JP2005507160A5 - - Google Patents
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- JP2005507160A5 JP2005507160A5 JP2003537103A JP2003537103A JP2005507160A5 JP 2005507160 A5 JP2005507160 A5 JP 2005507160A5 JP 2003537103 A JP2003537103 A JP 2003537103A JP 2003537103 A JP2003537103 A JP 2003537103A JP 2005507160 A5 JP2005507160 A5 JP 2005507160A5
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- 239000004065 semiconductor Substances 0.000 claims 44
- 230000005669 field effect Effects 0.000 claims 23
- 239000000758 substrate Substances 0.000 claims 18
- 239000004020 conductor Substances 0.000 claims 6
- 230000005684 electric field Effects 0.000 claims 6
- 239000003989 dielectric material Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 229920005591 polysilicon Polymers 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
Claims (36)
- 半導体装置であって、
a)半導体基板と、
b)半導体基板の中の第1の導電性型式の第1の領域と、
c)半導体基板の中の第2の導電性型式の第2の領域と、第1の領域と第2の領域とにおいてpnジャンクションを形成し、
d)第1と第2の領域の一方における電界に影響を与えるための半導体基板により集積された複数の電荷制御電極であって、相互に異なるバイアスをされるように複数個の電荷制御電極における少なくとも2つが電気的に減結合されており、かつ、
e)積み重ねられた電荷制御電極の各々の周りに配置された誘電体材料と、を包含する半導体装置。 - 請求項1に記載の半導体装置であって、そこに当該半導体装置はパワーダイオードである半導体装置。
- 請求項1に記載の半導体装置であって、そこに当該半導体装置はバイポーラトランジスタである、半導体装置。
- 請求項1に記載の半導体装置であって、そこに当該半導体基板はトレンチを包含し、またそこに当該複数の電荷制御電極における電荷制御電極はトレンチ内に積み重ねられている、半導体装置。
- 請求項1に記載の半導体装置であって、そこに第1の導電性型式はn型式であり、また第2の導電性型式はp型式である、半導体装置。
- 請求項1に記載の半導体装置であって、そこに当該複数の電荷制御電極の各々はポリシリコンを包含する、半導体装置。
- 請求項1に記載の半導体装置であって、そこに当該複数の電荷制御電極は、第1の領域の中に一般に均一な電界を作るためにバイアスされる半導体装置。
- 電界効果トランジスタであって、
a)主表面、ドリフト領域、及びドレイン領域を持つ第1の導電性型式の半導体基板と、
b)半導体基板の中に形成された第2の導電性型式のウエル領域と、
c)ウエル領域の中に形成された第1の導電性型式のソース領域と、
d)ソース領域に隣接して形成されたゲート電極と、
e)ドリフト領域内に埋め込まれた複数の積み重ねられた電荷制御電極であって、複数個の電荷制御電極における少なくとも2つが相互に異なるバイアスをされるのに適合され、
f)積み重ねられた電荷制御電極の各々の周りに配置された誘電体材料と、
を包含する電界効果トランジスタ。 - 請求項8に記載の電界効果トランジスタであって、そこに当該複数の積み重ねられた電荷制御電極はゲート電極の直接下にある、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、そこに当該ゲート電極はトレンチに入れられたゲート電極である、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、更に、当該複数の電荷制御電極内の電荷制御電極を夫々バイアス出来る複数のバイアス素子を包含する、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、そこに当該複数の積み重ねられた電荷制御電極は、ゲート電極の一つの側面に配置されている、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、そこに当該複数の積み重ねられた電荷制御電極は、第1の複数の積み重ねられた制御電極であり、またそこに電界効果トランジスタは、更に第2の複数の積み重ねられた制御電極を含む、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、そこに当該複数の積み重ねられた電荷制御電極は、半導体基板のドリフト領域内の電界プロファイルを調節するのに適合し、そのため、ドリフト領域の至る所の電界の大きさは一般に均一で、2x105V/cmを超える、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、更にトレンチを包含し、そこに当該複数の積み重ねられた電荷制御電極内の電荷制御電極は、トレンチ内に配置される、電界効果トランジスタ。
- 請求項8に記載の電界効果トランジスタであって、そこに当該電界効果トランジスタは、パワー金属酸化物半導体電界効果トランジスタ(MOSFET)である、電界効果トランジスタ。
- 半導体装置を形成するための方法であって、前記方法が、
a)第1の導電性型式の第1の領域を持つ半導体基板を準備し、
b)半導体基板の中に第2の導電性型式の一つの領域を形成し、第1の領域と第2の導電性型式の領域とにおいてpnジャンクションを形成し、
c)第1の電荷制御電極を形成し、
d)第2の電荷制御電極を形成し、第1の領域と第2の導電性型式の領域の1つにおける電界に影響を与えるように、前記第1,2の電荷制御電極が半導体基板により集積され、第1の電荷制御電極が、第2の電荷制御電極とは異なるバイアスをされるのに適合している、半導体装置を形成するための方法。 - 請求項17に記載の方法であって、更に当該半導体基板の中にトレンチを形成することを包含し、またそこに当該第1の電荷制御電極の形成は、導電性材料をトレンチの中に付着させ、そして次に付着した導電性材料をエッチングすることを包含する、半導体装置を形成するための方法。
- 請求項18に記載の方法であって、そこに当該導電性材料は第1の導電性材料であり、またそこに第2の電荷制御電極の形成は、トレンチの中に第2の導電性材料を付着させ、次に付着した第2の導電性材料をエッチングすることを包含する、半導体装置を形成するための方法。
- 請求項17に記載の方法であって、更に
当該半導体基板の中にトレンチに入れられたゲート構造を形成することを包含する、半導体装置を形成するための方法。 - 請求項17に記載の方法であって、そこに当該第1及び第2の電荷制御電極はポリシリコンを包含する、半導体装置を形成するための方法。
- 請求項17に記載の方法であって、そこに当該方法は、更に複数のバイアス素子を当該半導体基板の上又は中に形成することを包含し、そこに当該バイアス素子は、当該第1及び第2の電荷制御電極を異なる電圧にバイアスするのに適合している、半導体装置を形成するための方法。
- 請求項17に記載の方法であって、そこに当該半導体装置は、パワーMOSFETである、半導体装置を形成するための方法。
- 電界効果トランジスタであって、
a)主表面、ドリフト領域、及びドレイン領域を持つ第1の導電性型式の半導体基板と、
b)当該半導体基板の中に形成された第2の導電性型式のウエル領域と、
c)当該ウエル領域の中に形成された第1の導電性型式のソース領域と、
d)当該ソース領域に結合されたゲート接点層と、
e)当該ソース領域に隣接して形成されたゲート電極と、
f)当該ドリフト領域の中に埋め込まれた電荷制御電極であって、そこに電荷制御電極はソース接点層と異なる電位にバイアスされるのに適合し、またドリフト領域の中の電界を制御するのに適合しており、
g)当該電荷制御電極の周りに配置された誘電体材料と、
を包含する電界効果トランジスタ。 - 請求項24に記載の電界効果トランジスタであって、更に当該電荷制御電極を異なる電位にバイアスするのに適合したバイアス素子を包含する、電界効果トランジスタ。
- 請求項24に記載の電界効果トランジスタであって、そこに当該ゲート電極はトレンチに入れられたゲート電極である、電界効果トランジスタ。
- 請求項24に記載の電界効果トランジスタであって、そこに当該電荷制御電極はゲート電極の直接下にある、電界効果トランジスタ。
- 請求項24に記載の電界効果トランジスタであって、そこに当該電荷制御電極はゲート電極の直接下にあり、またそこに当該ゲート電極はトレンチに入れられたゲート電極である、電界効果トランジスタ。
- 電界効果トランジスタを形成する方法であって、
a)主表面、ドリフト領域、及びドレイン領域を持つ第1の導電性型式の半導体基板を準備し、
b)当該半導体基板の中に第2の導電性型式のウエル領域を形成し、
c)当該ウエル領域の中に第1の導電性型式のソース領域を形成し、
d)当該ソース領域の上にソース接点層を形成し、
e)当該ソース領域に隣接してゲート電極を形成し、
f)当該ドリフト領域の中に電荷制御電極を形成し、そこに電荷制御電極はソース接点層と異なる電位にバイアスされるのに適合し、またドリフト領域の中の電界を制御するのに適合しており、
g)当該電荷制御電極の周りに誘電体材料を形成すること、を包含する電界効果トランジスタを形成する方法。 - 請求項29に記載の方法であって、そこに当該ゲート電極はトレンチに入れられたゲート電極である、電界効果トランジスタを形成する方法。
- 請求項29に記載の方法であって、更に
バイアス素子を形成することを包含し、そこに当該バイアス素子は電荷制御電極をバイアスするのに適合している、バイアス素子を形成する方法。 - 請求項1に記載の半導体装置であって、さらに複数個の電荷制御電極における少なくとも2つが相互にバイアスするように連結するバイアス素子を含む、半導体装置。
- 請求項1に記載の半導体装置であって、複数個の電荷制御電極における少なくとも2つが半導体装置の表面にお互い平行に近接するように配置されている、半導体装置。
- 請求項33に記載の半導体装置であって、複数個の電荷制御電極が、第1および第2の半導体領域における1つに形成された1つまたはそれ以上のトレンチ内にある、半導体装置。
- 請求項33に記載の半導体装置であって、複数個の電荷制御電極が覆っており、第1および第2の半導体領域の1つの表面から絶縁されている、半導体装置。
- 請求項2に記載の半導体装置であって、前記パワーダイオードが第1の領域と連結されたアノード電極と、第2の領域に連結されたカソード電極とを有し、複数個の電荷制御電極がアノード電極とカソード電極の間に位置される、半導体装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/981,583 US6677641B2 (en) | 2001-10-17 | 2001-10-17 | Semiconductor structure with improved smaller forward voltage loss and higher blocking capability |
PCT/US2002/033515 WO2003034470A2 (en) | 2001-10-17 | 2002-10-16 | Semiconductor structure with improved smaller forward voltage loss and higher blocking capability |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005507160A JP2005507160A (ja) | 2005-03-10 |
JP2005507160A5 true JP2005507160A5 (ja) | 2005-12-22 |
Family
ID=25528484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003537103A Pending JP2005507160A (ja) | 2001-10-17 | 2002-10-16 | 半導体装置および電界効果トランジスタならびにそれらの形成方法 |
Country Status (8)
Country | Link |
---|---|
US (3) | US6677641B2 (ja) |
JP (1) | JP2005507160A (ja) |
KR (1) | KR100886420B1 (ja) |
CN (1) | CN100339959C (ja) |
AU (1) | AU2002335103A1 (ja) |
DE (1) | DE10297349T5 (ja) |
TW (1) | TW587328B (ja) |
WO (1) | WO2003034470A2 (ja) |
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-
2001
- 2001-10-17 US US09/981,583 patent/US6677641B2/en not_active Expired - Lifetime
-
2002
- 2002-08-27 US US10/228,420 patent/US6717230B2/en not_active Expired - Fee Related
- 2002-10-16 TW TW091123836A patent/TW587328B/zh not_active IP Right Cessation
- 2002-10-16 KR KR1020047005669A patent/KR100886420B1/ko not_active IP Right Cessation
- 2002-10-16 JP JP2003537103A patent/JP2005507160A/ja active Pending
- 2002-10-16 AU AU2002335103A patent/AU2002335103A1/en not_active Abandoned
- 2002-10-16 WO PCT/US2002/033515 patent/WO2003034470A2/en active Application Filing
- 2002-10-16 CN CNB028251903A patent/CN100339959C/zh not_active Expired - Fee Related
- 2002-10-16 DE DE10297349T patent/DE10297349T5/de not_active Ceased
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2003
- 2003-09-18 US US10/666,034 patent/US6991977B2/en not_active Expired - Fee Related
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