EP1845616A2 - Elément de résonateur piézoélectrique et dispositif piézoélectrique - Google Patents

Elément de résonateur piézoélectrique et dispositif piézoélectrique Download PDF

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Publication number
EP1845616A2
EP1845616A2 EP20070014596 EP07014596A EP1845616A2 EP 1845616 A2 EP1845616 A2 EP 1845616A2 EP 20070014596 EP20070014596 EP 20070014596 EP 07014596 A EP07014596 A EP 07014596A EP 1845616 A2 EP1845616 A2 EP 1845616A2
Authority
EP
European Patent Office
Prior art keywords
base
resonator element
piezoelectric resonator
vibration
vibration arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20070014596
Other languages
German (de)
English (en)
Other versions
EP1845616A3 (fr
EP1845616B1 (fr
Inventor
Hideo Tanaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1845616A2 publication Critical patent/EP1845616A2/fr
Publication of EP1845616A3 publication Critical patent/EP1845616A3/fr
Application granted granted Critical
Publication of EP1845616B1 publication Critical patent/EP1845616B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork
EP20070014596 2004-10-20 2005-10-17 Elément de résonateur piézoélectrique et dispositif piézoélectrique Not-in-force EP1845616B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004305621 2004-10-20
JP2005129906A JP4301200B2 (ja) 2004-10-20 2005-04-27 圧電振動片および圧電デバイス
EP20050022588 EP1650866B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP05022588.7 Division 2005-10-17
EP20050022588 Division EP1650866B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique

Publications (3)

Publication Number Publication Date
EP1845616A2 true EP1845616A2 (fr) 2007-10-17
EP1845616A3 EP1845616A3 (fr) 2007-11-07
EP1845616B1 EP1845616B1 (fr) 2010-11-24

Family

ID=35645609

Family Applications (4)

Application Number Title Priority Date Filing Date
EP20100171211 Not-in-force EP2276171B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique
EP20070014596 Not-in-force EP1845616B1 (fr) 2004-10-20 2005-10-17 Elément de résonateur piézoélectrique et dispositif piézoélectrique
EP20050022588 Not-in-force EP1650866B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique
EP20100171212 Not-in-force EP2276172B1 (fr) 2004-10-20 2005-10-17 Élément de résonateur piézoélectrique et dispositif piézoélectrique

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP20100171211 Not-in-force EP2276171B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP20050022588 Not-in-force EP1650866B1 (fr) 2004-10-20 2005-10-17 Élément résonateur piézoélectrique et dispositif piézoélectrique
EP20100171212 Not-in-force EP2276172B1 (fr) 2004-10-20 2005-10-17 Élément de résonateur piézoélectrique et dispositif piézoélectrique

Country Status (6)

Country Link
US (1) US7521846B2 (fr)
EP (4) EP2276171B1 (fr)
JP (1) JP4301200B2 (fr)
KR (3) KR100802865B1 (fr)
CN (2) CN101820263B (fr)
DE (2) DE602005025022D1 (fr)

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JP4609196B2 (ja) * 2005-06-20 2011-01-12 セイコーエプソン株式会社 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
US7694734B2 (en) * 2005-10-31 2010-04-13 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
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JP5500220B2 (ja) * 2006-08-18 2014-05-21 セイコーエプソン株式会社 振動片、振動子、発振器、及びセンサー
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KR100802865B1 (ko) 2008-02-12
EP2276172B1 (fr) 2012-08-22
EP2276171A1 (fr) 2011-01-19
KR20070096991A (ko) 2007-10-02
US20060082261A1 (en) 2006-04-20
EP1845616A3 (fr) 2007-11-07
CN101820263B (zh) 2014-01-22
DE602005023823D1 (de) 2010-11-11
CN100596020C (zh) 2010-03-24
EP2276172A1 (fr) 2011-01-19
EP1650866A2 (fr) 2006-04-26
KR101022123B1 (ko) 2011-03-17
JP4301200B2 (ja) 2009-07-22
CN101820263A (zh) 2010-09-01
KR100786425B1 (ko) 2007-12-17
JP2006148857A (ja) 2006-06-08
EP1650866A3 (fr) 2007-01-24
KR20060049085A (ko) 2006-05-18
EP1650866B1 (fr) 2010-09-29
EP2276171B1 (fr) 2012-05-09
DE602005025022D1 (de) 2011-01-05
KR20070014209A (ko) 2007-01-31
EP1845616B1 (fr) 2010-11-24
US7521846B2 (en) 2009-04-21

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