EP0973620B2 - Procede et dispositif pour nettoyer ou secher des pieces - Google Patents

Procede et dispositif pour nettoyer ou secher des pieces Download PDF

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Publication number
EP0973620B2
EP0973620B2 EP98930632A EP98930632A EP0973620B2 EP 0973620 B2 EP0973620 B2 EP 0973620B2 EP 98930632 A EP98930632 A EP 98930632A EP 98930632 A EP98930632 A EP 98930632A EP 0973620 B2 EP0973620 B2 EP 0973620B2
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EP
European Patent Office
Prior art keywords
workpieces
liquid
cleaning
treatment container
workpiece carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98930632A
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German (de)
English (en)
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EP0973620A1 (fr
EP0973620B1 (fr
Inventor
Joachim Schwarz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MAFAC Ernst Schwarz GmbH and Co KG
Original Assignee
MAFAC Ernst Schwarz GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Application filed by MAFAC Ernst Schwarz GmbH and Co KG filed Critical MAFAC Ernst Schwarz GmbH and Co KG
Priority to EP03010727.0A priority Critical patent/EP1342969B1/fr
Publication of EP0973620A1 publication Critical patent/EP0973620A1/fr
Publication of EP0973620B1 publication Critical patent/EP0973620B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/14—Drying solid materials or objects by processes not involving the application of heat by applying pressure, e.g. wringing; by brushing; by wiping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B11/00—Machines or apparatus for drying solid materials or objects with movement which is non-progressive
    • F26B11/18—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B11/00—Machines or apparatus for drying solid materials or objects with movement which is non-progressive
    • F26B11/18—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles
    • F26B11/181—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles the receptacle being a foraminous, perforated or open-structured drum or drum-like container, e.g. rotating around a substantially horizontal or vertical axis; the receptacle being multiple perforated drums, e.g. in superimposed arrangement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/048—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum in combination with heat developed by electro-magnetic means, e.g. microwave energy
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00

