EP1342969B1 - Procédé et appareil de séchage de pièces - Google Patents

Procédé et appareil de séchage de pièces Download PDF

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Publication number
EP1342969B1
EP1342969B1 EP03010727.0A EP03010727A EP1342969B1 EP 1342969 B1 EP1342969 B1 EP 1342969B1 EP 03010727 A EP03010727 A EP 03010727A EP 1342969 B1 EP1342969 B1 EP 1342969B1
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EP
European Patent Office
Prior art keywords
workpieces
liquid
treatment container
cleaning
workpiece carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03010727.0A
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German (de)
English (en)
Other versions
EP1342969A3 (fr
EP1342969A2 (fr
Inventor
Joachim Schwarz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MAFAC Ernst Schwarz GmbH and Co KG
Original Assignee
MAFAC Ernst Schwarz GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by MAFAC Ernst Schwarz GmbH and Co KG filed Critical MAFAC Ernst Schwarz GmbH and Co KG
Publication of EP1342969A2 publication Critical patent/EP1342969A2/fr
Publication of EP1342969A3 publication Critical patent/EP1342969A3/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/14—Drying solid materials or objects by processes not involving the application of heat by applying pressure, e.g. wringing; by brushing; by wiping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B11/00—Machines or apparatus for drying solid materials or objects with movement which is non-progressive
    • F26B11/18—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B11/00—Machines or apparatus for drying solid materials or objects with movement which is non-progressive
    • F26B11/18—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles
    • F26B11/181—Machines or apparatus for drying solid materials or objects with movement which is non-progressive on or in moving dishes, trays, pans, or other mainly-open receptacles the receptacle being a foraminous, perforated or open-structured drum or drum-like container, e.g. rotating around a substantially horizontal or vertical axis; the receptacle being multiple perforated drums, e.g. in superimposed arrangement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/048—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum in combination with heat developed by electro-magnetic means, e.g. microwave energy
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00

