HK1040431A1 - Contact probe and fabrication method thereof - Google Patents

Contact probe and fabrication method thereof

Info

Publication number
HK1040431A1
HK1040431A1 HK02100269A HK02100269A HK1040431A1 HK 1040431 A1 HK1040431 A1 HK 1040431A1 HK 02100269 A HK02100269 A HK 02100269A HK 02100269 A HK02100269 A HK 02100269A HK 1040431 A1 HK1040431 A1 HK 1040431A1
Authority
HK
Hong Kong
Prior art keywords
fabrication method
contact probe
probe
contact
fabrication
Prior art date
Application number
HK02100269A
Other languages
English (en)
Inventor
Haga Tsuyoshi
Okumura Katsuya
Hayasaka Nobuo
Shibata Hideki
Matsunaga Noriaki
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of HK1040431A1 publication Critical patent/HK1040431A1/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • G01R1/06738Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
HK02100269A 2000-06-01 2002-01-15 Contact probe and fabrication method thereof HK1040431A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000164407A JP3773396B2 (ja) 2000-06-01 2000-06-01 コンタクトプローブおよびその製造方法

Publications (1)

Publication Number Publication Date
HK1040431A1 true HK1040431A1 (en) 2002-06-07

Family

ID=18668029

Family Applications (1)

Application Number Title Priority Date Filing Date
HK02100269A HK1040431A1 (en) 2000-06-01 2002-01-15 Contact probe and fabrication method thereof

Country Status (7)

