DE68926260D1 - Formkörper aus Keramik auf Siliciumnitrid-Basis und Verfahren zu ihrer Herstellung - Google Patents

Formkörper aus Keramik auf Siliciumnitrid-Basis und Verfahren zu ihrer Herstellung

Info

Publication number
DE68926260D1
DE68926260D1 DE68926260T DE68926260T DE68926260D1 DE 68926260 D1 DE68926260 D1 DE 68926260D1 DE 68926260 T DE68926260 T DE 68926260T DE 68926260 T DE68926260 T DE 68926260T DE 68926260 D1 DE68926260 D1 DE 68926260D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
ceramic based
moldings made
moldings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68926260T
Other languages
English (en)
Other versions
DE68926260T2 (de
Inventor
Mikiro Arai
Osamu Funayama
Hayato Nishi
Tamio Ishiyama
Hiroshi Kaya
Takeshi Isoda
Kouichi Yasuda
Atsuro Takazawa
Tadashi Suzuki
Ichiro Koshi
Masaaki Ichiyama
Tomohiro Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
Original Assignee
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63046966A external-priority patent/JPH01219064A/ja
Application filed by Toa Nenryo Kogyyo KK filed Critical Toa Nenryo Kogyyo KK
Application granted granted Critical
Publication of DE68926260D1 publication Critical patent/DE68926260D1/de
Publication of DE68926260T2 publication Critical patent/DE68926260T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Ceramic Products (AREA)
DE68926260T 1988-02-29 1989-02-28 Formkörper aus Keramik auf Siliciumnitrid-Basis und Verfahren zu ihrer Herstellung Expired - Fee Related DE68926260T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63046966A JPH01219064A (ja) 1988-02-29 1988-02-29 セラミックス成形体
JP4696788 1988-02-29
JP4871388 1988-03-03

Publications (2)

Publication Number Publication Date
DE68926260D1 true DE68926260D1 (de) 1996-05-23
DE68926260T2 DE68926260T2 (de) 1996-08-22

Family

ID=27292828

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926260T Expired - Fee Related DE68926260T2 (de) 1988-02-29 1989-02-28 Formkörper aus Keramik auf Siliciumnitrid-Basis und Verfahren zu ihrer Herstellung

Country Status (4)

Country Link
US (1) US5145812A (de)
EP (1) EP0331424B1 (de)
KR (1) KR890012910A (de)
DE (1) DE68926260T2 (de)

