JPS6451314A - Method for purifying silicon tetrafluoride - Google Patents
Method for purifying silicon tetrafluorideInfo
- Publication number
- JPS6451314A JPS6451314A JP20655187A JP20655187A JPS6451314A JP S6451314 A JPS6451314 A JP S6451314A JP 20655187 A JP20655187 A JP 20655187A JP 20655187 A JP20655187 A JP 20655187A JP S6451314 A JPS6451314 A JP S6451314A
- Authority
- JP
- Japan
- Prior art keywords
- gaseous
- sif4
- crude
- molecular sieve
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Silicon Compounds (AREA)
Abstract
PURPOSE:To simply and easily obtain high purity gaseous SiF4 by purification, by bringing crude gaseous SiF4 into contact with a modified molecular sieve having hydrophobic property to adsorb and remove gaseous impurities such as CO2, H2S and SO2 in the crude gaseous SiF4. CONSTITUTION:Crude gaseous SiF4 contg. polar gaseous impurities such as CO2, H2S and SO2 is passed through a column packed with a modified molecular sieve having hydrophobic property by surface fluorination with a fluorine-contg. gas. The gaseous impurities in the gaseous SiF4 are adsorbed on the molecular sieve and removed. Thus, the crude gaseous SiF4 is very simply purified and gaseous SiF4 having very high purity is obtd. in a high yield.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20655187A JPS6451314A (en) | 1987-08-21 | 1987-08-21 | Method for purifying silicon tetrafluoride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20655187A JPS6451314A (en) | 1987-08-21 | 1987-08-21 | Method for purifying silicon tetrafluoride |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6451314A true JPS6451314A (en) | 1989-02-27 |
Family
ID=16525261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20655187A Pending JPS6451314A (en) | 1987-08-21 | 1987-08-21 | Method for purifying silicon tetrafluoride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6451314A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438129A (en) * | 1993-09-27 | 1995-08-01 | Becton Dickinson And Company | DNA purification by solid phase extraction using partially fluorinated aluminum hydroxide adsorbant |
US6579347B1 (en) * | 1998-04-28 | 2003-06-17 | Matsushita Electric Industrial Co., Ltd. | Method for removing sulfur compound present in city gas |
US7666379B2 (en) | 2001-07-16 | 2010-02-23 | Voltaix, Inc. | Process and apparatus for removing Bronsted acid impurities in binary halides |
JP2011504156A (en) * | 2007-09-21 | 2011-02-03 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | Method for purifying silicon tetrafluoride |
-
1987
- 1987-08-21 JP JP20655187A patent/JPS6451314A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438129A (en) * | 1993-09-27 | 1995-08-01 | Becton Dickinson And Company | DNA purification by solid phase extraction using partially fluorinated aluminum hydroxide adsorbant |
US5625054A (en) * | 1993-09-27 | 1997-04-29 | Becton Dickinson And Company | DNA purification by solid phase extraction using fluorinated celite |
US6579347B1 (en) * | 1998-04-28 | 2003-06-17 | Matsushita Electric Industrial Co., Ltd. | Method for removing sulfur compound present in city gas |
US7666379B2 (en) | 2001-07-16 | 2010-02-23 | Voltaix, Inc. | Process and apparatus for removing Bronsted acid impurities in binary halides |
JP2011504156A (en) * | 2007-09-21 | 2011-02-03 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | Method for purifying silicon tetrafluoride |
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