JP4768994B2 - 配線基板および半導体装置 - Google Patents
配線基板および半導体装置 Download PDFInfo
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- JP4768994B2 JP4768994B2 JP2005031100A JP2005031100A JP4768994B2 JP 4768994 B2 JP4768994 B2 JP 4768994B2 JP 2005031100 A JP2005031100 A JP 2005031100A JP 2005031100 A JP2005031100 A JP 2005031100A JP 4768994 B2 JP4768994 B2 JP 4768994B2
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Description
前記第1配線からなるパターンであって、第1方向と直交する第2方向に沿ったライン状パターンを少なくとも含む第1配線パターンと、
前記ベース絶縁膜の下面の凹部に設けられたパターンであって、当該配線基板の第1方向両側の下方側への反りを抑えるように形成された反り制御パターンを有することを特徴とする配線基板。
前記第1配線からなるパターンであって、第1方向と直交する第2方向に沿ったライン状パターンを少なくとも含み、且つ第1方向に沿ったX成分に対する第2方向に沿ったY成分の成分比率(Y/X)が1より大きい第1配線パターンと、
前記ベース絶縁膜の下面の凹部に設けられたパターンであって、X成分に対するY成分の成分比率(Y/X)が1より小さい反り制御パターンを有することを特徴とする配線基板。
まず、図1に示す一実施形態を挙げて本発明の配線基板の基本構造について説明する。
本発明により制御しようとする配線基板の反りは、前述のようにベース絶縁膜下面の凹部に設けられた下層配線のパターン(以下、下層配線パターン)に起因するものと考えられる。このような配線基板の反りは、下層配線が、X−Y直交座標系における一方の座標成分に偏ったパターンを形成している場合に発生しやすい。すなわち、パターンのX成分およびY成分について、X成分に対するY成分の比率(Y/X)(以下、パターン成分比率(Y/X))が1より大きい場合、配線基板に反りが発生しやすくなる傾向がある。
以下に本発明のベース絶縁膜として、好適な樹脂材料について説明する。
温度がt℃のときの弾性率をDt、温度がt℃のときの破断強度をHtとしたとき、
(2)D23 ≧ 5GPa、
(3)D150 ≧ 2.5GPa
(4)D-65/D150 ≦ 3.0
(5)H23 ≧ 140MPa
(6)H-65/H150 ≦ 2.3。
次に半導体装置の構造について説明する。
以下に、配線基板の製造方法について説明する。図8に、図1に示す配線基板の製造工程断面図を示す。
111 ベース絶縁膜
111a 凹部
112 下層配線
112a エッチングバリア層
112b パターン本体層
112c 高エッチングレート層
113 ヴィアホール
114 上層配線
115 ソルダーレジスト層
116 層間絶縁膜
117 ヴィアホール
118 第2の上層配線
120 半導体チップ
121 バンプ
122 アンダーフィル
131 半田ボール
132 バンプ
141 支持基板
142 レジスト層
201 配線基板の構成単位(製品部)
202 配線基板の周辺領域
301 ラインアンドスペースパターンからなるパターン単位
302 円形ベタパターン単位
501 金属板
502 絶縁層
503 ヴィアホール
504 配線パターン
505 フリップチップパッド部
506 絶縁層
507 基板補強体
508 外部電極端子
601 支持板
602 電極
603 絶縁層
604 ヴィアホール
605 配線
606 支持体
607 配線基板
Claims (25)
- 下面に凹部を有するベース絶縁膜と、前記凹部に設けられた第1配線と、前記ベース絶縁膜に形成されたヴィアホールと、このヴィアホール内の導電体を介して第1配線と接続され前記ベース絶縁膜の上面に形成された第2配線を有する配線基板において、
前記第1配線からなるパターンであって、第1方向と直交する第2方向に沿ったライン状パターンを少なくとも含み、且つ第1方向に沿ったX成分に対する第2方向に沿ったY成分の成分比率(Y/X)が1より大きい第1配線パターンと、
前記ベース絶縁膜の下面の凹部に設けられたパターンであって、X成分に対するY成分の成分比率(Y/X)が1より小さい反り制御パターンを有し、
前記第1配線パターンと前記反り制御パターンを合わせたパターンの成分比率(Y/X)が70/30〜30/70の範囲にあり、
前記反り制御パターンが、前記ベース絶縁膜下面の凹部に設けられたダミー配線からなるパターンであることを特徴とする配線基板。 - 前記反り制御パターンは、当該配線基板の第1方向両側の下方側への反りを抑えるように形成されたパターンである、請求項1に記載の配線基板。
- 前記第1配線パターンは、当該第1配線パターン全体に対する、第1方向に沿ったライン状パターンと第2方向に沿ったライン状パターンとの合計のエリア比率が60%以上である請求項1又は2に記載の配線基板。
- 前記第1配線パターンの成分比率(Y/X)が55/45以上である請求項1から3のいずれかに記載の配線基板。
- 前記第1配線パターンのエリア占有率は5%〜70%の範囲にある、請求項1から4のいずれかに記載の配線基板。
- 前記反り制御パターンの成分比率(Y/X)は30/70以下である、請求項1から5のいずれかに記載の配線基板。
- 前記反り制御パターンが、第2方向と直交するライン状パターンあるいはラインアンドスペースパターンである請求項1から6のいずれかに記載の配線基板。
