JP2005505690A5 - - Google Patents

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Publication number
JP2005505690A5
JP2005505690A5 JP2003534647A JP2003534647A JP2005505690A5 JP 2005505690 A5 JP2005505690 A5 JP 2005505690A5 JP 2003534647 A JP2003534647 A JP 2003534647A JP 2003534647 A JP2003534647 A JP 2003534647A JP 2005505690 A5 JP2005505690 A5 JP 2005505690A5
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Japan
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tungsten
substrate surface
nucleation layer
angstroms
exposing
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JP2003534647A
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JP4174424B2 (ja
JP2005505690A (ja
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Priority claimed from PCT/US2002/032348 external-priority patent/WO2003031679A2/en
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JP2003534647A 2001-10-10 2002-10-10 一連の堆積技術を用いる耐火性金属層を堆積する方法 Expired - Lifetime JP4174424B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32845101P 2001-10-10 2001-10-10
PCT/US2002/032348 WO2003031679A2 (en) 2001-10-10 2002-10-10 Method for depositing metal layers employing sequential deposition techniques

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JP2008181763A Division JP5048602B2 (ja) 2001-10-10 2008-07-11 一連の堆積技術を用いる耐火性金属層を堆積する方法

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JP2005505690A JP2005505690A (ja) 2005-02-24
JP2005505690A5 true JP2005505690A5 (OSRAM) 2008-08-28
JP4174424B2 JP4174424B2 (ja) 2008-10-29

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JP2003534647A Expired - Lifetime JP4174424B2 (ja) 2001-10-10 2002-10-10 一連の堆積技術を用いる耐火性金属層を堆積する方法
JP2008181763A Expired - Lifetime JP5048602B2 (ja) 2001-10-10 2008-07-11 一連の堆積技術を用いる耐火性金属層を堆積する方法

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Country Status (5)

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US (3) US6797340B2 (OSRAM)
JP (2) JP4174424B2 (OSRAM)
KR (1) KR100978993B1 (OSRAM)
TW (1) TW589684B (OSRAM)
WO (1) WO2003031679A2 (OSRAM)

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