Country Link
US (2) US20020000821A1 (xx)
EP (1) EP1160576B1 (xx)
JP (1) JP3773396B2 (xx)
KR (1) KR100808325B1 (xx)
DE (1) DE60133791T2 (xx)
HK (1) HK1040431A1 (xx)
TW (1) TW548410B (xx)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7321485B2 (en) 1997-04-08 2008-01-22 X2Y Attenuators, Llc Arrangement for energy conditioning
US7274549B2 (en) * 2000-12-15 2007-09-25 X2Y Attenuators, Llc Energy pathway arrangements for energy conditioning
US9054094B2 (en) 1997-04-08 2015-06-09 X2Y Attenuators, Llc Energy conditioning circuit arrangement for integrated circuit
US7301748B2 (en) 1997-04-08 2007-11-27 Anthony Anthony A Universal energy conditioning interposer with circuit architecture
US6603646B2 (en) * 1997-04-08 2003-08-05 X2Y Attenuators, Llc Multi-functional energy conditioner
US7336468B2 (en) * 1997-04-08 2008-02-26 X2Y Attenuators, Llc Arrangement for energy conditioning
US7193831B2 (en) * 2000-10-17 2007-03-20 X2Y Attenuators, Llc Energy pathway arrangement
CN1481603A (zh) * 2000-10-17 2004-03-10 X2Y˥�������޹�˾ 屏蔽汞齐和被屏蔽的能量路径及用于单个或多个带公共参考节点电路的其它元件
WO2002047936A1 (fr) * 2000-12-12 2002-06-20 Japan Science And Technology Corporation Mecanisme de direction pour voiture electrique
US7190179B2 (en) 2001-04-13 2007-03-13 Sumitomo Electric Industries, Ltd. Contact probe
CN100392408C (zh) 2001-12-25 2008-06-04 住友电气工业株式会社 接触探头
JP2004152536A (ja) * 2002-10-29 2004-05-27 Otax Co Ltd 電子部品用ソケット
US7180718B2 (en) * 2003-01-31 2007-02-20 X2Y Attenuators, Llc Shielded energy conditioner
JP3745744B2 (ja) 2003-04-16 2006-02-15 住友電気工業株式会社 金属構造体の製造方法およびその方法により製造した金属構造体
WO2005065097A2 (en) 2003-12-22 2005-07-21 X2Y Attenuators, Llc Internally shielded energy conditioner
US6855010B1 (en) * 2004-01-26 2005-02-15 Chuan Yi Precision Industry Co., Ltd. Terminal for electric connector for communication apparatus
US9476911B2 (en) 2004-05-21 2016-10-25 Microprobe, Inc. Probes with high current carrying capability and laser machining methods
JP2006064676A (ja) 2004-08-30 2006-03-09 Tokyo Electron Ltd プローブ針、プローブ針の製造方法および三次元立体構造の製造方法
US20060079102A1 (en) * 2004-10-13 2006-04-13 The Ludlow Company Lp Cable terminal with flexible contacts
KR100585561B1 (ko) * 2004-10-26 2006-06-07 주식회사 파이컴 수직형 전기적 접촉체 및 그 제조방법
JP2006132982A (ja) * 2004-11-02 2006-05-25 Tokyo Electron Ltd プローブ
JP4700353B2 (ja) * 2005-01-13 2011-06-15 山一電機株式会社 プローブエレメントの製造方法
KR20070107747A (ko) 2005-03-01 2007-11-07 엑스2와이 어테뉴에이터스, 엘.엘.씨 공통평면의 도전체를 갖는 조절기
WO2006093831A2 (en) 2005-03-01 2006-09-08 X2Y Attenuators, Llc Energy conditioner with tied through electrodes
JP2006242685A (ja) * 2005-03-02 2006-09-14 Fuchigami Micro:Kk コンタクトプローブカード
JP2006242774A (ja) * 2005-03-03 2006-09-14 Tokyo Electron Ltd プローブ及びプローブカード
JP4649248B2 (ja) * 2005-03-22 2011-03-09 山一電機株式会社 プローブユニット
JP4884753B2 (ja) 2005-11-22 2012-02-29 日本発條株式会社 導電性接触子ユニットおよび導電性接触子
JP4907191B2 (ja) 2006-02-17 2012-03-28 日本発條株式会社 導電性接触子ユニット
WO2007102401A1 (ja) 2006-03-03 2007-09-13 Nhk Spring Co., Ltd. 導電性接触子ユニット
CN101395481B (zh) 2006-03-03 2012-07-18 日本发条株式会社 导电性接触器单元
KR101390426B1 (ko) 2006-03-07 2014-04-30 엑스2와이 어테뉴에이터스, 엘.엘.씨 에너지 컨디셔너 구조물들
JP4842733B2 (ja) 2006-08-18 2011-12-21 日本発條株式会社 導電性接触子および導電性接触子ユニット
KR100864185B1 (ko) * 2007-01-31 2008-10-17 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
JP2008275488A (ja) * 2007-04-28 2008-11-13 Sankei Engineering:Kk 導電接触ピンおよびピン保持具、電気部品検査装置ならびに電気部品の製造方法
JP2009002845A (ja) * 2007-06-22 2009-01-08 Micronics Japan Co Ltd 接触子及び接続装置
US20090144970A1 (en) * 2007-12-06 2009-06-11 Winmems Technologies Holdings Co., Ltd. Fabricating an array of mems parts on a substrate
US7811849B2 (en) * 2008-01-30 2010-10-12 Winmems Technologies Co., Ltd. Placing a MEMS part on an application platform using a guide mask
KR100984876B1 (ko) 2008-05-08 2010-10-04 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
US8089294B2 (en) * 2008-08-05 2012-01-03 WinMENS Technologies Co., Ltd. MEMS probe fabrication on a reusable substrate for probe card application
US7737714B2 (en) * 2008-11-05 2010-06-15 Winmems Technologies Holdings Co., Ltd. Probe assembly arrangement
US7928751B2 (en) * 2009-02-18 2011-04-19 Winmems Technologies Holdings Co., Ltd. MEMS interconnection pins fabrication on a reusable substrate for probe card application
JP2010243411A (ja) * 2009-04-08 2010-10-28 Japan Electronic Materials Corp 垂直型プローブ
JP2010276579A (ja) * 2009-06-01 2010-12-09 Koyo Technos:Kk 電気接触子およびそれを備える検査治具
JP5903888B2 (ja) * 2010-03-15 2016-04-13 日本電産リード株式会社 接続端子及び検査用治具
US20120176122A1 (en) * 2010-03-30 2012-07-12 Yoshihiro Hirata Contact probe, linked body of contact probes, and manufacturing methods thereof
TW201135239A (en) * 2010-04-02 2011-10-16 Pleader Yamaichi Co Ltd High-frequency vertical elastic probe structure
JP5036892B2 (ja) * 2010-05-10 2012-09-26 株式会社神戸製鋼所 コンタクトプローブ
KR101149758B1 (ko) * 2010-06-30 2012-07-11 리노공업주식회사 프로브
TW201231977A (en) * 2011-01-20 2012-08-01 Pleader Yamaichi Co Ltd Structure of high-frequency vertical spring plate probe card
US8829937B2 (en) * 2011-01-27 2014-09-09 Formfactor, Inc. Fine pitch guided vertical probe array having enclosed probe flexures
KR20130010311A (ko) * 2011-07-18 2013-01-28 주식회사 코리아 인스트루먼트 수직형 프로브 카드
JP2013072658A (ja) 2011-09-26 2013-04-22 Sumitomo Electric Ind Ltd コンタクトプローブの製造方法
JP5699899B2 (ja) * 2011-10-14 2015-04-15 オムロン株式会社 接触子
JP5687172B2 (ja) * 2011-11-01 2015-03-18 三菱電機株式会社 半導体テスト治具およびそれを用いた耐圧測定方法
TW201533449A (zh) * 2014-02-24 2015-09-01 Mpi Corp 具有彈簧套筒式探針之探針裝置
DE102015004151B4 (de) * 2015-03-31 2022-01-27 Feinmetall Gmbh Verfahren zur Herstellung einer Federkontaktstift-Anordnung mit mehreren Federkontaktstiften
JP6728219B2 (ja) * 2015-03-31 2020-07-22 テクノプローベ エス.ピー.エー. 高周波適用のためのバーチカル接触プローブ、及びバーチカル接触プローブをもつ試験ヘッド
JP1558740S (xx) * 2015-11-12 2016-09-12
JP1558200S (xx) * 2015-11-12 2016-09-12
JP1558199S (xx) * 2015-11-12 2016-09-12
KR101813006B1 (ko) * 2016-01-04 2017-12-28 주식회사 아이에스시 반도체 테스트용 콘택터
KR20170119469A (ko) * 2016-04-19 2017-10-27 장용일 전기 단자 테스트용 메쉬형 컨택 핀
JP2018197714A (ja) * 2017-05-24 2018-12-13 山一電機株式会社 Mems型プローブ、及び、これを使用した電気検査用装置
KR102080592B1 (ko) * 2018-12-19 2020-04-20 주식회사 오킨스전자 S-타입 탄성편을 이용하여 3개의 플런저 상호 간의 콘택 특성이 개선되는 데스트 핀
KR102519285B1 (ko) * 2021-02-22 2023-04-17 (주)포인트엔지니어링 전기 전도성 접촉핀 및 이의 제조방법
KR102538834B1 (ko) * 2021-04-15 2023-06-02 (주)위드멤스 프로브 핀
TWI833186B (zh) * 2022-03-29 2024-02-21 大陸商迪科特測試科技(蘇州)有限公司 探針及其彈性結構

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256541A3 (de) * 1986-08-19 1990-03-14 Feinmetall Gesellschaft mit beschrÀ¤nkter Haftung Kontaktiervorrichtung
DE8711110U1 (de) * 1986-08-19 1987-12-17 Feinmetall Gmbh, 7033 Herrenberg Kontaktiervorrichtung
DE3643305A1 (de) * 1986-12-18 1988-06-30 Feinmetall Gmbh Kontaktelement fuer pruefadapter
US5148810A (en) 1990-02-12 1992-09-22 Acuson Corporation Variable origin-variable angle acoustic scanning method and apparatus
US5015947A (en) 1990-03-19 1991-05-14 Tektronix, Inc. Low capacitance probe tip
DE4029829A1 (de) 1990-09-20 1992-04-02 Dornier Medizintechnik Dreidimensionale darstellung von ultraschall-bildern
JPH0629625A (ja) * 1992-07-07 1994-02-04 Nippon Telegr & Teleph Corp <Ntt> 垂直共振器型双安定半導体レーザ
DE69416200T2 (de) * 1993-06-16 1999-06-02 Nitto Denko Corp Sondenkonstruktion
JPH0727789A (ja) 1993-07-09 1995-01-31 Nitto Denko Corp 回路配線板およびその製造方法
US5513430A (en) * 1994-08-19 1996-05-07 Motorola, Inc. Method for manufacturing a probe
KR970707444A (ko) * 1994-10-28 1997-12-01 야마모토 히데키 프로브 구조(probe structure)
JP2706432B2 (ja) 1995-07-24 1998-01-28 日東工業株式会社 電子写真装置用定着ベルト及び定着装置
US5667410A (en) * 1995-11-21 1997-09-16 Everett Charles Technologies, Inc. One-piece compliant probe
JPH09279365A (ja) 1996-04-11 1997-10-28 Mitsubishi Materials Corp 微細構造部品を製造する方法
JPH10303258A (ja) 1997-04-22 1998-11-13 Sumitomo Electric Ind Ltd 電子、電気回路の検査装置
JPH1144708A (ja) 1997-07-24 1999-02-16 Mitsubishi Materials Corp コンタクトプローブおよびその製造方法
JP3458684B2 (ja) 1997-11-28 2003-10-20 三菱マテリアル株式会社 コンタクトプローブ
JPH11191453A (ja) 1997-12-25 1999-07-13 Oputonikusu Seimitsu:Kk 端子板およびその製造方法
JPH11269587A (ja) 1998-03-24 1999-10-05 Toru Yamazaki 電解析出法による合金及びそれを用いた マイクロアレイコネクター
JP3281601B2 (ja) 1998-05-26 2002-05-13 武田産業株式会社 プロ−ブ針およびスプリングプロ−ブ用バネの製造方法
US5989994A (en) * 1998-12-29 1999-11-23 Advantest Corp. Method for producing contact structures
SG75186A1 (en) 1998-11-30 2000-09-19 Advantest Corp Method for producing contact structures
JP2001013166A (ja) 1999-06-28 2001-01-19 Toshiba Corp 半導体装置評価用プローブ構造体及びその製造方法
NL1012695C2 (nl) * 1999-07-23 2001-01-24 Berg Electronics Mfg Contactelement, werkwijze voor het vervaardigen daarvan en connector die hetzelfde omvat.
JP2001342591A (ja) 2000-03-27 2001-12-14 Takayasu Mochizuki 高強度合金及びその製造方法並びにその高強度合金を被覆してなる金属とその高強度合金を用いたマイクロ構造体

Also Published As

Publication number Publication date
DE60133791T2 (de) 2009-06-25
US6784680B2 (en) 2004-08-31
KR20010110168A (ko) 2001-12-12
US20030210063A1 (en) 2003-11-13
TW548410B (en) 2003-08-21
EP1160576A2 (en) 2001-12-05
US20020000821A1 (en) 2002-01-03
EP1160576A3 (en) 2003-07-23
KR100808325B1 (ko) 2008-02-27
JP3773396B2 (ja) 2006-05-10
JP2001343397A (ja) 2001-12-14
DE60133791D1 (de) 2008-06-12
EP1160576B1 (en) 2008-04-30

Similar Documents

Publication Publication Date Title
HK1040431A1 (en) Contact probe and fabrication method thereof
EP1291650A4 (en) BIOSENSOR AND PRODUCTION THEREOF
EP1312281A4 (en) METHOD AND DEVICE FOR MANUFACTURING A BRUSH
EG23122A (en) Pyrrolcarboxamides and pyrrolcarbothioamides
SG112805A1 (en) Semiconductor device and manufacturing method thereof
HK1121526A1 (en) Probe
EP1443332A4 (en) CURRENT SENSOR AND METHOD FOR MANUFACTURING THE SAME
AU9667901A (en) Mycoattractants and mycopesticides
IL156619A0 (en) Semiconductor device and its manufacturing method
EP1387174A4 (en) CONTACT PROBE
EP1460434A4 (en) CONTACT PROBE
SG96197A1 (en) Contact structure and production method thereof
EP1285219A4 (en) DEVICE AND METHOD FOR SURFACE MEASUREMENT
EP1336998A4 (en) ELECTROCHEMICAL DEVICE AND METHOD FOR MANUFACTURING THE SAME
GB0022447D0 (en) Measurement method
AU4037201A (en) Email alert device and method
SG96218A1 (en) Sic-formed materials and method for manufacturing same
GB0020808D0 (en) Scratch resisteance testing apparatrus and method
EP1343200A4 (en) METHOD FOR MANUFACTURING A RECTANGULAR WAFER AND WAFER OBTAINED
PL357421A1 (en) Method for manufacturing an electrode and an electrode
GB0028557D0 (en) Fabrication method and apparatus
GB0020427D0 (en) Moem device and fabrication method
AU2000239097A8 (en) Manufacturing apparatus and method
GB0013444D0 (en) Test method and kit
GB0014580D0 (en) Appatarus and process

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20120531