KR101378184B1 - 사불화규소 정제 방법 - Google Patents

사불화규소 정제 방법 Download PDF

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Publication number
KR101378184B1
KR101378184B1 KR1020107007571A KR20107007571A KR101378184B1 KR 101378184 B1 KR101378184 B1 KR 101378184B1 KR 1020107007571 A KR1020107007571 A KR 1020107007571A KR 20107007571 A KR20107007571 A KR 20107007571A KR 101378184 B1 KR101378184 B1 KR 101378184B1
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KR
South Korea
Prior art keywords
catalyst
inert substrate
silicon tetrafluoride
inert
metal
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English (en)
Korean (ko)
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KR20100080902A (ko
Inventor
비탈 레반카르
자밀 이브라힘
Original Assignee
엠이엠씨 일렉트로닉 머티리얼즈, 인크.
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Assigned to 코너 스타 리미티드 reassignment 코너 스타 리미티드 권리의 전부이전등록 Assignors: 썬에디슨, 인크.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/889—Manganese, technetium or rhenium
    • B01J23/8892—Manganese
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/90—Regeneration or reactivation
    • B01J23/94—Regeneration or reactivation of catalysts comprising metals, oxides or hydroxides of the iron group metals or copper
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C01B33/10784—Purification by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/066—Zirconium or hafnium; Oxides or hydroxides thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/584—Recycling of catalysts

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Catalysts (AREA)
  • Silicon Compounds (AREA)
KR1020107007571A 2007-09-21 2008-09-11 사불화규소 정제 방법 Expired - Fee Related KR101378184B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US97418207P 2007-09-21 2007-09-21
US60/974,182 2007-09-21
US12/208,464 US7943108B2 (en) 2007-09-21 2008-09-11 Processes for purification of silicon tetrafluoride
US12/208,464 2008-09-11

Publications (2)

Publication Number Publication Date
KR20100080902A KR20100080902A (ko) 2010-07-13
KR101378184B1 true KR101378184B1 (ko) 2014-03-24

Family

ID=40394334

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KR1020107007571A Expired - Fee Related KR101378184B1 (ko) 2007-09-21 2008-09-11 사불화규소 정제 방법

Country Status (9)

Country Link
US (3) US7943108B2 (https=)
EP (1) EP2190780B1 (https=)
JP (1) JP5654872B2 (https=)
KR (1) KR101378184B1 (https=)
CN (2) CN101918311B (https=)
MY (1) MY156877A (https=)
SG (1) SG174814A1 (https=)
TW (1) TWI449666B (https=)
WO (1) WO2009042415A2 (https=)

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RU2422359C1 (ru) * 2009-12-14 2011-06-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ очистки тетрафторида кремния от примеси летучих фторидов фосфора
US8765090B2 (en) * 2010-09-08 2014-07-01 Dow Corning Corporation Method for preparing a trihalosilane
KR101452354B1 (ko) * 2014-01-24 2014-10-22 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
WO2015111886A1 (ko) * 2014-01-24 2015-07-30 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
KR101515117B1 (ko) * 2014-01-24 2015-04-24 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
CN104528735B (zh) * 2015-01-14 2017-03-08 成都瑞芬思生物科技有限公司 一种提纯塔产出物的吸附提纯装置
CN109205669A (zh) * 2018-11-19 2019-01-15 新特能源股份有限公司 四氯化锆及四氟化硅的联合制备方法
DE102019211379A1 (de) * 2019-07-30 2021-02-04 Studiengesellschaft Kohle Mbh Verfahren zur Entfernung von Kohlenmonoxid und/oder gasförmigen Schwefelverbindungen aus Wasserstoffgas und/oder aliphatischen Kohlenwasserstoffen

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US4044100A (en) 1969-12-08 1977-08-23 Allied Chemical Corporation Separation of acidic gas constituents from gaseous mixtures containing the same
US20030183503A1 (en) 1996-08-20 2003-10-02 Ebara Corporation Method and apparatus for purifying a gas containing contaminants
US20060133986A1 (en) 2001-07-16 2006-06-22 Leisl Dukhedin-Lalla Process and apparatus for removing Bronsted acid impurities in binary halides

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US3984519A (en) * 1969-01-21 1976-10-05 Snam Progetti, S.P.A. Process to transport carbon from a zone to another one, by means of a carrier fluid acting inside a closed system, particularly for the reprocessing of nuclear fuel elements having a graphite structure
JPS59162122A (ja) * 1983-03-08 1984-09-13 Mitsui Toatsu Chem Inc 四弗化ケイ素の精製法
US4666944A (en) * 1984-09-21 1987-05-19 The Standard Oil Company Copper-zirconium-manganese-containing catalysts and processes for making alcohol mixtures using same
US4791079A (en) * 1986-06-09 1988-12-13 Arco Chemical Company Ceramic membrane for hydrocarbon conversion
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US4714604A (en) * 1986-08-13 1987-12-22 The Dow Chemical Company Method of separating HF and SiF4 from HCl
JPS6451314A (en) * 1987-08-21 1989-02-27 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride
JPS6452604A (en) * 1987-08-24 1989-02-28 Mitsui Toatsu Chemicals Method for purifying silicon tetrafluoride gas
ES2110983T3 (es) * 1990-04-20 1998-03-01 Air Liquide Procedimiento y dispositivo de elaboracion de nitrogeno ultrapuro.
JPH05253475A (ja) * 1992-03-12 1993-10-05 Japan Energy Corp 脱臭剤
US5833738A (en) * 1996-03-01 1998-11-10 D.D.I. Ltd. Specialty gas purification system
JP4263268B2 (ja) * 1997-10-17 2009-05-13 日揮ユニバーサル株式会社 アルミニウム製担体に触媒層を固定化する方法
WO2000062923A1 (en) * 1999-04-19 2000-10-26 Engelhard Corporation Catalyst composition comprising ceria and a platinum group metal
JP2001259426A (ja) * 2000-03-21 2001-09-25 Toyota Motor Corp 炭化水素系燃料の改質触媒およびその製造方法並びにモノリス触媒
US6511640B1 (en) * 2000-06-29 2003-01-28 The Boc Group, Inc. Purification of gases
JP4432230B2 (ja) * 2000-07-27 2010-03-17 日本ゼオン株式会社 フッ素化炭化水素の精製方法、溶剤、潤滑性重合体含有液および潤滑性重合体膜を有する物品
JP2003089512A (ja) * 2001-09-11 2003-03-28 Central Glass Co Ltd 四フッ化珪素の精製方法
JP4034091B2 (ja) * 2002-03-12 2008-01-16 三井化学株式会社 ＳｉＦ４の精製方法および高純度ＳｉＦ４ガス
DE10241529A1 (de) * 2002-09-05 2004-03-11 Basf Ag Adsorptionsmasse und Verfahren zur Entfernung von Kohlenmonoxid aus Stoffströmen
US6884752B2 (en) * 2002-12-31 2005-04-26 Prizmalite Industries, Inc. Photocatalytically-active, self-cleaning aqueous coating compositions and methods
JP3941059B2 (ja) * 2003-07-01 2007-07-04 Ｓｍｃ株式会社 ロケートクランプ装置
TW200512159A (en) * 2003-09-25 2005-04-01 Showa Denko Kk Method for producing tetrafluorosilane
FR2863910B1 (fr) * 2003-12-23 2006-01-27 Inst Francais Du Petrole Procede de capture du dioxyde de carbone contenu dans des fumees
JP2006021935A (ja) * 2004-07-06 2006-01-26 Kobe Steel Ltd 高純度処理ガスの生成方法
BRPI0607613A2 (pt) * 2005-02-28 2009-09-22 Catalytic Solutions Inc catalisador e método para reduzir óxidos de nitrogênio em fluxos de exaustão com hidrocarbonetos ou álcoois

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US4044100A (en) 1969-12-08 1977-08-23 Allied Chemical Corporation Separation of acidic gas constituents from gaseous mixtures containing the same
US20030183503A1 (en) 1996-08-20 2003-10-02 Ebara Corporation Method and apparatus for purifying a gas containing contaminants
US20060133986A1 (en) 2001-07-16 2006-06-22 Leisl Dukhedin-Lalla Process and apparatus for removing Bronsted acid impurities in binary halides

Also Published As

Publication number Publication date
JP2011504156A (ja) 2011-02-03
MY156877A (en) 2016-04-15
EP2190780A2 (en) 2010-06-02
TW200922873A (en) 2009-06-01
WO2009042415A2 (en) 2009-04-02
WO2009042415A3 (en) 2010-10-07
US7943108B2 (en) 2011-05-17
TWI449666B (zh) 2014-08-21
CN101918311B (zh) 2014-12-03
KR20100080902A (ko) 2010-07-13
CN101918311A (zh) 2010-12-15
CN102862990A (zh) 2013-01-09
US20100009843A1 (en) 2010-01-14
EP2190780B1 (en) 2015-02-25
SG174814A1 (en) 2011-10-28
JP5654872B2 (ja) 2015-01-14
US20100009844A1 (en) 2010-01-14
US20090092534A1 (en) 2009-04-09

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