JP2011233854A - ウェハレベル半導体パッケージ及びその製造方法 - Google Patents
ウェハレベル半導体パッケージ及びその製造方法 Download PDFInfo
- Publication number
- JP2011233854A JP2011233854A JP2010137916A JP2010137916A JP2011233854A JP 2011233854 A JP2011233854 A JP 2011233854A JP 2010137916 A JP2010137916 A JP 2010137916A JP 2010137916 A JP2010137916 A JP 2010137916A JP 2011233854 A JP2011233854 A JP 2011233854A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- semiconductor
- molding part
- semiconductor package
- package according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73209—Bump and HDI connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06524—Electrical connections formed on device or on substrate, e.g. a deposited or grown layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
- H01L2225/06568—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking the devices decreasing in size, e.g. pyramidical stack
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Abstract
【解決手段】第1の半導体チップ110と第1の半導体チップに電気的に接続され積層された第2の半導体チップ210と導電性ポスト160があり、第1の半導体チップと第2の半導体チップとの間にはモールディング部300が形成され第1の半導体チップと第2の半導体チップを保護すると同時に両チップを一体化させている。
【選択図】図10
Description
本発明は、ウェハレベル工程による半導体パッケージ、特にシステムインパッケージに関するもので、反りコントロール障壁ラインを含む半導体パッケージ及びベースチップの外郭切断ラインに沿って段差を形成した半導体パッケージを提案する。
図7を参照すると、半導体ウェハにおいて、個別半導体チップ周辺にまたは複数のチップ周辺に反りコントロール障壁ラインが連続的に形成されている様子が見られる。
115:湾入部
150:バンプ
160:導電性ポスト
162:反りコントロール障壁ライン
210:第2半導体チップ
300:モールディング部
Claims (15)
- 第1再配置導電層が形成されている第1半導体チップと、
前記第1半導体チップよりサイズが小さく、該第1半導体チップの上部に実装される第2半導体チップと、
前記第2半導体チップ周辺に前記第1半導体チップの上に形成されたモールディング部と、
前記第1再配置導電層と電気的に接続して、前記モールディング部を貫通する導電性ポストと、
前記第1半導体チップ上面で前記第2半導体チップ外郭に配置された反りコントロール障壁ラインと、
前記モールディング部上面に形成されて前記導電性ポストと電気的に接続する第2再配置導電層と、
前記第2再配置導電層と電気的に接続する外部接続端子とを含み、
前記反りコントロール障壁ラインは、前記モールディング部を構成する物質と弾性係数が異なる物質で形成されることを特徴とする半導体パッケージ。 - 前記反りコントロール障壁ラインが、金属障壁であることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第1半導体チップの裏面に形成された反りコントロール障壁層をさらに含む、請求項1に記載の半導体パッケージ。
- 前記反りコントロール障壁ラインが、前記第1半導体チップの縁近くに配置されることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記反りコントロール障壁ラインが、連続的なリング形態に形成されることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記反りコントロール障壁ラインが、不連続的なリング形態に形成されることを特徴とする、請求項1に記載の半導体パッケージ。
- 第1再配置導電層が形成されている第1半導体チップと、
前記第1半導体チップよりサイズが小さく、該第1半導体チップの上部に実装される第2半導体チップと、
前記第2半導体チップ周辺に前記第1半導体チップの上に形成されたモールディング部と、
前記第1再配置導電層と電気的に接続して、前記モールディング部を貫通する導電性ポストと、
前記モールディング部上面に形成されて前記導電性ポストと電気的に接続する第2再配置導電層と、
前記第2再配置導電層と電気的に接続する外部接続端子とを含み、
前記第1半導体チップの縁で、該第1半導体チップと前記モールディング部の接触界面が、該第1半導体チップの他の部分より拡張されていることを特徴とする半導体パッケージ。 - 前記第1半導体チップの縁で該第1半導体チップと前記モールディング部の接触界面が、該第1半導体チップ表面より下に形成されていることを特徴とする、請求項7に記載の半導体パッケージ。
- 前記第1半導体チップと前記第2半導体チップは、上面が相互に対向してバンプで相互に電気的に接続されることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第2半導体チップの裏面が、前記第1半導体チップの上部にダイアタッチされることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第2半導体チップの一方の表面が外部に露出していることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第1半導体チップと前記第2半導体チップの間には、薄膜型受動素子が形成されていることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第1半導体チップの縁が、段差を有する構造に形成され、該段差を有する部位に前記モールディング部が完全に充填されていることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第1半導体チップの縁が、傾斜した構造に形成され、傾斜した部位に前記モールディング部が完全に充填されていることを特徴とする、請求項1に記載の半導体パッケージ。
