EP2702608A1 - Substratbehandlungsanlage - Google Patents
SubstratbehandlungsanlageInfo
- Publication number
- EP2702608A1 EP2702608A1 EP12718967.8A EP12718967A EP2702608A1 EP 2702608 A1 EP2702608 A1 EP 2702608A1 EP 12718967 A EP12718967 A EP 12718967A EP 2702608 A1 EP2702608 A1 EP 2702608A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrate treatment
- lamp
- housing
- treatment plant
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/24—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J7/26—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space by flow of fluid through passages associated with tube or lamp
Definitions
- Substrate Treatment Plant The invention relates to a substrate treatment plant.
- Substrates ie for example by lead with an area of about the 2 or more, this can be achieved in two ways: either a single lamp is moved (or a small array of lamps, which cover only a part of the substrate) relative to the substrate, so that when juxtaposing a plurality of exposure fields, finally, the entire substrate can be exposed or annealed. Alternatively, an array of lamps extending over the entire substrate may be ignited once.
- a single lamp is moved (or a small array of lamps, which cover only a part of the substrate) relative to the substrate, so that when juxtaposing a plurality of exposure fields, finally, the entire substrate can be exposed or annealed.
- an array of lamps extending over the entire substrate may be ignited once.
- examples such as photoresists to be exposed on a substrate - in which a juxtaposition of several
- the prior art is an air-cooled lamp array which covers all or part of the substrate surface.
- lamps are placed outside the vacuum chamber and the substrate is through a window in the wall of the
- the viewing window would have thick accordingly - ie many centimeters - be designed.
- this custom glass typically quartz glass due to the high UV transparency
- due to the large thickness of the glass to achieve the required strength a significant portion of the light from the lamp will be in the glass of the viewing window
- Turbine blades For lasers used for drilling e.g. Turbine blades are used, serves a 200 mm long
- Gas discharge lamp as a light source.
- the lamp must be turned off due to the high lightning rate, e.g. 500 pulses per second, ie a relatively high average electrical power of e.g. 8 kW, water cooled.
- the cooling is generally accomplished by a so-called flow tube, in which the lamp is embedded.
- the flow tube is one
- Quartz glass tube through which deionized cooling water flows, thus cooling the lamp.
- Flow Tubes allow a turbulence-free flow of water along the lamp.
- the lamps are surrounded individually or in groups of sections transparent housings to the ambient conditions of the
- Isolate treatment chamber and, if appropriate, to cool with suitable gaseous or liquid media.
- Heating device disclosed which can also be used for the thermal treatment of surfaces of semiconductors.
- the heating unit itself here consists of a bent quartz glass tube, through which a carbon wire which is when it comes from electric current
- the quartz tube is on one
- Silicon carbide covered protective cover Silicon carbide covered protective cover.
- An object of the invention is known
- a substrate treatment system which comprises a system chamber and a light source for exposing substrates, the light source being arranged inside the substrate treatment system and at least one lamp arranged in an at least partially transparent, a vacuum-tight cavity for receiving a lamp housing and at least one lamp arranged in spatial proximity to the at least one lamp
- Reflector element comprising an electrical connection. Exposing the substrates in the proposed
- Substrate treatment plant takes place in such a manner and with such lamps, which are suitable due to their energy output, at least near the surface of the substrate and / or a layer located thereon in terms of their properties similar to a thermal
- Substrate treatment plant due to their arrangement within the plant chamber are arranged much closer to the substrate, whereby less energy is used to
- At least one reflector element in spatial proximity to the at least one lamp at least one reflector element is arranged with an electrical connection, which it
- the housing of the light source comprises at least one tube made of a light-transmitting material.
- Tubes are easy and inexpensive to produce, have due to their geometry, even at relatively low wall thicknesses on a relatively high strength and are ideally suited to arrange a rod-shaped lamp therein. If several tubes are arranged parallel to each other in a plane, so can simple and
- a surface luminous light source can be provided within the substrate treatment system, in which a plurality of rod-shaped lamps can be arranged independently of each other and at the same time the exposure over a larger area, level, for example
- plate-like substrates such as flat glass panes and
- the housing at least comprises two plates arranged parallel to each other and at least two plate strips connecting the plates, wherein at least one plate consists of a translucent material.