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FR2652081A1 (fr) * 1989-09-21 1991-03-22 Rhone Poulenc Chimie Procede de preparation d'un composite si3n4-sic.
JPH0615619B2 (ja) * 1989-12-20 1994-03-02 信越化学工業株式会社 ハフニウム含有シラザン重合体の製造方法及び該重合体を用いたセラミックスの製造方法
DE4006371A1 (de) * 1990-03-01 1991-09-05 Hoechst Ag Faserverstaerkte verbundwerkstoffe und verfahren zu ihrer herstellung
FR2674846A1 (fr) * 1991-04-05 1992-10-09 Atochem Procede de preparation de ceramiques monolithiques non oxydes a partir de precurseurs organometalliques.
US5494867A (en) * 1991-09-24 1996-02-27 Southwest Research Institute Method for making fiber-reinforced silicon nitride composites
US5707471A (en) * 1991-12-20 1998-01-13 Dow Corning Corporation Method for making ceramic matrix composites
DE4432182A1 (de) * 1993-09-13 1995-03-16 Isuzu Motors Ltd Verbundkeramik und Verfahren zu deren Herstellung
US5599867A (en) * 1994-03-28 1997-02-04 Honda Giken Kogyo Kabushiki Kaisha Composition for use in manufacturing molded ceramic body, method of manufacturing molded ceramic body from such composition, and method of producing ceramic body
US5643987A (en) * 1994-05-24 1997-07-01 Exxon Research And Engineering Company Synthesis of microporous ceramics
US5696217A (en) * 1994-05-24 1997-12-09 Exxon Research & Engineering Company Synthesis of microporous ceramics by ammonia pyrolysis of ceramic precursors
US5563212A (en) * 1994-05-24 1996-10-08 Exxon Research And Engineering Company Synthesis of microporous ceramics
US5856252A (en) * 1995-06-07 1999-01-05 The Regents Of The University Of California Damage tolerant ceramic matrix composites by a precursor infiltration
US5852088A (en) * 1995-12-27 1998-12-22 Exxon Research And Engineering Company Nanoporous ceramics with catalytic functionality
US5952421A (en) * 1995-12-27 1999-09-14 Exxon Research And Engineering Co. Synthesis of preceramic polymer-stabilized metal colloids and their conversion to microporous ceramics
US6495483B1 (en) * 1997-03-14 2002-12-17 The United States Of America As Represented By The Secretary Of The Navy Linear metallocene polymers containing acetylenic and inorganic units and thermosets and ceramics therefrom
US6743393B1 (en) 1998-06-17 2004-06-01 Coi Ceramics, Inc. Method for producing ceramic matrix composites
US6210786B1 (en) 1998-10-14 2001-04-03 Northrop Grumman Corporation Ceramic composite materials having tailored physical properties
US6339030B1 (en) * 1999-01-05 2002-01-15 The United States Of America As Represented By The United States Department Of Energy Fabrication of photonic band gap materials
CA2385993A1 (en) * 2000-03-31 2001-10-04 Toto Ltd. Method for wet forming of powder, method for producing powder sintered compact, powdery sintered compact, and apparatus using powdery sintered compact
WO2002009478A1 (fr) * 2000-07-24 2002-01-31 Tdk Corporation Dispositif luminescent
JP2003049772A (ja) * 2001-08-08 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造
JP2006128368A (ja) * 2004-10-28 2006-05-18 Tokyo Electron Ltd 基板処理装置、および基板回転装置
KR101432606B1 (ko) * 2011-07-15 2014-08-21 제일모직주식회사 갭필용 충전제, 이의 제조 방법 및 이를 사용한 반도체 캐패시터의 제조 방법
JP5970197B2 (ja) * 2012-02-08 2016-08-17 メルクパフォーマンスマテリアルズマニュファクチャリング合同会社 無機ポリシラザン樹脂
WO2014104510A1 (ko) 2012-12-31 2014-07-03 제일모직 주식회사 개질 수소화 폴리실록사잔, 이를 포함하는 실리카계 절연층 형성용 조성물, 실리카계 절연층 형성용 조성물의 제조방법, 실리카계 절연층 및 실리카계 절연층의 제조방법
WO2015053937A1 (en) * 2013-10-08 2015-04-16 United Technologies Corporation Method for providing crystalline silicon-containing ceramic material
US9890088B2 (en) * 2013-10-15 2018-02-13 United Technologies Corporation Preceramic polymer for ceramic including metal boride
US10647578B2 (en) 2016-12-11 2020-05-12 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
CN111902359A (zh) 2018-02-21 2020-11-06 乔治洛德方法研究和开发液化空气有限公司 全氢聚硅氮烷组合物和用于使用其形成氧化物膜的方法
CN112341207B (zh) * 2020-11-20 2022-08-12 哈尔滨工业大学 一种氮化硅-氧氮化硅柱孔复相陶瓷材料及其制备方法
CN116462520A (zh) * 2023-04-28 2023-07-21 长沙新立硅材料科技有限公司 一种用于单晶硅拉制的无氧氮化硅坩埚的制作方法
CN116477958A (zh) * 2023-04-28 2023-07-25 长沙新立硅材料科技有限公司 一种高纯一体化氮化硅散热基板的制作方法

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DE2218960A1 (de) * 1972-04-19 1973-11-08 Bayer Ag Formkoerper aus mogenen mischungen von siliciumcarbid und siliciumnitrid und verfahren zu ihrer erstellung
DE2243527A1 (de) * 1972-09-05 1974-04-18 Bayer Ag Formkoerper aus homogenen mischungen von siliciumcarbid und siliciumnitrid und verfahren zu ihrer herstellung
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS6051655A (ja) * 1983-08-30 1985-03-23 株式会社東芝 セラミックス焼結体の製造方法
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers
CA1241972A (en) * 1984-09-11 1988-09-13 Dow Corning Corporation Ceramic materials from silazane polymers
US4757035A (en) * 1984-09-21 1988-07-12 Dow Corning Corporation Ceramic materials with increased crystallinity from silazane polymers
JPS61129151A (ja) * 1984-11-27 1986-06-17 Teikoku Chem Ind Corp Ltd 液晶化合物
JPH0699191B2 (ja) * 1984-12-22 1994-12-07 京セラ株式会社 窒化珪素質焼結体の製造方法
JPS61151005A (ja) * 1984-12-26 1986-07-09 Nippon Soda Co Ltd α型結晶質窒化ケイ素の製造方法
JPS61191506A (ja) * 1985-02-18 1986-08-26 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
US4761389A (en) * 1985-04-01 1988-08-02 Dow Corning Corporation Process for preparing ceramic materials with reduced carbon levels
US4640902A (en) * 1985-05-31 1987-02-03 Rockwell International Corporation Low thermal conductivity Si3 N4 /ZrO2 composite ceramics
EP0206449A3 (de) * 1985-06-24 1987-06-24 Dow Corning Corporation Verfahren zur Herstellung von Keramikwerkstoffen
US4767831A (en) * 1985-06-24 1988-08-30 Dow Corning Corporation Process for preparing ceramic materials
US4645807A (en) * 1985-07-18 1987-02-24 Massachusetts Institute Of Technology Method for forming new preceramic polymers for SiC and Si3 N4 /SiC systems
US4711665A (en) * 1985-07-26 1987-12-08 Pennsylvania Research Corporation Oxidation resistant alloy
US4650733A (en) * 1985-10-28 1987-03-17 The United States Of America As Represented By The Secretary Of The Air Force Low impedance filter battery with effective electrolyte seal
JPS62125015A (ja) * 1985-11-19 1987-06-06 Toa Nenryo Kogyo Kk 高純度窒化珪素繊維およびその製法
JPS62156135A (ja) * 1985-12-28 1987-07-11 Toa Nenryo Kogyo Kk ポリオルガノ（ヒドロ）シラザン
JPS62202863A (ja) * 1986-02-28 1987-09-07 東芝シリコ−ン株式会社 ケイ素セラミツクスの製造方法
US4652276A (en) * 1986-03-10 1987-03-24 Gte Valeron Corporation High toughness silicon nitride cutting tools
US4711860A (en) * 1986-03-12 1987-12-08 Corning Glass Works Modified cordierite glass ceramic composite
JPS62290730A (ja) * 1986-06-10 1987-12-17 Shin Etsu Chem Co Ltd 有機シラザン重合体の製造方法
US4795724A (en) * 1986-06-12 1989-01-03 Ngk Insulators, Ltd. Silicon nitride sintered bodies and process for manufacturing the same
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US4720532A (en) * 1986-08-22 1988-01-19 Massachusetts Institute Of Technology Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4
DE3769261D1 (de) * 1986-09-30 1991-05-16 Sumitomo Electric Industries Siliziumnitridsintermaterial fuer schneidwerkzeuge und verfahren zu seiner herstellung.
JPS63123868A (ja) * 1986-11-10 1988-05-27 日産自動車株式会社 窒化珪素質焼結体の製造方法
JPS63222075A (ja) * 1987-03-10 1988-09-14 日本鋼管株式会社 高密度焼結体の製造方法

Also Published As

Publication number Publication date
KR890012910A (ko) 1989-09-20
DE68926260T2 (de) 1996-08-22
EP0331424B1 (de) 1996-04-17
EP0331424A1 (de) 1989-09-06
US5145812A (en) 1992-09-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee