ES2369953B1 - Plataforma optoelectrónica con conductor a base de carbono y puntos cuánticos y fototransistor que comprende una plataforma de este tipo - Google Patents
Plataforma optoelectrónica con conductor a base de carbono y puntos cuánticos y fototransistor que comprende una plataforma de este tipo Download PDFInfo
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- ES2369953B1 ES2369953B1 ES201131345A ES201131345A ES2369953B1 ES 2369953 B1 ES2369953 B1 ES 2369953B1 ES 201131345 A ES201131345 A ES 201131345A ES 201131345 A ES201131345 A ES 201131345A ES 2369953 B1 ES2369953 B1 ES 2369953B1
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- carbon
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- graphene
- phototransistor
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 62
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- 230000005693 optoelectronics Effects 0.000 title claims abstract description 12
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- YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 claims description 3
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
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- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0669—Nanowires or nanotubes
- H01L29/0673—Nanowires or nanotubes oriented parallel to a substrate
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
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- H01L31/035218—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures the quantum structure being quantum dots
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- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Condensed Matter Physics & Semiconductors (AREA)
- Nanotechnology (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Mathematical Physics (AREA)
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- Life Sciences & Earth Sciences (AREA)
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- Optics & Photonics (AREA)
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- Solid State Image Pick-Up Elements (AREA)
Abstract
Plataforma optoelectrónica con conductor a base de carbono y puntos cuánticos y fototransistor que comprende una plataforma de este tipo.#La invención comprende una plataforma optoelectrónica con una capa de conducción a base de carbono y una capa de puntos cuánticos coloidales encima como material absorbente de luz. Es posible una ganancia fotoconductora del orden de 10{sup,6}, mientras que se mantiene una baja tensión de funcionamiento. La plataforma puede usarse como fototransistor.
Description
CAMPO DE LA INVENCIÓN La presente invención se refiere a plataformas optoelectrónicas. En particular, a una plataforma en la que se mejora la ganancia fotoconductora.
ESTADO DE LA TÉCNICA
Los fotodiodos (InGaAs para aplicaciones de infrarrojo de longitud de onda corta y Si para aplicaciones de infrarrojo cercano y visible) demuestran alta sensibilidad. Sin embargo, están limitadas por el ruido de lectura y su eficiencia cuántica se limita a la unidad (es decir, un portador por fotón absorbido). En vista de la ausencia de ganancia fotoconductora en fotodiodos, se han desarrollado APD (fotodiodos de avalancha) para proporcionar ganancia a través de efectos de multiplicación de portadores. La ganancia en estos dispositivos es del orden de 100 a 1000 portadores por fotón absorbido. Los retos tecnológicos para integrar estas estructuras en sensores de imagen comunes y detectores de bajo coste es la alta polarización de funcionamiento requerida (del orden de cientos de V) y capas adicionales requeridas para suprimir las corrientes de fuga y prolongar la vida del dispositivo frente a la degradación debido a la alta polarización aplicada. Además, estos dispositivos no pueden integrarse de forma monolítica en la electrónica CMOS debido al diferente procedimiento de crecimiento requerido para los APD.
RESUMEN DE LA INVENCIÓN
La presente invención supera los problemas de la técnica anterior proporcionando una plataforma optoelectrónica que comprende una capa de conducción a base de carbono y una capa de puntos cuánticos coloidales para absorber luz encima de la misma. La plataforma está provista preferentemente de un sustrato y una capa intermedia de óxido entre el sustrato y la capa a base de carbono. La capa a base de carbono está compuesta preferiblemente por grafeno, óxido de grafeno reducido o nanotubos de carbono. El sustrato puede ser de nitruro de boro o GaAs y la capa intermedia de dieléctrico un óxido del grupo (o combinación de los mismos) de SiO2, LiF, alúmina y óxido de hafnio, o cualquier otro dieléctrico. Los puntos cuánticos pueden ser uno o más de los siguientes materiales: CdSe, CdS, PbSe, ZnO, ZnS, CZTS, Cu2S, Bi2S3, Ag2S, HgTe, CdHgTe, InAs, InSb. La capa a base de carbono puede conformarse en la forma de o bien un rectángulo, nanoconstricción, barra de Hall o bien una cinta. La invención también comprende un fototransistor con electrodos de drenaje y fuente y una plataforma de este tipo, y comprende opcionalmente un electrodo superior en contacto con la capa de puntos cuánticos.
BREVE DESCRIPCIÓN DE LOS DIBUJOS
Para completar la descripción y para proporcionar un mejor entendimiento de la invención, se proporciona un conjunto de dibujos. Dichos dibujos ilustran una realización preferida de la invención, lo que no debe interpretarse como que limita el alcance de la invención, sino sólo como un ejemplo de cómo puede realizarse la invención. Los dibujos comprenden las siguientes figuras:
La figura 1: muestra una primera realización de la invención.
La figura 2: muestra cómo los huecos de la capa de puntos cuánticos se transfieren a la capa a base de carbono y por tanto forman una capa de agotamiento.
La figura 3: es un esquema del principio de funcionamiento de la invención.
La figura 4: es un gráfico de la ganancia fotoconductora en el canal de grafeno.
La figura 5: muestra la respuesta espectral del dispositivo de la invención.
DESCRIPCIÓN DE LA INVENCIÓN
La invención es una plataforma optoelectrónica híbrida compatible con la integración de CMOS, que consiste en una capa a base de carbono (por ejemplo, grafeno) sensibilizada con puntos cuánticos coloidales (CQD). La capa a base de carbono se usa como el canal de transporte de portadores, y los CQD se emplean como el material absorbente. Tal como se muestra en la figura 1, cuando la plataforma se usa para fabricar un fototransistor, se deposita una capa de grafeno (2) sobre un sustrato de silicio (4) con una capa intermedia de SiO2 (3) para formar la puerta del fototransistor, y se conectan dos electrodos al grafeno en la dimensión lateral para formar los contactos metálicos del dispositivo de manera análoga a un electrodo de drenaje y fuente (Vs, Vd) en un transistor FET. Luego se sobrerrecubre el grafeno con una capa de CQD (1) cuya banda prohibida puede ajustarse según el tamaño y el material de los QD (CdSe: 400 – 650 nm, PbS: 650 – 2000 nm, HgTe: 1500 nm – 4000 nm).
Para la descripción del mecanismo subyacente nos centramos en el caso de QD de PbS, pero esto puede aplicarse generalmente a otros materiales de QD. En la superficie de contacto de la capa de QD con el grafeno hay un campo formado debido al desajuste entre las funciones de trabajo del grafeno y el PbS. Los huecos de los QD de PbS se transfieren al grafeno y forman una capa de agotamiento en la película de PbS y una película incorporada tal como se muestra en la figura 2. Los fotones incidentes crean pares electrón-hueco en los puntos cuánticos. Debido al alineamiento de bandas de los QD con respecto a la capa de grafeno, se transfiere entonces un solo tipo de portador (electrones) a la capa de grafeno y se transporta a través de grafeno hasta los contactos metálicos asistidos por un campo eléctrico aplicado desde la fuente al drenaje. Los huecos permanecen atrapados en la capa de PbS prolongando la vida de sus portadores. Cuando los electrones fotogenerados en la capa de grafeno alcanzan el contacto de drenaje, se vuelve a inyectar otro electrón mediante la fuente para proporcionar una conservación de la carga (figura 3). Por tanto, para un solo fotón absorbido se recircula un portador eléctrico en el dispositivo antes de recombinarse. La heterounión formada en la capa de grafeno-QD inhibe la recombinación y por tanto el número de portadores viene dado por la razón de la vida de los portadores con respecto al tiempo de tránsito de los electrones en el canal de grafeno. Debido a la movilidad de portadores extremadamente alta ofrecida por el canal de grafeno, se ha observado una ganancia fotoconductora del orden de 106 en la invención (figura 4). En vista de la alta movilidad del grafeno, el dispositivo requiere campos eléctricos aplicados muy bajos en la fuente-drenaje desde algunos V hasta unos cuantos voltios, y la ganancia puede ajustarse de manera lineal con la tensión aplicada. Este fenómeno (también llamado “efecto de control por fotopuerta”) es equivalente a tener una puerta superior en la capa de grafeno en la que se usa la luz incidente para generar portadores en la capa de QD que funciona como una puerta ópticamente controlada.
