JP5654872B2 - 四フッ化ケイ素の精製方法 - Google Patents

四フッ化ケイ素の精製方法 Download PDF

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Publication number
JP5654872B2
JP5654872B2 JP2010525895A JP2010525895A JP5654872B2 JP 5654872 B2 JP5654872 B2 JP 5654872B2 JP 2010525895 A JP2010525895 A JP 2010525895A JP 2010525895 A JP2010525895 A JP 2010525895A JP 5654872 B2 JP5654872 B2 JP 5654872B2
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JP
Japan
Prior art keywords
silicon tetrafluoride
source gas
catalyst
gas
carbon monoxide
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Expired - Fee Related
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JP2010525895A
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English (en)
Japanese (ja)
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JP2011504156A (ja
JP2011504156A5 (https=
Inventor
ビタル・レバンカル
ジャミール・イブラヒム
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SunEdison Inc
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SunEdison Inc
MEMC Electronic Materials Inc
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Publication of JP2011504156A publication Critical patent/JP2011504156A/ja
Publication of JP2011504156A5 publication Critical patent/JP2011504156A5/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/889Manganese, technetium or rhenium
    • B01J23/8892Manganese
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/90Regeneration or reactivation
    • B01J23/94Regeneration or reactivation of catalysts comprising metals, oxides or hydroxides of the iron group metals or copper
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/10778Purification
    • C01B33/10784Purification by adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/066Zirconium or hafnium; Oxides or hydroxides thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/40Capture or disposal of greenhouse gases of CO2
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/50Improvements relating to the production of bulk chemicals
    • Y02P20/584Recycling of catalysts

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Catalysts (AREA)
  • Silicon Compounds (AREA)
JP2010525895A 2007-09-21 2008-09-11 四フッ化ケイ素の精製方法 Expired - Fee Related JP5654872B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US97418207P 2007-09-21 2007-09-21
US60/974,182 2007-09-21
US12/208,464 US7943108B2 (en) 2007-09-21 2008-09-11 Processes for purification of silicon tetrafluoride
PCT/US2008/076027 WO2009042415A2 (en) 2007-09-21 2008-09-11 Processes for purification of silicon tetrafluoride
US12/208,464 2008-09-11

Publications (3)

Publication Number Publication Date
JP2011504156A JP2011504156A (ja) 2011-02-03
JP2011504156A5 JP2011504156A5 (https=) 2011-09-29
JP5654872B2 true JP5654872B2 (ja) 2015-01-14

Family

ID=40394334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010525895A Expired - Fee Related JP5654872B2 (ja) 2007-09-21 2008-09-11 四フッ化ケイ素の精製方法

Country Status (9)

Country Link
US (3) US7943108B2 (https=)
EP (1) EP2190780B1 (https=)
JP (1) JP5654872B2 (https=)
KR (1) KR101378184B1 (https=)
CN (2) CN101918311B (https=)
MY (1) MY156877A (https=)
SG (1) SG174814A1 (https=)
TW (1) TWI449666B (https=)
WO (1) WO2009042415A2 (https=)

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RU2422359C1 (ru) * 2009-12-14 2011-06-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ очистки тетрафторида кремния от примеси летучих фторидов фосфора
US8765090B2 (en) * 2010-09-08 2014-07-01 Dow Corning Corporation Method for preparing a trihalosilane
KR101452354B1 (ko) * 2014-01-24 2014-10-22 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
WO2015111886A1 (ko) * 2014-01-24 2015-07-30 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
KR101515117B1 (ko) * 2014-01-24 2015-04-24 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
CN104528735B (zh) * 2015-01-14 2017-03-08 成都瑞芬思生物科技有限公司 一种提纯塔产出物的吸附提纯装置
CN109205669A (zh) * 2018-11-19 2019-01-15 新特能源股份有限公司 四氯化锆及四氟化硅的联合制备方法
DE102019211379A1 (de) * 2019-07-30 2021-02-04 Studiengesellschaft Kohle Mbh Verfahren zur Entfernung von Kohlenmonoxid und/oder gasförmigen Schwefelverbindungen aus Wasserstoffgas und/oder aliphatischen Kohlenwasserstoffen

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US4044100A (en) * 1969-12-08 1977-08-23 Allied Chemical Corporation Separation of acidic gas constituents from gaseous mixtures containing the same
JPS59162122A (ja) * 1983-03-08 1984-09-13 Mitsui Toatsu Chem Inc 四弗化ケイ素の精製法
US4666944A (en) * 1984-09-21 1987-05-19 The Standard Oil Company Copper-zirconium-manganese-containing catalysts and processes for making alcohol mixtures using same
US4791079A (en) * 1986-06-09 1988-12-13 Arco Chemical Company Ceramic membrane for hydrocarbon conversion
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US4714604A (en) * 1986-08-13 1987-12-22 The Dow Chemical Company Method of separating HF and SiF4 from HCl
JPS6451314A (en) * 1987-08-21 1989-02-27 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride
JPS6452604A (en) * 1987-08-24 1989-02-28 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride gas
ES2110983T3 (es) * 1990-04-20 1998-03-01 Air Liquide Procedimiento y dispositivo de elaboracion de nitrogeno ultrapuro.
JPH05253475A (ja) * 1992-03-12 1993-10-05 Japan Energy Corp 脱臭剤
US5833738A (en) * 1996-03-01 1998-11-10 D.D.I. Ltd. Specialty gas purification system
US6620385B2 (en) 1996-08-20 2003-09-16 Ebara Corporation Method and apparatus for purifying a gas containing contaminants
JP4263268B2 (ja) * 1997-10-17 2009-05-13 日揮ユニバーサル株式会社 アルミニウム製担体に触媒層を固定化する方法
WO2000062923A1 (en) * 1999-04-19 2000-10-26 Engelhard Corporation Catalyst composition comprising ceria and a platinum group metal
JP2001259426A (ja) * 2000-03-21 2001-09-25 Toyota Motor Corp 炭化水素系燃料の改質触媒およびその製造方法並びにモノリス触媒
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JP4432230B2 (ja) * 2000-07-27 2010-03-17 日本ゼオン株式会社 フッ素化炭化水素の精製方法、溶剤、潤滑性重合体含有液および潤滑性重合体膜を有する物品
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Also Published As

Publication number Publication date
JP2011504156A (ja) 2011-02-03
MY156877A (en) 2016-04-15
EP2190780A2 (en) 2010-06-02
TW200922873A (en) 2009-06-01
WO2009042415A2 (en) 2009-04-02
WO2009042415A3 (en) 2010-10-07
US7943108B2 (en) 2011-05-17
TWI449666B (zh) 2014-08-21
CN101918311B (zh) 2014-12-03
KR20100080902A (ko) 2010-07-13
CN101918311A (zh) 2010-12-15
CN102862990A (zh) 2013-01-09
US20100009843A1 (en) 2010-01-14
EP2190780B1 (en) 2015-02-25
SG174814A1 (en) 2011-10-28
KR101378184B1 (ko) 2014-03-24
US20100009844A1 (en) 2010-01-14
US20090092534A1 (en) 2009-04-09

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