CN100459170C - 在其隧穿层中具有量子点的晶体管 - Google Patents
在其隧穿层中具有量子点的晶体管 Download PDFInfo
- Publication number
- CN100459170C CN100459170C CNB2004800398969A CN200480039896A CN100459170C CN 100459170 C CN100459170 C CN 100459170C CN B2004800398969 A CNB2004800398969 A CN B2004800398969A CN 200480039896 A CN200480039896 A CN 200480039896A CN 100459170 C CN100459170 C CN 100459170C
- Authority
- CN
- China
- Prior art keywords
- quantum dot
- insulating barrier
- semiconductor
- semiconductor body
- semiconductor subassembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002096 quantum dot Substances 0.000 title claims abstract description 62
- 239000004065 semiconductor Substances 0.000 claims abstract description 61
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000005245 sintering Methods 0.000 claims abstract description 4
- 230000004888 barrier function Effects 0.000 claims description 40
- 239000000126 substance Substances 0.000 claims description 18
- 239000010410 layer Substances 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 11
- 239000011159 matrix material Substances 0.000 claims description 8
- 239000002356 single layer Substances 0.000 claims description 2
- 239000000725 suspension Substances 0.000 abstract 1
- 239000011257 shell material Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 18
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 6
- 238000007596 consolidation process Methods 0.000 description 6
- 229910052732 germanium Inorganic materials 0.000 description 5
- 239000003446 ligand Substances 0.000 description 5
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- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000005669 field effect Effects 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 3
- ZMBHCYHQLYEYDV-UHFFFAOYSA-N trioctylphosphine oxide Chemical compound CCCCCCCCP(=O)(CCCCCCCC)CCCCCCCC ZMBHCYHQLYEYDV-UHFFFAOYSA-N 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002159 nanocrystal Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 2
- 229910017942 Ag—Ge Inorganic materials 0.000 description 1
- 229910018575 Al—Ti Inorganic materials 0.000 description 1
- 229910015367 Au—Sb Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910004349 Ti-Al Inorganic materials 0.000 description 1
- 229910004692 Ti—Al Inorganic materials 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 230000001684 chronic effect Effects 0.000 description 1
- 229910052956 cinnabar Inorganic materials 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000009422 external insulation Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000013110 organic ligand Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- -1 tetraethyl orthosilicate ester Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42332—Gate electrodes for transistors with a floating gate with the floating gate formed by two or more non connected parts, e.g. multi-particles flating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Nanotechnology (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Non-Volatile Memory (AREA)
- Thin Film Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04100011 | 2004-01-06 | ||
EP04100011.8 | 2004-01-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1902762A CN1902762A (zh) | 2007-01-24 |
CN100459170C true CN100459170C (zh) | 2009-02-04 |
Family
ID=34833700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800398969A Expired - Fee Related CN100459170C (zh) | 2004-01-06 | 2004-12-22 | 在其隧穿层中具有量子点的晶体管 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080283903A1 (zh) |
EP (1) | EP1704598A1 (zh) |
JP (1) | JP2007519240A (zh) |
CN (1) | CN100459170C (zh) |
WO (1) | WO2005076368A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4744885B2 (ja) * | 2005-01-18 | 2011-08-10 | 株式会社東芝 | 半導体装置の製造方法 |
US7482619B2 (en) * | 2005-09-07 | 2009-01-27 | Samsung Electronics Co., Ltd. | Charge trap memory device comprising composite of nanoparticles and method of fabricating the charge trap memory device |
WO2008069325A1 (ja) * | 2006-12-07 | 2008-06-12 | Nec Corporation | 半導体記憶装置および半導体装置 |
JP5306604B2 (ja) * | 2007-02-28 | 2013-10-02 | 富士通株式会社 | 二値半導体記憶装置 |
CN101923065B (zh) * | 2010-07-13 | 2013-05-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 场效应晶体管手性传感器及其制备方法 |
