CN101918311B - 用于纯化四氟化硅的方法 - Google Patents
用于纯化四氟化硅的方法 Download PDFInfo
- Publication number
- CN101918311B CN101918311B CN200880108027.5A CN200880108027A CN101918311B CN 101918311 B CN101918311 B CN 101918311B CN 200880108027 A CN200880108027 A CN 200880108027A CN 101918311 B CN101918311 B CN 101918311B
- Authority
- CN
- China
- Prior art keywords
- tetrafluoride
- catalyzer
- source gas
- silicon
- silicon source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
- B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
- B01J23/889—Manganese, technetium or rhenium
- B01J23/8892—Manganese
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/90—Regeneration or reactivation
- B01J23/94—Regeneration or reactivation of catalysts comprising metals, oxides or hydroxides of the iron group metals or copper
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
- C01B33/10784—Purification by adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/066—Zirconium or hafnium; Oxides or hydroxides thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/40—Capture or disposal of greenhouse gases of CO2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/584—Recycling of catalysts
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Toxicology (AREA)
- Inorganic Chemistry (AREA)
- Catalysts (AREA)
- Silicon Compounds (AREA)
Abstract
Description
线速度(cm/sec) | 时间(min) | 催化剂再生之前或 之后 | 具有氧化锆载体的出口CO 浓度(ppm) |
15 | 5 | 之前 | 1.75 |
15 | 30 | 之前 | 1.41 |
15 | 60 | 之前 | 2.75 |
25 | 5 | 之前 | 8.20 |
25 | 30 | 之前 | 9.17 |
25 | 60 | 之前 | 11.20 |
15 | 5 | 之后 | 4.87 |
15 | 30 | 之后 | 8.55 |
15 | 60 | 之后 | 9.23 |
25 | 5 | 之后 | 10.90 |
25 | 30 | 之后 | 11.23 |
25 | 60 | 之后 | 12.34 |
线速度(cm/sec) | 催化剂再生之 前或之后 | 具有氧化锆载体的出 口CO浓度(ppm) | 具有水合硅酸铝载体的出 口CO浓度(ppm) |
10 | 之前 | 0.40 | 2.1 |
25 | 之前 | 0.45 | 2.0 |
10 | 之后 | 0.47 | 17.8 |
25 | 之后 | 0.44 | 9.1 |
Claims (25)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US97418207P | 2007-09-21 | 2007-09-21 | |
US60/974,182 | 2007-09-21 | ||
PCT/US2008/076027 WO2009042415A2 (en) | 2007-09-21 | 2008-09-11 | Processes for purification of silicon tetrafluoride |
US12/208,464 US7943108B2 (en) | 2007-09-21 | 2008-09-11 | Processes for purification of silicon tetrafluoride |
US12/208,464 | 2008-09-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012103808393A Division CN102862990A (zh) | 2007-09-21 | 2008-09-11 | 用于纯化四氟化硅的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101918311A CN101918311A (zh) | 2010-12-15 |
CN101918311B true CN101918311B (zh) | 2014-12-03 |
Family
ID=40394334
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200880108027.5A Expired - Fee Related CN101918311B (zh) | 2007-09-21 | 2008-09-11 | 用于纯化四氟化硅的方法 |
CN2012103808393A Pending CN102862990A (zh) | 2007-09-21 | 2008-09-11 | 用于纯化四氟化硅的方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012103808393A Pending CN102862990A (zh) | 2007-09-21 | 2008-09-11 | 用于纯化四氟化硅的方法 |
Country Status (9)
Country | Link |
---|---|
US (3) | US7943108B2 (zh) |
EP (1) | EP2190780B1 (zh) |
JP (1) | JP5654872B2 (zh) |
KR (1) | KR101378184B1 (zh) |
CN (2) | CN101918311B (zh) |
MY (1) | MY156877A (zh) |
SG (1) | SG174814A1 (zh) |
TW (1) | TWI449666B (zh) |
WO (1) | WO2009042415A2 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012033644A1 (en) * | 2010-09-08 | 2012-03-15 | Dow Corning Corporation | Method for preparing a trihalosilane |
KR101452354B1 (ko) * | 2014-01-24 | 2014-10-22 | 한화케미칼 주식회사 | 폐가스의 정제방법 및 정제장치 |
MY195545A (en) * | 2014-01-24 | 2023-01-31 | Hanwha Chemical Corp | Purification Method And Purification Apparatus For Off-Gas |
KR101515117B1 (ko) * | 2014-01-24 | 2015-04-24 | 한화케미칼 주식회사 | 폐가스의 정제방법 및 정제장치 |
CN104528735B (zh) * | 2015-01-14 | 2017-03-08 | 成都瑞芬思生物科技有限公司 | 一种提纯塔产出物的吸附提纯装置 |
CN109205669A (zh) * | 2018-11-19 | 2019-01-15 | 新特能源股份有限公司 | 四氯化锆及四氟化硅的联合制备方法 |
DE102019211379A1 (de) * | 2019-07-30 | 2021-02-04 | Studiengesellschaft Kohle Mbh | Verfahren zur Entfernung von Kohlenmonoxid und/oder gasförmigen Schwefelverbindungen aus Wasserstoffgas und/oder aliphatischen Kohlenwasserstoffen |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3984519A (en) * | 1969-01-21 | 1976-10-05 | Snam Progetti, S.P.A. | Process to transport carbon from a zone to another one, by means of a carrier fluid acting inside a closed system, particularly for the reprocessing of nuclear fuel elements having a graphite structure |
US4044100A (en) * | 1969-12-08 | 1977-08-23 | Allied Chemical Corporation | Separation of acidic gas constituents from gaseous mixtures containing the same |
JPS59162122A (ja) * | 1983-03-08 | 1984-09-13 | Mitsui Toatsu Chem Inc | 四弗化ケイ素の精製法 |
US4666944A (en) * | 1984-09-21 | 1987-05-19 | The Standard Oil Company | Copper-zirconium-manganese-containing catalysts and processes for making alcohol mixtures using same |
US4791079A (en) * | 1986-06-09 | 1988-12-13 | Arco Chemical Company | Ceramic membrane for hydrocarbon conversion |
IT1196983B (it) | 1986-07-23 | 1988-11-25 | Enichem Agricoltura Spa | Procedimento per la produzione di tetrafluoruro di silicio |
US4714604A (en) * | 1986-08-13 | 1987-12-22 | The Dow Chemical Company | Method of separating HF and SiF4 from HCl |
JPS6451314A (en) * | 1987-08-21 | 1989-02-27 | Mitsui Toatsu Chemicals | Method for purifying silicon tetrafluoride |
JPS6452604A (en) * | 1987-08-24 | 1989-02-28 | Mitsui Toatsu Chemicals | Method for purifying silicon tetrafluoride gas |
DE69128739T2 (de) * | 1990-04-20 | 1998-08-06 | Air Liquide | Verfahren und Einrichtung zur Herstellung von ultrareinem Stickstoff |
JPH05253475A (ja) * | 1992-03-12 | 1993-10-05 | Japan Energy Corp | 脱臭剤 |
US5833738A (en) * | 1996-03-01 | 1998-11-10 | D.D.I. Ltd. | Specialty gas purification system |
US6620385B2 (en) | 1996-08-20 | 2003-09-16 | Ebara Corporation | Method and apparatus for purifying a gas containing contaminants |
JP4263268B2 (ja) * | 1997-10-17 | 2009-05-13 | 日揮ユニバーサル株式会社 | アルミニウム製担体に触媒層を固定化する方法 |
JP2002542015A (ja) * | 1999-04-19 | 2002-12-10 | エンゲルハード・コーポレーシヨン | セリアと白金族金属を含んで成る触媒組成物 |
JP2001259426A (ja) * | 2000-03-21 | 2001-09-25 | Toyota Motor Corp | 炭化水素系燃料の改質触媒およびその製造方法並びにモノリス触媒 |
US6511640B1 (en) * | 2000-06-29 | 2003-01-28 | The Boc Group, Inc. | Purification of gases |
JP4432230B2 (ja) * | 2000-07-27 | 2010-03-17 | 日本ゼオン株式会社 | フッ素化炭化水素の精製方法、溶剤、潤滑性重合体含有液および潤滑性重合体膜を有する物品 |
US7666379B2 (en) | 2001-07-16 | 2010-02-23 | Voltaix, Inc. | Process and apparatus for removing Bronsted acid impurities in binary halides |
JP2003089512A (ja) * | 2001-09-11 | 2003-03-28 | Central Glass Co Ltd | 四フッ化珪素の精製方法 |
JP4034091B2 (ja) * | 2002-03-12 | 2008-01-16 | 三井化学株式会社 | SiF4の精製方法および高純度SiF4ガス |
DE10241529A1 (de) * | 2002-09-05 | 2004-03-11 | Basf Ag | Adsorptionsmasse und Verfahren zur Entfernung von Kohlenmonoxid aus Stoffströmen |
US6884752B2 (en) | 2002-12-31 | 2005-04-26 | Prizmalite Industries, Inc. | Photocatalytically-active, self-cleaning aqueous coating compositions and methods |
JP3941059B2 (ja) * | 2003-07-01 | 2007-07-04 | Smc株式会社 | ロケートクランプ装置 |
TW200512159A (en) | 2003-09-25 | 2005-04-01 | Showa Denko Kk | Method for producing tetrafluorosilane |
FR2863910B1 (fr) * | 2003-12-23 | 2006-01-27 | Inst Francais Du Petrole | Procede de capture du dioxyde de carbone contenu dans des fumees |
JP2006021935A (ja) * | 2004-07-06 | 2006-01-26 | Kobe Steel Ltd | 高純度処理ガスの生成方法 |
MX2007010465A (es) * | 2005-02-28 | 2008-01-14 | Catalytic Solutions Inc | Catalizadores y metodo para reducir oxidos de nitrogeno en corrientes de escape de hidrocarburos o alcoholes. |
-
2008
- 2008-09-11 EP EP08833015.4A patent/EP2190780B1/en not_active Not-in-force
- 2008-09-11 KR KR1020107007571A patent/KR101378184B1/ko active IP Right Grant
- 2008-09-11 CN CN200880108027.5A patent/CN101918311B/zh not_active Expired - Fee Related
- 2008-09-11 MY MYPI2010000902A patent/MY156877A/en unknown
- 2008-09-11 JP JP2010525895A patent/JP5654872B2/ja not_active Expired - Fee Related
- 2008-09-11 WO PCT/US2008/076027 patent/WO2009042415A2/en active Application Filing
- 2008-09-11 CN CN2012103808393A patent/CN102862990A/zh active Pending
- 2008-09-11 US US12/208,464 patent/US7943108B2/en not_active Expired - Fee Related
- 2008-09-11 SG SG2011066321A patent/SG174814A1/en unknown
- 2008-09-19 TW TW097136194A patent/TWI449666B/zh not_active IP Right Cessation
-
2009
- 2009-09-21 US US12/563,565 patent/US20100009843A1/en not_active Abandoned
- 2009-09-21 US US12/563,572 patent/US20100009844A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2009042415A2 (en) | 2009-04-02 |
WO2009042415A3 (en) | 2010-10-07 |
EP2190780A2 (en) | 2010-06-02 |
US20100009844A1 (en) | 2010-01-14 |
US7943108B2 (en) | 2011-05-17 |
CN101918311A (zh) | 2010-12-15 |
TW200922873A (en) | 2009-06-01 |
US20100009843A1 (en) | 2010-01-14 |
JP2011504156A (ja) | 2011-02-03 |
KR20100080902A (ko) | 2010-07-13 |
CN102862990A (zh) | 2013-01-09 |
MY156877A (en) | 2016-04-15 |
TWI449666B (zh) | 2014-08-21 |
SG174814A1 (en) | 2011-10-28 |
US20090092534A1 (en) | 2009-04-09 |
KR101378184B1 (ko) | 2014-03-24 |
JP5654872B2 (ja) | 2015-01-14 |
EP2190780B1 (en) | 2015-02-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101918311B (zh) | 用于纯化四氟化硅的方法 | |
EP3388145A1 (en) | Ammonia removal material, ammonia removal method, and method for manufacturing hydrogen gas for fuel cell automobile | |
Niu et al. | NF3 decomposition over some metal oxides in the absence of water | |
TW200808440A (en) | Absorption composition and process for purifying streams of substances | |
EP2689844A1 (en) | Catalysts for purification of silicon tetrafluoride | |
KR20010061933A (ko) | 유해가스 정화제 및 정화방법 | |
JP2700412B2 (ja) | 水素化物ガスの精製方法 | |
JP2633511B2 (ja) | 排ガスの浄化方法 | |
JP2700413B2 (ja) | 水素化物ガスの精製方法 | |
JPS62286521A (ja) | 排ガスの浄化方法 | |
JPS62286520A (ja) | 排ガスの浄化方法 | |
WO2023228889A1 (ja) | 塩素ガス分解用触媒および排出ガス処理装置 | |
JPS62286522A (ja) | 排ガスの浄化方法 | |
US20230126756A1 (en) | Boron oxide-containing adsorbent and related methods and devices | |
JP2837201B2 (ja) | 酸性ガスの精製方法 | |
JPS62286525A (ja) | 排ガスの浄化方法 | |
JPS62286523A (ja) | 排ガスの浄化方法 | |
KR20240076841A (ko) | 산화붕소-함유 흡착제 및 관련 방법 및 디바이스 | |
JPS62286524A (ja) | 排ガスの浄化方法 | |
KR100788301B1 (ko) | 제올라이트 3에이를 이용한 삼불화질소 가스의 정제방법 | |
JPH11197509A (ja) | 排ガス処理剤 | |
JPH07284631A (ja) | 有害ガスの浄化剤 | |
JP2001190965A (ja) | 有害ガスの浄化剤及び浄化方法 | |
KR20040060302A (ko) | 복합성분을 흡착제로 사용한 삼불화질소의 정제 방법 | |
JPH02188408A (ja) | 水素化物ガスの精製方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: American Missouri Patentee after: SUNEDISON, Inc. Address before: American Missouri Patentee before: MEMC Electronic Materials, Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20181213 Address after: 17th Floor, Global Trade Plaza, 1 West Austin Road, Kowloon, China Patentee after: SUNEDISON, Inc. Address before: American Missouri Patentee before: SUNEDISON, Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 Termination date: 20190911 |