DE3854754T2 - Supraleitende Schaltungen aus Keramik und Verfahren zu ihrer Herstellung. - Google Patents

Supraleitende Schaltungen aus Keramik und Verfahren zu ihrer Herstellung.

Info

Publication number
DE3854754T2
DE3854754T2 DE3854754T DE3854754T DE3854754T2 DE 3854754 T2 DE3854754 T2 DE 3854754T2 DE 3854754 T DE3854754 T DE 3854754T DE 3854754 T DE3854754 T DE 3854754T DE 3854754 T2 DE3854754 T2 DE 3854754T2
Authority
DE
Germany
Prior art keywords
manufacture
superconducting circuits
ceramic superconducting
ceramic
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3854754T
Other languages
English (en)
Other versions
DE3854754D1 (de
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62218539A external-priority patent/JP2630362B2/ja
Priority claimed from JP62218538A external-priority patent/JPH063766B2/ja
Priority claimed from JP62222622A external-priority patent/JPH063765B2/ja
Priority claimed from JP22262387A external-priority patent/JP2585624B2/ja
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of DE3854754D1 publication Critical patent/DE3854754D1/de
Application granted granted Critical
Publication of DE3854754T2 publication Critical patent/DE3854754T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/048—Superconductive coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00—Superconducting magnets; Superconducting coils
    • H01F6/06—Coils, e.g. winding, insulating, terminating or casing arrangements therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/20—Permanent superconducting devices
    • H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/901—Printed circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE3854754T 1987-08-31 1988-08-31 Supraleitende Schaltungen aus Keramik und Verfahren zu ihrer Herstellung. Expired - Fee Related DE3854754T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP62218539A JP2630362B2 (ja) 1987-08-31 1987-08-31 超電導コイル
JP62218538A JPH063766B2 (ja) 1987-08-31 1987-08-31 超電導コイルの作製方法
JP62222622A JPH063765B2 (ja) 1987-09-06 1987-09-06 超電導コイル
JP22262387A JP2585624B2 (ja) 1987-09-06 1987-09-06 超電導コイルの作製方法

Publications (2)

Publication Number Publication Date
DE3854754D1 DE3854754D1 (de) 1996-01-18
DE3854754T2 true DE3854754T2 (de) 1997-02-06

Family

ID=27476866

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3854754T Expired - Fee Related DE3854754T2 (de) 1987-08-31 1988-08-31 Supraleitende Schaltungen aus Keramik und Verfahren zu ihrer Herstellung.

Country Status (3)

Country Link
US (1) US5079222A (de)
EP (1) EP0306287B1 (de)
DE (1) DE3854754T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5248658A (en) * 1987-04-07 1993-09-28 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a superconducting oxide pattern by laser sublimation
JPS63250881A (ja) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd 超電導体の作製方法
US5401716A (en) * 1987-04-15 1995-03-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing superconducting patterns
US5225394A (en) * 1987-08-31 1993-07-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing high Tc superconducting circuits
US4929595A (en) * 1988-02-26 1990-05-29 The University Of Alabama At Huntsville Superconducting thin film fabrication
US5104849A (en) * 1989-06-06 1992-04-14 The Furukawa Electric Co., Ltd. Oxide superconductor and method of manufacturing the same
AU635040B2 (en) * 1989-06-30 1993-03-11 Sumitomo Electric Industries, Ltd. Substrate having a superconductor layer
JP2767298B2 (ja) * 1989-09-05 1998-06-18 財団法人生産開発科学研究所 積層薄膜体及びその製造法
JPH03150218A (ja) * 1989-11-07 1991-06-26 Sumitomo Electric Ind Ltd 超電導薄膜の作製方法
DE4107686A1 (de) * 1991-03-09 1992-09-10 Abb Patent Gmbh Verfahren zur herstellung eines supraleitenden strombegrenzers sowie ein entsprechend hergestellter strombegrenzer
DE4107685A1 (de) * 1991-03-09 1992-09-10 Abb Patent Gmbh Supraleitender strombegrenzer
US5231078A (en) * 1991-09-05 1993-07-27 Ael Defense Corp. Thin film superconducting LC network
US5329225A (en) * 1992-11-02 1994-07-12 General Electric Co. Thin film superconductor inductor with shield for high frequency resonant circuit
US5310705A (en) * 1993-01-04 1994-05-10 The United States Of America As Represented By The United States Department Of Energy High-field magnets using high-critical-temperature superconducting thin films
US5426408A (en) * 1993-05-07 1995-06-20 The United States Of America As Represented By The Secretary Of The Navy Ceramic superconducting magnet using stacked modules
WO1994027329A1 (en) * 1993-05-14 1994-11-24 The University Of British Columbia Fabrication of oxide superconductor devices by impurity ion implantation
US5609946A (en) * 1995-10-03 1997-03-11 General Electric Company High frequency, high density, low profile, magnetic circuit components
US6069714A (en) * 1996-12-05 2000-05-30 Applied Science Fiction, Inc. Method and apparatus for reducing noise in electronic film development
DE10033869C2 (de) * 2000-07-12 2003-07-31 Karlsruhe Forschzent HTS-Kryomagnet und Aufmagnetisierungsverfahren
GB0120697D0 (en) 2001-08-24 2001-10-17 Coated Conductors Consultancy Superconducting coil fabrication
SG139508A1 (en) * 2001-09-10 2008-02-29 Micron Technology Inc Wafer dicing device and method
SG102639A1 (en) * 2001-10-08 2004-03-26 Micron Technology Inc Apparatus and method for packing circuits
SG142115A1 (en) * 2002-06-14 2008-05-28 Micron Technology Inc Wafer level packaging
SG119185A1 (en) 2003-05-06 2006-02-28 Micron Technology Inc Method for packaging circuits and packaged circuits
US7601649B2 (en) * 2004-08-02 2009-10-13 Micron Technology, Inc. Zirconium-doped tantalum oxide films
DE102011081465A1 (de) * 2011-08-24 2013-02-28 Siemens Aktiengesellschaft Verfahren zur Herstellung von supraleitenden Spulen und Vorrichtung mit einer supraleitenden Spule hergestellt nach dem Verfahren
CN108028106B (zh) * 2015-10-01 2020-03-06 古河电气工业株式会社 超导线材的连接结构

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6638894B1 (en) * 1987-01-09 2003-10-28 Lucent Technologies Inc. Devices and systems based on novel superconducting material
CA1329952C (en) * 1987-04-27 1994-05-31 Yoshihiko Imanaka Multi-layer superconducting circuit substrate and process for manufacturing same
JPS63300594A (ja) * 1987-05-29 1988-12-07 Nec Corp 多層セラミック配線基板およびその製造方法
JPS6411305A (en) * 1987-07-06 1989-01-13 Sumitomo Electric Industries Superconducting coil and manufacture thereof
US4894612A (en) * 1987-08-13 1990-01-16 Hypres, Incorporated Soft probe for providing high speed on-wafer connections to a circuit
JPH01134997A (ja) * 1987-11-19 1989-05-26 Mitsubishi Electric Corp 多層配線基板の製造方法とその装置
JPH01134996A (ja) * 1987-11-19 1989-05-26 Mitsubishi Electric Corp 多層配線基板の製造方法とその装置

Also Published As

Publication number Publication date
DE3854754D1 (de) 1996-01-18
US5079222A (en) 1992-01-07
EP0306287A3 (en) 1990-06-13
EP0306287B1 (de) 1995-12-06
EP0306287A2 (de) 1989-03-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee