JP2006523026A - 液浸リソグラフィ流体制御システム - Google Patents
液浸リソグラフィ流体制御システム Download PDFInfo
- Publication number
- JP2006523026A JP2006523026A JP2006509534A JP2006509534A JP2006523026A JP 2006523026 A JP2006523026 A JP 2006523026A JP 2006509534 A JP2006509534 A JP 2006509534A JP 2006509534 A JP2006509534 A JP 2006509534A JP 2006523026 A JP2006523026 A JP 2006523026A
- Authority
- JP
- Japan
- Prior art keywords
- pressurized gas
- fluid
- nozzle
- exposure area
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
Abstract
Description
Claims (45)
- 液浸リソグラフィ用の流体制御システムであって、
光学部材であって前記光学部材と該光学部材に対向して配置された表面との間にギャップが画成されている前記光学部材と、
前記ギャップ内に特定される露光領域に流体を供給するための流体供給デバイスと、
前記流体に力を作用させ、それによって前記流体が前記露光領域外部の特定の周辺領域に入ることを妨げる流体制御デバイスとを備える流体制御システム。 - 上記流体制御システムは、加圧ガス源と、ノズルであって、前記ノズルを通じて前記露光領域に前記加圧ガスを送出するためのノズルとを含み、前記露光領域の前記流体は、前記加圧ガスによって前記周辺領域に入ることが妨げられる請求項1に記載の流体制御システム。
- 前記ノズルは前記表面に対して斜めに向けられている請求項2に記載の流体制御システム。
- 前記加圧ガスは、前記流体が前記露光領域に接触するときに、2〜200m/秒の速度を有する請求項3に記載の流体制御システム。
- 前記加圧ガスの圧力は、前記表面を有する物体の走査速度と、前記ワークピースの表面及び前記流体の間の接触角とを備える一群から選択される1以上の因子によって、少なくとも部分的に決定される請求項2に記載の流体制御システム。
- 前記加圧ガスは水を吸収し、それにより湿度を減少させる請求項2に記載の流体制御システム。
- 前記流体制御デバイスはさらに供給されたガスを取り除くための排気マニホールドを含む請求項2に記載の流体制御システム。
- 前記加圧ガスが空気である請求項2に記載の流体制御システム。
- 前記加圧ガスが窒素である請求項2に記載の流体制御システム。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項2に記載の流体制御システム。
- 前記加圧ガス源とノズルは、前記表面を有する物体の走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項2に記載の流体制御システム。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定される一側に前記露光領域に隣接して置かれている請求項2に記載の流体制御システム。
- レチクルを保持するために配置されたレチクルステージと、
表面を有するワークピースを保持するために配置されたワーキングステージと、
光学素子を含んだ光学システムであって前記光学素子は前記ワークピースの前記表面に対向し、前記光学素子と前記ワークピースの前記表面との間にギャップが画成された光学システムと、
液浸リソグラフィプロセスの間に、前記光学素子及び前記ワークピースの間、並びに前記光学素子及び前記ワークピースと接触している特定の露光領域へ流体を提供するための流体供給デバイスと、
前記流体に力を作用させて、それによって前記流体が前記露光領域の外部の特定の周辺領域に入ることを妨げる流体制御デバイスとを備える液浸リソグラフィ装置。 - 前記力は流体力学的力であって、前記流体制御デバイスは加圧ガス源と、ノズルであって前記加圧ガスを前記ノズルを通じて前記露光領域に向かって送出するためのノズルとを含み、前記露光領域内の前記流体は前記加圧ガスの前記流体力学的力によって前記周辺領域に入ることが妨げられている請求項13に記載の液浸リソグラフィ装置。
- 前記ノズルは前記ワークピースの前記表面に関して斜めに向けられた請求項14に記載の液浸リソグラフィ装置。
- 前記加圧ガスの圧力は、前記ワークピースの走査速度と、前記ワークピースの表面及び前記流体の間の接触角とを備える一群から選択される1以上の因子によって、少なくとも部分的に決定される請求項14に記載の液浸リソグラフィ装置。
- 前記加圧ガスが空気である請求項14に記載の液浸リソグラフィ装置。
- 前記加圧ガスが窒素である請求項14に記載の液浸リソグラフィ装置。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項14に記載の液浸リソグラフィ装置。
- 前記加圧ガス源とノズルは、前記ワークピースの走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項14に記載の液浸リソグラフィ装置。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定された一側に前記露光領域に隣接して置かれている請求項14に記載の液浸リソグラフィ装置。
- 請求項14に記載の液浸リソグラフィ装置で製造された物体。
- 前記加圧ガスが空気である請求項22に記載の物体。
- 前記加圧ガスが窒素である請求項22に記載の物体。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項22に記載の物体。
- 前記加圧ガス源とノズルは、前記ワークピースの走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項22に記載の物体。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定された一側に前記露光領域に隣接して置かれている請求項22に記載の物体。
- 請求項14に記載の液浸リソグラフィ装置によって像が形成されたウェハ。
- 前記加圧ガスが空気である請求項28に記載のウェハ。
- 前記加圧ガスが窒素である請求項28に記載のウェハ。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項28に記載のウェハ。
- 前記加圧ガス源とノズルは、前記ワークピースの走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項28に記載のウェハ。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定される一側に前記露光領域に隣接して置かれている請求項28に記載のウェハ。
- リソグラフィプロセスを用いて物体を作製する方法であって、前記リソグラフィプロセスは請求項14に記載の液浸リソグラフィ装置を利用する方法。
- 前記加圧ガスが空気である請求項34に記載の方法。
- 前記加圧ガスが窒素である請求項34に記載の方法。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項34に記載の方法。
- 前記加圧ガス源とノズルは、前記ワークピースの走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項34に記載の方法。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定された一側に前記露光領域に隣接して置かれている請求項34に記載の方法。
- リソグラフィプロセスを用いてウェハをパターンニングするための方法であって、前記リソグラフィプロセスは請求項14に記載の液浸リソグラフィシステムを用いる方法。
- 前記加圧ガスが空気である請求項40に記載の方法。
- 前記加圧ガスが窒素である請求項40に記載の方法。
- 前記ノズルは、前記加圧ガスが前記露光領域内の前記流体に接触しているときに、15〜25m/秒の速度範囲で加圧ガスを提供するように構成された請求項40に記載の方法。
- 前記加圧ガス源とノズルは、前記ワークピースの走査方向によって規定される一側に前記露光領域に隣接して置かれている請求項40に記載の方法。
- 前記加圧ガス源とノズルは、前記ワークピースのステッピング軸によって規定された一側に前記露光領域に隣接して置かれている請求項40に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46214203P | 2003-04-09 | 2003-04-09 | |
PCT/US2004/009911 WO2004093159A2 (en) | 2003-04-09 | 2004-03-29 | Immersion lithography fluid control system |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010024368A Division JP5428909B2 (ja) | 2003-04-09 | 2010-02-05 | 液浸リソグラフィ流体制御システム |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006523026A true JP2006523026A (ja) | 2006-10-05 |
JP2006523026A5 JP2006523026A5 (ja) | 2010-03-25 |
JP4488004B2 JP4488004B2 (ja) | 2010-06-23 |
Family
ID=33299914
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006509534A Expired - Lifetime JP4488004B2 (ja) | 2003-04-09 | 2004-03-29 | 液浸リソグラフィ流体制御システム |
JP2010024368A Expired - Fee Related JP5428909B2 (ja) | 2003-04-09 | 2010-02-05 | 液浸リソグラフィ流体制御システム |
JP2013200777A Expired - Fee Related JP5679023B2 (ja) | 2003-04-09 | 2013-09-27 | 液浸リソグラフィ流体制御システム |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010024368A Expired - Fee Related JP5428909B2 (ja) | 2003-04-09 | 2010-02-05 | 液浸リソグラフィ流体制御システム |
JP2013200777A Expired - Fee Related JP5679023B2 (ja) | 2003-04-09 | 2013-09-27 | 液浸リソグラフィ流体制御システム |
Country Status (5)
Country | Link |
---|---|
US (6) | US7339650B2 (ja) |
JP (3) | JP4488004B2 (ja) |
KR (2) | KR101177331B1 (ja) |
TW (2) | TWI372412B (ja) |
WO (1) | WO2004093159A2 (ja) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006196905A (ja) * | 2005-01-14 | 2006-07-27 | Asml Netherlands Bv | リソグラフィ装置およびデバイス製造方法 |
JP2007513518A (ja) * | 2003-12-03 | 2007-05-24 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 適応浸漬媒体を使用した浸漬リソグラフィプロセス |
JPWO2006049134A1 (ja) * | 2004-11-01 | 2008-05-29 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
JP2009044168A (ja) * | 2003-09-03 | 2009-02-26 | Nikon Corp | 液浸リソグラフィのための流体の供給装置及び方法 |
JP2009152582A (ja) * | 2007-12-03 | 2009-07-09 | Asml Netherlands Bv | リソグラフィ装置及びデバイス製造方法 |
