DE60126936D1 - Mikrokontaktprüfnadel und elektrischer messfühler - Google Patents

Mikrokontaktprüfnadel und elektrischer messfühler

Info

Publication number
DE60126936D1
DE60126936D1 DE60126936T DE60126936T DE60126936D1 DE 60126936 D1 DE60126936 D1 DE 60126936D1 DE 60126936 T DE60126936 T DE 60126936T DE 60126936 T DE60126936 T DE 60126936T DE 60126936 D1 DE60126936 D1 DE 60126936D1
Authority
DE
Germany
Prior art keywords
microcontact
measuring probe
test needle
electric measuring
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60126936T
Other languages
English (en)
Other versions
DE60126936T2 (de
Inventor
Toshio Kazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26594126&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60126936(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Application granted granted Critical
Publication of DE60126936D1 publication Critical patent/DE60126936D1/de
Publication of DE60126936T2 publication Critical patent/DE60126936T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06772High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
DE60126936T 2000-06-16 2001-06-15 Mikrokontaktprüfnadel und elektrischer messfühler Expired - Lifetime DE60126936T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000181734 2000-06-16
JP2000181734 2000-06-16
JP2000312088 2000-10-12
JP2000312088 2000-10-12
PCT/JP2001/005137 WO2001096883A2 (en) 2000-06-16 2001-06-15 Microcontactor probe and electric probe unit

Publications (2)

Publication Number Publication Date
DE60126936D1 true DE60126936D1 (de) 2007-04-12
DE60126936T2 DE60126936T2 (de) 2007-06-14

Family

ID=26594126

Family Applications (3)

Application Number Title Priority Date Filing Date
DE60140330T Expired - Lifetime DE60140330D1 (de) 2000-06-16 2001-06-15 Mikrokontaktprüfnadel
DE60139584T Expired - Lifetime DE60139584D1 (de) 2000-06-16 2001-06-15 Mikrokontaktprüfnadel und elektrischer Messfühler
DE60126936T Expired - Lifetime DE60126936T2 (de) 2000-06-16 2001-06-15 Mikrokontaktprüfnadel und elektrischer messfühler

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE60140330T Expired - Lifetime DE60140330D1 (de) 2000-06-16 2001-06-15 Mikrokontaktprüfnadel
DE60139584T Expired - Lifetime DE60139584D1 (de) 2000-06-16 2001-06-15 Mikrokontaktprüfnadel und elektrischer Messfühler

Country Status (10)

Country Link
US (3) US7057403B2 (de)
EP (3) EP1795905B1 (de)
JP (1) JP4889183B2 (de)
KR (1) KR100745104B1 (de)
CN (1) CN1262842C (de)
AU (1) AU2001264297A1 (de)
DE (3) DE60140330D1 (de)
MY (1) MY134203A (de)
TW (1) TW515889B (de)
WO (1) WO2001096883A2 (de)