Definitions

  • the present invention relates to an apparatus and a method for drying workpieces.
  • the DE 92 17 047 U1 describes a device for cleaning of workpieces in which the workpieces are surrounded by a Waschstattkeitsbad, in which a gaseous medium is injected under pressure. In an air space above the Waschmaykeitsbades a negative pressure can be generated.
  • the DE 37 02 675 A1 describes a device for wet cleaning of workpieces, in which by means of a liquid jet, a turbulence flow is generated in a dip bath, in which the workpieces are arranged for cleaning.
  • the DE 44 18 608 A1 describes a vacuum microwave drying device for drying electrically non-conductive products.
  • the device has an outer and an inner chamber disposed therein, wherein in the drying process in the inner chamber microwaves are discharged to evaporate the solvent.
  • the FR 2 614 682 from which a method according to the preamble of claim 1 and a device according to the preamble of claim 5 are known, describes a method and an apparatus for drying materials of plant origin such as wood, wherein the drying process is assisted by vacuum.
  • the DE 26 49 189 describes another device for drying objects.
  • the known devices and methods have the disadvantage that they are not very effective for cleaning workpieces with the smallest surface structures and in particular for cleaning very small workpieces that are introduced as bulk material in the cleaning container.
  • the object on which the invention is based is to provide an effective method and a device for drying workpieces, in particular for drying workpieces having the smallest surface structures and bulk goods.
  • a device for cleaning workpieces has a treatment container in which a workpiece carrier for receiving the workpieces to be cleaned is arranged.
  • a spray unit with outlet nozzles for discharging cleaning liquid and / or a gaseous medium is arranged in the interior of the treatment container.
  • the workpiece carrier and / or the spray unit are also rotatably arranged in the treatment container.
  • the device for cleaning workpieces allows reliable cleaning of even the smallest workpieces when removing grease and oily residues from the smallest recesses and openings.
  • a liquid bath is generated in the treatment tank, which at least partially surrounds the workpieces held by the workpiece carrier.
  • Parallel to generating a negative pressure in the region above the liquid bath by means of a vacuum pump connected to a first suction opening, cleaning liquid and optionally a gaseous medium are introduced into the liquid bath and the area above the liquid bath via the spray unit.
  • the controllable liquid outlet is provided, over which per unit of time a quantity of liquid corresponding to the newly supplied quantity of liquid expires.
  • the liquid outlet preferably has a valve which is periodically opened and closed.
  • the device has the advantage that it can be used in addition to the cleaning of workpieces for drying the cleaned workpieces.
  • a gaseous medium is introduced under excess pressure via the outlet nozzles of the spray unit into the treatment tank, wherein the jet of gas impinging on the workpieces removes adhering liquid residues from the workpieces which are sucked off.
  • the suction is preferably carried out by the vacuum pump or via a further suction device, which is connected to a second suction opening of the treatment tank.
  • the further suction device serves, in particular, to quickly suck the liquid vapors located in the treatment tank immediately after the cleaning process.
  • a negative pressure generated by the vacuum pump in the processing tank accelerates the vaporization of the liquid residues removed from the workpieces by the gas jets.
  • the workpieces are constantly exposed to gas jets from constantly changing sides in order to effect as complete a drying as possible.
  • simultaneous rotation of the workpiece carrier is carried out, especially in bulk, a constant mixing of the workpieces, so that in the course of the drying process all workpieces are exposed to the gas jets.
  • the treatment container has externally mounted heating devices for heating the treatment container during the drying process.
  • the heat radiators are rotatably mounted around the workpiece carrier, about the axis of the processing vessel, in the processing vessel.
  • a liquid bath is generated in a treatment tank, in which a workpiece carrier for receiving the workpieces is arranged, and a negative pressure is generated in the treatment tank in an area above the liquid bath.
  • the workpiece carrier or the workpieces are in this case partially surrounded by the liquid bath.
  • Cleaning liquid and / or a gaseous medium are then introduced under excess pressure into the treatment vessel via outlet nozzles of a spray unit, wherein the liquid jets or the jets of the gaseous medium are preferably directed onto the workpieces.
  • the workpiece carrier is moved in the treatment container in such a way that the workpieces alternately pass above and below a liquid level of the liquid bath, so as to be exposed alternately to the different cleaning processes which take place above, below and in the boundary region between the liquid bath and the vacuum region to become.
  • the movement of the workpiece carrier can be done for example by periodic lifting and lowering or by rotation.
  • the liquid level is maintained at least approximately constant during the cleaning process to ensure that the workpieces pass alternately above and below the liquid level as the workpiece carrier moves.
  • the formation of the liquid bath into the treatment tank can be achieved by initially flooding the treatment tank take place to a predetermined level of liquid level, said liquid level is held approximately constant by the inflow of further cleaning liquid via a controllable liquid flow.