JP2009182359A (ja) * | 2003-10-28 | 2009-08-13 | Asml Netherlands Bv | リソグラフィ装置 |
JP2010135857A (ja) * | 2002-11-12 | 2010-06-17 | Asml Netherlands Bv | リソグラフィ装置およびデバイス製造方法 |
JP2010157766A (ja) * | 2003-05-13 | 2010-07-15 | Asml Netherlands Bv | リソグラフィ装置 |
JP2014168068A (ja) * | 2007-03-15 | 2014-09-11 | Nikon Corp | 液浸リソグラフィマシンにおける基板交換の間に、液浸流体を光学アセンブリに隣接して保持する装置および方法 |
JP2018022198A (ja) * | 2012-04-10 | 2018-02-08 | 株式会社ニコン | 液浸部材、露光装置、及びデバイス製造方法 |
JP2018205781A (ja) * | 2005-03-23 | 2018-12-27 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
JP2022001953A (ja) * | 2016-01-13 | 2022-01-06 | エーエスエムエル ネザーランズ ビー.ブイ. | 流体ハンドリング構造及びリソグラフィ装置 |
Families Citing this family (160)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9482966B2 (en) | 2002-11-12 | 2016-11-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN101713932B (zh) | 2002-11-12 | 2012-09-26 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
US7372541B2 (en) * | 2002-11-12 | 2008-05-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US10503084B2 (en) | 2002-11-12 | 2019-12-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN101470360B (zh) | 2002-11-12 | 2013-07-24 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
WO2004053955A1 (ja) | 2002-12-10 | 2004-06-24 | Nikon Corporation | 露光装置及びデバイス製造方法 |
US7242455B2 (en) | 2002-12-10 | 2007-07-10 | Nikon Corporation | Exposure apparatus and method for producing device |
WO2004053953A1 (ja) | 2002-12-10 | 2004-06-24 | Nikon Corporation | 露光装置及びデバイス製造方法 |
US7948604B2 (en) | 2002-12-10 | 2011-05-24 | Nikon Corporation | Exposure apparatus and method for producing device |
KR101037057B1 (ko) | 2002-12-10 | 2011-05-26 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
DE10261775A1 (de) | 2002-12-20 | 2004-07-01 | Carl Zeiss Smt Ag | Vorrichtung zur optischen Vermessung eines Abbildungssystems |
KR20180126102A (ko) | 2003-02-26 | 2018-11-26 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법 및 디바이스 제조 방법 |
KR101345474B1 (ko) | 2003-03-25 | 2013-12-27 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
DE602004020200D1 (de) | 2003-04-07 | 2009-05-07 | Nippon Kogaku Kk | Belichtungsgerät und verfahren zur herstellung einer vorrichtung |
KR101177331B1 (ko) | 2003-04-09 | 2012-08-30 | 가부시키가이샤 니콘 | 액침 리소그래피 유체 제어 시스템 |
WO2004090634A2 (en) | 2003-04-10 | 2004-10-21 | Nikon Corporation | Environmental system including vaccum scavange for an immersion lithography apparatus |
CN1771463A (zh) | 2003-04-10 | 2006-05-10 | 株式会社尼康 | 用于沉浸光刻装置收集液体的溢出通道 |
JP4650413B2 (ja) | 2003-04-10 | 2011-03-16 | 株式会社ニコン | 液浸リソグフラフィ装置用の移送領域を含む環境システム |
EP2613193B1 (en) | 2003-04-11 | 2016-01-13 | Nikon Corporation | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
JP4582089B2 (ja) | 2003-04-11 | 2010-11-17 | 株式会社ニコン | 液浸リソグラフィ用の液体噴射回収システム |
JP4837556B2 (ja) | 2003-04-11 | 2011-12-14 | 株式会社ニコン | 液浸リソグラフィにおける光学素子の洗浄方法 |
SG152078A1 (en) | 2003-04-17 | 2009-05-29 | Nikon Corp | Optical arrangement of autofocus elements for use with immersion lithography |
TWI612557B (zh) | 2003-05-23 | 2018-01-21 | Nikon Corp | 曝光方法及曝光裝置以及元件製造方法 |
TWI474380B (zh) | 2003-05-23 | 2015-02-21 | 尼康股份有限公司 | A method of manufacturing an exposure apparatus and an element |
KR101915914B1 (ko) | 2003-05-28 | 2018-11-06 | 가부시키가이샤 니콘 | 노광 방법, 노광 장치, 및 디바이스 제조 방법 |
US7213963B2 (en) | 2003-06-09 | 2007-05-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7684008B2 (en) | 2003-06-11 | 2010-03-23 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
TW201445617A (zh) | 2003-06-13 | 2014-12-01 | 尼康股份有限公司 | 基板載台、曝光裝置 |
US6867844B2 (en) | 2003-06-19 | 2005-03-15 | Asml Holding N.V. | Immersion photolithography system and method using microchannel nozzles |
TWI536430B (zh) | 2003-06-19 | 2016-06-01 | 尼康股份有限公司 | An exposure apparatus, an exposure method, and an element manufacturing method |
US6809794B1 (en) | 2003-06-27 | 2004-10-26 | Asml Holding N.V. | Immersion photolithography system and method using inverted wafer-projection optics interface |
DE60308161T2 (de) | 2003-06-27 | 2007-08-09 | Asml Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung eines Artikels |
EP2853943B1 (en) | 2003-07-08 | 2016-11-16 | Nikon Corporation | Wafer table for immersion lithography |
WO2005006418A1 (ja) | 2003-07-09 | 2005-01-20 | Nikon Corporation | 露光装置及びデバイス製造方法 |
ATE513309T1 (de) | 2003-07-09 | 2011-07-15 | Nikon Corp | Belichtungsvorrichtung und verfahren zur bauelementeherstellung |
WO2005006416A1 (ja) | 2003-07-09 | 2005-01-20 | Nikon Corporation | 結合装置、露光装置、及びデバイス製造方法 |
JP4524669B2 (ja) | 2003-07-25 | 2010-08-18 | 株式会社ニコン | 投影光学系の検査方法および検査装置 |
US7175968B2 (en) | 2003-07-28 | 2007-02-13 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and a substrate |
CN102323724B (zh) | 2003-07-28 | 2014-08-13 | 株式会社尼康 | 液浸曝光装置及其制造方法、曝光装置、器件制造方法 |
EP1503244A1 (en) | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
US7779781B2 (en) | 2003-07-31 | 2010-08-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
TWI263859B (en) | 2003-08-29 | 2006-10-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
EP1670039B1 (en) | 2003-08-29 | 2014-06-04 | Nikon Corporation | Exposure apparatus and device producing method |
WO2005029559A1 (ja) | 2003-09-19 | 2005-03-31 | Nikon Corporation | 露光装置及びデバイス製造方法 |
KR101301804B1 (ko) | 2003-09-26 | 2013-08-29 | 가부시키가이샤 니콘 | 투영노광장치 및 투영노광장치의 세정방법, 메인터넌스 방법 그리고 디바이스의 제조방법 |
KR101739711B1 (ko) | 2003-09-29 | 2017-05-24 | 가부시키가이샤 니콘 | 노광장치, 노광방법 및 디바이스 제조방법 |
JP3993549B2 (ja) * | 2003-09-30 | 2007-10-17 | 株式会社東芝 | レジストパターン形成方法 |
ATE509367T1 (de) | 2003-10-08 | 2011-05-15 | Zao Nikon Co Ltd | Belichtungsgerät, substrattrageverfahren, belichtungsverfahren und verfahren zur herstellung einer vorrichtung |
