JP2010157741A - スカロップ状側壁を有するシリコン貫通ビア - Google Patents
スカロップ状側壁を有するシリコン貫通ビア Download PDFInfo
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- JP2010157741A JP2010157741A JP2010000347A JP2010000347A JP2010157741A JP 2010157741 A JP2010157741 A JP 2010157741A JP 2010000347 A JP2010000347 A JP 2010000347A JP 2010000347 A JP2010000347 A JP 2010000347A JP 2010157741 A JP2010157741 A JP 2010157741A
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 33
- 239000010703 silicon Substances 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 86
- 239000004065 semiconductor Substances 0.000 claims abstract description 58
- 235000020637 scallop Nutrition 0.000 claims abstract description 7
- 241000237509 Patinopecten sp. Species 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 74
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- 238000005530 etching Methods 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000004020 conductor Substances 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 2
- 241000237503 Pectinidae Species 0.000 claims 1
- 239000010410 layer Substances 0.000 description 90
- 239000000463 material Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 238000012545 processing Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000009623 Bosch process Methods 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- PMTRSEDNJGMXLN-UHFFFAOYSA-N titanium zirconium Chemical compound [Ti].[Zr] PMTRSEDNJGMXLN-UHFFFAOYSA-N 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000008393 encapsulating agent Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- -1 tungsten nitride Chemical class 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- HZEIHKAVLOJHDG-UHFFFAOYSA-N boranylidynecobalt Chemical compound [Co]#B HZEIHKAVLOJHDG-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical compound [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】 基板、前記基板を覆う、1つ以上の誘電体層、及び前記基板を穿通して延伸し、スカロップ状の表面の側壁を有し、前記側壁に沿ったスカロップは約0.01μmより大きい深さを有するシリコン貫通ビア(TSV)を含む半導体デバイス。
【選択図】 図8
Description
[実施例]
104 パターン化マスク
106 第1凹所
208 保護ライナ
302 第2凹所
410、710、1010 シリコン貫通ビア(TSV)
412 バリア層
414 導電材料
500 ウエハ
510 半導体基板
512 電子回路構成
514 誘電体層
610 開口
712 バリア層
810 金属層
910 開口
1012 バリア層
θ 角度
Claims (15)
- 基板、
前記基板を覆う、1つ以上の誘電体層、及び
前記基板を穿通して延伸し、スカロップ状の表面の側壁を有し、前記側壁に沿ったスカロップは約0.01μmより大きい深さを有するシリコン貫通ビア(TSV)を含む半導体デバイス。 - 前記基板のデバイス面から前記基板の背面に延伸するにつれ、前記TSVは、狭くなる請求項1に記載の半導体デバイス。
- 前記基板の背面から前記基板のデバイス面に延伸するにつれ、前記TSVは、狭くなる請求項1に記載の半導体デバイス。
- 前記TSVは、前記基板上に形成された電子回路構成と直接コンタクトする請求項3に記載の半導体デバイス。
- 前記TSVは、金属層と直接コンタクトを形成する請求項3に記載の半導体デバイス。
- 前記TSVは、前記基板と1つ以上の誘電体層間のインターフェースで停止する請求項3に記載の半導体デバイス。
- 前記側壁は、前記基板の表面法線に対して約5度より大きい角度で傾斜する請求項1に記載の半導体デバイス。
- 半導体デバイスを形成する方法であって、前記方法は、
基板を提供するステップ、
前記基板上に電子回路構成を形成するステップ、
前記基板上に1つ以上の誘電体層を形成するステップ、
1つ以上の金属線を1つ以上の誘電体層に形成するステップ、及び
前記基板の第1面から前記基板の第2面に延伸するステップであって、スカロップ状の表面をした側壁を有し、この形成ステップは、等方性エッチングを繰り返し実施して凹所を形成し、前記凹所の側壁に沿って保護ライナを形成することで、少なくとも部分的に実施され、前記スカロップ状の表面は、約0.01μmより大きい深さを有するTSVを形成するステップを含む方法。 - 前記TSVを形成するステップは、
前記保護ライナを取り除くステップ、
前記側壁に沿ってバリア層を形成するステップ、及び
前記凹所を導電材料で充填するステップを更に含む請求項8に記載の方法。 - 前記保護ライナは高分子を含む請求項8に記載の方法。
- 前記第1面は、前記基板の回路面である請求項8に記載の方法。
- 前記TSVの形成は、1つ以上の誘電体層を穿通してエッチングし、前記基板を部分的に穿通してエッチングすることで実施される請求項8に記載の方法。
- 前記基板の背面を薄膜化し、前記TSVを前記基板の背面から突出させるステップを更に含む請求項8に記載の方法。
- 前記TSVの形成は、ゲート電極、金属線、または金属線がエッチング停止層の役割を果たすエッチングプロセスを用いて実施される請求項8に記載の方法。
- 基板、
前記基板を覆う1つ以上の誘電体層、及び
前記基板を穿通して延伸し、前記TSVが前記基板の第1面から前記基板の第2面に延伸した時、前記TSVは、複数のスカロップ状領域を有し、各スカロップ状領域のTSVの幅が前のスカロップ状領域のTSVの幅より小さくなるシリコン貫通ビア(TSV)を含む半導体デバイス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/348,650 US8049327B2 (en) | 2009-01-05 | 2009-01-05 | Through-silicon via with scalloped sidewalls |
Publications (1)
Publication Number | Publication Date |
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JP2010157741A true JP2010157741A (ja) | 2010-07-15 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010000347A Pending JP2010157741A (ja) | 2009-01-05 | 2010-01-05 | スカロップ状側壁を有するシリコン貫通ビア |
Country Status (5)
Country | Link |
---|---|
US (1) | US8049327B2 (ja) |
JP (1) | JP2010157741A (ja) |
KR (1) | KR101117444B1 (ja) |
CN (1) | CN101771020B (ja) |
TW (1) | TWI406381B (ja) |
Cited By (8)
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JP2012084871A (ja) * | 2010-09-15 | 2012-04-26 | Elpida Memory Inc | 半導体装置、およびその製造方法、ならびにデータ処理装置 |
JP2012146800A (ja) * | 2011-01-12 | 2012-08-02 | Canon Inc | 半導体装置及び半導体装置の製造方法 |
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JP2017112187A (ja) * | 2015-12-15 | 2017-06-22 | キヤノン株式会社 | 貫通配線を有する基板に素子を設けたデバイス及びその製造方法 |
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TWI406381B (zh) | 2013-08-21 |
KR101117444B1 (ko) | 2012-03-13 |
CN101771020A (zh) | 2010-07-07 |
KR20100081271A (ko) | 2010-07-14 |
US8049327B2 (en) | 2011-11-01 |
TW201027703A (en) | 2010-07-16 |
US20100171223A1 (en) | 2010-07-08 |
CN101771020B (zh) | 2012-05-23 |
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