JP2008532263A - 基板をウェハ・チャックに保持する方法 - Google Patents
基板をウェハ・チャックに保持する方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 117
- 238000000034 method Methods 0.000 title claims abstract description 36
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- 238000003825 pressing Methods 0.000 description 8
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- 238000004519 manufacturing process Methods 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
- Y10T29/4978—Assisting assembly or disassembly
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49998—Work holding
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manipulator (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Micromachines (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
米国政府が本発明の一括払いライセンス、および米国国防総省国防高等研究事業局(DARPA)によって与えられるN66001−01−1−8964とN66001−02−C−8011の条件で提供されるような妥当な条件で他者にライセンスを与えるように特許所有者に要求する権利を限られた状況の中で有する。
Claims (20)
- 基板をウェハ・チャックに保持する方法であって、
前記基板の一部分を前記ウェハ・チャックに向けて加速させるステップと、前記ウェハ・チャックへ向かう前記基板の移動の速度を生成するステップと、
前記基板が前記ウェハ・チャックに到達する前に前記速度を低下させるステップと
を含む方法。 - 前記加速させるステップが、前記基板の一部分を前記チャックから分離させることによって前記基板内にポテンシャル・エネルギーを保存するステップと、前記部分を前記ウェハ・チャックに向けて移動させることによって前記ポテンシャル・エネルギーを運動エネルギーへと変換するステップをさらに含む請求項1に記載の方法。
- 前記加速させるステップが、分離強制力を加え、前記分離強制力を終結させることによって前記基板の一部分と前記ウェハ・チャックの間の距離を増大させるステップをさらに含む請求項1に記載の方法。
- 前記速度を低下させるステップが、前記部分と前記ウェハ・チャックの間に規定される容積に正の圧力を加えるステップをさらに含む請求項1に記載の方法。
- 前記加速させるステップが、前記基板に分離強制力を加え、前記基板の一部分と前記ウェハ・チャックの間に形成される容積に正の圧力を加え、前記分離強制力を終結させることによって前記部分と前記ウェハ・チャックの間の距離を増大させるステップをさらに含み、前記低下させるステップが前記容積内の前記圧力を下げるステップをさらに含む請求項1に記載の方法。
- 前記加速させるステップが、前記基板に分離強制力を加え、前記基板の一部分と前記ウェハ・チャックの間に形成される容積に正の圧力を加え、前記分離強制力を終結させることによって前記部分と前記ウェハ・チャックの間の距離を増大させるステップをさらに含み、前記低下させるステップが前記容積内の前記圧力を上げるステップをさらに含む請求項1に記載の方法。
- 前記低下させるステップが、前記部分とこれに重なり合う前記ウェハ・チャックの間に形成される容積の正の圧力を増大させるステップをさらに含む請求項1に記載の方法。
- 基板をウェハ・チャックに保持する方法であって、
前記基板内のポテンシャル・エネルギーを保存するステップと、
前記基板の一部分を前記チャックに向けて移動させることによって前記ポテンシャル・エネルギーを運動エネルギーへと変換するステップと、
前記基板の前記部分が前記ウェハ・チャックに接触する前に前記運動エネルギーを低下させるステップと
を含む方法。 - 前記低下させるステップが、前記基板が前記ウェハ・チャックに近づいている間に前記基板を減速させるステップをさらに含む請求項8に記載の方法。
- 前記保存するステップが、前記部分とこれに重なり合う前記ウェハ・チャックの領域の間の距離を増大させる一方で、前記基板の残りの領域と前記ウェハ・チャックの間の実質的に一定の距離を維持するステップをさらに含む請求項8に記載の方法。
- 前記保存するステップが、前記部分と前記ウェハ・チャックの間に形成される容積に正の圧力を生成するステップと、前記基板を分離強制力に晒すことによって前記基板の一部分を分離させるステップとをさらに含む請求項8に記載の方法。
- 前記移動させることが前記分離強制力を終結させることをさらに含む請求項11に記載の方法。
- 前記低下させるステップが前記容積内の前記圧力を上げるステップをさらに含む請求項12に記載の方法。
- 前記保存するステップが、前記基板を分離強制力に晒すこと、および前記基板と前記ウェハ・チャックの間に真空圧力を加えることによって前記基板の一部分を分離させることを含み、前記領域に加えられる、変形真空圧力である前記真空圧力が、前記基板の残りの領域に加えられる真空圧力より低い請求項8に記載の方法。
- 移動させることが前記分離強制力を終結させることをさらに含み、前記低下させるステップが前記変形真空圧力を終結させてその代わりに正の圧力を加えることをさらに含む請求項14に記載の方法。
- 基板をウェハ・チャックに保持する方法であって、
前記基板の一部分を前記ウェハ・チャックから分離させる一方で、前記基板の残りの領域と前記ウェハ・チャックの間の実質的に一定の距離を維持させることによって前記基板内のポテンシャル・エネルギーを保存するステップと、
前記基板の部分を前記ウェハ・チャックに向けて移動させることによって前記ポテンシャル・エネルギーを運動エネルギーへと変換するステップと、
前記基板の前記部分が前記チャックに接触する前に前記部分の速度を低速にすることによって前記運動エネルギーを低下させるステップを含む方法。 - 前記保存するステップが、前記部分とこれに重なり合う前記ウェハ・チャックの領域の間の距離を増大させるステップをさらに含む請求項16に記載の方法。
- 前記保存するステップが前記部分を分離強制力に晒すステップをさらに含み、前記低下させるステップが前記分離強制力を終結させるステップをさらに含む請求項16に記載の方法。
- 前記低下させるステップが前記部分と前記ウェハ・チャックの間に形成される容積内の圧力を上げるステップをさらに含む請求項18に記載の方法。
- 前記保存するステップが前記基板と前記ウェハ・チャックの間に真空圧力を加えるステップをさらに含み、前記領域に関連する範囲に加えられた、変形真空圧力である真空圧力が、前記基板の残りの領域に適用される真空圧力より低く、前記低下させるステップが前記変形真空圧力を終結させて前記変形真空圧力の代わりに正の圧力を加えるステップをさらに含む請求項18に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/047,499 US7636999B2 (en) | 2005-01-31 | 2005-01-31 | Method of retaining a substrate to a wafer chuck |
US11/047,428 US7798801B2 (en) | 2005-01-31 | 2005-01-31 | Chucking system for nano-manufacturing |
US11/108,208 US7635445B2 (en) | 2005-01-31 | 2005-04-18 | Method of separating a mold from a solidified layer disposed on a substrate |
PCT/US2006/001151 WO2006083519A2 (en) | 2005-01-31 | 2006-01-12 | Method of retaining a substrate to a wafer chuck |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008532263A true JP2008532263A (ja) | 2008-08-14 |
JP2008532263A5 JP2008532263A5 (ja) | 2009-02-26 |
Family
ID=39730623
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007553121A Active JP4648408B2 (ja) | 2005-01-31 | 2006-01-12 | ナノ加工のためのチャッキング・システム |
JP2007553122A Pending JP2008532263A (ja) | 2005-01-31 | 2006-01-12 | 基板をウェハ・チャックに保持する方法 |
JP2007553123A Active JP5247153B2 (ja) | 2005-01-31 | 2006-01-12 | 基板上に配置された固化層からモールドを分離させる方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007553121A Active JP4648408B2 (ja) | 2005-01-31 | 2006-01-12 | ナノ加工のためのチャッキング・システム |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007553123A Active JP5247153B2 (ja) | 2005-01-31 | 2006-01-12 | 基板上に配置された固化層からモールドを分離させる方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7636999B2 (ja) |
JP (3) | JP4648408B2 (ja) |
SG (2) | SG158917A1 (ja) |
TW (1) | TWI327351B (ja) |
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JP2010219274A (ja) * | 2009-03-17 | 2010-09-30 | Dainippon Printing Co Ltd | 基板固定装置 |
US9272462B2 (en) | 2010-03-29 | 2016-03-01 | Fujifilm Corporation | Minute convexo-concave pattern forming method and forming device, and transfer substrate producing method and transfer substrate |
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- 2005-01-31 US US11/047,499 patent/US7636999B2/en active Active
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- 2006-01-12 JP JP2007553121A patent/JP4648408B2/ja active Active
- 2006-01-12 JP JP2007553122A patent/JP2008532263A/ja active Pending
- 2006-01-12 JP JP2007553123A patent/JP5247153B2/ja active Active
- 2006-01-12 SG SG201000531-2A patent/SG158917A1/en unknown
- 2006-01-12 SG SG201000535-3A patent/SG159498A1/en unknown
- 2006-01-19 TW TW095102093A patent/TWI327351B/zh not_active IP Right Cessation
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JP2007305895A (ja) * | 2006-05-15 | 2007-11-22 | Apic Yamada Corp | インプリント方法およびナノ・インプリント装置 |
JP2010219274A (ja) * | 2009-03-17 | 2010-09-30 | Dainippon Printing Co Ltd | 基板固定装置 |
US9272462B2 (en) | 2010-03-29 | 2016-03-01 | Fujifilm Corporation | Minute convexo-concave pattern forming method and forming device, and transfer substrate producing method and transfer substrate |
Also Published As
Publication number | Publication date |
---|---|
JP4648408B2 (ja) | 2011-03-09 |
TWI327351B (en) | 2010-07-11 |
JP2008537513A (ja) | 2008-09-18 |
US7636999B2 (en) | 2009-12-29 |
US20060172553A1 (en) | 2006-08-03 |
JP2008529826A (ja) | 2008-08-07 |
SG158917A1 (en) | 2010-02-26 |
SG159498A1 (en) | 2010-03-30 |
TW200636901A (en) | 2006-10-16 |
JP5247153B2 (ja) | 2013-07-24 |
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