EP1672682A4 (en) | 2003-10-08 | 2008-10-15 | Zao Nikon Co Ltd | SUBSTRATE TRANSPORT DEVICE AND METHOD, EXPOSURE DEVICE AND METHOD AND COMPONENT MANUFACTURING METHOD |
TWI598934B (zh) | 2003-10-09 | 2017-09-11 | Nippon Kogaku Kk | Exposure apparatus, exposure method, and device manufacturing method |
US7352433B2 (en) | 2003-10-28 | 2008-04-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4295712B2 (ja) | 2003-11-14 | 2009-07-15 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及び装置製造方法 |
TWI470371B (zh) | 2003-12-03 | 2015-01-21 | 尼康股份有限公司 | An exposure apparatus, an exposure method, an element manufacturing method, and an optical component |
KR101499405B1 (ko) | 2003-12-15 | 2015-03-05 | 가부시키가이샤 니콘 | 스테이지 장치, 노광 장치, 및 노광 방법 |
US7394521B2 (en) | 2003-12-23 | 2008-07-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4371822B2 (ja) * | 2004-01-06 | 2009-11-25 | キヤノン株式会社 | 露光装置 |
DE602005019689D1 (de) | 2004-01-20 | 2010-04-15 | Zeiss Carl Smt Ag | Belichtungsvorrichtung und messeinrichtung für eine projektionslinse |
US7026259B2 (en) * | 2004-01-21 | 2006-04-11 | International Business Machines Corporation | Liquid-filled balloons for immersion lithography |
US7589822B2 (en) | 2004-02-02 | 2009-09-15 | Nikon Corporation | Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
WO2005076321A1 (ja) | 2004-02-03 | 2005-08-18 | Nikon Corporation | 露光装置及びデバイス製造方法 |
KR101115111B1 (ko) * | 2004-02-13 | 2012-04-16 | 칼 짜이스 에스엠티 게엠베하 | 마이크로 리소그래프 투영 노광 장치 투영 대물 렌즈 |
US7027125B2 (en) * | 2004-03-25 | 2006-04-11 | International Business Machines Corporation | System and apparatus for photolithography |
KR20180042456A (ko) | 2004-03-25 | 2018-04-25 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
US7898642B2 (en) | 2004-04-14 | 2011-03-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
WO2005111722A2 (en) | 2004-05-04 | 2005-11-24 | Nikon Corporation | Apparatus and method for providing fluid for immersion lithography |
US7616383B2 (en) | 2004-05-18 | 2009-11-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN101833247B (zh) | 2004-06-04 | 2013-11-06 | 卡尔蔡司Smt有限责任公司 | 微光刻投影曝光系统的投影物镜的光学测量的测量系统 |
CN105467775B (zh) | 2004-06-09 | 2018-04-10 | 株式会社尼康 | 曝光装置及元件制造方法 |
US7463330B2 (en) | 2004-07-07 | 2008-12-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4894515B2 (ja) | 2004-07-12 | 2012-03-14 | 株式会社ニコン | 露光装置、デバイス製造方法、及び液体検出方法 |
WO2006019124A1 (ja) | 2004-08-18 | 2006-02-23 | Nikon Corporation | 露光装置及びデバイス製造方法 |
US7701550B2 (en) | 2004-08-19 | 2010-04-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101285963B1 (ko) | 2004-09-17 | 2013-07-12 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법 및 디바이스 제조 방법 |
US7423720B2 (en) | 2004-11-12 | 2008-09-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7411657B2 (en) | 2004-11-17 | 2008-08-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7446850B2 (en) | 2004-12-03 | 2008-11-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7196770B2 (en) | 2004-12-07 | 2007-03-27 | Asml Netherlands B.V. | Prewetting of substrate before immersion exposure |
US7365827B2 (en) | 2004-12-08 | 2008-04-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7352440B2 (en) | 2004-12-10 | 2008-04-01 | Asml Netherlands B.V. | Substrate placement in immersion lithography |
US7403261B2 (en) | 2004-12-15 | 2008-07-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7528931B2 (en) | 2004-12-20 | 2009-05-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7880860B2 (en) | 2004-12-20 | 2011-02-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7405805B2 (en) | 2004-12-28 | 2008-07-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7491661B2 (en) | 2004-12-28 | 2009-02-17 | Asml Netherlands B.V. | Device manufacturing method, top coat material and substrate |
SG124351A1 (en) | 2005-01-14 | 2006-08-30 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US20090262316A1 (en) * | 2005-01-31 | 2009-10-22 | Nikon Corporation | Exposure apparatus and method for producing device |
US8692973B2 (en) | 2005-01-31 | 2014-04-08 | Nikon Corporation | Exposure apparatus and method for producing device |
KR100938271B1 (ko) | 2005-02-10 | 2010-01-22 | 에이에스엠엘 네델란즈 비.브이. | 침지 액체, 노광 장치, 및 노광 프로세스 |
JP5343958B2 (ja) * | 2005-02-21 | 2013-11-13 | 株式会社ニコン | 露光装置、露光方法、及びデバイス製造方法 |
JP4807086B2 (ja) * | 2005-02-21 | 2011-11-02 | 株式会社ニコン | 露光装置、露光方法、及びデバイス製造方法 |
US7224431B2 (en) | 2005-02-22 | 2007-05-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7378025B2 (en) | 2005-02-22 | 2008-05-27 | Asml Netherlands B.V. | Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
US8018573B2 (en) | 2005-02-22 | 2011-09-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7282701B2 (en) | 2005-02-28 | 2007-10-16 | Asml Netherlands B.V. | Sensor for use in a lithographic apparatus |
US7428038B2 (en) | 2005-02-28 | 2008-09-23 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
US7864437B2 (en) * | 2005-02-28 | 2011-01-04 | Nikon Corporation | Adaptor for microscope and microscope apparatus (microscope-use adaptor and microscope device) |
JP4524207B2 (ja) * | 2005-03-02 | 2010-08-11 | 富士フイルム株式会社 | 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
US7324185B2 (en) | 2005-03-04 | 2008-01-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4622595B2 (ja) * | 2005-03-11 | 2011-02-02 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
US8638422B2 (en) * | 2005-03-18 | 2014-01-28 | Nikon Corporation | Exposure method, exposure apparatus, method for producing device, and method for evaluating exposure apparatus |
US7330238B2 (en) | 2005-03-28 | 2008-02-12 | Asml Netherlands, B.V. | Lithographic apparatus, immersion projection apparatus and device manufacturing method |
US7411654B2 (en) | 2005-04-05 | 2008-08-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
USRE43576E1 (en) | 2005-04-08 | 2012-08-14 | Asml Netherlands B.V. | Dual stage lithographic apparatus and device manufacturing method |
US7291850B2 (en) | 2005-04-08 | 2007-11-06 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20060232753A1 (en) | 2005-04-19 | 2006-10-19 | Asml Holding N.V. | Liquid immersion lithography system with tilted liquid flow |
US7433016B2 (en) | 2005-05-03 | 2008-10-07 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7317507B2 (en) * | 2005-05-03 | 2008-01-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8248577B2 (en) | 2005-05-03 | 2012-08-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7268357B2 (en) * | 2005-05-16 | 2007-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Immersion lithography apparatus and method |
US20090021706A1 (en) * | 2005-06-01 | 2009-01-22 | Nikon Corporation | Immersion fluid containment system and method for immersion lithogtraphy |
US7652746B2 (en) | 2005-06-21 | 2010-01-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7474379B2 (en) | 2005-06-28 | 2009-01-06 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7834974B2 (en) | 2005-06-28 | 2010-11-16 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8054445B2 (en) | 2005-08-16 | 2011-11-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7580112B2 (en) | 2005-08-25 | 2009-08-25 | Nikon Corporation | Containment system for immersion fluid in an immersion lithography apparatus |
US7411658B2 (en) | 2005-10-06 | 2008-08-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2007142366A (ja) * | 2005-10-18 | 2007-06-07 | Canon Inc | 露光装置及びデバイス製造方法 |
US7804577B2 (en) | 2005-11-16 | 2010-09-28 | Asml Netherlands B.V. | Lithographic apparatus |
US7864292B2 (en) | 2005-11-16 | 2011-01-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7633073B2 (en) | 2005-11-23 | 2009-12-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7773195B2 (en) | 2005-11-29 | 2010-08-10 | Asml Holding N.V. | System and method to increase surface tension and contact angle in immersion lithography |
US7420194B2 (en) | 2005-12-27 | 2008-09-02 | Asml Netherlands B.V. | Lithographic apparatus and substrate edge seal |
US7649611B2 (en) | 2005-12-30 | 2010-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2007194484A (ja) * | 2006-01-20 | 2007-08-02 | Toshiba Corp | 液浸露光方法 |
US8045134B2 (en) | 2006-03-13 | 2011-10-25 | Asml Netherlands B.V. | Lithographic apparatus, control system and device manufacturing method |
JP4889331B2 (ja) * | 2006-03-22 | 2012-03-07 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
CN101416076A (zh) * | 2006-04-03 | 2009-04-22 | 株式会社尼康 | 对浸没液体为疏溶的入射表面和光学窗 |
US9477158B2 (en) | 2006-04-14 | 2016-10-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
DE102006021797A1 (de) | 2006-05-09 | 2007-11-15 | Carl Zeiss Smt Ag | Optische Abbildungseinrichtung mit thermischer Dämpfung |
JP2008004928A (ja) * | 2006-05-22 | 2008-01-10 | Nikon Corp | 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法 |
US7567338B2 (en) * | 2006-08-30 | 2009-07-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7843548B2 (en) * | 2006-11-13 | 2010-11-30 | Asml Netherlands B.V. | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system |
US8045135B2 (en) | 2006-11-22 | 2011-10-25 | Asml Netherlands B.V. | Lithographic apparatus with a fluid combining unit and related device manufacturing method |
JP4810411B2 (ja) * | 2006-11-30 | 2011-11-09 | 東京応化工業株式会社 | 処理装置 |
US9632425B2 (en) | 2006-12-07 | 2017-04-25 | Asml Holding N.V. | Lithographic apparatus, a dryer and a method of removing liquid from a surface |
US8634053B2 (en) | 2006-12-07 | 2014-01-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20080225248A1 (en) * | 2007-03-15 | 2008-09-18 | Nikon Corporation | Apparatus, systems and methods for removing liquid from workpiece during workpiece processing |
US20080231823A1 (en) * | 2007-03-23 | 2008-09-25 | Nikon Corporation | Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus |
US8947629B2 (en) | 2007-05-04 | 2015-02-03 | Asml Netherlands B.V. | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
US9013672B2 (en) | 2007-05-04 | 2015-04-21 | Asml Netherlands B.V. | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
JP4533416B2 (ja) * | 2007-09-25 | 2010-09-01 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
US7967960B2 (en) * | 2007-11-06 | 2011-06-28 | United Microelectronics Corp. | Fluid-confining apparatus |
KR101408783B1 (ko) * | 2007-12-07 | 2014-06-17 | 삼성전자주식회사 | 반도체 소자의 제조장치 및 이를 이용한 반도체 소자의제조방법 |
JP2009188241A (ja) * | 2008-02-07 | 2009-08-20 | Toshiba Corp | 液浸露光装置及び液浸露光方法 |
US9176393B2 (en) | 2008-05-28 | 2015-11-03 | Asml Netherlands B.V. | Lithographic apparatus and a method of operating the apparatus |
EP2151940A1 (en) * | 2008-08-05 | 2010-02-10 | Nokia Siemens Networks OY | Communication network element and method transmitting data |
US8477284B2 (en) * | 2008-10-22 | 2013-07-02 | Nikon Corporation | Apparatus and method to control vacuum at porous material using multiple porous materials |
US8634055B2 (en) * | 2008-10-22 | 2014-01-21 | Nikon Corporation | Apparatus and method to control vacuum at porous material using multiple porous materials |
GB2470049B (en) | 2009-05-07 | 2011-03-23 | Zeiss Carl Smt Ag | Optical imaging with reduced immersion liquid evaporation effects |
NL2005207A (en) | 2009-09-28 | 2011-03-29 | Asml Netherlands Bv | Heat pipe, lithographic apparatus and device manufacturing method. |
EP2381310B1 (en) | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Fluid handling structure and lithographic apparatus |
US8476004B2 (en) | 2011-06-27 | 2013-07-02 | United Microelectronics Corp. | Method for forming photoresist patterns |
NL2009139A (en) * | 2011-08-05 | 2013-02-06 | Asml Netherlands Bv | A fluid handling structure, a lithographic apparatus and a device manufacturing method. |
US8701052B1 (en) | 2013-01-23 | 2014-04-15 | United Microelectronics Corp. | Method of optical proximity correction in combination with double patterning technique |
US8627242B1 (en) | 2013-01-30 | 2014-01-07 | United Microelectronics Corp. | Method for making photomask layout |
US9331624B2 (en) * | 2013-02-25 | 2016-05-03 | National Taiwan University | Thrust ripple mapping system in a precision stage and method thereof |
US9230812B2 (en) | 2013-05-22 | 2016-01-05 | United Microelectronics Corp. | Method for forming semiconductor structure having opening |
CN106181675B (zh) * | 2016-07-07 | 2018-04-03 | 中国科学院光电技术研究所 | 一种适用于提升氟化钙凹锥镜粗糙度的磁流体加工工具及加工方法 |
KR102412406B1 (ko) | 2016-12-14 | 2022-06-22 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
US10948830B1 (en) | 2019-12-23 | 2021-03-16 | Waymo Llc | Systems and methods for lithography |
Family Cites Families (138)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US633572A (en) * | 1898-06-02 | 1899-09-26 | William Garrett | Billet-conveyer. |
GB1242527A (en) * | 1967-10-20 | 1971-08-11 | Kodak Ltd | Optical instruments |
US4509852A (en) * | 1980-10-06 | 1985-04-09 | Werner Tabarelli | Apparatus for the photolithographic manufacture of integrated circuit elements |
US4346164A (en) | 1980-10-06 | 1982-08-24 | Werner Tabarelli | Photolithographic method for the manufacture of integrated circuits |
JPS57153433A (en) * | 1981-03-18 | 1982-09-22 | Hitachi Ltd | Manufacturing device for semiconductor |
JPS58202448A (ja) | 1982-05-21 | 1983-11-25 | Hitachi Ltd | 露光装置 |
JPS5919912A (ja) | 1982-07-26 | 1984-02-01 | Hitachi Ltd | 液浸距離保持装置 |
DD221563A1 (de) | 1983-09-14 | 1985-04-24 | Mikroelektronik Zt Forsch Tech | Immersionsobjektiv fuer die schrittweise projektionsabbildung einer maskenstruktur |
DD224448A1 (de) | 1984-03-01 | 1985-07-03 | Zeiss Jena Veb Carl | Einrichtung zur fotolithografischen strukturuebertragung |
JPS6265326A (ja) | 1985-09-18 | 1987-03-24 | Hitachi Ltd | 露光装置 |
JPS63157419A (ja) | 1986-12-22 | 1988-06-30 | Toshiba Corp | 微細パタ−ン転写装置 |
US5237865A (en) * | 1987-08-17 | 1993-08-24 | Kabushiki Kaisha Toshiba | Flow rate measuring apparatus |
JPH04305917A (ja) | 1991-04-02 | 1992-10-28 | Nikon Corp | 密着型露光装置 |
JPH04305915A (ja) | 1991-04-02 | 1992-10-28 | Nikon Corp | 密着型露光装置 |
JPH0562877A (ja) | 1991-09-02 | 1993-03-12 | Yasuko Shinohara | 光によるlsi製造縮小投影露光装置の光学系 |
JPH06124873A (ja) * | 1992-10-09 | 1994-05-06 | Canon Inc | 液浸式投影露光装置 |
JP2753930B2 (ja) | 1992-11-27 | 1998-05-20 | キヤノン株式会社 | 液浸式投影露光装置 |
JPH06304527A (ja) * | 1993-04-26 | 1994-11-01 | Kaijo Corp | 超音波発生装置 |
JPH07220990A (ja) | 1994-01-28 | 1995-08-18 | Hitachi Ltd | パターン形成方法及びその露光装置 |
JPH08316124A (ja) | 1995-05-19 | 1996-11-29 | Hitachi Ltd | 投影露光方法及び露光装置 |
JPH08316125A (ja) | 1995-05-19 | 1996-11-29 | Hitachi Ltd | 投影露光方法及び露光装置 |
JP3397945B2 (ja) * | 1995-07-13 | 2003-04-21 | 株式会社カイジョー | 帯電防止装置及び帯電防止方法 |
US5825043A (en) | 1996-10-07 | 1998-10-20 | Nikon Precision Inc. | Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus |
WO1998024115A1 (fr) | 1996-11-28 | 1998-06-04 | Nikon Corporation | Dispositif d'alignement et procede d'exposition |
US6262796B1 (en) | 1997-03-10 | 2001-07-17 | Asm Lithography B.V. | Positioning device having two object holders |
EP0866375A3 (en) * | 1997-03-17 | 2000-05-24 | Nikon Corporation | Article positioning apparatus and exposing apparatus having the same |
JP3747566B2 (ja) * | 1997-04-23 | 2006-02-22 | 株式会社ニコン | 液浸型露光装置 |
US5886432A (en) * | 1997-04-28 | 1999-03-23 | Ultratech Stepper, Inc. | Magnetically-positioned X-Y stage having six-degrees of freedom |
JP3817836B2 (ja) | 1997-06-10 | 2006-09-06 | 株式会社ニコン | 露光装置及びその製造方法並びに露光方法及びデバイス製造方法 |
AU8747698A (en) * | 1997-08-21 | 1999-03-16 | Nikon Corporation | Positioning device, driving unit, and aligner equipped with the device |
JPH11176727A (ja) | 1997-12-11 | 1999-07-02 | Nikon Corp | 投影露光装置 |
WO1999049504A1 (fr) * | 1998-03-26 | 1999-09-30 | Nikon Corporation | Procede et systeme d'exposition par projection |
US6063267A (en) * | 1998-07-16 | 2000-05-16 | Clearwater Systems, Llc | Apparatus for treating flowing liquid with electromagnetic flux |
JP2000058436A (ja) | 1998-08-11 | 2000-02-25 | Nikon Corp | 投影露光装置及び露光方法 |
JP2001144168A (ja) * | 1999-11-16 | 2001-05-25 | Nikon Corp | 静電チャック、それを有する荷電粒子線露光装置、ウエハ保持方法及びそれを用いたデバイス製造方法 |
US7187503B2 (en) | 1999-12-29 | 2007-03-06 | Carl Zeiss Smt Ag | Refractive projection objective for immersion lithography |
US6995930B2 (en) | 1999-12-29 | 2006-02-07 | Carl Zeiss Smt Ag | Catadioptric projection objective with geometric beam splitting |
US6768117B1 (en) * | 2000-07-25 | 2004-07-27 | Applied Materials, Inc. | Immersion lens with magnetic shield for charged particle beam system |
KR100866818B1 (ko) | 2000-12-11 | 2008-11-04 | 가부시키가이샤 니콘 | 투영광학계 및 이 투영광학계를 구비한 노광장치 |
WO2002091078A1 (en) | 2001-05-07 | 2002-11-14 | Massachusetts Institute Of Technology | Methods and apparatus employing an index matching medium |
JP2002373852A (ja) * | 2001-06-15 | 2002-12-26 | Canon Inc | 露光装置 |
DE10210899A1 (de) | 2002-03-08 | 2003-09-18 | Zeiss Carl Smt Ag | Refraktives Projektionsobjektiv für Immersions-Lithographie |
US7092069B2 (en) | 2002-03-08 | 2006-08-15 | Carl Zeiss Smt Ag | Projection exposure method and projection exposure system |
DE10229818A1 (de) | 2002-06-28 | 2004-01-15 | Carl Zeiss Smt Ag | Verfahren zur Fokusdetektion und Abbildungssystem mit Fokusdetektionssystem |
TWI242691B (en) | 2002-08-23 | 2005-11-01 | Nikon Corp | Projection optical system and method for photolithography and exposure apparatus and method using same |
US7367345B1 (en) | 2002-09-30 | 2008-05-06 | Lam Research Corporation | Apparatus and method for providing a confined liquid for immersion lithography |
US6988326B2 (en) | 2002-09-30 | 2006-01-24 | Lam Research Corporation | Phobic barrier meniscus separation and containment |
US6954993B1 (en) | 2002-09-30 | 2005-10-18 | Lam Research Corporation | Concentric proximity processing head |
US7093375B2 (en) | 2002-09-30 | 2006-08-22 | Lam Research Corporation | Apparatus and method for utilizing a meniscus in substrate processing |
US6788477B2 (en) | 2002-10-22 | 2004-09-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for method for immersion lithography |
CN101713932B (zh) | 2002-11-12 | 2012-09-26 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
CN101470360B (zh) | 2002-11-12 | 2013-07-24 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
SG121818A1 (en) | 2002-11-12 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
DE60335595D1 (de) | 2002-11-12 | 2011-02-17 | Asml Netherlands Bv | Lithographischer Apparat mit Immersion und Verfahren zur Herstellung einer Vorrichtung |
US7110081B2 (en) | 2002-11-12 | 2006-09-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
SG121822A1 (en) | 2002-11-12 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
DE10253679A1 (de) | 2002-11-18 | 2004-06-03 | Infineon Technologies Ag | Optische Einrichtung zur Verwendung bei einem Lithographie-Verfahren, insbesondere zur Herstellung eines Halbleiter-Bauelements, sowie optisches Lithographieverfahren |
SG131766A1 (en) | 2002-11-18 | 2007-05-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
DE10258718A1 (de) | 2002-12-09 | 2004-06-24 | Carl Zeiss Smt Ag | Projektionsobjektiv, insbesondere für die Mikrolithographie, sowie Verfahren zur Abstimmung eines Projektionsobjektives |
US6992750B2 (en) | 2002-12-10 | 2006-01-31 | Canon Kabushiki Kaisha | Exposure apparatus and method |
CN100370533C (zh) | 2002-12-13 | 2008-02-20 | 皇家飞利浦电子股份有限公司 | 用于照射层的方法和用于将辐射导向层的装置 |
US7010958B2 (en) | 2002-12-19 | 2006-03-14 | Asml Holding N.V. | High-resolution gas gauge proximity sensor |
ES2268450T3 (es) | 2002-12-19 | 2007-03-16 | Koninklijke Philips Electronics N.V. | Metodo y dispositivo para irradiar puntos en una capa. |
WO2004057589A1 (en) | 2002-12-19 | 2004-07-08 | Koninklijke Philips Electronics N.V. | Method and device for irradiating spots on a layer |
US6781670B2 (en) | 2002-12-30 | 2004-08-24 | Intel Corporation | Immersion lithography |
US7090964B2 (en) | 2003-02-21 | 2006-08-15 | Asml Holding N.V. | Lithographic printing with polarized light |
US7206059B2 (en) | 2003-02-27 | 2007-04-17 | Asml Netherlands B.V. | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems |
US6943941B2 (en) | 2003-02-27 | 2005-09-13 | Asml Netherlands B.V. | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems |
US7029832B2 (en) | 2003-03-11 | 2006-04-18 | Samsung Electronics Co., Ltd. | Immersion lithography methods using carbon dioxide |
US20050164522A1 (en) | 2003-03-24 | 2005-07-28 | Kunz Roderick R. | Optical fluids, and systems and methods of making and using the same |
KR101177331B1 (ko) | 2003-04-09 | 2012-08-30 | 가부시키가이샤 니콘 | 액침 리소그래피 유체 제어 시스템 |
CN1771463A (zh) | 2003-04-10 | 2006-05-10 | 株式会社尼康 | 用于沉浸光刻装置收集液体的溢出通道 |
JP4656057B2 (ja) | 2003-04-10 | 2011-03-23 | 株式会社ニコン | 液浸リソグラフィ装置用電気浸透素子 |
WO2004090634A2 (en) | 2003-04-10 | 2004-10-21 | Nikon Corporation | Environmental system including vaccum scavange for an immersion lithography apparatus |
JP4650413B2 (ja) | 2003-04-10 | 2011-03-16 | 株式会社ニコン | 液浸リソグフラフィ装置用の移送領域を含む環境システム |
EP2613193B1 (en) | 2003-04-11 | 2016-01-13 | Nikon Corporation | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine |
JP4582089B2 (ja) | 2003-04-11 | 2010-11-17 | 株式会社ニコン | 液浸リソグラフィ用の液体噴射回収システム |
JP4837556B2 (ja) | 2003-04-11 | 2011-12-14 | 株式会社ニコン | 液浸リソグラフィにおける光学素子の洗浄方法 |
SG152078A1 (en) | 2003-04-17 | 2009-05-29 | Nikon Corp | Optical arrangement of autofocus elements for use with immersion lithography |
JP4146755B2 (ja) | 2003-05-09 | 2008-09-10 | 松下電器産業株式会社 | パターン形成方法 |
JP4025683B2 (ja) | 2003-05-09 | 2007-12-26 | 松下電器産業株式会社 | パターン形成方法及び露光装置 |
JP4084710B2 (ja) | 2003-06-12 | 2008-04-30 | 松下電器産業株式会社 | パターン形成方法 |
JP4054285B2 (ja) | 2003-06-12 | 2008-02-27 | 松下電器産業株式会社 | パターン形成方法 |
US6867844B2 (en) | 2003-06-19 | 2005-03-15 | Asml Holding N.V. | Immersion photolithography system and method using microchannel nozzles |
JP4029064B2 (ja) | 2003-06-23 | 2008-01-09 | 松下電器産業株式会社 | パターン形成方法 |
JP4084712B2 (ja) | 2003-06-23 | 2008-04-30 | 松下電器産業株式会社 | パターン形成方法 |
US6809794B1 (en) | 2003-06-27 | 2004-10-26 | Asml Holding N.V. | Immersion photolithography system and method using inverted wafer-projection optics interface |
EP1639391A4 (en) | 2003-07-01 | 2009-04-29 | Nikon Corp | USE OF FLUIDS SPECIFIED ISOTOPICALLY AS OPTICAL ELEMENTS |
US7384149B2 (en) | 2003-07-21 | 2008-06-10 | Asml Netherlands B.V. | Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system |
US7006209B2 (en) | 2003-07-25 | 2006-02-28 | Advanced Micro Devices, Inc. | Method and apparatus for monitoring and controlling imaging in immersion lithography systems |
US7326522B2 (en) | 2004-02-11 | 2008-02-05 | Asml Netherlands B.V. | Device manufacturing method and a substrate |
US7175968B2 (en) | 2003-07-28 | 2007-02-13 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and a substrate |
US7579135B2 (en) | 2003-08-11 | 2009-08-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lithography apparatus for manufacture of integrated circuits |
US7061578B2 (en) | 2003-08-11 | 2006-06-13 | Advanced Micro Devices, Inc. | Method and apparatus for monitoring and controlling imaging in immersion lithography systems |
US7700267B2 (en) | 2003-08-11 | 2010-04-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Immersion fluid for immersion lithography, and method of performing immersion lithography |
US7085075B2 (en) | 2003-08-12 | 2006-08-01 | Carl Zeiss Smt Ag | Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 |
US6844206B1 (en) | 2003-08-21 | 2005-01-18 | Advanced Micro Devices, Llp | Refractive index system monitor and control for immersion lithography |
US6954256B2 (en) | 2003-08-29 | 2005-10-11 | Asml Netherlands B.V. | Gradient immersion lithography |
US7070915B2 (en) | 2003-08-29 | 2006-07-04 | Tokyo Electron Limited | Method and system for drying a substrate |
US7014966B2 (en) | 2003-09-02 | 2006-03-21 | Advanced Micro Devices, Inc. | Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems |
EP3223074A1 (en) | 2003-09-03 | 2017-09-27 | Nikon Corporation | Apparatus and method for immersion lithography for recovering fluid |
US6961186B2 (en) | 2003-09-26 | 2005-11-01 | Takumi Technology Corp. | Contact printing using a magnified mask image |
KR101301804B1 (ko) * | 2003-09-26 | 2013-08-29 | 가부시키가이샤 니콘 | 투영노광장치 및 투영노광장치의 세정방법, 메인터넌스 방법 그리고 디바이스의 제조방법 |
US7369217B2 (en) | 2003-10-03 | 2008-05-06 | Micronic Laser Systems Ab | Method and device for immersion lithography |
US7678527B2 (en) | 2003-10-16 | 2010-03-16 | Intel Corporation | Methods and compositions for providing photoresist with improved properties for contacting liquids |
US20070105050A1 (en) | 2003-11-05 | 2007-05-10 | Dsm Ip Assets B.V. | Method and apparatus for producing microchips |
US7924397B2 (en) | 2003-11-06 | 2011-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Anti-corrosion layer on objective lens for liquid immersion lithography applications |
JP4747263B2 (ja) | 2003-11-24 | 2011-08-17 | カール・ツァイス・エスエムティー・ゲーエムベーハー | オブジェクティブにおける光学素子のための保持装置 |
US7545481B2 (en) | 2003-11-24 | 2009-06-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7125652B2 (en) | 2003-12-03 | 2006-10-24 | Advanced Micro Devices, Inc. | Immersion lithographic process using a conforming immersion medium |
EP1700163A1 (en) | 2003-12-15 | 2006-09-13 | Carl Zeiss SMT AG | Objective as a microlithography projection objective with at least one liquid lens |
KR101200654B1 (ko) | 2003-12-15 | 2012-11-12 | 칼 짜이스 에스엠티 게엠베하 | 고 개구율 및 평평한 단부면을 가진 투사 대물렌즈 |
US7460206B2 (en) | 2003-12-19 | 2008-12-02 | Carl Zeiss Smt Ag | Projection objective for immersion lithography |
WO2005059645A2 (en) | 2003-12-19 | 2005-06-30 | Carl Zeiss Smt Ag | Microlithography projection objective with crystal elements |
US20050185269A1 (en) | 2003-12-19 | 2005-08-25 | Carl Zeiss Smt Ag | Catadioptric projection objective with geometric beam splitting |
US7589818B2 (en) | 2003-12-23 | 2009-09-15 | Asml Netherlands B.V. | Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus |
US7394521B2 (en) | 2003-12-23 | 2008-07-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7119884B2 (en) | 2003-12-24 | 2006-10-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20050147920A1 (en) | 2003-12-30 | 2005-07-07 | Chia-Hui Lin | Method and system for immersion lithography |
US7088422B2 (en) | 2003-12-31 | 2006-08-08 | International Business Machines Corporation | Moving lens for immersion optical lithography |
JP4371822B2 (ja) | 2004-01-06 | 2009-11-25 | キヤノン株式会社 | 露光装置 |
JP4429023B2 (ja) | 2004-01-07 | 2010-03-10 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
US20050153424A1 (en) | 2004-01-08 | 2005-07-14 | Derek Coon | Fluid barrier with transparent areas for immersion lithography |
KR101407204B1 (ko) | 2004-01-14 | 2014-06-13 | 칼 짜이스 에스엠티 게엠베하 | 투영 대물렌즈 |
EP1716457B9 (en) | 2004-01-16 | 2012-04-04 | Carl Zeiss SMT GmbH | Projection system with a polarization-modulating element having a variable thickness profile |
WO2005069078A1 (en) | 2004-01-19 | 2005-07-28 | Carl Zeiss Smt Ag | Microlithographic projection exposure apparatus with immersion projection lens |
DE602005019689D1 (de) | 2004-01-20 | 2010-04-15 | Zeiss Carl Smt Ag | Belichtungsvorrichtung und messeinrichtung für eine projektionslinse |
US7026259B2 (en) | 2004-01-21 | 2006-04-11 | International Business Machines Corporation | Liquid-filled balloons for immersion lithography |
US7391501B2 (en) | 2004-01-22 | 2008-06-24 | Intel Corporation | Immersion liquids with siloxane polymer for immersion lithography |
WO2005074606A2 (en) | 2004-02-03 | 2005-08-18 | Rochester Institute Of Technology | Method of photolithography using a fluid and a system thereof |
WO2005076084A1 (en) | 2004-02-09 | 2005-08-18 | Carl Zeiss Smt Ag | Projection objective for a microlithographic projection exposure apparatus |
US7050146B2 (en) | 2004-02-09 | 2006-05-23 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101115111B1 (ko) | 2004-02-13 | 2012-04-16 | 칼 짜이스 에스엠티 게엠베하 | 마이크로 리소그래프 투영 노광 장치 투영 대물 렌즈 |
JP2007523383A (ja) | 2004-02-18 | 2007-08-16 | コーニング インコーポレイテッド | 深紫外光による大開口数結像のための反射屈折結像光学系 |
US20050205108A1 (en) | 2004-03-16 | 2005-09-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for immersion lithography lens cleaning |
US7027125B2 (en) | 2004-03-25 | 2006-04-11 | International Business Machines Corporation | System and apparatus for photolithography |
US7084960B2 (en) | 2004-03-29 | 2006-08-01 | Intel Corporation | Lithography using controlled polarization |
JP4264038B2 (ja) * | 2004-07-13 | 2009-05-13 | パナソニック株式会社 | 液浸露光用の液体及びパターン形成方法 |
-
2004
- 2004-03-29 KR KR1020057019188A patent/KR101177331B1/ko active IP Right Grant
- 2004-03-29 KR KR1020117018017A patent/KR20110104084A/ko not_active Application Discontinuation
- 2004-03-29 JP JP2006509534A patent/JP4488004B2/ja not_active Expired - Lifetime
- 2004-03-29 WO PCT/US2004/009911 patent/WO2004093159A2/en active Application Filing