  • Another possibility for producing the liquid bath is to keep the liquid outlet at the beginning of the cleaning process closed until a corresponding amount of cleaning liquid has been introduced into the treatment container via the spray unit.
  • Liquid vapors which form in the negative pressure region above the liquid bath, are sucked off, wherein the suction preferably takes place via a vacuum pump provided for generating the negative pressure.
  • a rotation of the spray unit wherein the outlet nozzles of the spray unit preferably move in opposite directions to a rotational movement of the workpiece carrier.
  • the cleaning method further provides to carry out the above-mentioned method steps several times in succession, wherein between the individual cleaning processes, the liquid bath is discharged almost abruptly over the liquid flow. Due to the resulting suction effect, a further cleaning effect is achieved on the workpieces.
  • the draining of the liquid bath is accelerated by generating an overpressure by means of compressed air injected via the spray unit.
  • the workpiece carrier and / or the spray unit are rotated during the drying process, on the one hand to achieve a continuous mixing of the workpieces with bulk material and, on the other hand, to expose the workpieces from all directions to the gaseous jet.
  • the drying process is accelerated by heating the treatment tank by means of internally or externally mounted heaters.
  • the inventive method for drying workpieces is provided to generate a negative pressure in a treatment vessel in which the workpieces are received by a workpiece carrier, and further in the interior of the treatment container to generate a directed onto the workpieces heat radiation.
  • the high-energy thermal radiation supported by the negative pressure formed in the container interior, causes evaporation of the liquid adhering to the workpieces.
  • rotation takes place around the workpiece carrier about the axis of the treatment container, a device to which the heat radiators are attached.
  • the liquid vapors are sucked out of the container interior.
  • the suction is preferably carried out by the vacuum pump required for generating the negative pressure.
  • a gaseous medium under pressure in the treatment treatment container contribute. This causes on the one hand, that liquid residues are blown away from the workpieces, wherein the liquid residues evaporate through the vacuum and the supplied heat and the resulting liquid vapors are sucked through the vacuum pump. On the other hand, by introducing the gaseous medium, a temporary weakening of the negative pressure, whereby the vacuum pump causes an increased suction effect in the container interior and whereby the liquid vapors are sucked out of the container interior faster.
  • Fig. 3 a sectional view of the device along the in Fig. 1 drawn section line BB 'is.
  • Fig. 2 shows the device cut in the axial direction also in a perspective view, with sectional areas are shown hatched for reasons of clarity.
  • the device has a substantially cylindrical treatment container 1, which has a controllable liquid outlet 4 and a first suction opening 7 for connection of a vacuum pump for generating a negative pressure in the interior of the treatment container 1. Furthermore, a second suction opening 6 is provided for the connection of a further suction device, which essentially serves for rapid suction of liquid vapors following a cleaning process that can be carried out with the device.
  • the further suction device preferably causes a much larger gas exchange than the vacuum pump, but is not suitable for generating a vacuum.
  • a workpiece carrier 12 for receiving workpieces is arranged, wherein the workpiece carrier 12 is rotatably mounted in the treatment container 1 about a longitudinally extending axis AA '.
  • the workpiece carrier 12 serves on the one hand for receiving individual large workpieces and on the other for receiving baskets 18 with bulk material, wherein the baskets are liquid and gas permeable.
  • a spray unit for introducing cleaning liquid or a gaseous medium into the container interior.
  • the spray unit consists in the embodiments shown in the figures of two parallel arranged substantially rectangular pipe runs 8a, 8b, one of which serves for the discharge of cleaning liquid and the other for the discharge of a gaseous medium.
  • the two pipe loops 8a, 8b each have a plurality of outlet nozzles directed at the workpiece carrier.
  • the spray unit formed from the two pipe loops 8a, 8b is likewise rotatably mounted about the container axis AA '.
  • a closable supply opening 16 is provided on one side of the treatment container 1.
  • the workpiece carrier 12 has a number of rollers, which facilitates retraction of the workpieces accommodating basket 18 in the treatment tank 1.
  • a flooding of the treatment tank 1 with a cleaning liquid except for a predetermined liquid level 100, 102, wherein the workpiece carrier 12 and the workpieces receiving basket 18 is partially surrounded by the liquid bath 50 takes place.
  • a partial vacuuming of the space 52 located above the liquid bath takes place by means of the vacuum pump connected to the first suction opening.
  • cleaning liquid is introduced via the outlet nozzles of the pipe loop 8a, 8b of the spray unit under pressure in the container interior, wherein the supply of the cleaning liquid from the outside via a central shaft 40, via which the workpiece carrier 12 and the spray unit are rotatably mounted.
  • the cleaning liquid When the cleaning liquid is introduced under pressure into the treatment tank 1, essentially three different cleaning processes result.
  • the pressure of the cleaning liquid preferably in the range is from 2.0 to 15.0 bar, and formed in the space 52 vacuum, preferably between 0.2 to 0.6 bar can be coordinated so that it comes to evaporate only when the cleaning liquid to the workpieces.
  • the cleaning liquid is heated to a temperature of about 60 to 85 ° C.
