CN111316433A - 半导体装置中的成形互连凸块 - Google Patents
半导体装置中的成形互连凸块 Download PDFInfo
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- CN111316433A CN111316433A CN201880070356.9A CN201880070356A CN111316433A CN 111316433 A CN111316433 A CN 111316433A CN 201880070356 A CN201880070356 A CN 201880070356A CN 111316433 A CN111316433 A CN 111316433A
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- bumps
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- Lead Frames For Integrated Circuits (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Wire Bonding (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762568330P | 2017-10-05 | 2017-10-05 | |
| US201762568331P | 2017-10-05 | 2017-10-05 | |
| US201762568333P | 2017-10-05 | 2017-10-05 | |
| US62/568,331 | 2017-10-05 | ||
| US62/568,333 | 2017-10-05 | ||
| US62/568,330 | 2017-10-05 | ||
| US16/103,839 US11444048B2 (en) | 2017-10-05 | 2018-08-14 | Shaped interconnect bumps in semiconductor devices |
| US16/103,839 | 2018-08-14 | ||
| PCT/US2018/054392 WO2019070995A1 (en) | 2017-10-05 | 2018-10-04 | INTERCONNECTION BUMPS SHAPED IN SEMICONDUCTOR DEVICES |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111316433A true CN111316433A (zh) | 2020-06-19 |
Family
ID=65992654
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880070356.9A Pending CN111316433A (zh) | 2017-10-05 | 2018-10-04 | 半导体装置中的成形互连凸块 |
| CN201880070342.7A Active CN111295748B (zh) | 2017-10-05 | 2018-10-05 | 半导体装置中的引线框 |
| CN201880073966.4A Pending CN111357098A (zh) | 2017-10-05 | 2018-10-05 | 半导体装置中的预模制引线框 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880070342.7A Active CN111295748B (zh) | 2017-10-05 | 2018-10-05 | 半导体装置中的引线框 |
| CN201880073966.4A Pending CN111357098A (zh) | 2017-10-05 | 2018-10-05 | 半导体装置中的预模制引线框 |
Country Status (5)
| Country | Link |
|---|---|
| US (6) | US11444048B2 (https=) |
| EP (3) | EP3692574A4 (https=) |
| JP (3) | JP7622308B2 (https=) |
| CN (3) | CN111316433A (https=) |
| WO (3) | WO2019070995A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11600590B2 (en) * | 2019-03-22 | 2023-03-07 | Advanced Semiconductor Engineering, Inc. | Semiconductor device and semiconductor package |
| US11682609B2 (en) | 2019-06-29 | 2023-06-20 | Texas Instruments Incorporated | Three-dimensional functional integration |
| CN110379792B (zh) * | 2019-07-23 | 2021-07-20 | 中新国际联合研究院 | 用于温度循环的电子组件焊点 |
| CN110660771B (zh) * | 2019-10-09 | 2021-03-30 | 中新国际联合研究院 | 一种半导体封装中焊点形状的优化结构 |
| CN110854029B (zh) * | 2019-11-08 | 2021-04-13 | 中新国际联合研究院 | 自然形成的粗短沙漏形焊点的成形工艺 |
| US11569154B2 (en) | 2021-05-27 | 2023-01-31 | Texas Instruments Incorporated | Interdigitated outward and inward bent leads for packaged electronic device |
| TWI845252B (zh) | 2023-04-12 | 2024-06-11 | 頎邦科技股份有限公司 | 半導體封裝構造及其晶片 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09139404A (ja) * | 1995-11-16 | 1997-05-27 | Toshiba Corp | 半導体装置およびその製造方法 |
| CN2538067Y (zh) * | 2002-04-24 | 2003-02-26 | 威盛电子股份有限公司 | 覆晶封装基板 |
| JP2007157745A (ja) * | 2005-11-30 | 2007-06-21 | Sanyo Electric Co Ltd | 回路装置 |
| US20070172981A1 (en) * | 2006-01-20 | 2007-07-26 | Meng-Jen Wang | Method for making flip chip on leadframe package |
| JP2013187383A (ja) * | 2012-03-08 | 2013-09-19 | Denso Corp | バンプ構造体の製造方法 |
| CN104282637A (zh) * | 2014-10-31 | 2015-01-14 | 南通富士通微电子股份有限公司 | 倒装芯片半导体封装结构 |
Family Cites Families (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2035086C1 (ru) | 1992-11-19 | 1995-05-10 | Николай Григорьевич Коломицкий | Способ изготовления полупроводниковых кристаллов |
| TW309654B (https=) * | 1995-03-29 | 1997-07-01 | Olin Corp | |
| JPH0913940A (ja) | 1995-06-30 | 1997-01-14 | Mitsubishi Agricult Mach Co Ltd | 移動農機におけるエンジンの消音装置 |
| SE513690C2 (sv) | 1995-08-16 | 2000-10-23 | Alfa Laval Agri Ab | Antennsystem med drivkretsar för transponder |
| JPH10178047A (ja) * | 1996-12-16 | 1998-06-30 | Seiko Instr Inc | 半導体装置 |
| JPH1154663A (ja) * | 1997-08-04 | 1999-02-26 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置とそれに用いられる回路部材、および回路部材の製造方法 |
| US6184062B1 (en) | 1999-01-19 | 2001-02-06 | International Business Machines Corporation | Process for forming cone shaped solder for chip interconnection |
| JP3826605B2 (ja) * | 1999-03-08 | 2006-09-27 | セイコーエプソン株式会社 | 半導体装置の実装構造の製造方法、液晶装置、および電子機器 |
| US6717245B1 (en) | 2000-06-02 | 2004-04-06 | Micron Technology, Inc. | Chip scale packages performed by wafer level processing |
| KR100546696B1 (ko) * | 2000-10-11 | 2006-01-26 | 앰코 테크놀로지 코리아 주식회사 | 반도체패키지 제조 공정용 리드프레임의 형성 방법 |
| US7064009B1 (en) * | 2001-04-04 | 2006-06-20 | Amkor Technology, Inc. | Thermally enhanced chip scale lead on chip semiconductor package and method of making same |
| JP2002368177A (ja) * | 2001-06-12 | 2002-12-20 | Mitsubishi Electric Corp | リードフレーム及び半導体装置 |
| US8236612B2 (en) | 2002-04-29 | 2012-08-07 | Unisem (Mauritius) Holdings Limited | Partially patterned lead frames and methods of making and using the same in semiconductor packaging |
| JP4446772B2 (ja) | 2004-03-24 | 2010-04-07 | 三洋電機株式会社 | 回路装置およびその製造方法 |
| JP4119866B2 (ja) * | 2004-05-12 | 2008-07-16 | 富士通株式会社 | 半導体装置 |
| US7045893B1 (en) | 2004-07-15 | 2006-05-16 | Amkor Technology, Inc. | Semiconductor package and method for manufacturing the same |
| TW200607030A (en) * | 2004-08-04 | 2006-02-16 | Univ Nat Chiao Tung | Process for protecting solder joints and structure for alleviating electromigration and joule heating in solder joints |
| KR100630703B1 (ko) | 2004-10-15 | 2006-10-02 | 삼성전자주식회사 | 레이저빔의 파장 제어 시스템 및 그 제어방법 |
| KR101298225B1 (ko) * | 2005-06-30 | 2013-08-27 | 페어차일드 세미컨덕터 코포레이션 | 반도체 다이 패키지 및 그의 제조 방법 |
| JP4768343B2 (ja) * | 2005-07-27 | 2011-09-07 | 株式会社デンソー | 半導体素子の実装方法 |
| TWI263351B (en) * | 2005-09-20 | 2006-10-01 | Siliconware Precision Industries Co Ltd | Semiconductor package and fabrication method thereof |
| FI119729B (fi) * | 2005-11-23 | 2009-02-27 | Vti Technologies Oy | Menetelmä mikroelektromekaanisen komponentin valmistamiseksi ja mikroelektromekaaninen komponentti |
| US9847309B2 (en) * | 2006-09-22 | 2017-12-19 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming vertical interconnect structure between semiconductor die and substrate |
| US20090014852A1 (en) * | 2007-07-11 | 2009-01-15 | Hsin-Hui Lee | Flip-Chip Packaging with Stud Bumps |
| US7749887B2 (en) * | 2007-12-18 | 2010-07-06 | Micron Technology, Inc. | Methods of fluxless micro-piercing of solder balls, and resulting devices |
| KR101204092B1 (ko) | 2008-05-16 | 2012-11-22 | 삼성테크윈 주식회사 | 리드 프레임 및 이를 구비한 반도체 패키지와 그 제조방법 |
| TWI386119B (zh) * | 2009-03-04 | 2013-02-11 | 萬國半導體股份有限公司 | 緊湊型電感功率電子器件封裝 |
| US8551820B1 (en) * | 2009-09-28 | 2013-10-08 | Amkor Technology, Inc. | Routable single layer substrate and semiconductor package including same |
| JP5271949B2 (ja) * | 2009-09-29 | 2013-08-21 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US20120006833A1 (en) * | 2010-07-07 | 2012-01-12 | Shower Niche Kit, Inc. | Shower niche kit |
| US8076184B1 (en) | 2010-08-16 | 2011-12-13 | Stats Chippac, Ltd. | Semiconductor device and method of forming wafer-level multi-row etched leadframe with base leads and embedded semiconductor die |
| US8304277B2 (en) * | 2010-09-09 | 2012-11-06 | Stats Chippac, Ltd. | Semiconductor device and method of forming base substrate with cavities formed through etch-resistant conductive layer for bump locking |
| JP2012069704A (ja) | 2010-09-22 | 2012-04-05 | Toshiba Corp | 半導体装置及びその製造方法 |
| US20120098120A1 (en) | 2010-10-21 | 2012-04-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Centripetal layout for low stress chip package |
| US20120267779A1 (en) * | 2011-04-25 | 2012-10-25 | Mediatek Inc. | Semiconductor package |
| US8907437B2 (en) | 2011-07-22 | 2014-12-09 | Allegro Microsystems, Llc | Reinforced isolation for current sensor with magnetic field transducer |
| US9484259B2 (en) | 2011-09-21 | 2016-11-01 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming protection and support structure for conductive interconnect structure |
| CN102394232A (zh) * | 2011-11-29 | 2012-03-28 | 杭州矽力杰半导体技术有限公司 | 一种引线框架及应用其的芯片倒装封装装置 |
| CN102629599B (zh) * | 2012-04-06 | 2014-09-03 | 天水华天科技股份有限公司 | 四边扁平无引脚封装件及其生产方法 |
| US9646923B2 (en) * | 2012-04-17 | 2017-05-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices, methods of manufacture thereof, and packaged semiconductor devices |
| US9293338B2 (en) * | 2012-11-08 | 2016-03-22 | Nantong Fujitsu Microelectronics Co., Ltd. | Semiconductor packaging structure and method |
| US9911685B2 (en) * | 2012-11-09 | 2018-03-06 | Amkor Technology, Inc. | Land structure for semiconductor package and method therefor |
| JP6030970B2 (ja) * | 2013-02-12 | 2016-11-24 | エスアイアイ・セミコンダクタ株式会社 | 樹脂封止型半導体装置およびその製造方法 |
| JP2014179364A (ja) | 2013-03-13 | 2014-09-25 | Ps4 Luxco S A R L | 半導体チップ及びこれを備える半導体装置 |
| US9287200B2 (en) * | 2013-06-27 | 2016-03-15 | Freescale Semiconductor, Inc. | Packaged semiconductor device |
| JP6130312B2 (ja) * | 2014-02-10 | 2017-05-17 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| US9219025B1 (en) * | 2014-08-15 | 2015-12-22 | Infineon Technologies Ag | Molded flip-clip semiconductor package |