- 前記反り制御パターンが、前記第1配線と同じ材料で形成され、同じ厚みを有している請求項1から7のいずれかに記載の配線基板。
- 前記第1方向は当該配線基板の一辺に沿った方向である、請求項1から8のいずれかに記載の配線基板。
- 所定の配線基板に対応する基板領域単位がブロック状に配列形成された請求項1から9のいずれかに記載の配線基板。
- 前記基板領域単位がブロック状に配列形成された当該配線基板の平面形状は長方形であり、前記第1の方向は該長方形の長辺に沿った方向である、請求項10に記載の配線基板。
- 前記ベース絶縁膜の下面の凹部に設けられたパターンのエリア占有率は10%〜70%の範囲にある、請求項10又は11に記載の配線基板。
- 前記基板領域単位の配列領域周辺部に、前記ベース絶縁膜下面の凹部に設けられたブロックパターンを有する請求項10から12のいずれかに記載の配線基板。
- 前記ブロックパターンが、前記第1配線と同じ材料で形成され、同じ厚みを有している請求項13に記載の配線基板。
- 前記反り制御パターンとして、前記基板領域単位内に設けられたダミー配線からなる第1の反り制御パターンと、前記基板領域単位の配列領域周辺部に設けられた第2の反り制御パターンを有する請求項10から14のいずれかに記載の配線基板。
- 前記第2の反り制御パターンは、第2方向と直交するラインアンドスペースパターンからなる領域単位がブロック状に配列されたパターンを有する請求項15に記載の配線基板。
- 前記第1配線の下面が前記ベース絶縁膜の下面と同一平面内にある請求項1から16のいずれかに記載の配線基板。
- 前記第1配線の下面が前記ベース絶縁膜の下面より上方に位置している請求項1から16のいずれかに記載の配線基板。
- 前記ベース絶縁膜が耐熱性樹脂からなる請求項1から18のいずれかに記載の配線基板。
- 前記ベース絶縁膜が繊維強化樹脂複合材料からなる請求項1から18のいずれかに記載の配線基板。
- 前記第2配線の一部を覆い、残部を露出させるように形成されたソルダーレジスト層を有する請求項1から20のいずれかに記載の配線基板。
- 前記ベース絶縁膜の上面側に設けられた絶縁層と、この絶縁層に形成されたヴィアホールと、このヴィアホール内の導電体を介して下方の配線と接続され当該絶縁層の上面に形成された上層配線とからなる配線構造層を1つ又は複数有する請求項1から20のいずれかに記載の配線基板。
- 前記上層配線の一部を覆い、残部を露出させるように形成されたソルダーレジスト層を有する請求項22に記載の配線基板。
- 請求項1から23のいずれかに記載の配線基板と、この配線基板に搭載された半導体チップを有する半導体装置。
- 前記半導体チップは、前記配線基板の下面側に搭載され前記第1配線と接続されている請求項24に記載の半導体装置。
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JP2005031100A JP4768994B2 (ja) | 2005-02-07 | 2005-02-07 | 配線基板および半導体装置 |
TW095103395A TWI299553B (en) | 2005-02-07 | 2006-01-27 | Interconnecting substrate and semiconductor device |
US11/341,445 US7745736B2 (en) | 2005-02-07 | 2006-01-30 | Interconnecting substrate and semiconductor device |
KR1020060011178A KR100688385B1 (ko) | 2005-02-07 | 2006-02-06 | 배선기판 및 반도체장치 |
CN2008101610659A CN101673724B (zh) | 2005-02-07 | 2006-02-07 | 互连衬底和半导体器件 |
CNB2006100068156A CN100438007C (zh) | 2005-02-07 | 2006-02-07 | 互连衬底和半导体器件 |
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JP4431123B2 (ja) * | 2006-05-22 | 2010-03-10 | 日立電線株式会社 | 電子装置用基板およびその製造方法、並びに電子装置およびその製造方法 |
JP5117692B2 (ja) * | 2006-07-14 | 2013-01-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2008071963A (ja) * | 2006-09-14 | 2008-03-27 | Denso Corp | 多層配線基板 |
DE102007034402B4 (de) | 2006-12-14 | 2014-06-18 | Advanpack Solutions Pte. Ltd. | Halbleiterpackung und Herstellungsverfahren dafür |
TWI320588B (en) * | 2006-12-27 | 2010-02-11 | Siliconware Precision Industries Co Ltd | Semiconductor device having conductive bumps and fabrication methodthereof |
JP4506767B2 (ja) * | 2007-02-28 | 2010-07-21 | カシオ計算機株式会社 | 半導体装置の製造方法 |
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