Families Citing this family (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60140330D1 (de) 2000-06-16 2009-12-10 Nhk Spring Co Ltd Mikrokontaktprüfnadel
JP4242199B2 (ja) * 2003-04-25 2009-03-18 株式会社ヨコオ Icソケット
JP4695337B2 (ja) * 2004-02-04 2011-06-08 日本発條株式会社 導電性接触子および導電性接触子ユニット
JPWO2005083773A1 (ja) * 2004-02-27 2007-08-30 株式会社アドバンテスト プローブカード及びその製造方法
JP4438601B2 (ja) * 2004-10-28 2010-03-24 株式会社ヨコオ 検査ユニットの製法
US7626408B1 (en) * 2005-02-03 2009-12-01 KK Technologies, Inc. Electrical spring probe
EP1959260B1 (de) * 2005-12-05 2019-05-29 NHK Spring Company Limited Prüfkarte
US7393214B2 (en) * 2006-02-17 2008-07-01 Centipede Systems, Inc. High performance electrical connector
JP4522975B2 (ja) * 2006-06-19 2010-08-11 東京エレクトロン株式会社 プローブカード
JP4939879B2 (ja) * 2006-09-13 2012-05-30 株式会社エンプラス 電気接触子、及び、電気部品用ソケット
EP2093576A4 (de) * 2006-12-15 2010-09-22 Nhk Spring Co Ltd Leitfähiger kontakthalter, leitfähige kontakteinheit und verfahren zur herstellung eines leitfähigen kontakthalters
TWI385399B (zh) * 2007-04-27 2013-02-11 Nhk Spring Co Ltd 導電性觸頭
US7521949B2 (en) * 2007-05-07 2009-04-21 Intel Corporation Test pin, method of manufacturing same, and system containing same
CN101315392A (zh) * 2007-05-31 2008-12-03 佛山普立华科技有限公司 探针定位装置
JP4176133B1 (ja) * 2007-06-06 2008-11-05 田中貴金属工業株式会社 プローブピン
JP4986726B2 (ja) * 2007-06-14 2012-07-25 日立オートモティブシステムズ株式会社 可変容量形ポンプ
US7442045B1 (en) * 2007-08-17 2008-10-28 Centipede Systems, Inc. Miniature electrical ball and tube socket with self-capturing multiple-contact-point coupling
CN101743481A (zh) * 2007-12-28 2010-06-16 三菱电线工业株式会社 探针
JP5607934B2 (ja) * 2008-02-01 2014-10-15 日本発條株式会社 プローブユニット
WO2009102029A1 (ja) * 2008-02-14 2009-08-20 Nhk Spring Co., Ltd. コンタクトプローブおよびプローブユニット
JP5394264B2 (ja) * 2008-02-14 2014-01-22 日本発條株式会社 プローブユニット
JP2009250917A (ja) * 2008-04-10 2009-10-29 Nidec-Read Corp 基板検査用治具及び検査用接触子
JP2009281886A (ja) * 2008-05-22 2009-12-03 Toshiba Corp プローブカード
WO2010008257A2 (ko) * 2008-07-18 2010-01-21 Lee Jae Hak 스프링 조립체 및 그를 이용한 테스트 소켓
JP2010060310A (ja) * 2008-09-01 2010-03-18 Nidec-Read Corp 基板検査治具及びその電極部
JP2010060527A (ja) * 2008-09-05 2010-03-18 Yokowo Co Ltd グランド用コンタクトプローブを有する検査ユニット
WO2010048971A1 (en) * 2008-10-30 2010-05-06 Verigy (Singapore) Pte., Ltd. Test arrangement, pogo-pin and method for testing a device under test
JP4900843B2 (ja) 2008-12-26 2012-03-21 山一電機株式会社 半導体装置用電気接続装置及びそれに使用されるコンタクト
DE102009004555A1 (de) * 2009-01-14 2010-09-30 Atg Luther & Maelzer Gmbh Verfahren zum Prüfen von Leiterplatten
JP5657220B2 (ja) * 2009-02-04 2015-01-21 株式会社笠作エレクトロニクス プローブピン用ソケット及びプローブユニット
US7874880B2 (en) * 2009-02-26 2011-01-25 Ironwood Electronics, Inc. Adapter apparatus with sleeve spring contacts
WO2011071082A1 (ja) * 2009-12-11 2011-06-16 日本発條株式会社 コンタクトプローブ
DE102011105036B4 (de) * 2010-06-21 2015-06-18 Caetec Gmbh Steckverbinder für mobiles Messtechnik-Modulsystem
CN101943710A (zh) * 2010-08-23 2011-01-12 安拓锐高新测试技术(苏州)有限公司 一种层叠半导体芯片的测试探针
JP5618729B2 (ja) * 2010-09-24 2014-11-05 シチズンセイミツ株式会社 コンタクトプローブ及びこれを用いた電子回路試験装置
DE102011004106A1 (de) * 2010-12-28 2012-06-28 Robert Bosch Gmbh Leiterplatte, Verfahren zum Herstellen einer Leiterplatte und Prüfvorrichtung zum Prüfen einer Leiterplatte
TW201231977A (en) * 2011-01-20 2012-08-01 Pleader Yamaichi Co Ltd Structure of high-frequency vertical spring plate probe card
US20120274338A1 (en) * 2011-04-29 2012-11-01 International Business Machines Corporation High performance time domain reflectometry
EP2725364A1 (de) 2011-06-22 2014-04-30 Meiko Electronics Co., Ltd. Spiralsonde und herstellungsverfahren dafür
CN102353821B (zh) * 2011-09-05 2013-06-19 管晓翔 用于热敏电阻分拣的夹持测试机构
KR101582432B1 (ko) * 2011-10-07 2016-01-04 닛폰 하츠죠 가부시키가이샤 프로브 유닛
