JP2007096232A - インターポーザ及び電子装置の製造方法 - Google Patents
インターポーザ及び電子装置の製造方法 Download PDFInfo
- Publication number
- JP2007096232A JP2007096232A JP2005287065A JP2005287065A JP2007096232A JP 2007096232 A JP2007096232 A JP 2007096232A JP 2005287065 A JP2005287065 A JP 2005287065A JP 2005287065 A JP2005287065 A JP 2005287065A JP 2007096232 A JP2007096232 A JP 2007096232A
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- Prior art keywords
- film
- interposer
- electrode
- wiring
- electrodes
- Prior art date
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Images
Classifications
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- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0147—Carriers and holders
- H05K2203/016—Temporary inorganic, non-metallic carrier, e.g. for processing or transferring
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0191—Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/007—Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49126—Assembling bases
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
- Y10T29/49151—Assembling terminal to base by deforming or shaping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
Abstract
【解決手段】複数の樹脂層より成る基材10と;基材10に埋め込まれ、下部電極20とキャパシタ誘電体膜22と上部電極24とを有する薄膜キャパシタ12と;基材10を貫き、薄膜キャパシタの上部電極に電気的に接続された第1の貫通電極14bと;基材を貫き、薄膜キャパシタの下部電極に電気的に接続された第2の貫通電極14aとを有するインターポーザであって、基材に埋め込まれ、複数の薄膜キャパシタの各々の上部電極に電気的に接続された配線48を更に有し、複数の第1の貫通電極が、配線を介して、複数の薄膜キャパシタの上部電極に電気的に接続されており、複数の第1の貫通電極が、配線により、互いに電気的に接続されている。
【選択図】 図1
Description
本発明の一実施形態によるインターポーザ及びその製造方法、並びに、そのインターポーザを用いた電子装置及びその製造方法を図1乃至図18を用いて説明する。
まず、本実施形態によるインターポーザ及び電子装置を図1を用いて説明する。図1は、本実施形態によるインターポーザを示す断面図(その1)である。図2は、本実施形態によるインターポーザの一部を示す平面図である。図3は、本実施形態によるインターポーザを示す断面図(その2)である。図4は、本実施形態による電子装置を示す断面図である。
次に、本実施形態によるインターポーザ及び電子装置の製造方法を図5乃至図18を用いて説明する。図5乃至図18は、本実施形態によるインターポーザ及び電子装置の製造方法を示す工程断面図である。
本発明は上記実施形態に限らず種々の変形が可能である。
(付記1)
複数の樹脂層より成る基材と;前記基材に埋め込まれ、下部電極と、前記下部電極上に形成されたキャパシタ誘電体膜と、前記キャパシタ誘電体膜上に形成された上部電極とを有する薄膜キャパシタと;前記基材を貫き、前記薄膜キャパシタの前記上部電極に電気的に接続された第1の貫通電極と;前記基材を貫き、前記薄膜キャパシタの前記下部電極に電気的に接続された第2の貫通電極とを有するインターポーザであって、
前記基材に埋め込まれ、複数の前記薄膜キャパシタの各々の前記上部電極に電気的に接続された配線を更に有し、
複数の前記第1の貫通電極が、前記配線を介して、前記複数の薄膜キャパシタの前記上部電極に電気的に接続されており、
