DE69841964D1 - Toroidförmige Reaktivgasquelle mit niedrigem Feld - Google Patents

Toroidförmige Reaktivgasquelle mit niedrigem Feld

Info

Publication number
DE69841964D1
DE69841964D1 DE69841964T DE69841964T DE69841964D1 DE 69841964 D1 DE69841964 D1 DE 69841964D1 DE 69841964 T DE69841964 T DE 69841964T DE 69841964 T DE69841964 T DE 69841964T DE 69841964 D1 DE69841964 D1 DE 69841964D1
Authority
DE
Germany
Prior art keywords
toroidal
gas source
reactive gas
low field
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841964T
Other languages
English (en)
Inventor
Donald K Smith
Xing Chen
William Holber
Eric Georgelis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25382309&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69841964(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE69841964D1 publication Critical patent/DE69841964D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69841964T 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld Expired - Lifetime DE69841964D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/883,281 US6150628A (en) 1997-06-26 1997-06-26 Toroidal low-field reactive gas source

Publications (1)

Publication Number Publication Date
DE69841964D1 true DE69841964D1 (de) 2010-12-02

Family

ID=25382309

Family Applications (8)

Application Number Title Priority Date Filing Date
DE69811497T Expired - Lifetime DE69811497T2 (de) 1997-06-26 1998-06-23 Torusförmige reaktivgasquelle mit niedriger feldstärke
DE69842098T Expired - Lifetime DE69842098D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841964T Expired - Lifetime DE69841964D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841963T Expired - Lifetime DE69841963D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841962T Expired - Lifetime DE69841962D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841965T Expired - Lifetime DE69841965D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69842259T Expired - Lifetime DE69842259D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841961T Expired - Lifetime DE69841961D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69811497T Expired - Lifetime DE69811497T2 (de) 1997-06-26 1998-06-23 Torusförmige reaktivgasquelle mit niedriger feldstärke
DE69842098T Expired - Lifetime DE69842098D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld

Family Applications After (5)

Application Number Title Priority Date Filing Date
DE69841963T Expired - Lifetime DE69841963D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841962T Expired - Lifetime DE69841962D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841965T Expired - Lifetime DE69841965D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69842259T Expired - Lifetime DE69842259D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld
DE69841961T Expired - Lifetime DE69841961D1 (de) 1997-06-26 1998-06-23 Toroidförmige Reaktivgasquelle mit niedrigem Feld

Country Status (5)

Country Link
US (5) US6150628A (de)
EP (9) EP1313128B1 (de)
JP (5) JP4070152B2 (de)
DE (8) DE69811497T2 (de)
WO (1) WO1999000823A1 (de)

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US20020125226A1 (en) 2002-09-12
US6150628A (en) 2000-11-21
JP4070152B2 (ja) 2008-04-02
EP1310980A1 (de) 2003-05-14
EP2256781A1 (de) 2010-12-01
JP2007165304A (ja) 2007-06-28
DE69841962D1 (de) 2010-12-02
EP0992059A1 (de) 2000-04-12
JP4431183B2 (ja) 2010-03-10
US6664497B2 (en) 2003-12-16
EP2256781B1 (de) 2012-12-26
US6486431B1 (en) 2002-11-26
DE69842259D1 (de) 2011-06-16
DE69841965D1 (de) 2010-12-02
EP1313128B1 (de) 2011-05-04
JP2009176750A (ja) 2009-08-06
DE69842098D1 (de) 2011-02-24
US20020125225A1 (en) 2002-09-12
EP1313130A1 (de) 2003-05-21
EP1313128A1 (de) 2003-05-21
EP1310981B1 (de) 2010-10-20
EP1313130B1 (de) 2011-01-12
DE69811497D1 (de) 2003-03-27
EP1313131A1 (de) 2003-05-21
EP1313129B1 (de) 2010-10-20
JP4608583B2 (ja) 2011-01-12
JP2007165325A (ja) 2007-06-28
DE69841961D1 (de) 2010-12-02
JP2008218431A (ja) 2008-09-18
US20040079287A1 (en) 2004-04-29
JP2002507315A (ja) 2002-03-05
US6559408B2 (en) 2003-05-06
EP1313131B1 (de) 2010-10-20
EP0992059B1 (de) 2003-02-19
DE69841963D1 (de) 2010-12-02
WO1999000823A1 (en) 1999-01-07
EP1310981A1 (de) 2003-05-14
EP1310980B1 (de) 2010-10-20
EP1313132A1 (de) 2003-05-21
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US7161112B2 (en) 2007-01-09

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