JP5861423B2 (ja) * 2011-12-06 2016-02-16 山一電機株式会社 コンタクトプローブ及びそれを備えた半導体素子用ソケット
US9476518B2 (en) * 2012-01-18 2016-10-25 Marshall Excelsior Co. Valve assembly and method
CN102608428B (zh) * 2012-03-16 2014-05-07 国家电线电缆质量监督检验中心 电缆导体直流电阻测试装置
US8373430B1 (en) * 2012-05-06 2013-02-12 Jerzy Roman Sochor Low inductance contact probe with conductively coupled plungers
JP6011103B2 (ja) * 2012-07-23 2016-10-19 山一電機株式会社 コンタクトプローブ及びそれを備えた半導体素子用ソケット
TWI490508B (zh) 2012-12-17 2015-07-01 Princo Corp 軟性測試裝置及其測試方法
CN103913642A (zh) * 2013-01-08 2014-07-09 鸿富锦精密工业(深圳)有限公司 信号测试装置
TWM461790U (zh) * 2013-04-26 2013-09-11 De-Xing Xiao 具弧狀接觸稜線之測試探針
KR102016427B1 (ko) 2013-09-10 2019-09-02 삼성전자주식회사 포고 핀 및 이를 포함하는 프로브 카드
TWI548879B (zh) * 2014-01-28 2016-09-11 Spring sleeve probe
CN104460061B (zh) * 2014-12-09 2018-06-05 京东方科技集团股份有限公司 测试探头及测试设备
US20160216294A1 (en) * 2015-01-27 2016-07-28 Kurt F. Kaashoek Electrical Spring Probe with Stabilization
US9500674B2 (en) * 2015-02-04 2016-11-22 C.C.P. Contact Probes Co., Ltd. Probe structure
US9887478B2 (en) 2015-04-21 2018-02-06 Varian Semiconductor Equipment Associates, Inc. Thermally insulating electrical contact probe
KR101662951B1 (ko) * 2015-06-14 2016-10-14 김일 푸쉬 플레이트가 있는 프로브 카드
JP2017142080A (ja) * 2016-02-08 2017-08-17 日本電産リード株式会社 接触端子、検査治具、及び検査装置
JP6647075B2 (ja) * 2016-02-19 2020-02-14 日本発條株式会社 合金材料、コンタクトプローブおよび接続端子
WO2017208690A1 (ja) * 2016-05-31 2017-12-07 日本電産リード株式会社 接触導電治具、及び検査装置
US10877085B2 (en) 2016-06-09 2020-12-29 Nidec Read Corporation Inspection jig and inspection device
CN106569088A (zh) * 2016-09-13 2017-04-19 北京映翰通网络技术股份有限公司 配电网线路故障指示及定位装置
CN106706974B (zh) * 2016-12-23 2019-07-23 深圳市瑞能实业股份有限公司 一种低阻抗接触导电测试电极
JP2018107011A (ja) * 2016-12-27 2018-07-05 株式会社エンプラス 電気接触子及び電気部品用ソケット
JP6961351B2 (ja) * 2017-02-07 2021-11-05 株式会社日本マイクロニクス 治具
JP6892277B2 (ja) * 2017-02-10 2021-06-23 株式会社日本マイクロニクス プローブ及び電気的接続装置
US11346859B2 (en) 2017-03-30 2022-05-31 Nhk Spring Co., Ltd. Contact probe and probe unit
CN110462407B (zh) * 2017-03-30 2022-03-11 日本发条株式会社 探针座及探针单元
CN108241078B (zh) * 2017-05-18 2020-06-02 苏州韬盛电子科技有限公司 垂直探针卡
JP7021874B2 (ja) * 2017-06-28 2022-02-17 株式会社ヨコオ コンタクトプローブ及び検査治具
JP7098886B2 (ja) * 2017-07-04 2022-07-12 日本電産リード株式会社 接触端子、検査治具、及び検査装置
TWI640783B (zh) * 2017-09-15 2018-11-11 中華精測科技股份有限公司 探針卡裝置及其圓形探針
TWI671529B (zh) * 2017-12-22 2019-09-11 馬來西亞商宇騰精密探針集團 具有壓縮性彈簧組件的接觸探針
TWI627412B (zh) * 2017-12-27 2018-06-21 致茂電子股份有限公司 電流探針
WO2019168286A1 (ko) * 2018-03-02 2019-09-06 이승용 테스트 소켓 및 그 테스트 소켓을 포함한 테스트 장치
KR102071479B1 (ko) * 2019-02-07 2020-03-02 이승용 이동 가능한 pcb 커넥터를 포함한 테스트 소켓 및 그 테스트 소켓을 포함한 테스트 장치
KR101999320B1 (ko) * 2018-03-02 2019-10-01 이승용 포고 핀을 포함한 테스트 소켓 및 그 테스트 소켓을 포함한 테스트 장치
KR20210021349A (ko) 2018-06-14 2021-02-25 폼팩터, 인크. 디커플링된 전기적 및 기계적 설계를 갖는 전기 테스트 프로브들
KR102139946B1 (ko) * 2019-01-23 2020-08-12 주식회사 이노글로벌 테스트 소켓 및 이의 제조방법
CN113614899B (zh) * 2019-03-13 2023-10-24 日本发条株式会社 接触式探针及信号传送方法
CN112129975A (zh) * 2019-06-25 2020-12-25 中国探针股份有限公司 电连接组件
CN115210581A (zh) * 2020-02-26 2022-10-18 日本电产理德股份有限公司 筒状体、接触端子、检查治具以及检查装置
US11121511B1 (en) * 2020-03-16 2021-09-14 TE Connectivity Services Gmbh Electrical connector with shielding gasket
JP7566494B2 (ja) * 2020-05-28 2024-10-15 株式会社日本マイクロニクス 電気的接触子及び電気的接触子の製造方法
JP7453891B2 (ja) * 2020-10-06 2024-03-21 日本航空電子工業株式会社 電気部品検査器具
WO2022085483A1 (ja) * 2020-10-22 2022-04-28 株式会社ヨコオ コンタクトプローブ
CN114487518A (zh) * 2021-12-13 2022-05-13 渭南高新区木王科技有限公司 一种可以独立调节弹簧阻力的双头双动探针
KR102393628B1 (ko) * 2022-01-11 2022-05-04 주식회사 아썸닉스 테스트 핀
US20240201224A1 (en) * 2022-12-20 2024-06-20 Semiconductor Components Industries, Llc Temperature resistant contact unit holder receptacle assembly and related methods
US20240241153A1 (en) * 2023-01-12 2024-07-18 Johnstech International Corporation Spring probe contact assembly

