JP6300214B2 - トンネル電界効果トランジスタによる集積回路及びその製造方法 - Google Patents
トンネル電界効果トランジスタによる集積回路及びその製造方法 Download PDFInfo
- Publication number
- JP6300214B2 JP6300214B2 JP2016507421A JP2016507421A JP6300214B2 JP 6300214 B2 JP6300214 B2 JP 6300214B2 JP 2016507421 A JP2016507421 A JP 2016507421A JP 2016507421 A JP2016507421 A JP 2016507421A JP 6300214 B2 JP6300214 B2 JP 6300214B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- type region
- type
- semiconductor layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000002353 field-effect transistor method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims description 59
- 230000005669 field effect Effects 0.000 claims description 49
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 31
- 229910045601 alloy Inorganic materials 0.000 claims description 25
- 239000000956 alloy Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 23
- 238000005468 ion implantation Methods 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 2
- 238000002513 implantation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 33
- 229910021341 titanium silicide Inorganic materials 0.000 description 19
- 239000000758 substrate Substances 0.000 description 13
- 239000010936 titanium Substances 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000003071 parasitic effect Effects 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
Description
<1> 第1のP型領域及び第1のN型領域の一方がソース領域、他方がドレイン領域として動作する第1のトンネル電界効果トランジスタと、第2のP型領域及び第2のN型領域の一方がソース領域、他方がドレイン領域として動作する第2のトンネル電界効果トランジスタとが、同一極性で一つの活性領域に形成されるとともに前記第1のP型領域と前記第2のN型領域とが隣接するように形成され、隣接する前記第1のP型領域と前記第2のN型領域とが金属半導体合金膜により電気的に接続されており、前記金属半導体合金膜は、それぞれ半導体層の表面から一定の形成深さで形成され、対向配置される前記第1のP型領域と前記第2のN型領域との間を架け渡すように形成され、かつ、前記半導体層の表面位置から前記第1のP型領域及び前記第2のN型領域の前記形成深さと同じかこれよりも深い深さまで形成されていることを特徴とするトンネル電界効果トランジスタによる集積回路。
<2> 共通の半導体層上に、第1の絶縁膜の上に第1のゲート電極が積層された第1の積層構造と、第2の絶縁膜の上に第2のゲート電極が積層された第2の積層構造とを互いに離間した位置に形成するゲート電極形成工程と、前記第1の積層構造と前記第2の積層構造との間の前記半導体層の表面において、前記第1の積層構造に隣接して第1のP型領域をP型不純物のイオン注入により形成し、前記第2の積層構造に隣接して第2のN型領域をN型不純物のイオン注入により形成し、前記第1の積層構造に隣接して前記第1のP型領域の反対側の位置の前記半導体層の表面に第1のN型領域を前記N型不純物のイオン注入により形成し、前記第2の積層構造に隣接して前記第2のN型領域の反対側の位置の前記半導体層の表面に第2のP型領域を前記P型不純物のイオン注入により形成するとともに前記第1のP型領域と前記第2のN型領域とが隣接されるように前記第1のP型領域、前記第2のP型領域、前記第1のN型領域及び前記第2のN型領域を形成するイオン注入工程と、前記半導体層上の前記第1の積層構造の両側面に第1のサイドウォールを形成するとともに、前記半導体層上の前記第2の積層構造の両側面に第2のサイドウォールを形成するサイドウォール形成工程と、前記第1のサイドウォールと前記第2のサイドウォールとの間の前記半導体層上に金属膜を形成し、その金属膜を加熱して前記半導体層と反応させて金属半導体合金膜を形成する金属半導体合金膜形成工程と、を含み、前記金属半導体合金膜形成工程は、それぞれ前記半導体層の表面から一定の形成深さで形成され、対向配置される前記第1のP型領域と前記第2のN型領域との間を架け渡すように前記金属半導体合金膜を形成し、かつ、前記金属半導体合金膜を前記半導体層の表面位置から前記第1のP型領域及び前記第2のN型領域の前記形成深さと同じかこれよりも深い深さまで形成する工程であることを特徴とするトンネル電界効果トランジスタによる集積回路の製造方法。
図1は、本発明に係るトンネル電界効果トランジスタによる集積回路の一実施形態の構造断面図を示す。同図に示す本実施形態のトンネル電界効果トランジスタによる集積回路は、一つの活性領域に形成された同一極性の第1のトンネル電界効果トランジスタ10aと第2のトンネル電界効果トランジスタ10bとが、金属半導体合金膜の一例のチタンシリサイド(TiSi)膜22によって電気的に接続された構成である。
なお、本明細書において「同一極性」とは、P型トランジスタ及びN型トランジスタのいずれかであるトランジスタ動作特性が2つのトンネル電界効果トランジスタ間で同一であることを示す。
図3〜図5は、本発明に係るトンネル電界効果トランジスタによる集積回路の製造方法の一実施形態の各工程の素子の構造断面図を示す。なお、図1と同一構造部分には同一符号を付してある。まず、図3(A)に示すように、Si支持基板11の表面に厚さ145nmのBOX層12と、厚さ50nmのP型の濃度1×1015cm−3のSOI層13とが積層された構造のウエハ(以下、SOI基板ともいう)を用意する。このSOI基板の全体の厚さは例えば525μmである。
図7は、本実施形態のシミュレーション結果を得るための回路図を示す。同図において、第1のTFET31aはゲート電極32a、N+領域33a及びP+領域34aを有し、第2のTFET31bはゲート電極32b、N+領域33b及びP+領域34bを有する。更に、それらN+領域33a及び33bと、P+領域34a及び34bとの上部から所定の深さにわたって図7にハッチングを付して模式的に示すように、図1、図5(C)に示したような金属半導体合金膜の一例のTiSi膜35が形成されている。また、第1のTFET31aのP+領域34aと、第2のTFET31bのN+領域33bとがTiSi膜35により電気的に接続されており、TFET31a及び31bは電気的に接続されている。
本発明では、2つのTFETの隣接する互いに導電型が異なるソース領域とドレイン領域とを金属半導体合金で電気的に接続することを可能としたので、各種の論理回路に応用できる。図9は、本発明を適用したNAND回路の一例の構成を示す。図9において、符号41は2つのTFETの並列回路、符号42は別の2つのTFETの直列回路であり、符号43及び44はゲート電極である。また、図9において、「P」で示したP領域及び「N」で示したN領域の上部には実施形態で説明したような所定の深さの金属半導体合金(図示せず)が形成されている。更に、ドレイン電圧VDDは高電圧、ソース電圧VSSは低電圧に設定されており、並列回路41を構成する2つのTFETはP型TFETとして動作し、直列回路42を構成する2つのTFETはN型TFETとして動作する。
11 Si支持基板
12 BOX層
13 SOI層
14 絶縁膜
14a、14b ゲート絶縁膜
15 電極膜
15a、15b、43、44、65 ゲート電極
16a、16b、33a、33b N+領域
18a、18b、34a、34b P+領域
20a、20b サイドウォール
21 チタン(Ti)膜
22、23、25、35 チタンシリサイド(TiSi)膜
24 バルク基板
41 並列回路
42 直列回路
51、52 P型トランジスタとして動作するトンネル電界効果トランジスタ(TFET)
53、54 N型トランジスタとして動作するトンネル電界効果トランジスタ(TFET)
61、63 N領域
62、64 P領域
Claims (2)
- 第1のP型領域及び第1のN型領域の一方がソース領域、他方がドレイン領域として動作する第1のトンネル電界効果トランジスタと、第2のP型領域及び第2のN型領域の一方がソース領域、他方がドレイン領域として動作する第2のトンネル電界効果トランジスタとが、同一極性で一つの活性領域に形成されるとともに前記第1のP型領域と前記第2のN型領域とが隣接するように形成され、隣接する前記第1のP型領域と前記第2のN型領域とが金属半導体合金膜により電気的に接続されており、
前記金属半導体合金膜は、それぞれ半導体層の表面から一定の形成深さで形成され、対向配置される前記第1のP型領域と前記第2のN型領域との間を架け渡すように形成され、かつ、前記半導体層の表面位置から前記第1のP型領域及び前記第2のN型領域の前記形成深さと同じかこれよりも深い深さまで形成されていることを特徴とするトンネル電界効果トランジスタによる集積回路。 - 共通の半導体層上に、第1の絶縁膜の上に第1のゲート電極が積層された第1の積層構造と、第2の絶縁膜の上に第2のゲート電極が積層された第2の積層構造とを互いに離間した位置に形成するゲート電極形成工程と、
前記第1の積層構造と前記第2の積層構造との間の前記半導体層の表面において、前記第1の積層構造に隣接して第1のP型領域をP型不純物のイオン注入により形成し、前記第2の積層構造に隣接して第2のN型領域をN型不純物のイオン注入により形成し、前記第1の積層構造に隣接して前記第1のP型領域の反対側の位置の前記半導体層の表面に第1のN型領域を前記N型不純物のイオン注入により形成し、前記第2の積層構造に隣接して前記第2のN型領域の反対側の位置の前記半導体層の表面に第2のP型領域を前記P型不純物のイオン注入により形成するとともに前記第1のP型領域と前記第2のN型領域とが隣接されるように前記第1のP型領域、前記第2のP型領域、前記第1のN型領域及び前記第2のN型領域を形成するイオン注入工程と、
前記半導体層上の前記第1の積層構造の両側面に第1のサイドウォールを形成するとともに、前記半導体層上の前記第2の積層構造の両側面に第2のサイドウォールを形成するサイドウォール形成工程と、
前記第1のサイドウォールと前記第2のサイドウォールとの間の前記半導体層上に金属膜を形成し、その金属膜を加熱して前記半導体層と反応させて金属半導体合金膜を形成する金属半導体合金膜形成工程と、
を含み、
前記金属半導体合金膜形成工程は、それぞれ前記半導体層の表面から一定の形成深さで形成され、対向配置される前記第1のP型領域と前記第2のN型領域との間を架け渡すように前記金属半導体合金膜を形成し、かつ、前記金属半導体合金膜を前記半導体層の表面位置から前記第1のP型領域及び前記第2のN型領域の前記形成深さと同じかこれよりも深い深さまで形成する工程であることを特徴とするトンネル電界効果トランジスタによる集積回路の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014047609 | 2014-03-11 | ||
JP2014047609 | 2014-03-11 | ||
PCT/JP2015/054710 WO2015137081A1 (ja) | 2014-03-11 | 2015-02-20 | トンネル電界効果トランジスタによる集積回路及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015137081A1 JPWO2015137081A1 (ja) | 2017-04-06 |
JP6300214B2 true JP6300214B2 (ja) | 2018-03-28 |
Family
ID=54071530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016507421A Active JP6300214B2 (ja) | 2014-03-11 | 2015-02-20 | トンネル電界効果トランジスタによる集積回路及びその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10361193B2 (ja) |
EP (1) | EP3104403A4 (ja) |
JP (1) | JP6300214B2 (ja) |
KR (1) | KR101915559B1 (ja) |
CN (1) | CN106104789B (ja) |
TW (1) | TWI597819B (ja) |
WO (1) | WO2015137081A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108352406A (zh) * | 2016-11-23 | 2018-07-31 | 华为技术有限公司 | 一种隧穿场效应晶体管制备方法及其隧穿场效应晶体管 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62190751A (ja) * | 1986-02-17 | 1987-08-20 | Nec Corp | 半導体装置 |
JP3039967B2 (ja) | 1990-08-03 | 2000-05-08 | 株式会社日立製作所 | 半導体装置 |
JPH08148579A (ja) * | 1994-11-24 | 1996-06-07 | Toyota Central Res & Dev Lab Inc | 半導体装置およびその製造方法 |
JP3180700B2 (ja) * | 1997-02-03 | 2001-06-25 | 日本電気株式会社 | 半導体集積回路装置 |
JP2002231951A (ja) * | 2001-01-29 | 2002-08-16 | Sony Corp | 半導体装置およびその製造方法 |
US20060091490A1 (en) * | 2004-11-03 | 2006-05-04 | Hung-Wei Chen | Self-aligned gated p-i-n diode for ultra-fast switching |
JP4143096B2 (ja) * | 2006-04-25 | 2008-09-03 | 株式会社東芝 | Mos型半導体装置及びその製造方法 |
DE102006023429B4 (de) * | 2006-05-18 | 2011-03-10 | Infineon Technologies Ag | ESD-Schutz-Element zur Verwendung in einem elektrischen Schaltkreis |
JP2009164453A (ja) * | 2008-01-09 | 2009-07-23 | Renesas Technology Corp | 半導体装置およびその製造方法 |
CN102201450B (zh) * | 2011-05-31 | 2012-10-10 | 北京大学 | 一种隧穿场效应晶体管及其制备方法 |
JP5743831B2 (ja) * | 2011-09-29 | 2015-07-01 | 株式会社東芝 | 半導体装置 |
-
2015
- 2015-02-20 CN CN201580012440.1A patent/CN106104789B/zh active Active
- 2015-02-20 US US15/125,263 patent/US10361193B2/en active Active
- 2015-02-20 WO PCT/JP2015/054710 patent/WO2015137081A1/ja active Application Filing
- 2015-02-20 EP EP15761826.5A patent/EP3104403A4/en not_active Withdrawn