El dispositivo propuesto puede hacerse funcionar como un dispositivo de dos terminales, con la puerta abierta, o como un fototransistor controlando el potencial de la puerta y por tanto la conductividad del canal de grafeno. La corriente de oscuridad procedente del mismo puede minimizarse aplicando un potencial a la puerta para desactivar la conductividad de oscuridad de la capa de grafeno (en el caso en que el grafeno tenga una banda prohibida). Puede colocarse una puerta adicional encima de la capa de CQD para controlar el campo eléctrico en la capa de CQD. Esta puerta puede emplearse para agotar completamente una capa gruesa de película de QCD que se emplea para absorber completamente la luz incidente. El uso de la puerta adicional puede ampliarse para reajustar el dispositivo y controlar la respuesta temporal: un impulso de señal de alta polarización inversa de la puerta Vg2 puede cambiar la dirección del campo eléctrico e impulsar los huecos fotogenerados atrapados en la capa de QD hacia el grafeno
o los electrones fotogenerados desde el grafeno hacia la capa de QD para inducir recombinación.
La respuesta espectral del dispositivo se muestra en la figura 5. La sensibilidad espectral del grafeno está determinada por la absorción de fotones en una sobrecapa de QD y puede ajustarse mediante la selección apropiada del material de sensibilización.
El dispositivo puede fabricarse mediante colada por centrifugación o colada por pulverización de una capa de QD a partir de una disolución. Los puntos cuánticos experimentan un proceso de intercambio de ligandos para eliminar el ácido oleico de la superficie y sustituirlo por un ligando bidentado que reticula los puntos cuánticos y los convierte en un sólido conductor. Tales ligandos pueden ser: etanoditiol, etilendiamina, hidrazina, etanotiol, propanotiol, ácido fórmico, ácido oxálico, ácido acético, o restos inorgánicos tales como SnS4, PbBr2, PbI2, PbCl2. También se emplea una molécula de ligando bidentado para acoplarse electrónicamente los QD a la capa de grafeno. Tales ligandos bidentados incluyen: etanoditiol, etilendiamina, bencenoditiol, hidrazina. El grosor total de la capa de QD puede ajustarse desde unos cuantos nm hasta varios cientos de nm para absorber completamente la luz incidente.
La capa a base de carbono puede ser una capa de nanotubos de carbono (CNT) o grafeno modelado u óxido de grafeno reducido. Los CNT pueden hacerse crecer mediante cvd y transferirse al sustrato. Se hacer crecer grafeno monocapa o multicapa mediante cvd, procesamiento en disolución y luego se transfiere al sustrato, o el grafeno se exfolia y luego se transfiere al sustrato. El modelado del conductor a base de carbono puede realizarse mediante una gran variedad de técnicas, tales como grabado químico o con plasma, o mediante nanopartículas térmicamente activadas, haz iónico, litografía de sonda de barrido o eliminación capa por capa. Un procedimiento alternativo para realizar nanocintas de grafeno es cerrar nanotubos abiertos.
Los QD pueden ser de (y no se limitan a): CdSe, CdS, PbSe, ZnO, ZnS, CZTS, Cu2S, Bi2S3, Ag2S, HgTe, CdHgTe, InAs, InSb, etc. Pueden ser también de tipo núcleo-capa exterior.
El material semiconductor de QD puede ser de tipo p, de tipo n o intrínseco. El material semiconductor fotosensible puede ser un polímero conjugado o un colorante, depositarse mediante colada por centrifugación, colada por pulverización, colada por goteo
o evaporarse sobre grafeno.
El conductor a base de carbono se modela en cualquier geometría específica tal como rectángulo, nanoconstricción, barra de Hall o cinta (sólo una tira de unos cuantos nm de ancho). Cuando la capa a base de carbono consiste en grafeno entonces puede estar compuesta por una monocapa o múltiples capas de grafeno. La(s) capas de grafeno puede(n) modificarse para abrir una banda prohibida en la capa a base de carbono. Esto permite reducir la corriente de oscuridad del dispositivo y desactivar eléctricamente el canal de transistor. Modificaciones adicionales para reducir la corriente de oscuridad del dispositivo y permitir la detección de un solo fotón incluyen la formación de nanoconstricciones del canal a base de carbono que puede proporcionar fenómenos de bloqueo de Coulomb que pueden reducir la corriente de oscuridad y permitir la detección de un solo fotón.
La capa de sustrato puede ser de Si, nitruro de boro, GaAs, etc. y la capa intermedia de dieléctrico puede ser de cualquier óxido, como SiO2, alúmina, óxido de hafnio, etc o de LiF.
La invención puede hallar aplicaciones en sensores de formación de imágenes para cámaras digitales, teledetección, visión nocturna y detección de un solo fotón, etc., en comunicaciones ópticas para la detección y transmisión de bajo nivel de potencia y en instrumentación óptica para la detección de potencia ultrabaja, entre otros.
En este texto, el término “comprende” y sus derivaciones (tales como “que comprende”, etc.) no deben entenderse en un sentido excluyente, es decir, estos términos no deben interpretarse como que excluyen la posibilidad de que lo que se describió y definió pueda incluir elementos adicionales.
Por otro lado, la invención no se limita obviamente a la(s) realización/realizaciones específica(s) descrita(s) anteriormente en el presente documento, sino que también abarca cualquier variación que pueda considerarse por cualquier experto en la técnica (por ejemplo, con relación a la elección de materiales, dimensiones, componentes, configuración, etc.), dentro del alcance general de la invención tal como se define en las reivindicaciones.
Claims (7)
- REIVINDICACIONES
- 1.
- Una plataforma optoelectrónica que comprende una capa de conducción a base de carbono (2) y encima de la capa a base de carbono una capa de puntos cuánticos coloidales para absorber luz (1) caracterizada porque la capa de conducción (2) está compuesta por grafeno, óxido de grafeno reducido o nanotubos de carbono.
-
- 2.
- Una plataforma optoelectrónica según la reivindicación 1, caracterizada porque comprende un sustrato (4) y una capa intermedia de un dieléctrico (3) entre el sustrato y la capa a base de carbono.
-
- 3.
- Una plataforma optoelectrónica según cualquiera de las reivindicaciones 1 a 2, caracterizada porque el sustrato es uno de Si, nitruro de boro o GaAs y la capa dieléctrica intermedia es uno o una combinación de Si02, LiF, alúmina y óxido de hafnio.
-
- 4.
- Una plataforma optoelectrónica según cualquiera de las reivindicaciones anteriores, caracterizada porque los puntos cuánticos son uno o una composición de materiales del siguiente grupo: PbS, CdSe, CdS, PbSe, ZnO, ZnS, CZTS, CU2S, Bi2S3, Ag2S, HgTe, CdHgTe, InAs, InSb.
-
- 5.
- Una plataforma optoelectrónica según cualquiera de las reivindicaciones anteriores, caracterizada porque la capa a base de carbono está conformada en la forma de un rectángulo, nanoconstricción, barra de Hall o cinta.
-
- 6.
- Un fototransistor que comprende electrodos de drenaje y fuente (Vs, Vd) y una plataforma según cualquiera de las reivindicaciones anteriores.
-
- 7.
- Un fototransistor según la reivindicación 6, que comprende además un electrodo superior en contacto con la capa de puntos cuánticos.
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