- 前記第1半導体チップ上面に、前記第2半導体チップ外郭に配置されたリング形態の前記反りコントロール障壁ラインをさらに含む、請求項1に記載の半導体パッケージ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2010-0038710 | 2010-04-26 | ||
KR1020100038710A KR101088205B1 (ko) | 2010-04-26 | 2010-04-26 | 반도체 패키지 및 웨이퍼 레벨 반도체 패키지 제조 방법 |
KR1020100042703A KR20110123297A (ko) | 2010-05-07 | 2010-05-07 | 웨이퍼레벨 반도체 패키지 및 그 제조방법 |
KR10-2010-0042703 | 2010-05-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2011233854A true JP2011233854A (ja) | 2011-11-17 |
Family
ID=44815113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010137916A Pending JP2011233854A (ja) | 2010-04-26 | 2010-06-17 | ウェハレベル半導体パッケージ及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8421211B2 (ja) |
JP (1) | JP2011233854A (ja) |
TW (1) | TWI418013B (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8399300B2 (en) * | 2010-04-27 | 2013-03-19 | Stats Chippac, Ltd. | Semiconductor device and method of forming adjacent channel and DAM material around die attach area of substrate to control outward flow of underfill material |
US9269685B2 (en) * | 2011-05-09 | 2016-02-23 | Infineon Technologies Ag | Integrated circuit package and packaging methods |
US9425116B2 (en) | 2011-05-09 | 2016-08-23 | Infineon Technologies Ag | Integrated circuit package and a method for manufacturing an integrated circuit package |
US9105562B2 (en) | 2011-05-09 | 2015-08-11 | Infineon Technologies Ag | Integrated circuit package and packaging methods |
US9613917B2 (en) | 2012-03-30 | 2017-04-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package-on-package (PoP) device with integrated passive device in a via |
KR101867489B1 (ko) | 2012-06-20 | 2018-06-14 | 삼성전자주식회사 | 웨이퍼 레벨 패키지 형성방법 |
US9165887B2 (en) | 2012-09-10 | 2015-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with discrete blocks |
US9257412B2 (en) * | 2012-09-12 | 2016-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stress reduction apparatus |
US8975726B2 (en) * | 2012-10-11 | 2015-03-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | POP structures and methods of forming the same |
KR20140048468A (ko) * | 2012-10-15 | 2014-04-24 | 삼성전자주식회사 | 패키지 기판 및 이를 포함하는 반도체 패키지 |
US9391041B2 (en) | 2012-10-19 | 2016-07-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fan-out wafer level package structure |
JP5930070B2 (ja) * | 2012-12-28 | 2016-06-08 | 富士電機株式会社 | 半導体装置 |
US8765527B1 (en) | 2013-06-13 | 2014-07-01 | Freescale Semiconductor, Inc. | Semiconductor device with redistributed contacts |
US20150001741A1 (en) * | 2013-06-27 | 2015-01-01 | Stats Chippac, Ltd. | Semiconductor Device and Method of Forming an Interposer Including a Beveled Edge |
US9679839B2 (en) | 2013-10-30 | 2017-06-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chip on package structure and method |
US9373527B2 (en) | 2013-10-30 | 2016-06-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chip on package structure and method |
US20150340308A1 (en) * | 2014-05-21 | 2015-11-26 | Broadcom Corporation | Reconstituted interposer semiconductor package |
US9831214B2 (en) | 2014-06-18 | 2017-11-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device packages, packaging methods, and packaged semiconductor devices |
US10177032B2 (en) * | 2014-06-18 | 2019-01-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices, packaging devices, and methods of packaging semiconductor devices |
US9847317B2 (en) | 2014-07-08 | 2017-12-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of packaging semiconductor devices and packaged semiconductor devices |
US20160049383A1 (en) * | 2014-08-12 | 2016-02-18 | Invensas Corporation | Device and method for an integrated ultra-high-density device |
US9443780B2 (en) | 2014-09-05 | 2016-09-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device having recessed edges and method of manufacture |
TWI576025B (zh) * | 2014-10-29 | 2017-03-21 | 矽品精密工業股份有限公司 | 基板結構及其製法 |
US20160351462A1 (en) * | 2015-05-25 | 2016-12-01 | Inotera Memories, Inc. | Fan-out wafer level package and fabrication method thereof |
KR102327142B1 (ko) | 2015-06-11 | 2021-11-16 | 삼성전자주식회사 | 웨이퍼 레벨 패키지 |
US20170098628A1 (en) * | 2015-10-05 | 2017-04-06 | Mediatek Inc. | Semiconductor package structure and method for forming the same |
WO2017107176A1 (en) | 2015-12-25 | 2017-06-29 | Intel Corporation | Conductive wire through-mold connection apparatus and method |
TWI644408B (zh) * | 2016-12-05 | 2018-12-11 | 美商美光科技公司 | 中介層及半導體封裝體 |
US10978408B2 (en) * | 2018-06-07 | 2021-04-13 | Powertech Technology Inc. | Semiconductor package and manufacturing method thereof |
US10861782B2 (en) | 2018-08-21 | 2020-12-08 | Micron Technology, Inc. | Redistribution layers including reinforcement structures and related semiconductor device packages, systems and methods |
US11600590B2 (en) | 2019-03-22 | 2023-03-07 | Advanced Semiconductor Engineering, Inc. | Semiconductor device and semiconductor package |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000243729A (ja) * | 1999-02-24 | 2000-09-08 | Texas Instr Japan Ltd | 半導体装置の製造方法 |
JP2001257310A (ja) * | 2000-03-09 | 2001-09-21 | Oki Electric Ind Co Ltd | 半導体装置およびその製造方法およびその試験方法 |
JP2004207267A (ja) * | 2002-12-20 | 2004-07-22 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2005044989A (ja) * | 2003-07-22 | 2005-02-17 | Sony Corp | 半導体パッケージ及びその製造方法 |
JP2005216941A (ja) * | 2004-01-27 | 2005-08-11 | New Japan Radio Co Ltd | チップサイズ半導体装置およびその製造方法 |
WO2005124857A1 (ja) * | 2004-06-16 | 2005-12-29 | Rohm Co., Ltd. | 半導体装置 |
JP2007184438A (ja) * | 2006-01-10 | 2007-07-19 | Casio Comput Co Ltd | 半導体装置 |
JP2009194022A (ja) * | 2008-02-12 | 2009-08-27 | Nec Corp | チップサイズパッケージ及び半導体装置 |
JP2010073949A (ja) * | 2008-09-19 | 2010-04-02 | Toshiba Corp | 半導体装置及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005065207A2 (en) * | 2003-12-30 | 2005-07-21 | Tessera, Inc. | Microelectronic packages and methods therefor |
JP4768994B2 (ja) * | 2005-02-07 | 2011-09-07 | ルネサスエレクトロニクス株式会社 | 配線基板および半導体装置 |
US8101868B2 (en) * | 2005-10-14 | 2012-01-24 | Ibiden Co., Ltd. | Multilayered printed circuit board and method for manufacturing the same |
US20080136004A1 (en) * | 2006-12-08 | 2008-06-12 | Advanced Chip Engineering Technology Inc. | Multi-chip package structure and method of forming the same |
-
2010