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493766U (de) 1977-12-16 1979-07-03
US4528500A (en) * 1980-11-25 1985-07-09 Lightbody James D Apparatus and method for testing circuit boards
US4724383A (en) * 1985-05-03 1988-02-09 Testsystems, Inc. PC board test fixture
DE8812068U1 (de) * 1987-10-09 1989-02-16 Feinmetall GmbH, 71083 Herrenberg Kontaktvorrichtung
DE3820795A1 (de) * 1988-06-20 1989-12-21 Ingun Pruefmittelbau Gmbh Gefederter kontaktstift zum pruefen von prueflingen
EP0462706A1 (de) * 1990-06-11 1991-12-27 ITT INDUSTRIES, INC. (a Delaware corporation) Kontaktanordnung
US5157325A (en) * 1991-02-15 1992-10-20 Compaq Computer Corporation Compact, wireless apparatus for electrically testing printed circuit boards
US5576631A (en) * 1992-03-10 1996-11-19 Virginia Panel Corporation Coaxial double-headed spring contact probe assembly
US5420519A (en) * 1992-03-10 1995-05-30 Virginia Panel Corporation Double-headed spring contact probe assembly
US6150616A (en) * 1996-04-12 2000-11-21 Nhk Spring Co., Ltd. Electroconductive contact unit system
JP3326095B2 (ja) 1996-12-27 2002-09-17 日本発条株式会社 導電性接触子
JP3634074B2 (ja) * 1996-06-28 2005-03-30 日本発条株式会社 導電性接触子
JP3414593B2 (ja) * 1996-06-28 2003-06-09 日本発条株式会社 導電性接触子
JPH10214649A (ja) * 1997-01-30 1998-08-11 Yokowo Co Ltd スプリングコネクタおよび該スプリングコネクタを用いた装置
US6396293B1 (en) 1999-02-18 2002-05-28 Delaware Capital Formation, Inc. Self-closing spring probe
US6462567B1 (en) 1999-02-18 2002-10-08 Delaware Capital Formation, Inc. Self-retained spring probe
JP3527724B2 (ja) * 1999-11-17 2004-05-17 株式会社アドバンテスト Icソケット及びic試験装置
JP2001255340A (ja) * 2000-03-13 2001-09-21 Yokowo Co Ltd コンタクトプローブ及び該コンタクトプローブを設けたicパッケージ検査用ソケット
DE60140330D1 (de) 2000-06-16 2009-12-10 Nhk Spring Co Ltd Mikrokontaktprüfnadel

