CN102064089B - 形成多晶硅层的方法、薄膜晶体管、显示装置及制造方法 - Google Patents
形成多晶硅层的方法、薄膜晶体管、显示装置及制造方法 Download PDFInfo
- Publication number
- CN102064089B CN102064089B CN201010506428.5A CN201010506428A CN102064089B CN 102064089 B CN102064089 B CN 102064089B CN 201010506428 A CN201010506428 A CN 201010506428A CN 102064089 B CN102064089 B CN 102064089B
- Authority
- CN
- China
- Prior art keywords
- layer
- semiconductor layer
- groove
- electrode
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 42
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 42
- 239000010409 thin film Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 44
- 238000002425 crystallisation Methods 0.000 claims abstract description 34
- 230000008025 crystallization Effects 0.000 claims abstract description 33
- 239000003054 catalyst Substances 0.000 claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 claims description 239
- 239000004065 semiconductor Substances 0.000 claims description 56
- 238000009413 insulation Methods 0.000 claims description 21
- 229910021332 silicide Inorganic materials 0.000 claims description 15
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 15
- 238000000059 patterning Methods 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 6
- 239000012044 organic layer Substances 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 239000013078 crystal Substances 0.000 description 24
- 239000003863 metallic catalyst Substances 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007715 excimer laser crystallization Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- VVTQWTOTJWCYQT-UHFFFAOYSA-N alumane;neodymium Chemical compound [AlH3].[Nd] VVTQWTOTJWCYQT-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02672—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using crystallisation enhancing elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1277—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using a crystallisation promoting species, e.g. local introduction of Ni catalyst
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1281—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor by using structural features to control crystal growth, e.g. placement of grain filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1296—Multistep manufacturing methods adapted to increase the uniformity of device parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78675—Polycrystalline or microcrystalline silicon transistor with normal-type structure, e.g. with top gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geometry (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0109835 | 2009-11-13 | ||
KR1020090109835A KR101094295B1 (ko) | 2009-11-13 | 2009-11-13 | 다결정 실리콘층의 제조방법, 박막트랜지스터의 제조방법, 및 유기전계발광표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102064089A CN102064089A (zh) | 2011-05-18 |
CN102064089B true CN102064089B (zh) | 2016-03-02 |
Family
ID=43479223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010506428.5A Expired - Fee Related CN102064089B (zh) | 2009-11-13 | 2010-10-12 | 形成多晶硅层的方法、薄膜晶体管、显示装置及制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8890165B2 (zh) |
EP (1) | EP2323159A1 (zh) |
JP (1) | JP6081689B2 (zh) |
KR (1) | KR101094295B1 (zh) |
CN (1) | CN102064089B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102646595A (zh) * | 2011-11-11 | 2012-08-22 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制造方法、显示器件 |
US9087694B2 (en) * | 2012-06-03 | 2015-07-21 | Silicon Solar Solutions, Llc | Ultra-large grain polycrystalline semiconductors through top-down aluminum induced crystallization (TAIC) |
CN103219228B (zh) * | 2013-03-11 | 2016-05-25 | 京东方科技集团股份有限公司 | 多晶硅层的制作方法和多晶硅薄膜晶体管及其制造方法 |
TWI593024B (zh) * | 2015-07-24 | 2017-07-21 | 友達光電股份有限公司 | 薄膜電晶體的製造方法 |
CN106935657B (zh) | 2017-05-04 | 2020-06-02 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制造方法、显示装置 |
CN107946173B (zh) * | 2017-10-12 | 2019-12-27 | 惠科股份有限公司 | 低温多晶硅薄膜及晶体管的制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1719615A (zh) * | 2004-07-07 | 2006-01-11 | 三星Sdi株式会社 | 薄膜晶体管及其制造方法 |
CN101150142A (zh) * | 2006-09-19 | 2008-03-26 | 三星电子株式会社 | 有机电致发光显示器及制造其的方法 |
Family Cites Families (84)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6333868A (ja) | 1986-07-28 | 1988-02-13 | Nec Corp | Mis型電界効果トランジスタの製造方法 |
JPS63304668A (ja) | 1987-06-03 | 1988-12-12 | Fujitsu Ltd | 絶縁ゲ−ト型トランジスタの製造方法 |
JP2617950B2 (ja) | 1987-10-16 | 1997-06-11 | 松下電器産業株式会社 | 液晶表示装置の製造方法 |
JPH04135161A (ja) | 1990-09-21 | 1992-05-08 | Ietatsu Ono | 研磨方法とその研磨加工装置 |
JP3076119B2 (ja) | 1991-12-25 | 2000-08-14 | 株式会社日立製作所 | 液晶表示装置の製造方法 |
EP0589049B1 (en) * | 1992-03-25 | 2000-01-12 | Kanegafuchi Chemical Industry Co., Ltd. | Thin polysilicon film and production thereof |
JPH0669515A (ja) * | 1992-08-19 | 1994-03-11 | Fujitsu Ltd | 半導体記憶装置 |
JP3139154B2 (ja) | 1992-08-19 | 2001-02-26 | セイコーエプソン株式会社 | 液晶装置及びその製造方法 |
JP3107941B2 (ja) | 1993-03-05 | 2000-11-13 | 株式会社半導体エネルギー研究所 | 薄膜トランジスタおよびその作製方法 |
JPH0713196A (ja) | 1993-06-21 | 1995-01-17 | Toshiba Corp | アクティブマトリックス型液晶表示装置 |
KR100294026B1 (ko) * | 1993-06-24 | 2001-09-17 | 야마자끼 순페이 | 전기광학장치 |
US7081938B1 (en) * | 1993-12-03 | 2006-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method for manufacturing the same |
JPH0845850A (ja) | 1994-07-27 | 1996-02-16 | Oki Electric Ind Co Ltd | ドープト多結晶半導体薄膜の成長方法 |
JP3295679B2 (ja) | 1995-08-04 | 2002-06-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP3143591B2 (ja) | 1995-09-14 | 2001-03-07 | キヤノン株式会社 | 表示装置 |
JP3476320B2 (ja) * | 1996-02-23 | 2003-12-10 | 株式会社半導体エネルギー研究所 | 半導体薄膜およびその作製方法ならびに半導体装置およびその作製方法 |
TW317643B (zh) | 1996-02-23 | 1997-10-11 | Handotai Energy Kenkyusho Kk | |
KR100205523B1 (ko) | 1996-04-08 | 1999-07-01 | 구자홍 | 박막트랜지스터 및 그 제조방법 |
JPH1174536A (ja) * | 1997-01-09 | 1999-03-16 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2000031488A (ja) * | 1997-08-26 | 2000-01-28 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
KR20000055877A (ko) | 1999-02-10 | 2000-09-15 | 장진 | 니켈이 포함된 다결정 실리콘 |
KR100317638B1 (ko) | 1999-03-19 | 2001-12-22 | 구본준, 론 위라하디락사 | 폴리실리콘 박막트랜지스터 소자 및 그 제조방법 |
US6878968B1 (en) * | 1999-05-10 | 2005-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP3706527B2 (ja) * | 1999-06-30 | 2005-10-12 | Hoya株式会社 | 電子線描画用マスクブランクス、電子線描画用マスクおよび電子線描画用マスクの製造方法 |
JP3715848B2 (ja) * | 1999-09-22 | 2005-11-16 | シャープ株式会社 | 半導体装置の製造方法 |
US6294442B1 (en) * | 1999-12-10 | 2001-09-25 | National Semiconductor Corporation | Method for the formation of a polysilicon layer with a controlled, small silicon grain size during semiconductor device fabrication |
JP4200618B2 (ja) | 1999-12-27 | 2008-12-24 | ソニー株式会社 | 半導体膜形成方法及び薄膜半導体装置の製造方法 |
GB2358081B (en) * | 2000-01-07 | 2004-02-18 | Seiko Epson Corp | A thin-film transistor and a method for maufacturing thereof |
KR100450595B1 (ko) | 2000-02-09 | 2004-09-30 | 히다찌 케이블 리미티드 | 결정실리콘 반도체장치 및 그 장치의 제조방법 |
JP4769997B2 (ja) | 2000-04-06 | 2011-09-07 | ソニー株式会社 | 薄膜トランジスタ及びその製造方法、液晶表示装置、液晶表示装置の製造方法、有機el装置、有機el装置の製造方法 |
JP2001337348A (ja) | 2000-05-30 | 2001-12-07 | Toshiba Corp | アレイ基板およびその製造方法 |
KR100387122B1 (ko) | 2000-09-15 | 2003-06-12 | 피티플러스(주) | 백 바이어스 효과를 갖는 다결정 실리콘 박막 트랜지스터의 제조 방법 |
JP4267266B2 (ja) | 2001-07-10 | 2009-05-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2003060209A (ja) | 2001-08-08 | 2003-02-28 | Sharp Corp | 半導体装置およびその製造方法 |
JP2003100629A (ja) | 2001-09-19 | 2003-04-04 | Sharp Corp | 半導体装置及びその製造方法 |
JP4135347B2 (ja) | 2001-10-02 | 2008-08-20 | 株式会社日立製作所 | ポリシリコン膜生成方法 |
JP2003188098A (ja) | 2001-12-13 | 2003-07-04 | Sharp Corp | 半導体装置およびその製造方法 |
US6933527B2 (en) * | 2001-12-28 | 2005-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and semiconductor device production system |
TW536716B (en) * | 2002-07-04 | 2003-06-11 | Ind Tech Res Inst | Capacitor structure of low temperature polysilicon |
JP4092261B2 (ja) * | 2002-08-02 | 2008-05-28 | 三星エスディアイ株式会社 | 基板の製造方法及び有機エレクトロルミネッセンス素子の製造方法 |
KR100603284B1 (ko) | 2002-10-22 | 2006-07-20 | 삼성에스디아이 주식회사 | 캐페시턴스가 증가된 전계발광 디스플레이 패널 |
KR20040036761A (ko) | 2002-10-24 | 2004-05-03 | 엘지전자 주식회사 | 고밀도 플라즈마 화학기상증착법에 의한 실리콘 증착방법 |
KR100470274B1 (ko) * | 2002-11-08 | 2005-02-05 | 진 장 | 덮개층을 이용한 비정질 물질의 상 변화 방법 |
JP4115252B2 (ja) * | 2002-11-08 | 2008-07-09 | シャープ株式会社 | 半導体膜およびその製造方法ならびに半導体装置およびその製造方法 |
TWI305681B (en) * | 2002-11-22 | 2009-01-21 | Toppoly Optoelectronics Corp | Method for fabricating thin film transistor array and driving circuits |
JP3904512B2 (ja) | 2002-12-24 | 2007-04-11 | シャープ株式会社 | 半導体装置およびその製造方法、並びに半導体装置を備えた電子機器 |
JP4059095B2 (ja) * | 2003-02-07 | 2008-03-12 | セイコーエプソン株式会社 | 相補型薄膜トランジスタ回路、電気光学装置、電子機器 |
TW200520229A (en) | 2003-12-03 | 2005-06-16 | Toppoly Optoelectronics Corp | Thin film transistor of multi-gate structure and its manufacturing method |
US7238963B2 (en) * | 2003-04-28 | 2007-07-03 | Tpo Displays Corp. | Self-aligned LDD thin-film transistor and method of fabricating the same |
KR20040098958A (ko) | 2003-05-16 | 2004-11-26 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그의 제조 방법 |
US7358165B2 (en) * | 2003-07-31 | 2008-04-15 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor device and method for manufacturing semiconductor device |
JP4578877B2 (ja) | 2003-07-31 | 2010-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
KR100623228B1 (ko) | 2003-11-27 | 2006-09-18 | 삼성에스디아이 주식회사 | 박막트랜지스터, 상기 박막트랜지스터를 구비하는유기전계발광표시장치 및 상기 박막트랜지스터의 제조방법 |
KR100579188B1 (ko) | 2004-02-12 | 2006-05-11 | 삼성에스디아이 주식회사 | 엘디디 구조를 갖는 박막트랜지스터 |
WO2005119779A1 (en) * | 2004-06-03 | 2005-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and manufacturing method of the same |
KR100600874B1 (ko) | 2004-06-09 | 2006-07-14 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그의 제조 방법 |
KR100626007B1 (ko) | 2004-06-30 | 2006-09-20 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 상기 박막 트랜지스터의 제조방법, 이박막 트랜지스터를 구비한 평판표시장치, 및 이평판표시장치의 제조방법 |
KR100611764B1 (ko) * | 2004-08-20 | 2006-08-10 | 삼성에스디아이 주식회사 | 박막트랜지스터의 제조 방법 |
KR100611766B1 (ko) | 2004-08-24 | 2006-08-10 | 삼성에스디아이 주식회사 | 박막트랜지스터 제조 방법 |
US7416928B2 (en) * | 2004-09-08 | 2008-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
KR100628989B1 (ko) | 2004-09-17 | 2006-09-27 | 진 장 | 비정질 실리콘 박막의 결정화 방법 |
KR20060026776A (ko) * | 2004-09-21 | 2006-03-24 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그의 제조 방법 |
KR100689316B1 (ko) | 2004-10-29 | 2007-03-08 | 엘지.필립스 엘시디 주식회사 | 유기전계발광다이오드소자 및 그 제조방법 |
KR100669789B1 (ko) | 2004-11-26 | 2007-01-16 | 삼성에스디아이 주식회사 | 평판 디스플레이 장치 |
JP5073482B2 (ja) * | 2005-03-31 | 2012-11-14 | 東京エレクトロン株式会社 | シリコン酸化膜の製造方法、その制御プログラム、記憶媒体及びプラズマ処理装置 |
US7341907B2 (en) * | 2005-04-05 | 2008-03-11 | Applied Materials, Inc. | Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon |
US7652291B2 (en) | 2005-05-28 | 2010-01-26 | Samsung Mobile Display Co., Ltd. | Flat panel display |
TWI401802B (zh) | 2005-06-30 | 2013-07-11 | Samsung Display Co Ltd | 薄膜電晶體板及其製造方法 |
JP2007027202A (ja) | 2005-07-12 | 2007-02-01 | Sharp Corp | 表示装置の製造方法および表示装置 |
JP2007035812A (ja) | 2005-07-26 | 2007-02-08 | Mitsubishi Electric Corp | 多結晶シリコン膜の製造方法および薄膜トランジスタ |
JP4815600B2 (ja) | 2005-09-06 | 2011-11-16 | 株式会社テラセミコン | 多結晶シリコン薄膜製造方法及びその製造装置 |
KR100778781B1 (ko) | 2005-12-16 | 2007-11-27 | 주식회사 테라세미콘 | 다결정 실리콘 박막 제조방법 및 그 제조장치 |
JP2009520373A (ja) * | 2005-12-19 | 2009-05-21 | エヌエックスピー ビー ヴィ | シリコン・オン・インシュレータ装置におけるソースおよびドレイン形成 |
KR20070076860A (ko) | 2006-01-20 | 2007-07-25 | 삼성전자주식회사 | 유기발광 디스플레이 및 그 제조방법 |
TWI296855B (en) | 2006-03-07 | 2008-05-11 | Au Optronics Corp | Thin film transistor and manufacturing method thereof |
KR100770269B1 (ko) | 2006-05-18 | 2007-10-25 | 삼성에스디아이 주식회사 | 박막트랜지스터의 제조방법 |
KR100770266B1 (ko) * | 2006-11-10 | 2007-10-25 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그 제조방법 |
KR100864883B1 (ko) | 2006-12-28 | 2008-10-22 | 삼성에스디아이 주식회사 | 박막트랜지스터, 그의 제조방법 및 이를 구비한유기전계발광표시장치. |
KR100864884B1 (ko) | 2006-12-28 | 2008-10-22 | 삼성에스디아이 주식회사 | 박막트랜지스터, 그의 제조방법 및 이를 구비한유기전계발광표시장치 |
KR100839735B1 (ko) | 2006-12-29 | 2008-06-19 | 삼성에스디아이 주식회사 | 트랜지스터, 이의 제조 방법 및 이를 구비한 평판 표시장치 |
KR100889626B1 (ko) * | 2007-08-22 | 2009-03-20 | 삼성모바일디스플레이주식회사 | 박막트랜지스터, 그의 제조방법, 이를 구비한유기전계발광표시장치, 및 그의 제조방법 |
JP2009059940A (ja) | 2007-08-31 | 2009-03-19 | Sharp Corp | 薄膜トランジスタ、薄膜トランジスタの製造方法、及び、電子装置 |
KR20080086967A (ko) | 2008-08-28 | 2008-09-29 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 이를 구비한 유기전계발광표시장치 |
KR101015849B1 (ko) | 2009-03-03 | 2011-02-23 | 삼성모바일디스플레이주식회사 | 박막트랜지스터, 그의 제조방법 및 이를 포함하는 유기전계발광표시장치 |
-
2009
- 2009-11-13 KR KR1020090109835A patent/KR101094295B1/ko not_active IP Right Cessation
-
2010
- 2010-02-26 US US12/714,154 patent/US8890165B2/en not_active Expired - Fee Related
- 2010-10-12 CN CN201010506428.5A patent/CN102064089B/zh not_active Expired - Fee Related
- 2010-10-13 JP JP2010230428A patent/JP6081689B2/ja not_active Expired - Fee Related
- 2010-11-15 EP EP10191250A patent/EP2323159A1/en not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1719615A (zh) * | 2004-07-07 | 2006-01-11 | 三星Sdi株式会社 | 薄膜晶体管及其制造方法 |
CN101150142A (zh) * | 2006-09-19 | 2008-03-26 | 三星电子株式会社 | 有机电致发光显示器及制造其的方法 |
Also Published As
Publication number | Publication date |
---|---|
KR101094295B1 (ko) | 2011-12-19 |
EP2323159A1 (en) | 2011-05-18 |
JP2011109075A (ja) | 2011-06-02 |
US8890165B2 (en) | 2014-11-18 |
CN102064089A (zh) | 2011-05-18 |
KR20110053039A (ko) | 2011-05-19 |
US20110114961A1 (en) | 2011-05-19 |
JP6081689B2 (ja) | 2017-02-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102064089B (zh) | 形成多晶硅层的方法、薄膜晶体管、显示装置及制造方法 | |
CN102082077B (zh) | 制造多晶硅层的方法、薄膜晶体管、显示装置及制造方法 | |
CN100481508C (zh) | 薄膜晶体管及其制造方法 | |
US8384087B2 (en) | Thin film transistor, organic light emitting diode display device having the same, and method of fabricating the same | |
KR100864883B1 (ko) | 박막트랜지스터, 그의 제조방법 및 이를 구비한유기전계발광표시장치. | |
KR20090020028A (ko) | 박막트랜지스터, 그의 제조방법, 이를 구비한유기전계발광표시장치, 및 그의 제조방법 | |
CN101826555B (zh) | 薄膜晶体管、制造方法及有机发光二极管显示装置 | |
KR20100078863A (ko) | 다결정 실리콘의 제조방법, 박막트랜지스터, 그의 제조방법및 이를 포함하는 유기전계발광표시장치 | |
US20120056187A1 (en) | Method of forming polycrystalline silicon layer, and thin film transistor and organic light emitting device including the polycrystalline silicon layer | |
KR101049808B1 (ko) | 박막트랜지스터, 그의 제조방법 및 이를 포함하는 유기전계발광표시장치 | |
KR101146995B1 (ko) | 다결정 실리콘층의 형성 방법 및 이를 이용한 박막 트랜지스터의 형성방법 | |
KR101050467B1 (ko) | 다결정 실리콘층, 그 제조방법, 상기 다결정 실리층을 이용한 박막 트랜지스터 및 상기 박막 트랜지스터를 구비한 유기발광표시장치 | |
KR101094302B1 (ko) | 유기전계발광표시장치 및 그의 제조방법 | |
US20050139923A1 (en) | Semiconductor device with modified mobility and thin film transistor having the same | |
CN101086969A (zh) | 制造底栅型薄膜晶体管的方法 | |
US8125033B2 (en) | Polycrystalline silicon layer, flat panel display using the same, and method of fabricating the same | |
US7749873B2 (en) | Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same | |
KR101049806B1 (ko) | 다결정 실리콘의 제조방법, 박막트랜지스터, 그의 제조방법및 이를 포함하는 유기전계발광표시장치 | |
JP2006032909A (ja) | 電子回路装置、画素表示装置及び電子回路装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20121105 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20121105 Address after: South Korea Gyeonggi Do Yongin Applicant after: SAMSUNG DISPLAY Co.,Ltd. Address before: South Korea Gyeonggi Do Yongin Applicant before: Samsung Mobile Display Co.,Ltd. |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160302 |
|
CF01 | Termination of patent right due to non-payment of annual fee |