WO2007102401A1 - 導電性接触子ユニット - Google Patents
導電性接触子ユニット Download PDFInfo
- Publication number
- WO2007102401A1 WO2007102401A1 PCT/JP2007/053951 JP2007053951W WO2007102401A1 WO 2007102401 A1 WO2007102401 A1 WO 2007102401A1 JP 2007053951 W JP2007053951 W JP 2007053951W WO 2007102401 A1 WO2007102401 A1 WO 2007102401A1
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- WO
- WIPO (PCT)
- Prior art keywords
- conductive contact
- contact
- conductive
- holder
- guide groove
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Definitions
- the present invention relates to a conductive material that transmits and receives electrical signals by contacting electrodes and terminals of an electronic component when conducting a conduction state inspection or an operation characteristic inspection in an electronic component such as a liquid crystal panel or a semiconductor integrated circuit. This relates to the contact unit.
- a plurality of conductive contacts are provided corresponding to connection terminals of the semiconductor integrated circuit, and the conductive contacts are A technique related to a conductive contact unit having a function of ensuring electrical continuity by physically contacting a connection terminal is known.
- the strong conductive contact unit has a structure including at least a plurality of conductive contacts and a conductive contact holder for holding the conductive contacts.
- Patent Document 1 Japanese Patent Laid-Open No. 2001-343397
- Patent Document 2 JP-A-10-132853
- a guide is provided in the conductive contact holder, and the conductive contact is inserted between the guides.
- the conductive contact unit In the case of the conductive contact unit to be configured, there is a clearance between the conductive contact and the guide. For this reason, when a load is generated while the conductive contact is in contact with the guide, the contact position between the conductive contact and the guide is not aligned, resulting in variations in frictional force, and a stable inspection signal for the inspection object. There was a risk that it could not be supplied.
- the present invention has been made in view of the above, and the conductive contact capable of reducing the variation in frictional force generated between the conductive contact and the guide and stably supplying the inspection signal.
- the purpose is to provide child units.
- the conductive contact cue includes a plurality of conductive contacts that respectively input and output electrical signals to and from the circuit structure.
- a conductive contact unit that houses a plurality of conductive contacts; and a conductive contact holder that houses and holds a plurality of conductive contacts; and And a vibration applying means for applying vibrations.
- the conductive contact unit according to the present invention is characterized in that, in the above invention, the vibration applying means includes a vibrating body attached to a side surface of the conductive contact holder.
- the vibration applying means is a vibration having a resonance frequency of the conductive contact holder or a resonance frequency of the conductive contact. Is applied to the conductive contact holder.
- the conductive contact unit according to the present invention is characterized in that, in the above-described invention, the vibration applying unit includes a vibrating body attached to a side surface of the conductive contact holder.
- the conductive contact has a plate shape, and a first contact portion that physically contacts any of the different circuit structures; A second contact portion that physically contacts a circuit structure different from the first contact portion; and an elastic portion that is interposed between the first contact portion and the second contact portion and is elastic in a longitudinal direction. And a first connection part that connects the elastic part and the first contact part, and a second connection part that connects the elastic part and the second contact part.
- at least a part of the second contact portion is an outer surface of the conductive contact holder and has a guide groove inside. It protrudes in the normal direction of the outer surface from the outer surface of the formed portion.
- the conductive contact holder is slidable on one edge portion in the width direction of the conductive contact.
- a first guide groove that is fitted and held in the first guide groove, and is positioned opposite to the first guide groove, and slides on the other edge of the conductive contact that is fitted in the first guide groove.
- a plurality of second guide grooves that are freely fitted and held are provided.
- the conductive contact is a first needle-like member that physically contacts any one of the different circuit structures; A second needle-like member physically contacting a circuit structure different from the first needle-like member; and the first needle-like member and the second needle-like member connected to each other, and a spring that is elastic in the longitudinal direction. And a member.
