JP2008311643A - アンバイポーラ物質を利用した電界効果トランジスタ及び論理回路 - Google Patents
アンバイポーラ物質を利用した電界効果トランジスタ及び論理回路 Download PDFInfo
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- 230000005669 field effect Effects 0.000 title claims abstract description 51
- 239000000463 material Substances 0.000 title abstract description 27
- 239000010410 layer Substances 0.000 claims description 69
- 239000000758 substrate Substances 0.000 claims description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910021389 graphene Inorganic materials 0.000 claims description 7
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- OSOKRZIXBNTTJX-UHFFFAOYSA-N [O].[Ca].[Cu].[Sr].[Bi] Chemical compound [O].[Ca].[Cu].[Sr].[Bi] OSOKRZIXBNTTJX-UHFFFAOYSA-N 0.000 claims description 4
- CXRFFSKFQFGBOT-UHFFFAOYSA-N bis(selanylidene)niobium Chemical compound [Se]=[Nb]=[Se] CXRFFSKFQFGBOT-UHFFFAOYSA-N 0.000 claims description 4
- 239000002356 single layer Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000037237 body shape Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
【解決手段】ソース領域、ドレイン領域及びその間のチャンネル領域を備え、ソース領域、ドレイン領域及びチャンネル領域が一体型で形成されたアンバイポーラ層と、チャンネル領域に形成されたゲート電極と、アンバイポーラ層からゲート電極を離隔させる絶縁層と、を備え、ソース領域からドレイン領域への第1方向と交差する第2方向において、ソース領域及びドレイン領域の幅がチャンネル領域の幅よりさらに広く形成される電界効果トランジスタである。
【選択図】図2
Description
110 基板
112 絶縁層
120 アンバイポーラ層
121 ソース領域
122 ドレイン領域
123 チャンネル領域
130 ゲート電極
132 絶縁層
Claims (13)
- ソース領域、ドレイン領域及びその間のチャンネル領域を備え、前記ソース領域、前記ドレイン領域及び前記チャンネル領域が一体型で形成されたアンバイポーラ層と、
前記チャンネル領域に形成されたゲート電極と、
前記アンバイポーラ層から前記ゲート電極を離隔させる絶縁層と、を備え、
前記ソース領域から前記ドレイン領域への第1方向と交差する第2方向において、前記ソース領域及びドレイン領域の幅が前記チャンネル領域の幅よりも広いことを特徴とする電界効果トランジスタ。 - 前記ゲート電極が前記ソース領域側に形成され、前記電界効果トランジスタがn型であることを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記ゲート電極が前記ドレイン領域側に形成され、前記電界効果トランジスタがp型であることを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記チャンネル領域の幅が、5nmないし100nmであることを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記アンバイポーラ層が、一つの層で形成されたことを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記アンバイポーラ層が、窒化ホウ素、テルル化カドミウム、セレン化ニオブからなるグループから選択されたいずれか一つで形成されたことを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記アンバイポーラ層が、ビスマスストロンチウムカルシウム銅酸化物の1/2層で形成されたことを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記アンバイポーラ層が、1層ないし9層のグラフェンで形成されたことを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記ゲート電極が、前記チャンネル層の上方で前記ソース領域側及び前記ドレイン領域側にそれぞれ形成された第1ゲート電極及び第2ゲート電極を備え、前記第1ゲート電極または前記第2ゲート電極に電圧が選択的に印加されるときにn型またはp型となることを特徴とする請求項1に記載の電界効果トランジスタ。
- 前記電界効果トランジスタのための基板をさらに備え、
前記絶縁層が、前記基板上に位置し、前記アンバイポーラ層が、前記絶縁層上に位置することを特徴とする請求項1に記載の電界効果トランジスタ。 - 前記電界効果トランジスタのための基板をさらに備え、
前記ゲート電極が、前記基板と前記絶縁層との間に形成されたことを特徴とする請求項1に記載の電界効果トランジスタ。 - 前記第2方向が、前記第1方向に対して直交することを特徴とする請求項1に記載の電界効果トランジスタ。
- 少なくとも一つのp型トランジスタと少なくとも一つのn型トランジスタとを備える論理回路において、
前記p型トランジスタ及び前記n型トランジスタが、それぞれ請求項1ないし12のいずれか一項に記載の電界効果トランジスタであることを特徴とする論理回路。
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KR10-2007-0058009 | 2007-06-13 | ||
KR1020070058009A KR101443215B1 (ko) | 2007-06-13 | 2007-06-13 | 앰비폴라 물질을 이용한 전계효과 트랜지스터 및 논리회로 |
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Cited By (3)
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JP2011216714A (ja) * | 2010-03-31 | 2011-10-27 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2013012611A (ja) * | 2011-06-29 | 2013-01-17 | Fujitsu Ltd | 半導体デバイス及びその製造方法 |
JP2017112386A (ja) * | 2009-10-16 | 2017-06-22 | 三星電子株式会社Samsung Electronics Co.,Ltd. | グラフェン素子及びその製造方法 |
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JP5124373B2 (ja) * | 2008-07-11 | 2013-01-23 | 株式会社日立製作所 | 電子デバイス,受光・発光デバイス、それを用いた電子集積回路および光集積回路 |
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US8274098B2 (en) | 2012-09-25 |
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