Definitions

  • the present invention relates to a method for cleaning and drying workpieces.
  • the DE 92 17 047 U1 describes a device for cleaning workpieces, in which the workpieces are surrounded by a washing liquid bath, in which a gaseous medium is injected under pressure. In an air space above the Waschmaykeitsbades a negative pressure can be generated.
  • the DE 37 02 675 A1 describes a device for wet cleaning of workpieces, in which by means of a liquid jet, a turbulence flow is generated in a dip bath, in which the workpieces are arranged for cleaning.
  • a device for cleaning of workpieces which has a treatment container and arranged in the treatment container workpiece carrier for receiving workpieces.
  • a spray unit arranged in the treatment tank is rotatably arranged around the workpiece carrier and has outlet nozzles for discharging a cleaning liquid.
  • a flood pipe is provided to flood the cleaning tank wholly or partly with a cleaning liquid.
  • the DE 44 46 587 A1 describes a cleaning device with a tank in which a batch can be cleaned by means of cleaning liquid, which is discharged via nozzles of a supply line.
  • a negative pressure can be generated.
  • He further has in the lower part of a drain pipe, which is connected either via a circulation pump to the supply line, or which leads via a pump in a reservoir, which in turn is connected via a pump to the supply line.
  • the known devices and methods have the disadvantage that they are not very effective for cleaning workpieces with the smallest surface structures and in particular for cleaning very small workpieces that are introduced as bulk material in the cleaning container.
  • the aim of the present invention is therefore to provide a method for cleaning workpieces, with the reliable cleaning of even the smallest workpieces and workpieces with filigree surface structures is possible, which operates reliably based on aqueous cleaning fluids without the addition of solvents and the In particular, the above-mentioned disadvantages do not arise.
  • the inventive method allows reliable cleaning even the smallest workpieces with removal of grease and oil residues from the smallest recesses and openings.
  • a liquid bath is generated in the treatment tank, which at least partially surrounds the workpieces held by the workpiece carrier.
  • Parallel to generating a negative pressure in the region above the liquid bath by means of a vacuum pump connected to a first suction opening, cleaning liquid and optionally a gaseous medium are introduced into the liquid bath and the area above the liquid bath via the spray unit.
  • the cleaning liquid discharged from the spraying unit impinges on the workpieces Spontaneous evaporations, whereby gas particles bounce on the workpieces at high speed due to the released energy and achieve a considerable cleaning effect.
  • the controllable liquid outlet is provided, over which per unit of time a quantity of liquid corresponding to the newly supplied quantity of liquid expires.
  • the liquid outlet preferably has a valve which is periodically opened and closed.
  • the inventive method also has the advantage that it can be used in addition to the cleaning of workpieces for drying the cleaned workpieces.
  • a gaseous medium is introduced under excess pressure via the outlet nozzles of the spray unit into the treatment tank, wherein the gas jet impinging on the workpieces removes liquid residues adhering to the workpieces which are sucked off.
  • the suction is preferably carried out by the vacuum pump or via a further, provided according to an embodiment of the invention further suction device which is connected to a second suction opening of the treatment vessel.
  • the further suction device serves, in particular, to quickly suck the liquid vapors located in the treatment tank immediately after the cleaning process.
  • a negative pressure generated by the vacuum pump in the processing tank accelerates the vaporization of the liquid residues removed from the workpieces by the gas jets.
  • the workpieces are constantly exposed to gas jets from constantly changing sides in order to effect as complete a drying as possible.
  • simultaneous rotation of the workpiece carrier is carried out, especially in bulk, a constant mixing of the workpieces, so that in the course of the drying process all workpieces are exposed to the gas jets.
  • the treatment tank has externally mounted heaters for heating the treatment tank during the drying process.
  • heat radiators in the interior of the treatment container, which emit during the drying process directed to the workpieces heat radiation, which causes supported by the existing in the treatment tank vacuum evaporation of adhering to the workpieces liquid residues.
  • the heat radiators are rotatably arranged around the workpiece carrier in the treatment tank.
  • a liquid bath is produced in a treatment container in which a workpiece carrier for receiving the workpieces is arranged, and a negative pressure is generated in the treatment container in an area above the liquid bath.
  • the workpiece carrier or the workpieces are in this case partially surrounded by the liquid bath.
  • Cleaning liquid and / or a gaseous medium are then introduced under excess pressure into the treatment vessel via outlet nozzles of a spray unit, wherein the liquid jets or the jets of the gaseous medium are preferably directed onto the workpieces.
  • the workpiece carrier is moved in the treatment container in such a way that the workpieces alternately pass above and below a liquid level of the liquid bath, so as to be exposed alternately to the different cleaning processes which take place above, below and in the boundary region between the liquid bath and the vacuum region to become.
  • the movement of the workpiece carrier can be done for example by periodic lifting and lowering or by rotation.
  • the liquid level is maintained at least approximately constant during the cleaning process to ensure that the workpieces pass alternately above and below the liquid level as the workpiece carrier moves.