- the conductive contact unit of the present invention a plurality of conductive contacts that respectively input and output electric signals to and from the circuit structure are accommodated, and the different circuit structures are electrically connected.
- FIG. 1 is a perspective view showing a configuration of a conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 2 is a view in the direction of arrow A in FIG.
- FIG. 3 is a diagram showing a configuration of a conductive contact.
- FIG. 4 is a partially enlarged perspective view of the upper surface portion of the conductive contact holder.
- FIG. 5 shows an internal configuration of the conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 6 is a partially enlarged view showing a state in which a circuit board connected to the inspection circuit is attached above the conductive contact holder.
- FIG. 7-1 is a diagram showing a state immediately after the test object is brought into contact with the conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 7-2 is a diagram showing a state when the test object is raised to the position at the time of inspection with respect to the conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 8 is a diagram showing a deflection-load characteristic (when vibration is applied) of the conductive contact housed in the conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 9 is a diagram showing a deflection-load characteristic (when no vibration is applied) of the conductive contact housed in the conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 10 is a diagram showing an internal configuration of a conductive contact unit according to Embodiment 2 of the present invention.
- FIG. 1 is a perspective view showing a configuration of a conductive contact unit according to Embodiment 1 of the present invention.
- FIG. 2 is a view in the direction of arrow A in FIG.
- the conductive contact unit 1 shown in these drawings is used for inspection and operation of a circuit structure such as a liquid crystal panel to be inspected.
- a plurality of conductive contacts 2 each having a plate shape, a conductive contact holder 3 for accommodating and holding a plurality of conductive contacts 2, and fixed to the conductive contact holder 3
- the rod-shaped member 4 that supports the plurality of conductive contacts 2 and the vibrating body 5 (vibration mark) that is attached to the side surface portion 3c of the conductive contact holder 3 and applies vibration to the conductive contact holder 3
- an oscillating section 6 that generates a signal having a predetermined frequency for vibrating the vibrating body 5.
- FIG. 3 is a diagram showing a configuration of the conductive contact 2.
- the lead straight direction in FIG. 3 is “longitudinal direction of the conductive contact 2”
- the horizontal direction in FIG. 3 is “width direction of the conductive contact 2”.
- the direction is referred to as the “plate thickness (thickness) direction of the conductive contact 2”.
- the conductive contact 2 shown in FIG. 3 establishes an electrical connection between different circuit structures, and has a predetermined circuit structure (specifically, a flexible substrate to which an inspection signal is supplied) and an object.
- the first contact portion 21 that makes physical contact the second contact portion 22 that makes physical contact with a circuit structure different from the first contact portion 21 (specifically, an inspection target such as a liquid crystal panel), and the first An elastic part 23 that is interposed between the contact part 21 and the second contact part 22 and that is stretchable in the longitudinal direction, and has the same width and thickness as the elastic part 23, and connects the first contact part 21 and the elastic part 23.
- the first connection portion 24 and the second connection having the same width and thickness as the elastic portion 23, connecting the second contact portion 22 and the elastic portion 23, and having an opening 26 penetrating in the plate thickness direction And part 25.
- the second contact portion 22 protrudes in the width direction from the edge portion in the width direction of the second connection portion 25.
- the conductive contact 2 is formed of a conductive material. Specifically, for example, nickel
- first connection portion 24 and the second connection portion 25 may have a width and Z or thickness different from those of the elastic portion 23.
- the conductive contact holder 3 includes a hollow holding portion 31 having a substantially rectangular parallelepiped shape, and first guide members 32 and second guides that are attached to the hollow portion of the holding portion 31 so as to face each other and guide a plurality of conductive contacts.
- the guide member 33 has a fixing hole 34 that is formed at a predetermined position of the side surface portion 3b facing each other via the holding portion 31 and fixes the end portion of the rod-like member 4.
- FIG. 4 is a partially enlarged perspective view of the upper surface portion 3 a of the conductive contact holder 3.
- the first guide member 32 is a straight line that slidably fits and holds one edge in the width direction of the conductive contact 2 when the conductive contact 2 is mounted.
- a plurality of guide grooves 321 are formed, and the second guide member 33 is positioned opposite to the guide groove 321 (first guide groove) of the first guide member 32 and is electrically conductively fitted into the guide groove 321.
- a plurality of linear guide grooves 331 (second guide grooves) for slidably fitting and holding the other edge in the width direction of the contact 2 are formed.
- the guide groove 321 and the guide groove 331 that form a pair have a function of positioning the conductive contact 2 with respect to the surface direction perpendicular to the longitudinal direction and a function of guiding the expansion and contraction of the conductive contact 2. is doing. Further, among the pairs formed by the guide groove 321 and the guide groove 331, the intervals between adjacent pairs are all equal and parallel to each other.
- Each of the guide groove 321 and the guide groove 331 has the same groove width) and the same groove depth (d). Of these, it is sufficient that the groove depth has a value that can reliably hold the conductive contact 2 without detachment. In this sense, the groove depth of the guide groove 321 and the groove depth of the guide groove 331 are different. It doesn't matter.
- each guide groove is slightly larger than the plate thickness of the conductive contact 2. Further, the distance between the groove bottom portions of the opposing guide grooves 321 and 331 is slightly larger than the width of the conductive contact 2. As described above, since there is a clearance between the conductive contact 2 and the conductive contact holder 3, the conductive contact 2 has a degree of freedom of movement without being constrained within the guide.
- FIG. 5 is a diagram showing the internal configuration of the conductive contact sleeve 1.
- the first guide member 32 and the second guide member 33 have a structure extending in parallel with each other along the z-axis direction (direction perpendicular to the groove width direction and the groove depth direction) in FIG.
- the length of the guide groove 321 extending in the z-axis direction in FIG. 5 is the same as the length of the guide groove 331 extending in the z-axis direction.
- the guide groove 321 reaches the bottom surface portion 3d of the conductive contact holder 3. However, the guide groove 321 reaches the position vertically above the bottom surface portion 3d and does not reach the force.
- the load of the second contact portion 22 is not applied to the first contact portion 21 and the second contact portion 22 (the state shown in FIG. 5).
- the tip protrudes a predetermined amount in the X-axis direction from the side surface portion 3c of the conductive contact holder 3 (the protrusion amount is ⁇ ).
- the amount of protrusion ⁇ depends on the size of the conductive contact 2 and conductive contact holder 3 and the inspection.
- the operator can perform an inspection from above the conductive contact unit.
- Visual inspection can be easily performed with a microscope, and inspection work can be performed while confirming the physical contact between the tip of the conductive contact and the inspection object.
- the operator does not need to bend the posture and observe the contact state between the conductive contact and the inspection object. Therefore, the workability and reliability of inspection can be further improved, and the burden on the operator can be reduced.
- the tip of the second contact portion 22 protrudes by a predetermined amount from the bottom surface portion 3d in the negative z-axis direction (the protrusion amount is h), and the second contact portion 22 includes the elastic portion 23 and the first contact portion. 1Axis of symmetry parallel to the longitudinal direction of the connection 24 The O force is also formed at a position offset by a predetermined distance (the offset amount is ⁇ ).
- the protruding amount h and the offset amount ⁇ are also conductive contacts like the protruding amount ⁇ .
- the conductive contact holder 3 At least the first guide member 32 and the second guide member 33 that are in direct contact with the conductive contact 2 are made of an insulating material in order to prevent occurrence of a short circuit. Preferably it is formed.
- the conductive contact holder 3 is formed using a low thermal expansion synthetic resin, and the guide groove 321 and the guide groove 331 are formed by dicing or the like. Other ceramics such as alumina (Al)), zircoyu (ZrO), silica (SiO), etc.
- the base material of the conductive contact holder 3 is formed using a thermosetting resin such as silicon or epoxy, or an engineering plastic such as polycarbonate, and the guide groove 321 and the guide groove 331 are formed using a processing technique such as etching.
- a base material is formed using another appropriate material (whether or not there is an insulating property), and the conductive contact holder 3 is formed.
- An appropriate insulating paint may be applied to a portion (a portion including the guide groove 321 and the guide groove 331) that can come into contact with the child 2.
- the holding portion 31 may be configured by using the same insulating material as that of the first guide member 32 and the second guide member 33.
- the plurality of conductive contacts 2 are accommodated in the first guide member 32 and the second guide member 33, and after passing through the opening 26 of each conductive contact 2, It is inserted into the fixing hole 34 and fixed to the conductive contact holder 3.
- the bar-shaped member 4 functions to prevent the conductive contact 2 from being removed from the holding portion 31 by penetrating through the openings 26 of the plurality of conductive contacts 2 held by the holding portion 31 at the same time. It performs the function of imparting initial deflection to contact 2.
- the cross section perpendicular to the longitudinal direction of the rod-shaped member 4 has a shape in which a rectangular corner is chamfered, and the area thereof is smaller than the area of the opening 26 of the conductive contact 2. With such a cross-sectional shape, it is possible to facilitate the processing when forming the fixing hole 34 for the conductive contact 2.
- the conductive contact 2 when the conductive contact 2 is applied with a load, the movement of the conductive contact 2 becomes smooth and a predetermined load is applied to the conductive contact 2. It is also possible to ensure support stability in the rod-shaped member 4. Further, when the test object is brought into contact with the conductive contact 2, the opening 26 is separated from the bar-shaped member 4 and can freely move with respect to the bar-shaped member 4. As a result, as will be described later, the conductive contact 2 can be slightly rotated.
- the cross-sectional shape perpendicular to the longitudinal direction of the rod-shaped member 4 is not limited to the above-described one, and may be, for example, a polygon or a square, or a circle. Needless to say, the shape force of the fixing hole 34 varies depending on the cross-sectional shape of the rod-shaped member 4.
- the rod-shaped member 4 having the above configuration is also formed of an insulating material.
- this rod-shaped member 4 is made of a ceramic or the like that has high rigidity and little deflection even when a load is applied. Insulating materials are particularly preferred.
- the vibrating body 5 for example, a force to which a piezoelectric element or the like can be applied may be applied, and a balancer that is unbalanced with respect to the rotary motor may be applied.
- the powerful vibrating body 5 vibrates in response to a signal having a predetermined frequency from the oscillating portion 6, and applies vibrations to the first guide member 32 and the second guide member 33.
- the attaching position is not limited.
- the vibration frequency of the vibrating body 5 is the resonance frequency of the holding portion 31 constituting the conductive contact holder 3, or the resonance frequency of the first guide member 32 or the second guide member 33, or the conductive contact.
- a value that substantially matches the resonance frequency of 2 is more preferable because the electrode applied to the vibrating body 5 can be reduced and can be vibrated efficiently.
- the vibrating body 5 does not have to be attached to the conductive contact holder 3 as long as it is in the vicinity of the conductive contact holder 3 and can vibrate the conductive contact holder 3.
- a rod-shaped member that penetrates the conductive contact 2 may be used as a vibrating body.
- FIG. 6 is a partially enlarged view showing a state where a circuit board that establishes an electrical connection with a signal processing circuit that generates and outputs an inspection signal is attached above the conductive contact holder 3.
- the position of the conductive contact 2 shown in FIG. 5 is indicated by a one-dot chain line.
- a circuit board 201 shown in FIG. 6 is obtained by forming a large number of wirings such as nickel and electrodes for connection on one surface of a sheet-like base material having strength such as polyimide. In FIG. 6, positioning is performed so that the electrode of the circuit board 201 such as a flexible board contacts the first contact portion 21 of the conductive contact 2, and the fixing member has the same material force as that of the conductive contact holder 3.
- a state in which the circuit board 201 is sandwiched and fixed by 202 and the conductive contact holder 3 is illustrated.
- the circuit board 201 is fixed to the conductive contact unit 1
- the conductive contact holder 3 and the fixing member 202 may be fastened with screws or the like (not shown).
- each conductive contact 2 is subjected to a load (initial load) caused by a force other than gravity acting on itself, and each elastic contact 2 Part 23 contracts in the longitudinal direction.
- the other end of the circuit board 201 is connected to a signal processing circuit (not shown) as described above, and transmits / receives an electric signal to / from an inspection object in contact with the second contact portion 22. .
- the circuit board 201 is brought into contact with the conductive contact 2, but instead, the connection terminal of the signal output circuit is in direct contact with the conductive contact 2. It is also possible.
- a flat plate-like lid member is used to apply an initial load to the conductive contact.
- the thickness of the lid member is reduced. Only the amount of protrusion at the contact part at the tip of the conductive contact needed to be increased tl. For this reason, the load There was a problem that the ratio of the unstable part when it was added increased, making it easy to bend around the tip.
- the first contact portion 21 that is unlikely to cause the above-described problem can be formed significantly smaller than the conventional one.
- FIG. 7-1 is a diagram showing a state in the vicinity of the lower end portion of the conductive contact 2 immediately after the inspection object 203 comes into contact with the second contact portion 22 of the conductive contact 2.
- FIG. 7-2 is a diagram showing a state in the vicinity of the lower end portion of the conductive contact 2 when the inspection object 203 is raised to the position at the time of inspection. In Fig. 7-2, for comparison, the position of the conductive contact 2 immediately after contact is shown by a one-dot chain line.
- the tip of the second contact portion 22 is offset by ⁇ from the longitudinal symmetry axis (center axis) O of the elastic portion 23 and the first connection portion 24. Yes. Because of this, inspection
- the conductive contact 2 contracts the elastic part 23 and the opening 26 also separates the bar-like member 4 force, as described above. It rotates slightly by the moment. This rotation can be caused by the presence of minute gaps between the edge in the width direction of the elastic portion 23 and the guide grooves 321 and 331.
- the second contact portion 22 rotates by a small angle clockwise in FIG. 7-2 and moves on the surface of the inspection object 203 while maintaining the contact state. More specifically, the tip of the second contact portion 22 pulls on the inspection target 203 from the initial contact point P to the final contact point P.
- the conductive contact 2 is a guide. Even if it touches the groove 321 or 331, it will leave immediately. For this reason, the apparent dynamic friction coefficient becomes smaller and the frictional force becomes smaller. Since the time in which the edge in the width direction of the conductive contact 2 contacts the guide grooves 321 and 331 is shortened, the frictional force generated between the guide grooves 321 and 331 can be reduced.
- the conductive contact 2 is partially fitted in the guide groove 321 and the guide groove 331 extending along the expansion / contraction direction of the elastic portion 23 of the conductive contact 2. Holding child 2. For this reason, the occurrence of buckling and torsion when the elastic portion 23 contracts, which is a problem peculiar to the plate-like conductive contact 2, is prevented, and the elastic characteristics of the elastic portion 23 due to them are deteriorated. You do n’t have to. Therefore, a large stroke can be realized without buckling or twisting even if a load exceeding a certain level is applied to the conductive contact 2 within an appropriate range, and the desired contact state with the inspection object 203 can be achieved. Can be obtained.
- the conductive contact 2 is held by the guide groove 321 of the first guide member 32 and the guide groove 331 of the second guide member 33.
- the contact area between the contact 2 and the conductive contact holder 3 can be reduced to reduce sliding resistance, and the conductive contact 2 can be expanded and contracted smoothly.
- the conductive contact unit 1 has guide grooves 321 adjacent to each other whose groove width (w) of the guide groove 321 and the guide groove 331 is approximately the same as the plate thickness of the conductive contact 2.
- the intervals between the gaps and the guide grooves 331 may be arbitrarily small as long as the insulation between the adjacent conductive contacts 2 can be sufficiently secured. Therefore, it is possible to reduce the arrangement interval of the plurality of conductive contacts 2, and it is possible to sufficiently cope with the reduction in the arrangement interval of the connection electrodes and terminals of the circuit structure to be contacted. .
- the conductive contact 2 is passed through the bar-like member 4 to give the conductive contact 2 an initial deflection and prevent it from coming off. .
- the second contact portion 22 can be made smaller, the bending of the tip of the conductive contact 2 can be prevented and stably held, and the conductive contact 2 can be held near the lower end. It is possible to prevent the guide grooves 321 and Z or the guide grooves 331 from coming off. As a result, the position accuracy of the tip of the conductive contact 2 is increased, and the reliability and durability of the conductive contact unit 1 can be improved.
- FIG. 8 is a diagram showing the relationship between the deflection of the conductive contact 2 and the load in the state where the vibrating body 5 vibrates in the conductive contact unit 1 (deflection—load characteristics). is there.
- FIG. 9 is a diagram illustrating the deflection-one load characteristic of the conductive contact 2 when the vibrating body 5 is not vibrating. In both figures, the upper side is when compressed, and the lower side is when extended.
- the characteristic difference (hysteresis) between compressing and expanding the conductive contact 2 is smaller when it is turned.
- the difference in FIG. 8 is about 30% less than that in FIG. This tendency can be said regardless of the frequency of the signal oscillated by the oscillator 6.
- the conductive contact 2 vibrates inside the conductive contact holder 3, thereby causing the gap between the guide grooves 321 and 331. Since the frictional force is reduced, the variation in the load value generated in the conductive contact 2 becomes smaller than before, and a stable inspection signal can be supplied to the inspection object 203. Such an effect becomes larger as the pitch of the inspection object 203 becomes narrower.
- a plurality of conductive contacts that respectively input and output electrical signals to and from the circuit structure are accommodated, and different circuit structures are electrically connected.
- a conductive contact unit that continues, and includes a conductive contact holder that accommodates and holds the plurality of conductive contacts, and a vibration applying unit that applies vibration to the conductive contact holder.
- the shape of the second contact portion of the conductive contact is determined by the material of the conductive contact, the conductivity It should be determined by various conditions such as the shape of the conductive contact holder that houses and holds the conductive contact, the load to be applied to the conductive contact holder, the type of inspection object, and the technical features according to the present invention. If it is provided, the details of the shape can be changed as appropriate.
- FIG. 10 is a partial cross-sectional view showing the configuration of the conductive contact unit according to Embodiment 2 of the present invention.
- the conductive contact unit 7 shown in FIG. 1 includes a plurality of conductive contacts 8, a conductive contact holder 9 that accommodates the conductive contacts 8, and a vibrating body 10 attached to the conductive contact holder 9. With.
- the vibrating body 10 is connected to an oscillating unit (not shown), and vibrates according to a signal having a predetermined frequency output from the oscillating unit.
- the conductive contact 8 is a pin-type probe, and a needle-shaped member 81 (first needle-shaped member) that contacts the circuit board 201 and a needle that contacts a connection terminal (not shown) on the inspection target 203.
- the needle-like members 81 and 82 and the spring member 83 constituting the conductive contact 8 are configured to have the same axis by the conductive material, and are formed in the conductive contact holder 9 as a whole. It passes through the holder hole 91.
- the conductive contact holder 9 is formed by laminating two substrates 9a and 9b.
- the vicinity of the end of the holder hole 91 has a stepped shape corresponding to the flange shape of the needle-like members 81 and 82, and functions to prevent the conductive contact 8 from coming off from the conductive contact holder 9.
- the first guide member and the Z or second guide member may be made of ceramic or the like, and the guide member itself may be used as a vibrating body to directly apply vibration.
- the conductive contact unit according to the present invention is also applicable to inspection of a package substrate mounted with a semiconductor chip or a high-density probe unit used for wafer level inspection. Is possible.
- the present invention can include various embodiments and the like not described herein, and V, V, within the scope not departing from the technical idea specified by the claims. It is possible to make various design changes.
- the conductive contact unit according to the present invention is suitable for conducting state inspection and operating characteristic inspection in electronic components such as liquid crystal panels and semiconductor integrated circuits.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2008503811A JP5179347B2 (ja) | 2006-03-03 | 2007-03-01 | 導電性接触子ユニット |
US12/224,447 US7789707B2 (en) | 2006-03-03 | 2007-03-01 | Conductive contact unit |
TW096107124A TW200804824A (en) | 2006-03-03 | 2007-03-02 | Conductive contact unit |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006-058644 | 2006-03-03 | ||
JP2006058644 | 2006-03-03 |
Publications (1)
Publication Number | Publication Date |
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WO2007102401A1 true WO2007102401A1 (ja) | 2007-09-13 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2007/053951 WO2007102401A1 (ja) | 2006-03-03 | 2007-03-01 | 導電性接触子ユニット |
Country Status (6)
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US (1) | US7789707B2 (ja) |
JP (1) | JP5179347B2 (ja) |
KR (1) | KR20080091510A (ja) |
CN (1) | CN101395482A (ja) |
TW (1) | TW200804824A (ja) |
WO (1) | WO2007102401A1 (ja) |
Cited By (2)
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JP2010217085A (ja) * | 2009-03-18 | 2010-09-30 | Toppan Printing Co Ltd | 検査装置 |
JP2011043421A (ja) * | 2009-08-21 | 2011-03-03 | Fujitsu Ltd | プローバー装置及び検査方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP5095604B2 (ja) * | 2006-03-03 | 2012-12-12 | 日本発條株式会社 | 導電性接触子ユニット |
CN105158654B (zh) * | 2015-08-24 | 2017-09-26 | 大连世有电力科技有限公司 | 用于变压器局部放电诊断的智能机器人 |
JP6642359B2 (ja) * | 2016-09-21 | 2020-02-05 | オムロン株式会社 | プローブピンおよび検査ユニット |
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- 2007-03-01 JP JP2008503811A patent/JP5179347B2/ja not_active Expired - Fee Related
- 2007-03-01 CN CNA2007800077406A patent/CN101395482A/zh active Pending
- 2007-03-01 KR KR1020087021512A patent/KR20080091510A/ko not_active Application Discontinuation
- 2007-03-01 US US12/224,447 patent/US7789707B2/en not_active Expired - Fee Related
- 2007-03-01 WO PCT/JP2007/053951 patent/WO2007102401A1/ja active Application Filing
- 2007-03-02 TW TW096107124A patent/TW200804824A/zh unknown
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JPH0875786A (ja) * | 1994-09-05 | 1996-03-22 | Kawasaki Steel Corp | プローブカード |
JPH1019930A (ja) * | 1996-06-28 | 1998-01-23 | Nhk Spring Co Ltd | 導電性接触子 |
JPH11133060A (ja) * | 1997-10-31 | 1999-05-21 | Tani Denki Kogyo Kk | テスト用端子 |
JP2001324515A (ja) * | 2000-05-17 | 2001-11-22 | Suncall Corp | 電子部品検査用コンタクトプローブ装置 |
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JP2010217085A (ja) * | 2009-03-18 | 2010-09-30 | Toppan Printing Co Ltd | 検査装置 |
JP2011043421A (ja) * | 2009-08-21 | 2011-03-03 | Fujitsu Ltd | プローバー装置及び検査方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200804824A (en) | 2008-01-16 |
US20090233493A1 (en) | 2009-09-17 |
KR20080091510A (ko) | 2008-10-13 |
JP5179347B2 (ja) | 2013-04-10 |
JPWO2007102401A1 (ja) | 2009-07-23 |
US7789707B2 (en) | 2010-09-07 |
CN101395482A (zh) | 2009-03-25 |
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