ES2369953B1 (es) * | 2011-08-02 | 2012-10-09 | Fundació Institut De Ciències Fotòniques | Plataforma optoelectrónica con conductor a base de carbono y puntos cuánticos y fototransistor que comprende una plataforma de este tipo |
US9680027B2 (en) * | 2012-03-07 | 2017-06-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Nickelide source/drain structures for CMOS transistors |
CN103824888A (zh) * | 2014-02-28 | 2014-05-28 | 苏州大学 | 一种具有微浮结构的半导体器件 |
US10230022B2 (en) * | 2014-03-13 | 2019-03-12 | General Electric Company | Lighting apparatus including color stable red emitting phosphors and quantum dots |
CN106952826A (zh) * | 2017-03-30 | 2017-07-14 | 深圳市华星光电技术有限公司 | 一种场效应晶体管及其制备方法 |
US10180924B2 (en) * | 2017-05-08 | 2019-01-15 | Liqid Inc. | Peer-to-peer communication for graphics processing units |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0843360A1 (en) * | 1996-11-15 | 1998-05-20 | Hitachi Europe Limited | Memory device |
WO2001062830A2 (en) * | 2000-02-22 | 2001-08-30 | Eugenia Kumacheva | Polymer-based nanocomposite materials and methods of production thereof |
WO2002003430A2 (en) * | 2000-06-29 | 2002-01-10 | California Institute Of Technology | Aerosol process for fabricating discontinuous floating gate microelectronic devices |
EP1213745A1 (en) * | 2000-12-05 | 2002-06-12 | Sony International (Europe) GmbH | Method of producing a ferroelectric memory and memory device |
EP1226878A2 (en) * | 2001-01-24 | 2002-07-31 | Matsushita Electric Industrial Co., Ltd. | Aligned fine particles, method for producing the same and device using the same |
US20030003300A1 (en) * | 2001-07-02 | 2003-01-02 | Korgel Brian A. | Light-emitting nanoparticles and method of making same |
WO2003099708A1 (fr) * | 2002-05-28 | 2003-12-04 | Matsushita Electric Industrial Co., Ltd. | Procede de production de nanoparticules et nanoparticules produites selon ce procede |
EP1372140A1 (en) * | 2002-06-10 | 2003-12-17 | Fujitsu Limited | A perpendicular magnetic memory medium, a manufacturing method thereof, and a magnetic memory storage |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6294401B1 (en) * | 1998-08-19 | 2001-09-25 | Massachusetts Institute Of Technology | Nanoparticle-based electrical, chemical, and mechanical structures and methods of making same |
-
2004
- 2004-12-22 CN CNB2004800398969A patent/CN100459170C/zh not_active Expired - Fee Related
- 2004-12-22 EP EP04806618A patent/EP1704598A1/en not_active Withdrawn
- 2004-12-22 JP JP2006548446A patent/JP2007519240A/ja not_active Withdrawn
- 2004-12-22 US US10/585,063 patent/US20080283903A1/en not_active Abandoned
- 2004-12-22 WO PCT/IB2004/052905 patent/WO2005076368A1/en active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0843360A1 (en) * | 1996-11-15 | 1998-05-20 | Hitachi Europe Limited | Memory device |
WO2001062830A2 (en) * | 2000-02-22 | 2001-08-30 | Eugenia Kumacheva | Polymer-based nanocomposite materials and methods of production thereof |
WO2002003430A2 (en) * | 2000-06-29 | 2002-01-10 | California Institute Of Technology | Aerosol process for fabricating discontinuous floating gate microelectronic devices |
EP1213745A1 (en) * | 2000-12-05 | 2002-06-12 | Sony International (Europe) GmbH | Method of producing a ferroelectric memory and memory device |
EP1226878A2 (en) * | 2001-01-24 | 2002-07-31 | Matsushita Electric Industrial Co., Ltd. | Aligned fine particles, method for producing the same and device using the same |
US20030003300A1 (en) * | 2001-07-02 | 2003-01-02 | Korgel Brian A. | Light-emitting nanoparticles and method of making same |
WO2003099708A1 (fr) * | 2002-05-28 | 2003-12-04 | Matsushita Electric Industrial Co., Ltd. | Procede de production de nanoparticules et nanoparticules produites selon ce procede |
EP1372140A1 (en) * | 2002-06-10 | 2003-12-17 | Fujitsu Limited | A perpendicular magnetic memory medium, a manufacturing method thereof, and a magnetic memory storage |
Also Published As
Publication number | Publication date |
---|---|
CN1902762A (zh) | 2007-01-24 |
JP2007519240A (ja) | 2007-07-12 |
EP1704598A1 (en) | 2006-09-27 |
WO2005076368A1 (en) | 2005-08-18 |
US20080283903A1 (en) | 2008-11-20 |
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Owner name: NXP CO., LTD. Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS N.V. Effective date: 20070817 |
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