JP2007520617A5 - - Google Patents

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Publication number
JP2007520617A5
JP2007520617A5 JP2006552126A JP2006552126A JP2007520617A5 JP 2007520617 A5 JP2007520617 A5 JP 2007520617A5 JP 2006552126 A JP2006552126 A JP 2006552126A JP 2006552126 A JP2006552126 A JP 2006552126A JP 2007520617 A5 JP2007520617 A5 JP 2007520617A5
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JP
Japan
Prior art keywords
isocyanate
expandable polymer
polymer microspheres
polishing pad
curing agent
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JP2006552126A
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English (en)
Japanese (ja)
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JP2007520617A (ja
JP4954716B2 (ja
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Priority claimed from US10/772,054 external-priority patent/US20050171224A1/en
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Publication of JP2007520617A publication Critical patent/JP2007520617A/ja
Publication of JP2007520617A5 publication Critical patent/JP2007520617A5/ja
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Publication of JP4954716B2 publication Critical patent/JP4954716B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006552126A 2004-02-03 2005-01-13 ポリウレタン研磨パッド Expired - Lifetime JP4954716B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/772,054 2004-02-03
US10/772,054 US20050171224A1 (en) 2004-02-03 2004-02-03 Polyurethane polishing pad
PCT/US2005/001192 WO2005077999A1 (en) 2004-02-03 2005-01-13 Polyurethane polishing pad

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012009792A Division JP5593337B2 (ja) 2004-02-03 2012-01-20 ポリウレタン研磨パッド

Publications (3)

Publication Number Publication Date
JP2007520617A JP2007520617A (ja) 2007-07-26
JP2007520617A5 true JP2007520617A5 (https=) 2011-06-16
JP4954716B2 JP4954716B2 (ja) 2012-06-20

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JP2006552126A Expired - Lifetime JP4954716B2 (ja) 2004-02-03 2005-01-13 ポリウレタン研磨パッド
JP2012009792A Expired - Lifetime JP5593337B2 (ja) 2004-02-03 2012-01-20 ポリウレタン研磨パッド

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012009792A Expired - Lifetime JP5593337B2 (ja) 2004-02-03 2012-01-20 ポリウレタン研磨パッド

Country Status (7)

Country Link
US (3) US20050171224A1 (https=)
EP (1) EP1716193A1 (https=)
JP (2) JP4954716B2 (https=)
KR (1) KR101141880B1 (https=)
CN (1) CN1914241B (https=)
TW (1) TWI378994B (https=)
WO (1) WO2005077999A1 (https=)

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KR100467765B1 (ko) 2002-02-04 2005-01-24 에스케이씨 주식회사 고경도 및 우수한 내마모성을 갖는 폴리우레탄 탄성체제조용 조성물
JP2003257905A (ja) * 2002-03-01 2003-09-12 Disco Abrasive Syst Ltd 被研磨物の研磨方法
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