  • the formation of the liquid bath into the treatment tank can be carried out by initial flooding of the treatment tank to a predetermined level of liquid level, this level of liquid level is kept approximately constant when flowing further cleaning liquid via a controllable liquid flow.
  • Another way to generate the liquid bath is to keep the liquid drain closed at the beginning of the cleaning process until a corresponding amount of cleaning liquid has been introduced into the treatment tank via the spray unit.
  • Liquid vapors which form in the negative pressure region above the liquid bath, are sucked off, wherein the suction preferably takes place via a vacuum pump provided for generating the negative pressure.
  • a rotation of the spray unit wherein the outlet nozzles of the spray unit preferably move in opposite directions to a rotational movement of the workpiece carrier.
  • the cleaning method according to the invention further provides for carrying out the above-mentioned method steps several times in succession, wherein between the individual cleaning processes, the liquid bath is discharged almost abruptly via the liquid outlet. Due to the resulting suction effect, a further cleaning effect is achieved on the workpieces.
  • the draining of the liquid bath is accelerated by generating an overpressure by means of compressed air injected via the spray unit.
  • the workpiece carrier and / or the spray unit are rotated during the drying process, on the one hand to achieve a continuous mixing of the workpieces with bulk material and, on the other hand, to expose the workpieces from all directions to the gaseous jet.
  • the drying process can be accelerated by heating the treatment tank by means of internally or externally mounted heaters.
  • a method for drying workpieces is provided to generate a negative pressure in a treatment vessel in which the workpieces are received by a workpiece carrier, and further to generate in the interior of the treatment vessel directed onto the workpieces heat radiation.
  • the high-energy thermal radiation causes, supported by the negative pressure formed in the container interior, an evaporation of the adhering to the workpieces liquid.
  • the liquid vapors are sucked out of the container interior.
  • the suction is preferably carried out by the vacuum pump required for generating the negative pressure.
  • drying method preferably via outlet nozzles of a spray unit to introduce a gaseous medium under pressure in the treatment vessel.
  • a gaseous medium under pressure in the treatment vessel.
  • Fig. 3 a sectional view of the device along the in Fig. 1 drawn section line BB 'is.
  • Fig. 2 also shows the device cut in the axial direction in perspective View, where sectional areas are shaded for clarity.
  • the device has a substantially cylindrical treatment container 1, which has a controllable liquid outlet 4 and a first suction opening 7 for connection of a vacuum pump for generating a negative pressure in the interior of the treatment container 1. Furthermore, a second suction opening 6 is provided for the connection of a further suction device, which essentially serves for rapid suction of liquid vapors following a cleaning process which can be carried out with the device.
  • the further suction device preferably causes a much larger gas exchange than the vacuum pump, but is not suitable for generating a vacuum.
  • a workpiece carrier 12 for receiving workpieces is arranged, wherein the workpiece carrier 12 is rotatably mounted in the treatment container 1 about a longitudinal axis A-A '.
  • the workpiece carrier 12 serves on the one hand for receiving individual large workpieces and on the other for receiving baskets 18 with bulk material, wherein the baskets are liquid and gas permeable.
  • a spray unit 8a, 8b for introducing cleaning liquid or a gaseous medium into the container interior.
  • the spray unit consists in the embodiments shown in the figures of two parallel arranged substantially rectangular running pipe loops, one of which serves for the discharge of cleaning liquid and the other for the discharge of a gaseous medium.
  • the two pipe loops 8a, 8b each have a plurality of outlet nozzles directed at the workpiece carrier.
  • the spray unit formed from the two pipe loops 8a, 8b is likewise rotatably mounted around the container axis A-A '.
  • a closable supply opening 16 is provided on one side of the treatment container 1.
  • the workpiece carrier 12 has a number of rollers, which facilitates retraction of the workpieces accommodating basket 18 in the treatment tank 1.
  • a flooding of the treatment tank 1 with a cleaning liquid except for a predetermined liquid level 100, 102, wherein the workpiece carrier 12 and the workpieces receiving basket 18 is partially surrounded by the liquid bath 50 takes place.
  • a partial vacuuming of the space 52 located above the liquid bath takes place by means of the vacuum pump connected to the first suction opening.
  • cleaning liquid is introduced via the outlet nozzles of one of the pipe loop of the spray unit 8a, 8b under pressure in the container interior, wherein the supply of the cleaning liquid from the outside via a central shaft 40, via which also the workpiece carrier 12 and the spray unit 8a, 8b are rotatably mounted ,
  • the cleaning liquid When the cleaning liquid is introduced under pressure into the treatment tank 1, essentially three different cleaning processes result.
  • the space 52 above the liquid bath when the liquid jets strike the workpieces, explosive spontaneous evaporations of the treatment liquid occur, whereby the released energy causes the detachment of contaminants and firmly adhering coating and surface contaminants.
  • the pressure of the cleaning liquid which is preferably in the range of 2.0 to 15.0 bar, and formed in the space 52 vacuum, preferably between 0.2 to 0.6 bar can be coordinated so that it only when hitting the cleaning liquid on the workpieces comes to evaporations.
  • the cleaning liquid is heated to a temperature of about 60 to 85 ° C.
  • turbulent underwater currents develop through the introduction of the cleaning fluid, which cause a cleaning effect on the workpieces.
  • the workpieces located in the basket 18 are alternately fed to the different cleaning processes in the space 52 above the liquid bath and in the liquid bath 50. Furthermore, by rotation of the workpiece carrier 12, the workpiece of the charge located in the basket 18 is permanently mixed in order to expose all the workpieces during the cleaning process to the cleaning processes acting on the batch from the outside. In the space 52 above the liquid bath the workpieces are acted upon by rotation of the workpiece carrier 12 from different directions with the exiting from the outlet nozzles liquid jets.
  • the spray unit 8a, 8b can remain stationary, wherein a part of the pipe loops 8a, 8b is arranged above and a part below the liquid level 100, 102 in order to inject cleaning liquid into both the space 52 and the liquid bath 50.
  • the spray unit 8a, 8b is rotated counter to the workpiece carrier 18 about the axis A-A 'during the cleaning process.
  • the rotation of the workpiece carrier 12 causes in the liquid bath 50 an additional turbulent flow which enhances the cleaning effect.
  • permanent gas fractions are introduced into the liquid bath 50, which achieve there as gas bubbles of various forms cleaning effects on the workpieces.
  • the liquid vapors accumulating in the gas space 52 are permanently sucked off via the first suction opening 7 by the vacuum pump during the cleaning process.
  • one portion of the liquid bath 50 corresponding to the inflowing amount of cleaning liquid is discharged via the liquid outlet 4 per unit time.
  • the liquid outlet 4 has a valve which is not shown in more detail in the figures and which is opened and closed at regular intervals to discharge the liquid.
  • the permanent flow of cleaning liquid from the liquid bath 50 which is replaced by the cleaning liquid supplied via the spraying unit 8a, 8b, has the advantage that during the cleaning process, dirt accumulating in the liquid bath 50 is permanently removed.
  • the described cleaning process is preferably carried out several times in succession, wherein between the individual processes, the liquid bath 50 is very quickly at least partially drained via the liquid outlet 4, this creates a strong suction on the workpieces, entraining adhering to the workpieces debris.
  • the discharge of the liquid bath 50 is advantageously accelerated by generating an overpressure by means of compressed air introduced via the spray unit.
  • the device is also suitable for drying wet workpieces following the cleaning process.
  • the cleaning liquid is drained via the liquid outlet 4 and the liquid outlet 4 is closed.
  • a gaseous medium in particular air, is injected under excess pressure into the treatment tank 1.
  • the adhering to the workpieces liquid residues are torn away by the gas jet and evaporate, wherein the forming liquid vapor is preferably sucked by the vacuum pump via the first suction opening 7.
  • a negative pressure generated by the vacuum pump in the treatment tank 1 also accelerates the evaporation of the liquid residues discharged from the workpieces.
  • the workpieces are permanently mixed and applied from different sides with the gas jets for drying.
  • the workpiece carrier 18 and the tube loop 8b rotate in opposite directions about the axis A-A 'of the treatment container.
  • the drying effect is enhanced by heating the container interior, wherein the heating is generated by externally mounted, not shown here heaters or arranged in the container interior heat radiator 10 a, 10 b.
  • the heat radiators are preferably directed to the workpiece carrier 12 and the workpieces and, as in the Fig. 1 and 3 shown as stationary heat radiator 10 a stationarily arranged on a container inner wall or, as in Fig. 4 represented as rotatable heat radiator 10b arranged on a parallel to the pipe loops 8a, 8b of the spray unit arranged pipe loop 8c, which is rotatably mounted together with the spray unit 8a, 8b about the axis AA 'of the treatment vessel.
  • the heat radiators 10a, 10b are, as in particular from Fig. 1 emerges formed as elongated elements which extend in the axial direction in the treatment tank 1.
  • the temperature of the introduced via the spray unit 8a, 8b gaseous medium is dependent on the temperature sensitivity of the workpieces to be dried between 50 and 200 ° C, correspondingly varies the pressure of the introduced gaseous medium between 0.5 bar and 10 bar, wherein in the container interior, a vacuum is formed between 0.2 bar and 0.6 bar.
  • the device also allows a further drying process in which a Drying of the workpieces by the heat radiation emitted by the heat radiators 10a, 10b takes place in conjunction with a vacuum generated in the container interior by the vacuum pump.
  • This method is particularly suitable for drying mechanically less resilient components, such as electronic components, which would be destroyed by using the above-described drying method by the high pressure of the gas jets.
  • FIG. 4 The device shown the ability to rotate the heat radiator 10b through the pipe loop 8c to the workpiece carrier 18 and to leave the workpiece carrier 18 stationary or rotate the workpiece carrier 18 and the pipe loop 8c in opposite directions to permanently suspend the workpieces from different directions of heat radiation.
  • the forming in the container interior liquid vapor is sucked through the first suction port 7 and the vacuum pump.
  • a gaseous medium in particular air
  • air is briefly blown into the container interior at defined time intervals via one of the pipe loops of the spray unit 8a, 8b in order to temporarily increase the pressure in the container interior and thus reduce the vacuum.
  • the introduced air is sucked off via the vacuum pump, whereby the liquid vapors are removed more quickly from the treatment tank 1 through this short-term increased gas exchange.
  • the introduced air further causes liquid residues to be blown away from the workpieces so as to effect a faster evaporation of the adhered liquid residues.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Drying Of Solid Materials (AREA)