Also Published As

Publication number Publication date
US20030137316A1 (en) 2003-07-24
WO2001096883A3 (en) 2002-06-27
DE60126936T2 (de) 2007-06-14
US7969170B2 (en) 2011-06-28
JP2004503783A (ja) 2004-02-05
EP1795905B1 (de) 2009-08-12
AU2001264297A1 (en) 2001-12-24
EP1795906B1 (de) 2009-10-28
EP1795905A1 (de) 2007-06-13
KR20030014711A (ko) 2003-02-19
US7459922B2 (en) 2008-12-02
MY134203A (en) 2007-11-30
US20090009205A1 (en) 2009-01-08
DE60139584D1 (de) 2009-09-24
TW515889B (en) 2003-01-01
WO2001096883A2 (en) 2001-12-20
US20060220666A1 (en) 2006-10-05
DE60140330D1 (de) 2009-12-10
US7057403B2 (en) 2006-06-06
JP4889183B2 (ja) 2012-03-07
EP1795906A1 (de) 2007-06-13
CN1436306A (zh) 2003-08-13
KR100745104B1 (ko) 2007-08-01
EP1290454B1 (de) 2007-02-28
EP1290454A2 (de) 2003-03-12
CN1262842C (zh) 2006-07-05

Similar Documents

Publication Publication Date Title
DE60126936D1 (de) Mikrokontaktprüfnadel und elektrischer messfühler
DE602004016973D1 (de) Testeinrichtung und testverfahren
DE19983903T1 (de) IC-Sockel und IC-Testgerät
NO990741D0 (no) NMR-fluidkarakteriseringsanordning og fremgangsmÕte for bruk med elektriske vaierline-formasjonstesteinstrumenter
DE60109365D1 (de) Antennenschaltungsanordnung und Testmethode
DE60036754D1 (de) Vorrichtung zur Kalibrierung von Temperaturmessungen und zur Messung von elektrischen Strömen
NO994610D0 (no) Pröveinnretning for bearbeidingsinstrument
DE60138852D1 (de) Formmesssensor und Formmessinstrument
DE60041520D1 (de) Gerät zur auswertung elektrischer eigenschaften
DE60040585D1 (de) Elektrische Vorrichtung und Anordnung
ATE460658T1 (de) Teststreifenmessverfahren
DE59913490D1 (de) Einrichtung zur vermessung und analyse von elektrischen signalen eines integrierten schaltungsbausteins
DE10082299T1 (de) Wellenformgenerator und Prüfvorrichtung
FI20000292A (fi) Testausjärjestely ja testausmenetelmä
DE60040129D1 (de) Test- und Messinstrument mit Telekommunikationsmaskentestfähigkeit und Zoom-Anordnung
DE60000915D1 (de) Einrichtung zur strommessung und zugehöriges verfahren
DE69907241D1 (de) Nmr bohrlochmessvorrichtung
DE60130594D1 (de) SDH Testvorrichtung und SDH Testverfahren
DE10196444T1 (de) Prüfvorrichtung
FI20021500A0 (fi) Paristosovitelma sondeja varten sekä sondi
GB2364777B (en) An improved capacitance measurement probe
DE602004011614D1 (de) Mustergenerator und testeinrichtung
ATE399691T1 (de) Einrichtung zur mechanischen und elektrischen überprüfung der verstelleinrichtung von weichenantrieben
DE60000251D1 (de) Kompakte Gesichtsfeldtestanordnung
DE60037224D1 (de) Verfahren zum Messen einer elektrischen Spannung und Anordnung zur Durchführung des Verfahrens

Legal Events

Date Code Title Description
8364 No opposition during term of opposition