  • turbulent underwater currents develop through the introduction of the cleaning fluid, which cause a cleaning effect on the workpieces.
  • the workpieces located in the basket 18 are alternately fed to the different cleaning processes in the space 52 above the liquid bath and in the liquid bath 50. Furthermore, by rotating the workpiece carrier 12, the workpiece of the charge located in the basket 18 is permanently mixed in order to expose all the workpieces during the cleaning process to the cleaning processes acting on the batch from the outside. In the space 52 above the liquid bath, the workpieces are acted upon by rotation of the workpiece carrier 12 from different directions with the liquid jets emerging from the outlet nozzles.
  • the spray unit may in this case remain stationary, wherein a portion of the tube loops 8a, 8b above and a portion below the liquid level 100, 102 is arranged to inject both in the space 52 and in the liquid bath 50 cleaning liquid.
  • the spray unit is rotated counter to the workpiece carrier 18 about the axis A-A '.
  • the rotation of the workpiece carrier 12 causes in the liquid bath 50 an additional turbulent flow, the Reinforced cleaning effect.
  • permanent gas fractions are introduced into the liquid bath 50, which achieve there as gas bubbles of various forms cleaning effects on the workpieces.
  • the liquid vapors accumulating in the gas space 52 are permanently sucked off via the first suction opening 7 by the vacuum pump during the cleaning process.
  • one portion of the liquid bath 50 corresponding to the inflowing amount of cleaning liquid is discharged via the liquid outlet 4 per unit time.
  • the liquid outlet 4 has a valve which is not shown in more detail in the figures and which is opened and closed at regular intervals for discharging the liquid.
  • the permanent flow of cleaning liquid from the liquid bath 50, which is replaced by the cleaning liquid supplied via the spray unit has the advantage that during the cleaning process, dirt that collects in the liquid bath 50 is permanently removed.
  • the described cleaning process is preferably carried out several times in succession, wherein between the individual processes, the liquid bath 50 is very quickly at least partially drained via the liquid outlet 4, thereby creating a strong suction on the workpieces, entraining the dirt adhering to the workpieces.
  • the discharge of the liquid bath 50 is advantageously accelerated by generating an overpressure by means of compressed air introduced via the spray unit.
  • the device is also suitable for drying wet workpieces following the cleaning process.
  • the cleaning liquid is drained via the liquid outlet 4 and the liquid outlet 4 is closed.
  • a gaseous medium in particular air, is injected under excess pressure into the treatment tank 1.
  • the adhering to the workpieces liquid residues are torn away by the gas jet and evaporate, wherein the forming liquid vapor is preferably sucked by the vacuum pump via the first suction opening 7.
  • a negative pressure generated by the vacuum pump in the treatment tank 1 also accelerates the evaporation of the liquid residues discharged from the workpieces.
  • the workpieces are permanently mixed and applied from different sides with the gas jets for drying.
  • the workpiece carrier 18 and the tube loop 8b rotate in opposite directions about the axis A-A 'of the treatment container.
  • the drying effect is enhanced by heating the container interior, wherein the heating is generated by externally mounted, not shown here heaters or arranged in the container interior heat radiator 10 a, 10 b.
  • the heat radiators are preferably directed to the workpiece carrier 12 and the workpieces and, as in the Fig. 1 and 3 shown as a stationary heat radiator 10 a stationarily arranged on a container inner wall or, as in accordance with the invention in Fig. 4 represented as a rotatable heat radiator 10b arranged on a parallel to the pipe loops 8a, 8b of the spray unit arranged pipe loop 8c, which is rotatably mounted together with the spray unit about the axis AA 'of the treatment vessel.
  • the heat radiators 10a, 10b are, as in particular from Fig. 1 emerges formed as elongated elements which extend in the axial direction in the treatment tank 1.
  • the temperature of the gaseous medium introduced via the spray unit is between 50 and 200 ° C., correspondingly the pressure of the introduced gaseous medium varies between 0.5 bar and 10 bar, whereby a vacuum between 0, 2 bar and 0.6 bar is formed.
  • the device according to the invention enables a drying method according to the invention in which the workpieces are dried by the thermal radiation radiated by the heat radiators 10a, 10b in connection with a vacuum generated in the container interior by the vacuum pump.
  • This method is particularly suitable for drying mechanically less resilient components, such as electronic components, which, when in use of the above-described drying process would be destroyed by the high pressure of the gas jets.
  • FIG. 4 The device shown the ability to rotate the heat radiator 10b through the pipe loop 8c to the workpiece carrier 18 and to leave the workpiece carrier 18 stationary or rotate the workpiece carrier 18 and the pipe loop 8c in opposite directions to permanently suspend the workpieces from different directions of heat radiation.
  • the forming in the container interior liquid vapor is sucked through the first suction port 7 and the vacuum pump.
  • a gaseous medium in particular air
  • the introduced air is sucked off via the vacuum pump, whereby the liquid vapors are removed more quickly from the treatment tank 1 through this short-term increased gas exchange.
  • the introduced air also causes liquid residues to be blown away from the workpieces so as to cause faster evaporation of the adhered liquid residues.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Claims (10)

  1. Procédé de séchage de pièces comprenant les étapes consistant à :
    - produire une dépression dans un récipient de traitement (1) essentiellement cylindrique dans lequel est disposé un support de pièce (12) pour recevoir les pièces,
    - produire une radiation thermique dirigée sur les pièces au moyen de radiateurs thermiques (10a, 10b) montés dans le récipient de traitement (1), caractérisé par
    - une étape consistant à faire tourner un dispositif portant les radiateurs thermiques 10b) dans le récipient de traitement (1) autour du support de pièce (12) autour d'un axe (A-A') convergé sur une direction longitudinale du récipient de traitement (1).
  2. Procédé conforme à la revendication 1,
    selon lequel
    on fait tourner le support de pièce (12) autour de l'axe (A, A') du récipient de traitement (1).
  3. Procédé conforme à la revendication 1 ou 2, selon lequel on introduit un fluide gazeux en surpression dans le récipient de traitement (1).
  4. Procédé conforme à la revendication 1, 2 ou 3, selon lequel les vapeurs de fluide sont aspirées de la partie interne du récipient de traitement (1).
  5. Dispositif de séchage de pièces comportant :
    - un récipient de traitement (1) essentiellement cylindrique pouvant être mis en dépression,
    - un support de pièce (12) monté dans le récipient de traitement,
    - des radiateurs thermiques (10a, 10b) montés dans le récipient de traitement (1) et dirigés vers le support de pièces (12), caractérisé en ce que
    les radiateurs thermiques 10b) sont montés mobiles en rotation dans le récipient de traitement au moyen d'un dispositif de rotation autour d'un axe (A, A') convergé sur une direction longitudinale du récipient de traitement (1).
  6. Dispositif conforme à la revendication 5, dans lequel le support de pièce (12) est monté mobile en rotation dans le récipient de traitement (1) autour de l'axe (A, A') du récipient de traitement (1).
  7. Dispositif conforme à la revendication 5 ou 6, dans lequel le récipient de traitement (1) comporte une première ouverture d'aspiration (7) destinée à être reliée à une pompe à vide.
  8. Dispositif conforme à l'une des revendications 5 à 7, comportant une unité de pulvérisation montée dans le récipient de traitement (1) pour introduire un fluide gazeux dans le récipient de traitement (1).
  9. Dispositif conforme à la revendication 8, dans lequel l'unité de pulvérisation est montée mobile en rotation dans le récipient de traitement (1) autour de l'axe (A, A') de ce récipient de traitement (1).
  10. Dispositif conforme à l'une des revendications 5 à 9, dans lequel le récipient de traitement (1) comporte une seconde ouverture d'aspiration (6) pour aspirer des vapeurs de fluide.
EP03010727.0A 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces Expired - Lifetime EP1342969B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19714603A DE19714603C1 (de) 1997-04-09 1997-04-09 Verfahren und Vorrichtung zur Reinigung von Werkstücken
DE19714603 1997-04-09
EP98930632A EP0973620B2 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP98930632A Division EP0973620B2 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces
EP98930632.9 Division 1998-10-22

Publications (3)

Publication Number Publication Date
EP1342969A2 EP1342969A2 (fr) 2003-09-10
EP1342969A3 EP1342969A3 (fr) 2006-06-07
EP1342969B1 true EP1342969B1 (fr) 2013-05-29

Family

ID=7825878

Family Applications (2)

Application Number Title Priority Date Filing Date
EP03010727.0A Expired - Lifetime EP1342969B1 (fr) 1997-04-09 1998-04-08 Procédé et appareil de séchage de pièces
EP98930632A Expired - Lifetime EP0973620B2 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP98930632A Expired - Lifetime EP0973620B2 (fr) 1997-04-09 1998-04-08 Procede et dispositif pour nettoyer ou secher des pieces

Country Status (8)

Country Link
US (1) US6253462B1 (fr)
EP (2) EP1342969B1 (fr)
AT (1) ATE246552T1 (fr)
AU (1) AU8101098A (fr)
BR (1) BR9808526A (fr)
CA (1) CA2286102C (fr)
DE (2) DE19714603C1 (fr)
WO (1) WO1998045059A1 (fr)

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CN109442934A (zh) * 2018-09-30 2019-03-08 张红艳 一种石油焦加工用烘干机
CN109926397A (zh) * 2019-04-30 2019-06-25 苏州能拓新能源有限公司 一种清洗烘干设备

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KR100360402B1 (ko) * 2000-03-22 2002-11-13 삼성전자 주식회사 회전성 분사노즐을 구비하는 웨이퍼 건조 장치 및 이를이용한 웨이퍼 건조 방법
DE10149027B4 (de) * 2001-10-05 2010-05-06 Mafac Ernst Schwarz Gmbh & Co. Kg Aufnahmevorrichtung für einen Werkstückträger oder Werkstückkorb in einer Reinigungs- und/oder Trocknungsanlage
GB2385315B (en) * 2002-01-15 2004-06-30 Bespak Plc Improvements in or relating to valves for dispensers
JP2003266030A (ja) * 2002-03-15 2003-09-24 Seiko Epson Corp 被処理物の洗浄方法および装置並びにデバイスの製造方法およびデバイス
DE10212604B3 (de) * 2002-03-21 2004-01-22 Mafac Ernst Schwarz Gmbh & Co. Kg Vorrichtung zur Aufnahme eines Werkstückträgers und zur Zuführung eines ersten und zweiten Mediums und Reinigungsbehälter mit einer solchen Vorrichtung
DE10216285B4 (de) * 2002-04-12 2012-03-29 Mafac Ernst Schwarz Gmbh & Co. Kg Maschinenfabrik Reinigungsvorrichtung zur Reinigung von Werkstücken
US20050020462A1 (en) * 2003-07-22 2005-01-27 Mark Sanders System and method for removing coatings from plastic parts
DE102004046802B3 (de) * 2004-09-27 2006-04-27 Mafac Ernst Schwarz Gmbh & Co. Kg Maschinenfabrik Behandlungsvorrichtung und Verfahren zur reinigenden und/oder trocknenden Behandlung von Werkstücken
DE102006039715A1 (de) 2006-08-24 2008-02-28 Dürr Ecoclean GmbH Reinigungsvorrichtung mit einer Flutkammer
JP2008086914A (ja) * 2006-10-02 2008-04-17 Shiga Yamashita:Kk ワークの水切り装置
DE102007040522A1 (de) * 2007-08-28 2009-03-05 Atec Pharmatechnik Gmbh Verfahren zum Waschen von kleineren Gegenständen
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WO1998045059A1 (fr) 1998-10-15
CA2286102C (fr) 2007-09-18
EP1342969A3 (fr) 2006-06-07
EP1342969A2 (fr) 2003-09-10
CA2286102A1 (fr) 1998-10-15
DE19714603C1 (de) 1998-10-29
EP0973620A1 (fr) 2000-01-26
AU8101098A (en) 1998-10-30
EP0973620B2 (fr) 2008-06-25
BR9808526A (pt) 2000-05-23
DE59809214D1 (de) 2003-09-11
US6253462B1 (en) 2001-07-03
EP0973620B1 (fr) 2003-08-06
ATE246552T1 (de) 2003-08-15

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