Claims (9)

  1. Procédé de nettoyage de pièces selon lequel on introduit les pièces dans un récipient de traitement (1) comportant un support de pièces (12) pour recevoir les pièces et dans lequel on introduit un liquide de nettoyage en pression par des buses (8a, 8b) d'une unité de pulvérisation (8a, 8b) dirigée vers la pièce dans le récipient de traitement (1), procédé ayant les étapes suivantes :
    - on réalise un bain de liquide (50) qui entoure au moins en partie les pièces dans le récipient de traitement (1),
    - on crée une dépression dans un volume de gaz (52) se trouvant au-dessus du bain de liquide (50),
    caractérisé par les étapes suivantes pendant l'introduction du liquide de nettoyage par les buses (8a, 8b) dans le volume de gaz (52) et simultanément dans le bain de liquide (50) :
    - on déplace le support de pièces (12) dans le récipient de traitement (1) de façon que les pièces passent alternativement dans le bain de liquide (50) et dans le volume de gaz (52) au-dessus du bain de liquide (50).
  2. Procédé selon la revendication 1,
    caractérisé en ce qu'
    on maintient le niveau de liquide (100, 102) du bain de liquide (50) au moins sensiblement constant.
  3. Procédé selon la revendication 1 ou 2,
    caractérisé en ce qu'
    on fait tourner le support de pièces (12) autour d'un axe A-A' du récipient de traitement pour faire passer alternativement les pièces dans le bain de liquide (50) et dans le volume de gaz (52).
  4. Procédé selon l'une des revendications 1 à 3,
    caractérisé en ce qu'
    on évacue par aspiration les vapeurs de liquide du volume de gaz (52).
  5. Procédé selon l'une des revendications 1 à 4,
    caractérisé en ce qu'
    on fait tourner l'unité de pulvérisation (8a, 8b) de préférence en sens opposé au support de pièces dans le récipient de traitement (1).
  6. Procédé selon l'une des revendications 1 à 5,
    caractérisé en ce qu'
    on évacue au moins en partie le bain de liquide (50) à des intervalles de temps réguliers.
  7. Procédé selon l'une des revendications 1 à 6, comportant les étapes suivantes pour sécher les pièces :
    - on enlève le liquide de nettoyage du récipient de traitement,
    - on introduit un milieu gazeux sous pression par des buses de l'unité de pulvérisation (8a, 8b) dans le récipient de traitement (1),
    - on aspire des vapeurs de liquide de l'intérieur du récipient de traitement (1),
    - on fait tourner l'unité de pulvérisation (8a, 8b) et/ou le support de pièces (12) dans le récipient de traitement (1).
  8. Procédé selon la revendication 7,
    caractérisé en ce qu'
    on crée une dépression dans le récipient de traitement (1).
  9. Procédé selon la revendication 7,
    caractérisé en ce qu'
    on chauffe l'intérieur du récipient de traitement (1) à l'aide de radiateurs thermiques (10a, 10b) installés extérieurement sur le récipient de traitement (1) ou à l'intérieur du récipient de traitement (1), et dirigés vers le support de pièces (12).
EP98930632A 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces Expired - Lifetime EP0973620B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP03010727.0A EP1342969B1 (fr) 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19714603A DE19714603C1 (de) 1997-04-09 1997-04-09 Verfahren und Vorrichtung zur Reinigung von Werkstücken
DE19714603 1997-04-09
PCT/DE1998/001006 WO1998045059A1 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP03010727.0A Division EP1342969B1 (fr) 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces
EP03010727.0 Division-Into 2003-05-14

Publications (3)

Publication Number Publication Date
EP0973620A1 EP0973620A1 (fr) 2000-01-26
EP0973620B1 EP0973620B1 (fr) 2003-08-06
EP0973620B2 true EP0973620B2 (fr) 2008-06-25

Family

ID=7825878

Family Applications (2)

Application Number Title Priority Date Filing Date
EP98930632A Expired - Lifetime EP0973620B2 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces
EP03010727.0A Expired - Lifetime EP1342969B1 (fr) 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP03010727.0A Expired - Lifetime EP1342969B1 (fr) 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces

Country Status (8)

Country Link
US (1) US6253462B1 (fr)
EP (2) EP0973620B2 (fr)
AT (1) ATE246552T1 (fr)
AU (1) AU8101098A (fr)
BR (1) BR9808526A (fr)
CA (1) CA2286102C (fr)
DE (2) DE19714603C1 (fr)
WO (1) WO1998045059A1 (fr)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100360402B1 (ko) * 2000-03-22 2002-11-13 삼성전자 주식회사 회전성 분사노즐을 구비하는 웨이퍼 건조 장치 및 이를이용한 웨이퍼 건조 방법
DE10149027B4 (de) * 2001-10-05 2010-05-06 Mafac Ernst Schwarz Gmbh & Co. Kg Aufnahmevorrichtung für einen Werkstückträger oder Werkstückkorb in einer Reinigungs- und/oder Trocknungsanlage
GB2385315B (en) * 2002-01-15 2004-06-30 Bespak Plc Improvements in or relating to valves for dispensers
JP2003266030A (ja) * 2002-03-15 2003-09-24 Seiko Epson Corp 被処理物の洗浄方法および装置並びにデバイスの製造方法およびデバイス
DE10212604B3 (de) * 2002-03-21 2004-01-22 Mafac Ernst Schwarz Gmbh & Co. Kg Vorrichtung zur Aufnahme eines Werkstückträgers und zur Zuführung eines ersten und zweiten Mediums und Reinigungsbehälter mit einer solchen Vorrichtung
DE10216285B4 (de) * 2002-04-12 2012-03-29 Mafac Ernst Schwarz Gmbh & Co. Kg Maschinenfabrik Reinigungsvorrichtung zur Reinigung von Werkstücken
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DE59809214D1 (de) 2003-09-11
EP0973620A1 (fr) 2000-01-26
CA2286102A1 (fr) 1998-10-15
BR9808526A (pt) 2000-05-23
ATE246552T1 (de) 2003-08-15
DE19714603C1 (de) 1998-10-29
WO1998045059A1 (fr) 1998-10-15
EP1342969A2 (fr) 2003-09-10
EP1342969B1 (fr) 2013-05-29
CA2286102C (fr) 2007-09-18
AU8101098A (en) 1998-10-30
EP1342969A3 (fr) 2006-06-07
EP0973620B1 (fr) 2003-08-06
US6253462B1 (en) 2001-07-03

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