JP2007517140A5 - - Google Patents

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Publication number
JP2007517140A5
JP2007517140A5 JP2006547095A JP2006547095A JP2007517140A5 JP 2007517140 A5 JP2007517140 A5 JP 2007517140A5 JP 2006547095 A JP2006547095 A JP 2006547095A JP 2006547095 A JP2006547095 A JP 2006547095A JP 2007517140 A5 JP2007517140 A5 JP 2007517140A5
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JP
Japan
Prior art keywords
vinylpyridine
reaction product
polymer compound
substituted pyridyl
poly
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Granted
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JP2006547095A
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English (en)
Japanese (ja)
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JP4539925B2 (ja
JP2007517140A (ja
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Priority claimed from US10/963,369 external-priority patent/US8002962B2/en
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Publication of JP2007517140A publication Critical patent/JP2007517140A/ja
Publication of JP2007517140A5 publication Critical patent/JP2007517140A5/ja
Application granted granted Critical
Publication of JP4539925B2 publication Critical patent/JP4539925B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006547095A 2003-12-22 2004-12-13 微小電子機器における銅の電着 Expired - Lifetime JP4539925B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US53177103P 2003-12-22 2003-12-22
US10/963,369 US8002962B2 (en) 2002-03-05 2004-10-12 Copper electrodeposition in microelectronics
PCT/US2004/041620 WO2005066391A1 (en) 2003-12-22 2004-12-13 Copper electrodeposition in microelectronics

Publications (3)

Publication Number Publication Date
JP2007517140A JP2007517140A (ja) 2007-06-28
JP2007517140A5 true JP2007517140A5 (enExample) 2008-02-07
JP4539925B2 JP4539925B2 (ja) 2010-09-08

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ID=34752972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006547095A Expired - Lifetime JP4539925B2 (ja) 2003-12-22 2004-12-13 微小電子機器における銅の電着

Country Status (7)

Country Link
US (4) US8002962B2 (enExample)
EP (1) EP1697561B1 (enExample)
JP (1) JP4539925B2 (enExample)
KR (1) KR101157284B1 (enExample)
PT (1) PT1697561T (enExample)
TW (1) TWI266383B (enExample)
WO (1) WO2005066391A1 (enExample)

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