JP2006302950A - 不揮発性半導体装置および不揮発性半導体装置の製造方法 - Google Patents

不揮発性半導体装置および不揮発性半導体装置の製造方法 Download PDF

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Publication number
JP2006302950A
JP2006302950A JP2005118505A JP2005118505A JP2006302950A JP 2006302950 A JP2006302950 A JP 2006302950A JP 2005118505 A JP2005118505 A JP 2005118505A JP 2005118505 A JP2005118505 A JP 2005118505A JP 2006302950 A JP2006302950 A JP 2006302950A
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Prior art keywords
insulating film
gates
semiconductor device
floating
film
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JP2005118505A
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Japanese (ja)
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JP2006302950A5 (enExample
Inventor
Yasuaki Yonemochi
泰明 米持
Hisakazu Otoi
尚和 音居
Akio Nishida
彰男 西田
Shigeru Shiratake
茂 白竹
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Renesas Technology Corp
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Renesas Technology Corp
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Priority to JP2005118505A priority Critical patent/JP2006302950A/ja
Priority to US11/402,972 priority patent/US7705392B2/en
Publication of JP2006302950A publication Critical patent/JP2006302950A/ja
Publication of JP2006302950A5 publication Critical patent/JP2006302950A5/ja
Priority to US12/613,057 priority patent/US20100044772A1/en
Priority to US12/727,890 priority patent/US8211777B2/en
Priority to US13/488,015 priority patent/US8669172B2/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/68—Floating-gate IGFETs
    • H10D30/6891—Floating-gate IGFETs characterised by the shapes, relative sizes or dispositions of the floating gate electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/031—Manufacture or treatment of data-storage electrodes
    • H10D64/035—Manufacture or treatment of data-storage electrodes comprising conductor-insulator-conductor-insulator-semiconductor structures

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2005118505A 2005-04-15 2005-04-15 不揮発性半導体装置および不揮発性半導体装置の製造方法 Pending JP2006302950A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005118505A JP2006302950A (ja) 2005-04-15 2005-04-15 不揮発性半導体装置および不揮発性半導体装置の製造方法
US11/402,972 US7705392B2 (en) 2005-04-15 2006-04-13 Nonvolatile semiconductor device and method of manufacturing nonvolatile semiconductor device
US12/613,057 US20100044772A1 (en) 2005-04-15 2009-11-05 Nonvolatile semiconductor device and method of manufacturing nonvolatile semiconductor device
US12/727,890 US8211777B2 (en) 2005-04-15 2010-03-19 Method of manufacturing nonvolatile semiconductor device
US13/488,015 US8669172B2 (en) 2005-04-15 2012-06-04 Method of manufacturing nonvolatile semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005118505A JP2006302950A (ja) 2005-04-15 2005-04-15 不揮発性半導体装置および不揮発性半導体装置の製造方法

Related Child Applications (1)

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JP2012005997A Division JP5526162B2 (ja) 2012-01-16 2012-01-16 不揮発性半導体装置および不揮発性半導体装置の製造方法

Publications (2)

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JP2006302950A true JP2006302950A (ja) 2006-11-02
JP2006302950A5 JP2006302950A5 (enExample) 2008-05-22

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JP2005118505A Pending JP2006302950A (ja) 2005-04-15 2005-04-15 不揮発性半導体装置および不揮発性半導体装置の製造方法

Country Status (2)

Country Link
US (4) US7705392B2 (enExample)
JP (1) JP2006302950A (enExample)

Cited By (17)

* Cited by examiner, † Cited by third party
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JP2007088283A (ja) * 2005-09-22 2007-04-05 Renesas Technology Corp 不揮発性半導体記憶装置と半導体装置および、不揮発性半導体記憶装置の製造方法
KR100843044B1 (ko) 2007-08-20 2008-07-01 주식회사 하이닉스반도체 반도체 소자의 제조방법
JP2009027161A (ja) * 2007-07-18 2009-02-05 Hynix Semiconductor Inc フラッシュメモリ素子の製造方法
JP2009194305A (ja) * 2008-02-18 2009-08-27 Toshiba Corp 半導体記憶装置及びその製造方法
JP2009206152A (ja) * 2008-02-26 2009-09-10 Toshiba Corp 半導体記憶装置及びその製造方法
JP2010027922A (ja) * 2008-07-22 2010-02-04 Toshiba Corp 半導体記憶装置及びその製造方法
US7795092B2 (en) 2007-06-27 2010-09-14 Kabushiki Kaisha Toshiba Semiconductor device and manufacturing method thereof
JP2010225786A (ja) * 2009-03-23 2010-10-07 Toshiba Corp 半導体記憶装置及びその半導体記憶装置の製造方法
US7884415B2 (en) 2008-06-10 2011-02-08 Kabushiki Kaisha Toshiba Semiconductor memory device having multiple air gaps in interelectrode insulating film
US8008704B2 (en) 2008-02-15 2011-08-30 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method of manufacturing the same
US20120238089A1 (en) * 2005-04-15 2012-09-20 Renesas Electronics Corporation Method of manufacturing nonvolatile semiconductor device
US8357966B2 (en) 2010-03-23 2013-01-22 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing semiconductor device
US8563421B2 (en) 2007-08-06 2013-10-22 Samsung Electronics Co., Ltd. Method of fabricating semiconductor device
US8609507B2 (en) 2011-05-04 2013-12-17 Hynix Semiconductor Inc. Semiconductor device and method of manufacturing the same
KR20140038824A (ko) * 2012-09-21 2014-03-31 삼성전자주식회사 반도체 소자 및 그의 제조 방법
US9006815B2 (en) 2011-02-25 2015-04-14 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method for manufacturing the same
CN105990324A (zh) * 2015-02-15 2016-10-05 华邦电子股份有限公司 半导体元件及其制造方法