- two plate strips are sufficient to connect the two parallel plates to one another to form a housing, for example when the then still open two ends of this composite open outside the installation chamber, as will be described below in connection with a further embodiment.
- the housing may pass through at least one wall of the housing
- Plant chamber extends through and on the outside of the plant chamber has at least one opening through which the cavity of the housing is accessible from outside the plant chamber. This makes it possible on the one hand, individual lamps, if necessary, during operation of the
- Vacuum process runs, and in this way one
- the at least one opening is formed as a coolant connection, so that a coolant can be passed through the housing in order to cool the lamp or lamps.
- the coolant may for example be a gas such as air or nitrogen, but also a coolant such as deionized water or the like be .
- the light source comprises at least two rod-shaped arranged in a plane
- Lamps and the reflector element comprises at least one arranged in a plane parallel thereto electrically conductive plate. This allows two or more lamps below
- Reflector element are ignited, whereby the structure of the substrate treatment system can be kept simple.
- the reflector element may according to another embodiment be part of the housing, i. the reflector element may for example be formed by one of the plates or one or more plate strips of the housing,
- the reflector element is an electrically conductive layer, which on a
- Component of the housing for example, a translucent, electrically non-conductive plate or a translucent, electrically non-conductive
- Plate strip is attached. It is also possible to mount the electrically conductive layer on a portion of the surface of a transparent, electrically non-conductive tube. For example, if a tube of translucent material such as quartz glass or the like is applied to long flash lamps, e.g. 1700 mm, scaled and passed through a vacuum chamber, glass wall thicknesses of e.g. 1.5 mm to withstand the vacuum pressure. At a relatively low level
- Such pipes can be inexpensive
- the lamp can be cooled by means of a closed nitrogen cycle through the housing and a heat exchanger without the formation of ozone. It is state of the art in processes in which no UV component is required to suppress the ozone formation at the expense of the luminous efficacy by cerium doping of the lamp body. This variant is of course also in the
- Fig. 1 is a belonging to a substrate treatment plant system chamber in perspective view with a
- Fig. 2 is a cross-sectional view of a
- Fig. 3 is a cross-sectional view of a
- FIG. 4 is a cross-sectional view of a Substrate treatment plant according to a fourth
- Fig. 5 is a cross-sectional view of a
- FIG. 6 shows a lamp arrangement according to a sixth
- Fig. 7 shows a lamp assembly according to a seventh
- FIG. 1 shows a partial view of a plant chamber 1, which is part of a substrate treatment plant for vacuum treatment of plate-shaped substrates.
- the plant chamber 1 has side walls 11, a bottom 12 and flanges 13, to which a lid, not shown here, can be placed, so that the plant chamber 1 can be closed by the lid.
- a transport device 2 for the substrates 3 is arranged in the plant chamber 1.
- the transport device 2 is formed by an arrangement of transport rollers 22, which are arranged in a horizontal plane, which are rotatably mounted and drivable in two storage banks 21 and to which the substrates to be treated are placed and moved in a transport direction 25 through the substrate treatment plant.
- the transport device 2 is arranged in a plane lamp array, which is in the interior of the installation chamber 1 under the operation of the
- Substrate treatment plant the plant chamber 1
- occlusive connected to the upper flange 13, not shown cover is arranged.
- These are transverse to the transport direction 25 of the substrates in a horizontal Level, which is parallel to and above the transport plane of the substrates, a plurality of quartz glass tubes 41 (flow tubes) guided through the plant chamber 1 and stored for example in sealing rings that they penetrate the side walls 11 of the plant chamber 1.
- quartz glass tubes 41 flow tubes guided through the plant chamber 1 and stored for example in sealing rings that they penetrate the side walls 11 of the plant chamber 1.
- the tubes 41 can then be used to guide lamps, which cause the optical treatment of the substrates, which are moved on the transport device 2 under the lamps through the substrate treatment plant. This makes it possible both to increase the lamps in atmospheric pressure
- the tubes 41 have a circular cross-section.
- the tubes 41 are particularly simple and therefore inexpensive to produce, on the other hand particularly pressure resistant.
- the wall thickness of the tubes 41 does not scale with the number of lamps and only slightly with their length due to the required mechanical
- Fig. 2 shows a cross section through a
- This reflector element 6 serves to ignite the lamps 5.