- 2015-02-20 KR KR1020167028098A patent/KR101915559B1/ko active IP Right Grant
- 2015-02-20 JP JP2016507421A patent/JP6300214B2/ja active Active
- 2015-03-11 TW TW104107794A patent/TWI597819B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP3104403A4 (en) | 2017-09-27 |
TW201539711A (zh) | 2015-10-16 |
WO2015137081A1 (ja) | 2015-09-17 |
EP3104403A1 (en) | 2016-12-14 |
JPWO2015137081A1 (ja) | 2017-04-06 |
US10361193B2 (en) | 2019-07-23 |
CN106104789A (zh) | 2016-11-09 |
TWI597819B (zh) | 2017-09-01 |
KR101915559B1 (ko) | 2018-11-06 |
CN106104789B (zh) | 2018-12-18 |
US20170077092A1 (en) | 2017-03-16 |
KR20160132080A (ko) | 2016-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102484134B (zh) | 半导体器件及其制造方法 | |
US9178061B2 (en) | Method for fabricating MOSFET on silicon-on-insulator with internal body contact | |
TW200423301A (en) | Doping of semiconductor fin device | |
JP2010251344A (ja) | 半導体装置およびその製造方法 | |
JP5925740B2 (ja) | トンネル電界効果トランジスタ | |
TWI752041B (zh) | 半導體裝置、積體電路以及半導體裝置的製造方法 | |
TWI588993B (zh) | 半導體組件及製造其之方法 | |
US9673106B2 (en) | Semiconductor devices and methods of manufacturing the same | |
KR20050017395A (ko) | 반도체장치 | |
CN103681346B (zh) | 晶体管、半导体器件及其制造方法 | |
JP2014146647A (ja) | 半導体装置 | |
US20080150026A1 (en) | Metal-oxide-semiconductor field effect transistor with an asymmetric silicide | |
TWI751431B (zh) | 具有低閃爍雜訊的半導體裝置及其形成方法 | |
JP2013191760A (ja) | 半導体装置 | |
JP2008270575A (ja) | 半導体装置およびその製造方法 | |
JP3344381B2 (ja) | 半導体装置及びその製造方法 | |
JP2007511907A (ja) | 完全に量子井戸が空乏化した低出力のマルチチャネルcmosfet | |
US8637938B2 (en) | Semiconductor device with pocket regions and method of manufacturing the same | |
JP6300214B2 (ja) | トンネル電界効果トランジスタによる集積回路及びその製造方法 | |
TW202316531A (zh) | 形成底部介電隔離層的方法 | |
US8664063B2 (en) | Method of producing a semiconductor device and semiconductor device | |
JP2022552417A (ja) | 水平ゲートオールアラウンド(hGAA)ナノワイヤ及びナノスラブトランジスタ | |
CN107369648B (zh) | 一种双栅氧化层制造方法 | |
US20150123187A1 (en) | Semiconductor device manufacturing method and semiconductor device | |
US11908863B2 (en) | Transistor element, ternary inverter apparatus comprising same, and method for producing same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161129 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20171219 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180117 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180206 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180219 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6300214 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |