CN114424331B - 存储器设备以及控制方法 - Google Patents

存储器设备以及控制方法 Download PDF

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Publication number
CN114424331B
CN114424331B CN201980100500.3A CN201980100500A CN114424331B CN 114424331 B CN114424331 B CN 114424331B CN 201980100500 A CN201980100500 A CN 201980100500A CN 114424331 B CN114424331 B CN 114424331B
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CN
China
Prior art keywords
temperature
memory
memory medium
stage
memory device
Prior art date
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Active
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CN201980100500.3A
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English (en)
Chinese (zh)
Other versions
CN114424331A (zh
Inventor
吉水康人
福岛崇
人见达郎
井上新
三浦正幸
菅野伸一
藤泽俊雄
中塚圭祐
佐贯朋也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kioxia Corp
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Kioxia Corp
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Publication date
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Publication of CN114424331A publication Critical patent/CN114424331A/zh
Application granted granted Critical
Publication of CN114424331B publication Critical patent/CN114424331B/zh
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0458—Details related to environmental aspects, e.g. temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C2029/0403—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals during or with feedback to manufacture
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/04—Arrangements for writing information into, or reading information out from, a digital store with means for avoiding disturbances due to temperature effects

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Test And Diagnosis Of Digital Computers (AREA)
  • Control Of Temperature (AREA)
CN201980100500.3A 2019-11-15 2019-11-15 存储器设备以及控制方法 Active CN114424331B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/044931 WO2021095251A1 (ja) 2019-11-15 2019-11-15 ストレージデバイスおよび制御方法

Publications (2)

Publication Number Publication Date
CN114424331A CN114424331A (zh) 2022-04-29
CN114424331B true CN114424331B (zh) 2025-07-11

Family

ID=75912115

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980100500.3A Active CN114424331B (zh) 2019-11-15 2019-11-15 存储器设备以及控制方法

Country Status (6)

Country Link
US (1) US12384624B2 (https=)
EP (1) EP4060721A4 (https=)
JP (1) JP7293389B2 (https=)
CN (1) CN114424331B (https=)
TW (2) TWI765316B (https=)
WO (1) WO2021095251A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112021007343T5 (de) 2021-03-23 2024-05-02 Kioxia Corporation Speichersystem
CN116393387A (zh) * 2023-04-10 2023-07-07 长鑫存储技术有限公司 探针卡管理装置及管理系统

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CN105103281A (zh) * 2013-03-25 2015-11-25 东京毅力科创株式会社 基板检查装置和基板温度调节方法

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CN105103281A (zh) * 2013-03-25 2015-11-25 东京毅力科创株式会社 基板检查装置和基板温度调节方法

Also Published As

Publication number Publication date
TW202230579A (zh) 2022-08-01
CN114424331A (zh) 2022-04-29
TWI800355B (zh) 2023-04-21
EP4060721A1 (en) 2022-09-21
TW202127561A (zh) 2021-07-16
US12384624B2 (en) 2025-08-12
JP7293389B2 (ja) 2023-06-19
WO2021095251A1 (ja) 2021-05-20
US20220204270A1 (en) 2022-06-30
EP4060721A4 (en) 2023-08-09
TWI765316B (zh) 2022-05-21
JPWO2021095251A1 (https=) 2021-05-20

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