CN102270504B - 堆叠半导体存储器件、存储器系统及修复硅通孔缺陷的方法 - Google Patents

堆叠半导体存储器件、存储器系统及修复硅通孔缺陷的方法 Download PDF

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CN102270504B
CN102270504B CN201110141841.0A CN201110141841A CN102270504B CN 102270504 B CN102270504 B CN 102270504B CN 201110141841 A CN201110141841 A CN 201110141841A CN 102270504 B CN102270504 B CN 102270504B
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buffer
tsvs
memory chip
memory
tsv
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Chinese (zh)
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CN102270504A (zh
Inventor
吴台荣
朴光
朴光一
梁润硕
孙宁洙
金始弘
裵升浚
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/06Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/70Masking faults in memories by using spares or by reconfiguring
    • G11C29/702Masking faults in memories by using spares or by reconfiguring by replacing auxiliary circuits, e.g. spare voltage generators, decoders or sense amplifiers, to be used instead of defective ones
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/22Connection or disconnection of sub-entities or redundant parts of a device in response to a measurement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/18Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of the types provided for in two or more different main groups of the same subclass of H10B, H10D, H10F, H10H, H10K or H10N
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/10Input/output [I/O] data interface arrangements, e.g. I/O data control circuits, I/O data buffers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/04All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same main group of the same subclass of class H10
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06541Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
    • H01L25/0657Stacked arrangements of devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Memories (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN201110141841.0A 2010-06-01 2011-05-30 堆叠半导体存储器件、存储器系统及修复硅通孔缺陷的方法 Active CN102270504B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100051733A KR101728068B1 (ko) 2010-06-01 2010-06-01 적층 반도체 메모리 장치, 이를 포함하는 메모리 시스템, 및 관통전극 결함리페어 방법
KR10-2010-0051733 2010-06-01

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CN102270504A CN102270504A (zh) 2011-12-07
CN102270504B true CN102270504B (zh) 2016-08-31

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US (1) US8654593B2 (enExample)
JP (1) JP5982097B2 (enExample)
KR (1) KR101728068B1 (enExample)
CN (1) CN102270504B (enExample)
TW (1) TWI532051B (enExample)

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KR102125340B1 (ko) 2014-06-19 2020-06-23 삼성전자주식회사 신호 전달을 위한 주 경로 및 우회 경로를 갖는 집적 회로 및 그것을 포함하는 집적 회로 패키지
KR20160006991A (ko) * 2014-07-10 2016-01-20 에스케이하이닉스 주식회사 복수의 채널 및 관통 비아를 포함하는 반도체 장치
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Also Published As

Publication number Publication date
JP5982097B2 (ja) 2016-08-31
TW201201218A (en) 2012-01-01
JP2011253607A (ja) 2011-12-15
KR101728068B1 (ko) 2017-04-19
US8654593B2 (en) 2014-02-18
CN102270504A (zh) 2011-12-07
TWI532051B (zh) 2016-05-01
KR20110131976A (ko) 2011-12-07
US20110292742A1 (en) 2011-12-01

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