前記複数の第1の貫通電極が、前記配線により、互いに電気的に接続されている
ことを特徴とするインターポーザ。
(付記2)
付記1記載のインターポーザにおいて、
前記下部電極は、ベタ状に形成されている
ことを特徴とするインターポーザ。
(付記3)
付記1記載のインターポーザにおいて、
前記基材に埋め込まれ、前記複数の薄膜キャパシタの各々の前記下部電極に電気的に接続された他の配線を更に有し、
複数の前記第2の貫通電極が、前記他の配線により、互いに電気的に接続されている
ことを特徴とするインターポーザ。
(付記4)
付記1乃至3のいずれかに記載のインターポーザにおいて、
前記基材を貫き、前記薄膜キャパシタから絶縁された第3の貫通電極を更に有する
ことを特徴とするインターポーザ。
(付記5)
付記1乃至4のいずれかに記載のインターポーザにおいて、
前記薄膜キャパシタの上面、下面及び側面を覆うように形成され、水素又は水分の拡散を防止する絶縁性バリア膜を更に有する
ことを特徴とするインターポーザ。
(付記6)
付記5記載のインターポーザにおいて、
前記絶縁性バリア膜は、無機材料より成る
ことを特徴とするインターポーザ。
(付記7)
付記5記載のインターポーザにおいて、
前記絶縁性バリア膜は、前記キャパシタ誘電体膜と同一の材料より成る非晶質膜である
ことを特徴とするインターポーザ。
(付記8)
付記5乃至7のいずれかに記載のインターポーザにおいて、
前記絶縁性バリア膜には、前記上部電極に達する開口部が形成されており、
前記開口部内には、水素又は水分の拡散を防止する導電性バリア膜が形成されており、
前記配線は、前記導電性バリア膜を介して前記上部電極に電気的に接続されている
ことを特徴とするインターポーザ。
(付記9)
付記5乃至7のいずれかに記載のインターポーザにおいて、
前記基材及び前記絶縁性バリア膜には、前記下部電極の少なくとも側面を露出する開口部が形成されており、
前記開口部内には、水素又は水分の拡散を防止する導電性バリア膜が形成されており、
前記第1の貫通電極は、前記導電性バリア膜が形成された前記開口部内に埋め込まれており、
前記第1の貫通電極は、前記導電性バリア膜を介して前記下部電極に電気的に接続されている
ことを特徴とするインターポーザ。
(付記10)
付記1乃至9のいずれかに記載のインターポーザにおいて、
前記樹脂層は、ポリイミド樹脂、エポキシ樹脂、ベンゾシクロブテン樹脂、ビスマレイミド・トリアジン樹脂、ポリテトラフルオロエチレン樹脂、アクリル樹脂、又は、ジアリルフタレート樹脂より成る
ことを特徴とするインターポーザ。
(付記11)
付記1乃至10のいずれかに記載のインターポーザにおいて、
前記キャパシタ誘電体膜は、Sr、Ba、Pb、Zr、Bi、Ta、Ti、Mg、及びNbの少なくともいずれかの元素を含む複合酸化物より成る
ことを特徴とするインターポーザ。
(付記12)
付記1乃至11のいずれかに記載のインターポーザにおいて、
前記下部電極又は前記上部電極は、Au、Cr、Cu、W、Pt、Pd、Ru、Ru酸化物、Ir、Ir酸化物、又はPt酸化物より成る
ことを特徴とするインターポーザ。
(付記13)
複数の樹脂層より成る基材と;前記基材に埋め込まれ、下部電極と、前記下部電極上に形成されたキャパシタ誘電体膜と、前記キャパシタ誘電体膜上に形成された上部電極とを有する薄膜キャパシタと;前記基材を貫き、前記薄膜キャパシタの前記上部電極に電気的に接続された第1の貫通電極と;前記基材を貫き、前記薄膜キャパシタの前記下部電極に電気的に接続された第2の貫通電極とを有するインターポーザであって、前記基材に埋め込まれ、複数の前記薄膜キャパシタの各々の前記上部電極に電気的に接続された配線を更に有し、複数の前記第1の貫通電極が、前記配線を介して、前記複数の薄膜キャパシタの前記上部電極に電気的に接続されているインターポーザを、基板上に形成する工程と、
前記インターポーザを台座により支持する工程と、
前記インターポーザを前記台座により支持した状態で前記基板を除去する工程と、
前記インターポーザを他の基板上に実装する工程と
を有することを特徴とする電子装置の製造方法。
(付記14)
付記13記載の電子装置の製造方法において、
前記インターポーザを前記台座により支持する工程では、前記インターポーザに熱剥離シートを用いて前記台座を接着する
ことを特徴とする電子装置の製造方法。
4…回路基板
6…半導体集積回路素子
10…基材
12…薄膜キャパシタ
14a〜14c…貫通電極
20…下部電極
22…キャパシタ誘電体膜
24…上部電極
26…樹脂層
28a〜28c…導電膜
30a〜30c…部分電極
32a…配線
32b、32c…導電膜
34…樹脂層
36a〜36c…部分電極
38…絶縁性バリア膜
40…絶縁性バリア膜
42…樹脂層
44a〜44d…開口部
45a、45b…導電性バリア膜
46a〜46c…部分電極
46d…導体プラグ
48…配線
50…配線
52…樹脂層
54a〜54c…部分電極
56…樹脂層
58a〜58c…部分電極
60a〜60c…電極パッド