- 2004-04-09 TW TW093109876A patent/TWI372412B/zh not_active IP Right Cessation
- 2004-04-09 TW TW096127403A patent/TW200801847A/zh unknown
-
2005
- 2005-09-29 US US11/237,650 patent/US7339650B2/en not_active Expired - Fee Related
-
2007
- 2007-01-17 US US11/653,835 patent/US20070115453A1/en not_active Abandoned
- 2007-07-25 US US11/878,547 patent/US8102501B2/en not_active Expired - Fee Related
- 2007-07-25 US US11/878,540 patent/US8497973B2/en not_active Expired - Fee Related
-
2008
- 2008-11-14 US US12/292,252 patent/US9618852B2/en not_active Expired - Fee Related
- 2008-11-14 US US12/292,251 patent/US8797500B2/en not_active Expired - Fee Related
-
2010
- 2010-02-05 JP JP2010024368A patent/JP5428909B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-27 JP JP2013200777A patent/JP5679023B2/ja not_active Expired - Fee Related
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010135857A (ja) * | 2002-11-12 | 2010-06-17 | Asml Netherlands Bv | リソグラフィ装置およびデバイス製造方法 |
JP2010157766A (ja) * | 2003-05-13 | 2010-07-15 | Asml Netherlands Bv | リソグラフィ装置 |
JP2016026309A (ja) * | 2003-09-03 | 2016-02-12 | 株式会社ニコン | 液浸リソグラフィのための流体の供給装置及び方法 |
JP2009044168A (ja) * | 2003-09-03 | 2009-02-26 | Nikon Corp | 液浸リソグラフィのための流体の供給装置及び方法 |
JP2014197716A (ja) * | 2003-09-03 | 2014-10-16 | 株式会社ニコン | 液浸リソグラフィのための流体の供給装置及び方法 |
JP2009182359A (ja) * | 2003-10-28 | 2009-08-13 | Asml Netherlands Bv | リソグラフィ装置 |
JP2010206225A (ja) * | 2003-10-28 | 2010-09-16 | Asml Netherlands Bv | リソグラフィ装置 |
JP2007513518A (ja) * | 2003-12-03 | 2007-05-24 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 適応浸漬媒体を使用した浸漬リソグラフィプロセス |
JP4848956B2 (ja) * | 2004-11-01 | 2011-12-28 | 株式会社ニコン | 露光装置、露光方法、及びデバイス製造方法 |
US8922754B2 (en) | 2004-11-01 | 2014-12-30 | Nikon Corporation | Immersion exposure apparatus and device fabricating method with two substrate stages and metrology station |
JP2011082538A (ja) * | 2004-11-01 | 2011-04-21 | Nikon Corp | 露光装置及びデバイス製造方法 |
US8330939B2 (en) | 2004-11-01 | 2012-12-11 | Nikon Corporation | Immersion exposure apparatus and device manufacturing method with a liquid recovery port provided on at least one of a first stage and second stage |
US9709900B2 (en) | 2004-11-01 | 2017-07-18 | Nikon Corporation | Exposure apparatus and device fabricating method |
JPWO2006049134A1 (ja) * | 2004-11-01 | 2008-05-29 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
JP4679371B2 (ja) * | 2005-01-14 | 2011-04-27 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置およびデバイス製造方法 |
JP2006196905A (ja) * | 2005-01-14 | 2006-07-27 | Asml Netherlands Bv | リソグラフィ装置およびデバイス製造方法 |
JP2010109395A (ja) * | 2005-01-14 | 2010-05-13 | Asml Netherlands Bv | リソグラフィ装置およびデバイス製造方法 |
JP2018205781A (ja) * | 2005-03-23 | 2018-12-27 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
JP2014168068A (ja) * | 2007-03-15 | 2014-09-11 | Nikon Corp | 液浸リソグラフィマシンにおける基板交換の間に、液浸流体を光学アセンブリに隣接して保持する装置および方法 |
JP2009152582A (ja) * | 2007-12-03 | 2009-07-09 | Asml Netherlands Bv | リソグラフィ装置及びデバイス製造方法 |
US8149379B2 (en) | 2007-12-03 | 2012-04-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2018022198A (ja) * | 2012-04-10 | 2018-02-08 | 株式会社ニコン | 液浸部材、露光装置、及びデバイス製造方法 |
JP2022001953A (ja) * | 2016-01-13 | 2022-01-06 | エーエスエムエル ネザーランズ ビー.ブイ. | 流体ハンドリング構造及びリソグラフィ装置 |
JP7241828B2 (ja) | 2016-01-13 | 2023-03-17 | エーエスエムエル ネザーランズ ビー.ブイ. | 流体ハンドリング構造及びリソグラフィ装置 |
US11614689B2 (en) | 2016-01-13 | 2023-03-28 | Asml Netherlands B.V. | Fluid handling structure and lithographic apparatus |
Also Published As
Publication number | Publication date |
---|---|
US8497973B2 (en) | 2013-07-30 |
US9618852B2 (en) | 2017-04-11 |
KR20050121715A (ko) | 2005-12-27 |
JP2014013939A (ja) | 2014-01-23 |
WO2004093159A2 (en) | 2004-10-28 |
TW200801847A (en) | 2008-01-01 |
JP2010161383A (ja) | 2010-07-22 |
WO2004093159A3 (en) | 2005-03-17 |
US20090075211A1 (en) | 2009-03-19 |
US20090075212A1 (en) | 2009-03-19 |
JP5679023B2 (ja) | 2015-03-04 |
KR101177331B1 (ko) | 2012-08-30 |
JP4488004B2 (ja) | 2010-06-23 |
US8102501B2 (en) | 2012-01-24 |
US20070115453A1 (en) | 2007-05-24 |
TWI372412B (en) | 2012-09-11 |
US20070263184A1 (en) | 2007-11-15 |
US20060023184A1 (en) | 2006-02-02 |
US8797500B2 (en) | 2014-08-05 |
JP5428909B2 (ja) | 2014-02-26 |
US7339650B2 (en) | 2008-03-04 |
KR20110104084A (ko) | 2011-09-21 |
TW200507014A (en) | 2005-02-16 |
US20070268468A1 (en) | 2007-11-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5679023B2 (ja) | 液浸リソグラフィ流体制御システム | |
JP6409853B2 (ja) | 液浸露光装置及びデバイス製造方法 | |
JP4514747B2 (ja) | リソグラフィ装置、デバイス製造方法および制御システム | |
JP5290333B2 (ja) | リソグラフィ装置およびデバイス製造方法 | |
US20100231875A2 (en) | Lithographic Apparatus and Device Manufacturing Method | |
JP4958930B2 (ja) | 液浸リソグラフィ装置及びデバイス製造方法 | |
KR101442032B1 (ko) | 리소그래피 장치 및 액체의 거동을 제어하는 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070323 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070323 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091208 |
|
A524 | Written submission of copy of amendment under section 19 (pct) |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20100205 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100309 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100322 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130409 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4488004 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130409 Year of fee payment: 3 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130409 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130409 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130409 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140409 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |