DE60335137D1 - Verfahren zum durchtrennung einen halbleiter substrat und verwendung einer schutzschicht für jenes verfahren - Google Patents

Verfahren zum durchtrennung einen halbleiter substrat und verwendung einer schutzschicht für jenes verfahren

Info

Publication number
DE60335137D1
DE60335137D1 DE60335137T DE60335137T DE60335137D1 DE 60335137 D1 DE60335137 D1 DE 60335137D1 DE 60335137 T DE60335137 T DE 60335137T DE 60335137 T DE60335137 T DE 60335137T DE 60335137 D1 DE60335137 D1 DE 60335137D1
Authority
DE
Germany
Prior art keywords
etching
plasma
separating
progress
plasma etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60335137T
Other languages
English (en)
Inventor
Kiyoshi Arita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of DE60335137D1 publication Critical patent/DE60335137D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Dicing (AREA)
  • Drying Of Semiconductors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Formation Of Insulating Films (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE60335137T 2002-12-11 2003-12-11 Verfahren zum durchtrennung einen halbleiter substrat und verwendung einer schutzschicht für jenes verfahren Expired - Lifetime DE60335137D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002359051A JP4013753B2 (ja) 2002-12-11 2002-12-11 半導体ウェハの切断方法
PCT/JP2003/015887 WO2004053981A1 (en) 2002-12-11 2003-12-11 Method of cutting semiconductor wafer and protective sheet used in the cutting method

Publications (1)

Publication Number Publication Date
DE60335137D1 true DE60335137D1 (de) 2011-01-05

Family

ID=32500922

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60335137T Expired - Lifetime DE60335137D1 (de) 2002-12-11 2003-12-11 Verfahren zum durchtrennung einen halbleiter substrat und verwendung einer schutzschicht für jenes verfahren

Country Status (9)

Country Link
US (1) US7060531B2 (de)
EP (1) EP1570519B1 (de)
JP (1) JP4013753B2 (de)
KR (1) KR100971760B1 (de)
CN (1) CN100356549C (de)
AT (1) ATE489727T1 (de)
AU (1) AU2003295231A1 (de)
DE (1) DE60335137D1 (de)
WO (1) WO2004053981A1 (de)

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JP4288229B2 (ja) * 2004-12-24 2009-07-01 パナソニック株式会社 半導体チップの製造方法
TWI267133B (en) * 2005-06-03 2006-11-21 Touch Micro System Tech Method of segmenting a wafer
JP2007180395A (ja) * 2005-12-28 2007-07-12 Sanyo Electric Co Ltd 半導体装置の製造方法
US7871899B2 (en) * 2006-01-11 2011-01-18 Amkor Technology, Inc. Methods of forming back side layers for thinned wafers
JP4997955B2 (ja) * 2006-12-18 2012-08-15 パナソニック株式会社 半導体チップの製造方法
JP4840174B2 (ja) * 2007-02-08 2011-12-21 パナソニック株式会社 半導体チップの製造方法
KR100828025B1 (ko) * 2007-06-13 2008-05-08 삼성전자주식회사 웨이퍼 절단 방법
US7838424B2 (en) * 2007-07-03 2010-11-23 Taiwan Semiconductor Manufacturing Company, Ltd. Enhanced reliability of wafer-level chip-scale packaging (WLCSP) die separation using dry etching
US7989319B2 (en) * 2007-08-07 2011-08-02 Semiconductor Components Industries, Llc Semiconductor die singulation method
US8012857B2 (en) * 2007-08-07 2011-09-06 Semiconductor Components Industries, Llc Semiconductor die singulation method
US7781310B2 (en) 2007-08-07 2010-08-24 Semiconductor Components Industries, Llc Semiconductor die singulation method
US8859396B2 (en) * 2007-08-07 2014-10-14 Semiconductor Components Industries, Llc Semiconductor die singulation method
CN101374384B (zh) * 2007-08-24 2010-10-06 富葵精密组件(深圳)有限公司 电路板用粘胶膜的切割方法
JP2009260272A (ja) * 2008-03-25 2009-11-05 Panasonic Corp 基板の加工方法および半導体チップの製造方法ならびに樹脂接着層付き半導体チップの製造方法
JP5218238B2 (ja) 2009-04-10 2013-06-26 パナソニック株式会社 基板の加工方法および半導体チップの製造方法ならびに樹脂接着層付き半導体チップの製造方法
JP5246001B2 (ja) * 2009-04-10 2013-07-24 パナソニック株式会社 基板の加工方法および半導体チップの製造方法ならびに樹脂接着層付き半導体チップの製造方法
KR101104134B1 (ko) * 2009-10-30 2012-01-13 전자부품연구원 반도체 칩 패키징 방법
TWI430415B (zh) * 2009-12-01 2014-03-11 Xintec Inc 晶片封裝體及其製造方法
US8384231B2 (en) 2010-01-18 2013-02-26 Semiconductor Components Industries, Llc Method of forming a semiconductor die
US9165833B2 (en) * 2010-01-18 2015-10-20 Semiconductor Components Industries, Llc Method of forming a semiconductor die
US9299664B2 (en) * 2010-01-18 2016-03-29 Semiconductor Components Industries, Llc Method of forming an EM protected semiconductor die
US20110175209A1 (en) * 2010-01-18 2011-07-21 Seddon Michael J Method of forming an em protected semiconductor die
USRE46339E1 (en) * 2011-03-14 2017-03-14 Plasma-Therm Llc Method and apparatus for plasma dicing a semi-conductor wafer
US9343365B2 (en) * 2011-03-14 2016-05-17 Plasma-Therm Llc Method and apparatus for plasma dicing a semi-conductor wafer
US8802545B2 (en) 2011-03-14 2014-08-12 Plasma-Therm Llc Method and apparatus for plasma dicing a semi-conductor wafer
JP5833411B2 (ja) * 2011-11-11 2015-12-16 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法ならびに液晶表示装置
US8815706B2 (en) 2012-01-20 2014-08-26 Infineon Technologies Ag Methods of forming semiconductor devices
US9553021B2 (en) * 2012-09-03 2017-01-24 Infineon Technologies Ag Method for processing a wafer and method for dicing a wafer
US9136173B2 (en) 2012-11-07 2015-09-15 Semiconductor Components Industries, Llc Singulation method for semiconductor die having a layer of material along one major surface
US9484260B2 (en) 2012-11-07 2016-11-01 Semiconductor Components Industries, Llc Heated carrier substrate semiconductor die singulation method
KR102029646B1 (ko) * 2013-01-31 2019-11-08 삼성전자 주식회사 반도체 장치 제조 방법
US9299614B2 (en) * 2013-12-10 2016-03-29 Applied Materials, Inc. Method and carrier for dicing a wafer
US9418894B2 (en) 2014-03-21 2016-08-16 Semiconductor Components Industries, Llc Electronic die singulation method
US9112050B1 (en) * 2014-05-13 2015-08-18 Applied Materials, Inc. Dicing tape thermal management by wafer frame support ring cooling during plasma dicing
US9472458B2 (en) * 2014-06-04 2016-10-18 Semiconductor Components Industries, Llc Method of reducing residual contamination in singulated semiconductor die
US9385041B2 (en) 2014-08-26 2016-07-05 Semiconductor Components Industries, Llc Method for insulating singulated electronic die
JP2016207737A (ja) * 2015-04-17 2016-12-08 株式会社ディスコ 分割方法
JP6506606B2 (ja) * 2015-04-27 2019-04-24 株式会社ディスコ ウエーハの分割方法
JP6516125B2 (ja) * 2015-09-07 2019-05-22 パナソニックＩｐマネジメント株式会社 プラズマ処理方法および電子部品の製造方法
JP6492288B2 (ja) * 2015-10-01 2019-04-03 パナソニックＩｐマネジメント株式会社 素子チップの製造方法
JP6492287B2 (ja) * 2015-10-01 2019-04-03 パナソニックＩｐマネジメント株式会社 素子チップの製造方法および電子部品実装構造体の製造方法
GB201518756D0 (en) 2015-10-22 2015-12-09 Spts Technologies Ltd Apparatus for plasma dicing
JP6575874B2 (ja) * 2016-03-09 2019-09-18 パナソニックＩｐマネジメント株式会社 素子チップの製造方法
KR101938306B1 (ko) * 2016-04-18 2019-01-14 최상준 건식 에칭장치의 제어방법
US10366923B2 (en) 2016-06-02 2019-07-30 Semiconductor Components Industries, Llc Method of separating electronic devices having a back layer and apparatus
US10373869B2 (en) 2017-05-24 2019-08-06 Semiconductor Components Industries, Llc Method of separating a back layer on a substrate using exposure to reduced temperature and related apparatus
CN111201482A (zh) * 2017-11-30 2020-05-26 深圳市柔宇科技有限公司 显示屏保护结构、显示组件及切割方法、贴膜方法
TWI825080B (zh) 2018-03-30 2023-12-11 日商琳得科股份有限公司 半導體晶片的製造方法
US10916474B2 (en) * 2018-06-25 2021-02-09 Semiconductor Components Industries, Llc Method of reducing residual contamination in singulated semiconductor die
CN110634796A (zh) * 2018-06-25 2019-12-31 半导体元件工业有限责任公司 用于处理电子管芯的方法及半导体晶圆和管芯的切单方法
US10607889B1 (en) * 2018-09-19 2020-03-31 Semiconductor Components Industries, Llc Jet ablation die singulation systems and related methods
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CN111640827B (zh) * 2019-03-01 2021-03-12 山东浪潮华光光电子股份有限公司 一种GaAs基LED芯片的切割方法

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Also Published As

Publication number Publication date
KR100971760B1 (ko) 2010-07-21
JP4013753B2 (ja) 2007-11-28
CN1692493A (zh) 2005-11-02
WO2004053981A1 (en) 2004-06-24
CN100356549C (zh) 2007-12-19
EP1570519A1 (de) 2005-09-07
AU2003295231A1 (en) 2004-06-30
KR20050084789A (ko) 2005-08-29
ATE489727T1 (de) 2010-12-15
EP1570519B1 (de) 2010-11-24
JP2004193305A (ja) 2004-07-08
US7060531B2 (en) 2006-06-13
US20040121611A1 (en) 2004-06-24

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