JP2009526399A - プラズマに面する壁の水蒸気不動態化 - Google Patents
プラズマに面する壁の水蒸気不動態化 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
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- Physical Vapour Deposition (AREA)
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Abstract
【選択図】 図2
Description
Claims (22)
- プラズマ処理チャンバ内で基板を処理するための不動態化方法であって:
該処理チャンバに不動態化ガスを、励起されていない状態で噴射するステップであって、該不動態化ガスが、少なくとも該処理チャンバの壁上に著しく化学吸収される程度の水蒸気である、前記ステップと;
その後、該処理チャンバ内の該基板を処理ガスのプラズマ内で処理するステップと;
を含む、前記方法。 - 該不動態化ガスが、水蒸気である、請求項1に記載の不動態化方法。
- 該不動態化ガスが、CH4、CO、及びCO2からなる群より選ばれる、請求項1に記載の不動態化方法。
- 該プラズマが、還元プラズマである、請求項1〜3のいずれか1項に記載の不動態化方法。
- 該処理ガスが、水素を含有する、請求項1〜3のいずれか1項に記載の不動態化方法。
- 該処理ガスが、(1)水素及び(2)水素とヘリウムからなる群より選ばれる、請求項1〜3のいずれか1項に記載の不動態化方法。
- 該処理チャンバが、該処理チャンバの内部に接続された出力管を持つ遠隔プラズマ源を含み、該水蒸気と処理ガスが、該遠隔プラズマ源に噴射され、ここで、該遠隔プラズマ源が、該噴射ステップでほとんど活性化されず、該処理ステップで活性化されて、該処理ガスを該プラズマに励起させる、請求項6に記載の不動態化方法。
- 前記処理チャンバが、更に、該遠隔プラズマ源と該不動態化ガスと該処理ガスが流れる該チャンバとの間に配置されたイオンフィルタを含む、請求項6に記載の不動態化方法。
- 該処理チャンバが、該処理チャンバの内部に接続された出力を持つ遠隔プラズマ源を含み、ここで、該水蒸気と処理ガスが該リモートプラズマ源に噴射され、該遠隔プラズマ源が該噴射ステップでほとんど活性化されず、該処理ステップで活性化されて、該処理ガスを該プラズマに励起させる、請求項2に記載の不動態化方法。
- 該処理ステップが、誘電体層を洗浄する、請求項1〜3のいずれか1項に記載の不動態化方法。
- 該処理ステップが、該誘電体層から残渣を除去する、請求項10に記載の不動態化方法。
- 該誘電体層が、多孔性であり、誘電率3.9未満を持つ、請求項10に記載の不動態化方法。
- 該噴射ステップが終わった後、該プラズマが励起される前に、該処理チャンバをポンプで排気して、該チャンバから水蒸気を除去するステップを更に含む、請求項1〜3のいずれか1項に記載の不動態化方法。
- 複数の連続処理基板のそれぞれに行われるステップを含む、プラズマ処理方法であって:
プラズマ処理チャンバに基板を挿入するステップであって、該基板を支持するためのペデスタルと、該ペデスタルに対向したガスシャワーヘッドと、該シャワーヘッドの後ろのマニホールドにその出力を接続している供給管を持つ遠隔プラズマ源と、を含む、前記ステップと;
水蒸気を該遠隔プラズマ源に通過させるが該水蒸気を効果的なプラズマに励起させないステップと;
その後、還元する処理ガスを該遠隔プラズマ源に通過させるとともにプラズマに励起させるステップと;
その後、該プラズマを消滅させるとともに該基板を該プラズマ処理チャンバから取り出すステップと;
を含む、前記方法。 - 該還元する処理ガスが、水素を含み、ほとんど水蒸気も酸素も含まない、請求項14に記載の方法。
- 該基板が、それを通ってエッチングされたホールを持つ誘電体層を含む、請求項14に記載の方法。
- 該誘電体層が、3.9未満の誘電率を持つ、請求項16に記載の方法。
- 不動態化と処理の方法であって:
励起されていない水蒸気を処理すべき基板を含有する真空処理チャンバに噴射するステップと;
その後、該真空処理チャンバをポンプで排気して、そこから該水蒸気のかなりの量を除去するステップと;
その後、処理ガスを、該真空処理チャンバ内で該基板を処理するためのプラズマに励起させるステップと;
を含む、前記方法。 - 該基板が、3.9未満の誘電率を持つ誘電体層を含有し、該処理ガスが、水素を含み、水と酸素をほとんど含まず、水素イオンが、該基板の上流で該プラズマからろ過される、請求項18記載の方法。
- 該水蒸気と該処理ガスを遠隔プラズマ源に流し、その出力を該プラズマ処理チャンバに分配し、ここで、該遠隔プラズマ源が、該噴射ステップでほとんど活性化されず、該励起ステップで活性化される、請求項18又は19に記載の方法。
- 下記ステップの順序を繰り返す、水素プラズマ源を作動させる方法であって、
水蒸気をプラズマ発生器に通過させ、該発生器が活性化されない、第一ステップと;
水素ガスを該プラズマ発生器に通過させ、該発生器が活性化される、第二ステップと;
を含む、前記方法。 - 該第一ステップの時間が、該第二ステップの時間よりかなり短い、請求項21に記載の方法。
Applications Claiming Priority (3)
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US11/351,676 US7695567B2 (en) | 2006-02-10 | 2006-02-10 | Water vapor passivation of a wall facing a plasma |
US11/351,676 | 2006-02-10 | ||
PCT/US2007/002546 WO2007094961A2 (en) | 2006-02-10 | 2007-01-30 | Water vapor passivation of a wall facing a plasma |
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JP2009526399A true JP2009526399A (ja) | 2009-07-16 |
JP5260318B2 JP5260318B2 (ja) | 2013-08-14 |
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JP (1) | JP5260318B2 (ja) |
KR (1) | KR101364440B1 (ja) |
CN (1) | CN101379213B (ja) |
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WO (1) | WO2007094961A2 (ja) |
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JP2005236053A (ja) * | 2004-02-20 | 2005-09-02 | Matsushita Electric Ind Co Ltd | プラズマ処理方法およびプラズマ処理装置 |
JP2005260060A (ja) * | 2004-03-12 | 2005-09-22 | Semiconductor Leading Edge Technologies Inc | レジスト除去装置及びレジスト除去方法、並びにそれを用いて製造した半導体装置 |
JP2007173337A (ja) * | 2005-12-20 | 2007-07-05 | Ulvac Japan Ltd | 真空処理槽、真空処理装置及び真空処理方法 |
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WO2020264054A1 (en) * | 2019-06-26 | 2020-12-30 | Lam Research Corporation | Chamber-accumulation extension via in-situ passivation |
Also Published As
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JP5260318B2 (ja) | 2013-08-14 |
US20070190266A1 (en) | 2007-08-16 |
US7695567B2 (en) | 2010-04-13 |
KR20080100220A (ko) | 2008-11-14 |
CN101379213B (zh) | 2013-03-20 |
TW200744765A (en) | 2007-12-16 |
KR101364440B1 (ko) | 2014-02-17 |
WO2007094961A2 (en) | 2007-08-23 |
CN101379213A (zh) | 2009-03-04 |
WO2007094961A3 (en) | 2008-01-17 |
TWI342241B (en) | 2011-05-21 |
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