-29 | 2025-03-06 | 京セラ株式会社 | 配線基板、パッケージ、および圧電デバイス |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4125441A (en) * | 1978-01-30 | 1978-11-14 | General Dynamics Corporation | Isolated bump circuitry on tape utilizing electroforming |
| US5136456A (en) * | 1989-11-17 | 1992-08-04 | Sigma Instruments, Inc. | Faulted current indicator with protection against temporary overloads and transients |
| US5329695A (en) * | 1992-09-01 | 1994-07-19 | Rogers Corporation | Method of manufacturing a multilayer circuit board |
| JP3346263B2 (ja) | 1997-04-11 | 2002-11-18 | イビデン株式会社 | プリント配線板及びその製造方法 |
| US6306751B1 (en) * | 1999-09-27 | 2001-10-23 | Lsi Logic Corporation | Apparatus and method for improving ball joints in semiconductor packages |
| US6723927B1 (en) * | 2000-08-24 | 2004-04-20 | High Connection Density, Inc. | High-reliability interposer for low cost and high reliability applications |
| JP3666591B2 (ja) * | 2002-02-01 | 2005-06-29 | 株式会社トッパンNecサーキットソリューションズ | 半導体チップ搭載用基板の製造方法 |
| US7365414B2 (en) * | 2003-12-01 | 2008-04-29 | Intel Corporation | Component packaging apparatus, systems, and methods |
| JP4146864B2 (ja) * | 2005-05-31 | 2008-09-10 | 新光電気工業株式会社 | 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法 |
| JP4819471B2 (ja) | 2005-10-12 | 2011-11-24 | 日本電気株式会社 | 配線基板及び配線基板を用いた半導体装置並びにその製造方法 |
| US7911038B2 (en) | 2006-06-30 | 2011-03-22 | Renesas Electronics Corporation | Wiring board, semiconductor device using wiring board and their manufacturing methods |
| JP5101169B2 (ja) * | 2007-05-30 | 2012-12-19 | 新光電気工業株式会社 | 配線基板とその製造方法 |
| JP5120342B2 (ja) * | 2009-06-18 | 2013-01-16 | ソニー株式会社 | 半導体パッケージの製造方法 |
| US8127979B1 (en) * | 2010-09-25 | 2012-03-06 | Intel Corporation | Electrolytic depositon and via filling in coreless substrate processing |
-
2011
- 2011-09-27 JP JP2011210212A patent/JP5795225B2/ja active Active
-
2012
- 2012-09-14 KR KR1020120101929A patent/KR101867893B1/ko active Active
- 2012-09-14 US US13/616,348 patent/US9210808B2/en active Active
- 2012-09-18 TW TW101134128A patent/TWI595813B/zh active
-
2015
- 2015-10-26 US US14/922,972 patent/US10117336B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013073994A5 (enExample) | ||
| JP2008263125A5 (enExample) | ||
| JP2014103295A5 (enExample) | ||
| JP2009105376A5 (enExample) | ||
| JP2011216921A (ja) | 半導体装置および半導体装置の製造方法 | |
| JP2010165855A5 (enExample) | ||
| JP2013118255A5 (enExample) | ||
| JP2013229542A5 (enExample) | ||
| CN105655319B (zh) | 布线衬底及其制造方法、电子组件装置 | |
| JP2010287742A5 (enExample) | ||
| JP2010129899A5 (enExample) | ||
| JP2015159197A5 (enExample) | ||
| JP2011061116A5 (enExample) | ||
| JP2018037504A (ja) | リードフレーム及び電子部品装置とそれらの製造方法 | |
| JP2014067941A5 (enExample) | ||
| TW201110267A (en) | An electronic device package and method of manufacture | |
| JP2014107427A5 (enExample) | ||
| JP5580522B2 (ja) | 半導体装置とその製造方法 | |
| JP2011028829A5 (enExample) | ||
| JP2017228720A5 (enExample) | ||
| JP2018081979A (ja) | リードフレーム及び電子部品装置とそれらの製造方法 | |
| JP2017112141A (ja) | 半導体素子搭載用リードフレーム及びその製造方法 | |
| JP6524526B2 (ja) | 半導体素子実装用基板及び半導体装置、並びにそれらの製造方法 | |
| JP2011114304A5 (enExample) | ||
| JP5866719B2 (ja) | 半導体装置用の中間成形品及び半導体装置 |