- 2010-06-17 JP JP2010137916A patent/JP2011233854A/ja active Pending
- 2010-06-27 US US12/824,190 patent/US8421211B2/en active Active
- 2010-06-29 TW TW099121297A patent/TWI418013B/zh not_active IP Right Cessation
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000243729A (ja) * | 1999-02-24 | 2000-09-08 | Texas Instr Japan Ltd | 半導体装置の製造方法 |
JP2001257310A (ja) * | 2000-03-09 | 2001-09-21 | Oki Electric Ind Co Ltd | 半導体装置およびその製造方法およびその試験方法 |
JP2004207267A (ja) * | 2002-12-20 | 2004-07-22 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2005044989A (ja) * | 2003-07-22 | 2005-02-17 | Sony Corp | 半導体パッケージ及びその製造方法 |
JP2005216941A (ja) * | 2004-01-27 | 2005-08-11 | New Japan Radio Co Ltd | チップサイズ半導体装置およびその製造方法 |
WO2005124857A1 (ja) * | 2004-06-16 | 2005-12-29 | Rohm Co., Ltd. | 半導体装置 |
JP2007184438A (ja) * | 2006-01-10 | 2007-07-19 | Casio Comput Co Ltd | 半導体装置 |
JP2009194022A (ja) * | 2008-02-12 | 2009-08-27 | Nec Corp | チップサイズパッケージ及び半導体装置 |
JP2010073949A (ja) * | 2008-09-19 | 2010-04-02 | Toshiba Corp | 半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201138056A (en) | 2011-11-01 |
US20110260336A1 (en) | 2011-10-27 |
US8421211B2 (en) | 2013-04-16 |
TWI418013B (zh) | 2013-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2011233854A (ja) | ウェハレベル半導体パッケージ及びその製造方法 | |
US8592952B2 (en) | Semiconductor chip and semiconductor package with stack chip structure | |
US6818998B2 (en) | Stacked chip package having upper chip provided with trenches and method of manufacturing the same | |
KR100780692B1 (ko) | 칩 스택 패키지 | |
JP3574450B1 (ja) | 半導体装置、及び半導体装置の製造方法 | |
KR20110123297A (ko) | 웨이퍼레벨 반도체 패키지 및 그 제조방법 | |
TWI430425B (zh) | 採用凸塊技術之積體電路封裝件系統 | |
US20100140801A1 (en) | Device | |
KR20150073472A (ko) | 접속 조인트부의 크랙이 억제된 칩 내장형 패키지 | |
JP2003086762A (ja) | 半導体装置及びその製造方法 | |
KR20190099731A (ko) | 보강용 탑 다이를 포함하는 반도체 패키지 제조 방법 | |
US20220384376A1 (en) | Package structure of semiconductor device with improved bonding between the substrates | |
KR101014577B1 (ko) | 반도체 장치, 및 반도체 장치를 제조하는 방법 | |
JP5557439B2 (ja) | 半導体装置及びその製造方法 | |
TWI681471B (zh) | 半導體裝置及其製造方法 | |
US7595268B2 (en) | Semiconductor package having re-distribution lines for supplying power and a method for manufacturing the same | |
US11552054B2 (en) | Package structure and method of manufacturing the same | |
TW201642428A (zh) | 矽中介層與其製作方法 | |
CN106611713B (zh) | 半导体封装体及其制作方法 | |
US20120261820A1 (en) | Assembly of stacked devices with semiconductor components | |
JP5151907B2 (ja) | 半導体装置及びその製造方法 | |
US8975745B2 (en) | Packaged microelectronic devices recessed in support member cavities, and associated methods | |
KR101088205B1 (ko) | 반도체 패키지 및 웨이퍼 레벨 반도체 패키지 제조 방법 | |
US10249573B2 (en) | Semiconductor device package with a stress relax pattern | |
KR20100096914A (ko) | 반도체 패키지 및 이를 이용한 스택 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120511 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120515 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120702 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121212 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130108 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130521 |