- Fig. 3 shows an embodiment in which straight tubes 41 are mounted in indentations 15 of the lid 14, so that the tubes 41 and the lamps 5 disposed therein are in vacuum within the plant chamber 1, wherein the ends of the tubes 41 into the atmosphere except for
- Plant chamber 1 open the vacuum chamber and can be supplied with voltage there.
- the indentations 15 of the lid 14 thus form walls of the plant chamber, through which the tubes extend.
- the indentations 15 can be detachably connected to the cover 14.
- the outside of the plant chamber 1 opening tubes 41, each forming a housing 4 for a lamp 5, can be used by their outer openings 44 for introducing and discharging coolant.
- coolant connections at the openings 44 coolant connections
- Fig. 4 shows an embodiment in which straight tubes 41 are mounted in the lid 14 of the system chamber 1 so that they penetrate the side walls 11 and the tubes 41 and the lamps 5 disposed therein are in vacuum within the system chamber 1, the ends the pipes 41 open into the atmosphere outside the plant chamber 1 and can be supplied there with voltage.
- Fig. 6 shows a planar arrangement of lamps 5 according to an embodiment in which the tubes 41 - unlike the embodiments described above - are arranged in tubes 41 with a rectangular cross-section. This can a small wall thickness of the tubes 41 at the same time high packing density of the lamps 5 can be achieved.
- Substrates 3 facing away from (horizontal) surfaces of the tubes 41 and located between the lamps 5 (vertical) surfaces of the tubes 41 may also be with an electrically conductive material such as aluminum or the like
- the coated surfaces if they are applied in accordance with an electric potential, represent a reflector element 6, which can serve to ignite the lamps 5, as described above. Incidentally, the same would be the case in the cross section
- Substrates 3 facing away from the lateral surface of the tubes 41 should be coated and the substrates. 3
- FIG. 7 further shows alternatively a lamp arrangement in a housing 4, which, in contrast to the previously presented tubes 41, not only a lamp 5, but a whole
- This housing 4 can accommodate planar arrangement of lamps 5.
- This housing 4 is formed of two plates 42, at least one of which is made of a translucent material, such as quartz glass, and webs in the form of plate strips 43 which are arranged between the two plates 42 and connected to these, the strength of the housing 4 increase.
- the other plate 42 can be
- Quartz glass or the like but also made of other materials, such as electrically conductive material such as aluminum or the like, or with electrically conductive material such as aluminum or the like
- the other plate may simultaneously constitute a capacitor element which can serve to ignite the lamps 5, as described above.
- Housing 4 at the same time act as reflectors to better exploit the light of the lamps 5.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Cultivation Of Plants (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011100098 | 2011-04-29 | ||
DE102011081749.2A DE102011081749B4 (de) | 2011-04-29 | 2011-08-29 | Substratbehandlungsanlage |
PCT/EP2012/057765 WO2012146715A1 (de) | 2011-04-29 | 2012-04-27 | Substratbehandlungsanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2702608A1 true EP2702608A1 (de) | 2014-03-05 |
Family
ID=47007734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12718967.8A Ceased EP2702608A1 (de) | 2011-04-29 | 2012-04-27 | Substratbehandlungsanlage |
Country Status (5)
Country | Link |
---|---|
US (1) | US9076635B2 (de) |
EP (1) | EP2702608A1 (de) |
CN (1) | CN103518257B (de) |
DE (1) | DE102011081749B4 (de) |
WO (1) | WO2012146715A1 (de) |
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2012
- 2012-04-27 CN CN201280021001.3A patent/CN103518257B/zh not_active Expired - Fee Related
- 2012-04-27 US US14/113,472 patent/US9076635B2/en not_active Expired - Fee Related
- 2012-04-27 WO PCT/EP2012/057765 patent/WO2012146715A1/de active Application Filing
- 2012-04-27 EP EP12718967.8A patent/EP2702608A1/de not_active Ceased
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Also Published As
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DE102011081749A1 (de) | 2012-10-31 |
WO2012146715A1 (de) | 2012-11-01 |
DE102011081749B4 (de) | 2016-04-14 |
US20140070689A1 (en) | 2014-03-13 |
CN103518257B (zh) | 2016-08-24 |
CN103518257A (zh) | 2014-01-15 |
US9076635B2 (en) | 2015-07-07 |
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Effective date: 20160506 |