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JP2009212218A (ja) * 2008-03-03 2009-09-17 Toshiba Corp 半導体記憶装置及びその製造方法
US7915124B2 (en) * 2008-07-09 2011-03-29 Sandisk Corporation Method of forming dielectric layer above floating gate for reducing leakage current
US7919809B2 (en) * 2008-07-09 2011-04-05 Sandisk Corporation Dielectric layer above floating gate for reducing leakage current
US8207036B2 (en) * 2008-09-30 2012-06-26 Sandisk Technologies Inc. Method for forming self-aligned dielectric cap above floating gate
JP2010283127A (ja) * 2009-06-04 2010-12-16 Toshiba Corp 半導体装置およびその製造方法
US8492224B2 (en) * 2010-06-20 2013-07-23 Sandisk Technologies Inc. Metal control gate structures and air gap isolation in non-volatile memory
US20120007165A1 (en) * 2010-07-12 2012-01-12 Samsung Electronics Co., Ltd. Semiconductor devices
KR20120015178A (ko) * 2010-08-11 2012-02-21 삼성전자주식회사 반도체 소자 및 반도체 소자 제조 방법
KR20120027906A (ko) * 2010-09-14 2012-03-22 삼성전자주식회사 반도체 소자 및 반도체 소자 제조 방법
JP5570953B2 (ja) 2010-11-18 2014-08-13 株式会社東芝 不揮発性半導体記憶装置および不揮発性半導体記憶装置の製造方法
SG10201408390TA (en) * 2010-11-18 2015-01-29 Toshiba Kk Nonvolatile semiconductor memory device and manufacturing method of nonvolatile semiconductor memory device
JP5591668B2 (ja) * 2010-11-30 2014-09-17 株式会社東芝 不揮発性半導体記憶装置および不揮発性半導体記憶装置の製造方法
US8575000B2 (en) 2011-07-19 2013-11-05 SanDisk Technologies, Inc. Copper interconnects separated by air gaps and method of making thereof
JP2013042068A (ja) * 2011-08-19 2013-02-28 Toshiba Corp 不揮発性半導体記憶装置とその製造方法
US9136128B2 (en) 2011-08-31 2015-09-15 Micron Technology, Inc. Methods and apparatuses including memory cells with air gaps and other low dielectric constant materials
JP2013089859A (ja) * 2011-10-20 2013-05-13 Toshiba Corp 半導体装置の製造方法
KR101813513B1 (ko) * 2011-11-30 2018-01-02 삼성전자주식회사 반도체 소자 및 반도체 소자의 제조 방법
JP5485309B2 (ja) * 2012-01-30 2014-05-07 株式会社東芝 半導体装置及びその製造方法
JP2013197187A (ja) * 2012-03-16 2013-09-30 Toshiba Corp 半導体装置及びその製造方法
JP5889118B2 (ja) 2012-06-13 2016-03-22 株式会社東芝 半導体装置及びその製造方法
TWI464831B (zh) * 2012-06-27 2014-12-11 Powerchip Technology Corp 半導體元件的製造方法
JP5796029B2 (ja) 2013-02-22 2015-10-21 株式会社東芝 半導体装置および半導体装置の製造方法
US9543310B2 (en) 2014-09-10 2017-01-10 Kabushiki Kaisha Toshiba Semiconductor storage device having communicated air gaps between adjacent memory cells
US9748311B2 (en) * 2014-11-07 2017-08-29 Micron Technology, Inc. Cross-point memory and methods for fabrication of same
CN107293545B (zh) * 2016-03-30 2020-04-07 中芯国际集成电路制造(上海)有限公司 半导体存储器件及其制造方法
US10453855B2 (en) 2017-08-11 2019-10-22 Micron Technology, Inc. Void formation in charge trap structures
US10446572B2 (en) 2017-08-11 2019-10-15 Micron Technology, Inc. Void formation for charge trap structures
US10680006B2 (en) 2017-08-11 2020-06-09 Micron Technology, Inc. Charge trap structure with barrier to blocking region
US10164009B1 (en) 2017-08-11 2018-12-25 Micron Technology, Inc. Memory device including voids between control gates
US10665499B2 (en) * 2018-06-28 2020-05-26 Intel Corporation Integrated circuit with airgaps to control capacitance
US11450601B2 (en) * 2019-09-18 2022-09-20 Micron Technology, Inc. Assemblies comprising memory cells and select gates
CN113035713B (zh) * 2019-12-24 2023-12-01 华邦电子股份有限公司 存储器结构及其制造方法
TWI797467B (zh) * 2020-08-03 2023-04-01 華邦電子股份有限公司 非揮發性記憶體結構及其製造方法
CN114256252B (zh) * 2020-09-22 2024-10-29 华邦电子股份有限公司 非易失性存储器结构及其制造方法
US11322623B2 (en) * 2020-09-29 2022-05-03 Winbond Electronics Corp. Non-volatile memory structure and method of manufacturing the same

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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120238089A1 (en) * 2005-04-15 2012-09-20 Renesas Electronics Corporation Method of manufacturing nonvolatile semiconductor device
US8669172B2 (en) * 2005-04-15 2014-03-11 Renesas Electronics Corporation Method of manufacturing nonvolatile semiconductor device
JP2007088283A (ja) * 2005-09-22 2007-04-05 Renesas Technology Corp 不揮発性半導体記憶装置と半導体装置および、不揮発性半導体記憶装置の製造方法
US7795092B2 (en) 2007-06-27 2010-09-14 Kabushiki Kaisha Toshiba Semiconductor device and manufacturing method thereof
JP2009027161A (ja) * 2007-07-18 2009-02-05 Hynix Semiconductor Inc フラッシュメモリ素子の製造方法
KR101010798B1 (ko) * 2007-07-18 2011-01-25 주식회사 하이닉스반도체 플래시 메모리 소자의 제조 방법
KR101356695B1 (ko) * 2007-08-06 2014-01-29 삼성전자주식회사 반도체 소자의 제조 방법
US8563421B2 (en) 2007-08-06 2013-10-22 Samsung Electronics Co., Ltd. Method of fabricating semiconductor device
KR100843044B1 (ko) 2007-08-20 2008-07-01 주식회사 하이닉스반도체 반도체 소자의 제조방법
US8008704B2 (en) 2008-02-15 2011-08-30 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method of manufacturing the same
US8349686B2 (en) 2008-02-15 2013-01-08 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method of manufacturing the same
JP2009194305A (ja) * 2008-02-18 2009-08-27 Toshiba Corp 半導体記憶装置及びその製造方法
US7915156B2 (en) 2008-02-26 2011-03-29 Kabushiki Kaisha Toshiba Semiconductor memory device and method for manufacturing the same
JP2009206152A (ja) * 2008-02-26 2009-09-10 Toshiba Corp 半導体記憶装置及びその製造方法
US7884415B2 (en) 2008-06-10 2011-02-08 Kabushiki Kaisha Toshiba Semiconductor memory device having multiple air gaps in interelectrode insulating film
US8158479B2 (en) 2008-07-22 2012-04-17 Kabushiki Kaisha Toshiba Semiconductor memory device and manufacturing method thereof
US8581325B2 (en) 2008-07-22 2013-11-12 Kabushiki Kaisha Toshiba Semiconductor memory device and manufacturing method thereof
JP2010027922A (ja) * 2008-07-22 2010-02-04 Toshiba Corp 半導体記憶装置及びその製造方法
US8253188B2 (en) 2009-03-23 2012-08-28 Kabushiki Kaisha Toshiba Semiconductor storage device and method for manufacturing the same
JP2010225786A (ja) * 2009-03-23 2010-10-07 Toshiba Corp 半導体記憶装置及びその半導体記憶装置の製造方法
US8357966B2 (en) 2010-03-23 2013-01-22 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing semiconductor device
US8624314B2 (en) 2010-03-23 2014-01-07 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing semiconductor device
US9006815B2 (en) 2011-02-25 2015-04-14 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method for manufacturing the same
US8609507B2 (en) 2011-05-04 2013-12-17 Hynix Semiconductor Inc. Semiconductor device and method of manufacturing the same
KR20140038824A (ko) * 2012-09-21 2014-03-31 삼성전자주식회사 반도체 소자 및 그의 제조 방법
KR102054264B1 (ko) * 2012-09-21 2019-12-10 삼성전자주식회사 반도체 소자 및 그의 제조 방법
CN105990324A (zh) * 2015-02-15 2016-10-05 华邦电子股份有限公司 半导体元件及其制造方法

Also Published As

Publication number Publication date
US8669172B2 (en) 2014-03-11
US7705392B2 (en) 2010-04-27
US20120238089A1 (en) 2012-09-20
US20100044772A1 (en) 2010-02-25
US20100190330A1 (en) 2010-07-29
US20060231884A1 (en) 2006-10-19
US8211777B2 (en) 2012-07-03

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