| US9337154B2 (en) | 2014-08-28 | 2016-05-10 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and method of manufacturing the same |
| US9502337B2 (en) * | 2014-10-31 | 2016-11-22 | Nantong Fujitsu Microelectronics Co., Ltd. | Flip-chip on leadframe semiconductor packaging structure and fabrication method thereof |
| KR101647587B1 (ko) * | 2015-03-03 | 2016-08-10 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 |
| JP2016213238A (ja) | 2015-04-30 | 2016-12-15 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
| CN204992803U (zh) * | 2015-09-01 | 2016-01-20 | 德昌电机(深圳)有限公司 | 单相永磁电机及其定子磁芯 |
| JP2017152646A (ja) | 2016-02-26 | 2017-08-31 | 富士通株式会社 | 電子部品、電子装置及び電子機器 |
| DE102016108060B4 (de) * | 2016-04-29 | 2020-08-13 | Infineon Technologies Ag | Packungen mit hohlraumbasiertem Merkmal auf Chip-Träger und Verfahren zu ihrer Herstellung |
| US10204814B1 (en) * | 2017-07-28 | 2019-02-12 | Stmicroelectronics, Inc. | Semiconductor package with individually molded leadframe and die coupled at solder balls |
-
2018
- 2018-08-14 US US16/103,839 patent/US11444048B2/en active Active
- 2018-10-03 US US16/151,026 patent/US10957666B2/en active Active
- 2018-10-03 US US16/150,986 patent/US11152322B2/en active Active
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-
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- 2022-09-13 US US17/944,143 patent/US20230012200A1/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09139404A (ja) * | 1995-11-16 | 1997-05-27 | Toshiba Corp | 半導体装置およびその製造方法 |
| CN2538067Y (zh) * | 2002-04-24 | 2003-02-26 | 威盛电子股份有限公司 | 覆晶封装基板 |
| JP2007157745A (ja) * | 2005-11-30 | 2007-06-21 | Sanyo Electric Co Ltd | 回路装置 |
| US20070172981A1 (en) * | 2006-01-20 | 2007-07-26 | Meng-Jen Wang | Method for making flip chip on leadframe package |
| JP2013187383A (ja) * | 2012-03-08 | 2013-09-19 | Denso Corp | バンプ構造体の製造方法 |
| CN104282637A (zh) * | 2014-10-31 | 2015-01-14 | 南通富士通微电子股份有限公司 | 倒装芯片半导体封装结构 |
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| EP3692569A4 (en) | 2020-12-09 |
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| US12183703B2 (en) | 2024-12-31 |
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| US20190109110A1 (en) | 2019-04-11 |
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| US20230012200A1 (en) | 2023-01-12 |
| JP7197849B2 (ja) | 2022-12-28 |
| EP3692570A1 (en) | 2020-08-12 |
| US20210210453A1 (en) | 2021-07-08 |
| EP3692574A1 (en) | 2020-08-12 |
| EP3692574A4 (en) | 2020-12-02 |
| JP7448754B2 (ja) | 2024-03-13 |
| US11152322B2 (en) | 2021-10-19 |
| CN111357098A (zh) | 2020-06-30 |
| US20190109016A1 (en) | 2019-04-11 |
| EP3692569A1 (en) | 2020-08-12 |
| JP2020537342A (ja) | 2020-12-17 |
| JP2020537341A (ja) | 2020-12-17 |
| WO2019071069A1 (en) | 2019-04-11 |
| US12191273B2 (en) | 2025-01-07 |
| US11444048B2 (en) | 2022-09-13 |
| CN111295748B (zh) | 2024-11-22 |
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