62…半田バンプ
64…台座
66…感圧粘着剤層
68…基材
70…熱剥離接着剤層
70a…発泡後の熱剥離接着剤層
72…熱剥離シート
74…基板
76…電極パッド
78…半導体基板
80…電極パッド
82…半田バンプ
84…半導体基板
86…開口部
88…開口部
90…開口部
92a〜92c…開口部
94a〜94c…開口部
Claims (10)
- 複数の樹脂層より成る基材と;前記基材に埋め込まれ、下部電極と、前記下部電極上に形成されたキャパシタ誘電体膜と、前記キャパシタ誘電体膜上に形成された上部電極とを有する薄膜キャパシタと;前記基材を貫き、前記薄膜キャパシタの前記上部電極に電気的に接続された第1の貫通電極と;前記基材を貫き、前記薄膜キャパシタの前記下部電極に電気的に接続された第2の貫通電極とを有するインターポーザであって、
前記基材に埋め込まれ、複数の前記薄膜キャパシタの各々の前記上部電極に電気的に接続された配線を更に有し、
複数の前記第1の貫通電極が、前記配線を介して、前記複数の薄膜キャパシタの前記上部電極に電気的に接続されており、
前記複数の第1の貫通電極が、前記配線により、互いに電気的に接続されている
ことを特徴とするインターポーザ。 - 請求項1記載のインターポーザにおいて、
前記下部電極は、ベタ状に形成されている
ことを特徴とするインターポーザ。 - 請求項1記載のインターポーザにおいて、
前記基材に埋め込まれ、前記複数の薄膜キャパシタの各々の前記下部電極に電気的に接続された他の配線を更に有し、
複数の前記第2の貫通電極が、前記他の配線により、互いに電気的に接続されている
ことを特徴とするインターポーザ。 - 請求項1乃至3のいずれか1項に記載のインターポーザにおいて、
前記薄膜キャパシタの上面、下面及び側面を覆うように形成され、水素又は水分の拡散を防止する絶縁性バリア膜を更に有する
ことを特徴とするインターポーザ。 - 請求項4記載のインターポーザにおいて、
前記絶縁性バリア膜は、無機材料より成る
ことを特徴とするインターポーザ。 - 請求項4記載のインターポーザにおいて、
前記絶縁性バリア膜は、前記キャパシタ誘電体膜と同一の材料より成る非晶質膜である
ことを特徴とするインターポーザ。 - 請求項4乃至6のいずれか1項に記載のインターポーザにおいて、
前記絶縁性バリア膜には、前記上部電極に達する開口部が形成されており、
前記開口部内には、水素又は水分の拡散を防止する導電性バリア膜が形成されており、
前記配線は、前記導電性バリア膜を介して前記上部電極に電気的に接続されている
ことを特徴とするインターポーザ。 - 請求項4乃至6のいずれか1項に記載のインターポーザにおいて、
前記基材及び前記絶縁性バリア膜には、前記下部電極の少なくとも側面を露出する開口部が形成されており、
前記開口部内には、水素又は水分の拡散を防止する導電性バリア膜が形成されており、
前記第1の貫通電極は、前記導電性バリア膜が形成された前記開口部内に埋め込まれており、
前記第1の貫通電極は、前記導電性バリア膜を介して前記下部電極に電気的に接続されている
ことを特徴とするインターポーザ。 - 複数の樹脂層より成る基材と;前記基材に埋め込まれ、下部電極と、前記下部電極上に形成されたキャパシタ誘電体膜と、前記キャパシタ誘電体膜上に形成された上部電極とを有する薄膜キャパシタと;前記基材を貫き、前記薄膜キャパシタの前記上部電極に電気的に接続された第1の貫通電極と;前記基材を貫き、前記薄膜キャパシタの前記下部電極に電気的に接続された第2の貫通電極とを有するインターポーザであって、前記基材に埋め込まれ、複数の前記薄膜キャパシタの各々の前記上部電極に電気的に接続された配線を更に有し、複数の前記第1の貫通電極が、前記配線を介して、前記複数の薄膜キャパシタの前記上部電極に電気的に接続されているインターポーザを、基板上に形成する工程と、
前記インターポーザを台座により支持する工程と、
前記インターポーザを前記台座により支持した状態で前記基板を除去する工程と、
前記インターポーザを他の基板上に実装する工程と
を有することを特徴とする電子装置の製造方法。 - 請求項9記載の電子装置の製造方法において、
前記インターポーザを前記台座により支持する工程では、前記インターポーザに熱剥離シートを用いて前記台座を接着する
ことを特徴とする電子装置の製造方法。
Priority Applications (3)
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US7937830B2 (en) | 2011-05-10 |
US20070076348A1 (en) | 2007-04-05 |
US7405366B2 (en) | 2008-07-29 |
JP4671829B2 (ja) | 2011-04-20 |
US20080257487A1 (en) | 2008-10-23 |
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