CN101918311B - 用于纯化四氟化硅的方法 - Google Patents

用于纯化四氟化硅的方法 Download PDF

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Publication number
CN101918311B
CN101918311B CN200880108027.5A CN200880108027A CN101918311B CN 101918311 B CN101918311 B CN 101918311B CN 200880108027 A CN200880108027 A CN 200880108027A CN 101918311 B CN101918311 B CN 101918311B
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CN
China
Prior art keywords
tetrafluoride
catalyzer
source gas
silicon
silicon source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200880108027.5A
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English (en)
Chinese (zh)
Other versions
CN101918311A (zh
Inventor
维塔尔·雷万卡尔
贾米勒·伊布拉希姆
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SunEdison Inc
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SunEdison Inc
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Filing date
Publication date
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Publication of CN101918311A publication Critical patent/CN101918311A/zh
Application granted granted Critical
Publication of CN101918311B publication Critical patent/CN101918311B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/889—Manganese, technetium or rhenium
    • B01J23/8892—Manganese
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/90—Regeneration or reactivation
    • B01J23/94—Regeneration or reactivation of catalysts comprising metals, oxides or hydroxides of the iron group metals or copper
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C01B33/10784—Purification by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/066—Zirconium or hafnium; Oxides or hydroxides thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/584—Recycling of catalysts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Catalysts (AREA)
  • Silicon Compounds (AREA)
CN200880108027.5A 2007-09-21 2008-09-11 用于纯化四氟化硅的方法 Expired - Fee Related CN101918311B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US97418207P 2007-09-21 2007-09-21
US60/974,182 2007-09-21
US12/208,464 US7943108B2 (en) 2007-09-21 2008-09-11 Processes for purification of silicon tetrafluoride
PCT/US2008/076027 WO2009042415A2 (en) 2007-09-21 2008-09-11 Processes for purification of silicon tetrafluoride
US12/208,464 2008-09-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2012103808393A Division CN102862990A (zh) 2007-09-21 2008-09-11 用于纯化四氟化硅的方法

Publications (2)

Publication Number Publication Date
CN101918311A CN101918311A (zh) 2010-12-15
CN101918311B true CN101918311B (zh) 2014-12-03

Family

ID=40394334

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200880108027.5A Expired - Fee Related CN101918311B (zh) 2007-09-21 2008-09-11 用于纯化四氟化硅的方法
CN2012103808393A Pending CN102862990A (zh) 2007-09-21 2008-09-11 用于纯化四氟化硅的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2012103808393A Pending CN102862990A (zh) 2007-09-21 2008-09-11 用于纯化四氟化硅的方法

Country Status (9)

Country Link
US (3) US7943108B2 (https=)
EP (1) EP2190780B1 (https=)
JP (1) JP5654872B2 (https=)
KR (1) KR101378184B1 (https=)
CN (2) CN101918311B (https=)
MY (1) MY156877A (https=)
SG (1) SG174814A1 (https=)
TW (1) TWI449666B (https=)
WO (1) WO2009042415A2 (https=)

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RU2422359C1 (ru) * 2009-12-14 2011-06-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ очистки тетрафторида кремния от примеси летучих фторидов фосфора
US8765090B2 (en) * 2010-09-08 2014-07-01 Dow Corning Corporation Method for preparing a trihalosilane
KR101452354B1 (ko) * 2014-01-24 2014-10-22 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
WO2015111886A1 (ko) * 2014-01-24 2015-07-30 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
KR101515117B1 (ko) * 2014-01-24 2015-04-24 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
CN104528735B (zh) * 2015-01-14 2017-03-08 成都瑞芬思生物科技有限公司 一种提纯塔产出物的吸附提纯装置
CN109205669A (zh) * 2018-11-19 2019-01-15 新特能源股份有限公司 四氯化锆及四氟化硅的联合制备方法
DE102019211379A1 (de) * 2019-07-30 2021-02-04 Studiengesellschaft Kohle Mbh Verfahren zur Entfernung von Kohlenmonoxid und/oder gasförmigen Schwefelverbindungen aus Wasserstoffgas und/oder aliphatischen Kohlenwasserstoffen

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US4044100A (en) * 1969-12-08 1977-08-23 Allied Chemical Corporation Separation of acidic gas constituents from gaseous mixtures containing the same
JPS59162122A (ja) * 1983-03-08 1984-09-13 Mitsui Toatsu Chem Inc 四弗化ケイ素の精製法
US4666944A (en) * 1984-09-21 1987-05-19 The Standard Oil Company Copper-zirconium-manganese-containing catalysts and processes for making alcohol mixtures using same
US4791079A (en) * 1986-06-09 1988-12-13 Arco Chemical Company Ceramic membrane for hydrocarbon conversion
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US4714604A (en) * 1986-08-13 1987-12-22 The Dow Chemical Company Method of separating HF and SiF4 from HCl
JPS6451314A (en) * 1987-08-21 1989-02-27 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride
JPS6452604A (en) * 1987-08-24 1989-02-28 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride gas
ES2110983T3 (es) * 1990-04-20 1998-03-01 Air Liquide Procedimiento y dispositivo de elaboracion de nitrogeno ultrapuro.
JPH05253475A (ja) * 1992-03-12 1993-10-05 Japan Energy Corp 脱臭剤
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WO2000062923A1 (en) * 1999-04-19 2000-10-26 Engelhard Corporation Catalyst composition comprising ceria and a platinum group metal
JP2001259426A (ja) * 2000-03-21 2001-09-25 Toyota Motor Corp 炭化水素系燃料の改質触媒およびその製造方法並びにモノリス触媒
US6511640B1 (en) * 2000-06-29 2003-01-28 The Boc Group, Inc. Purification of gases
JP4432230B2 (ja) * 2000-07-27 2010-03-17 日本ゼオン株式会社 フッ素化炭化水素の精製方法、溶剤、潤滑性重合体含有液および潤滑性重合体膜を有する物品
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JP4034091B2 (ja) * 2002-03-12 2008-01-16 三井化学株式会社 ＳｉＦ４の精製方法および高純度ＳｉＦ４ガス
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Also Published As

Publication number Publication date
JP2011504156A (ja) 2011-02-03
MY156877A (en) 2016-04-15
EP2190780A2 (en) 2010-06-02
TW200922873A (en) 2009-06-01
WO2009042415A2 (en) 2009-04-02
WO2009042415A3 (en) 2010-10-07
US7943108B2 (en) 2011-05-17
TWI449666B (zh) 2014-08-21
KR20100080902A (ko) 2010-07-13
CN101918311A (zh) 2010-12-15
CN102862990A (zh) 2013-01-09
US20100009843A1 (en) 2010-01-14
EP2190780B1 (en) 2015-02-25
SG174814A1 (en) 2011-10-28
JP5654872B2 (ja) 2015-01-14
KR101378184B1 (ko) 2014-03-24
US20100009844A1 (en) 2010-01-14
US20090092534A1 (en) 2009-04-09

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SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: American Missouri

Patentee after: SUNEDISON, Inc.

Address before: American Missouri

Patentee before: MEMC Electronic Materials, Inc.

CP01 Change in the name or title of a patent holder
TR01 Transfer of patent right

Effective date of registration: 20181213

Address after: 17th Floor, Global Trade Plaza, 1 West Austin Road, Kowloon, China

Patentee after: SUNEDISON, Inc.

Address before: American Missouri

Patentee before: SUNEDISON, Inc.

TR01 Transfer of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141203

Termination date: 20190911

CF01 Termination of patent right due to non-payment of annual fee