JPS6451314A - Method for purifying silicon tetrafluoride - Google Patents

Method for purifying silicon tetrafluoride

Info

Publication number
JPS6451314A
JPS6451314A JP20655187A JP20655187A JPS6451314A JP S6451314 A JPS6451314 A JP S6451314A JP 20655187 A JP20655187 A JP 20655187A JP 20655187 A JP20655187 A JP 20655187A JP S6451314 A JPS6451314 A JP S6451314A
Authority
JP
Japan
Prior art keywords
gaseous
sif4
crude
molecular sieve
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20655187A
Other languages
Japanese (ja)
Inventor
Hiroyuki Momotake
Isao Harada
Nobuhiko Koto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP20655187A priority Critical patent/JPS6451314A/en
Publication of JPS6451314A publication Critical patent/JPS6451314A/en
Pending legal-status Critical Current

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  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Silicon Compounds (AREA)

Abstract

PURPOSE:To simply and easily obtain high purity gaseous SiF4 by purification, by bringing crude gaseous SiF4 into contact with a modified molecular sieve having hydrophobic property to adsorb and remove gaseous impurities such as CO2, H2S and SO2 in the crude gaseous SiF4. CONSTITUTION:Crude gaseous SiF4 contg. polar gaseous impurities such as CO2, H2S and SO2 is passed through a column packed with a modified molecular sieve having hydrophobic property by surface fluorination with a fluorine-contg. gas. The gaseous impurities in the gaseous SiF4 are adsorbed on the molecular sieve and removed. Thus, the crude gaseous SiF4 is very simply purified and gaseous SiF4 having very high purity is obtd. in a high yield.
JP20655187A 1987-08-21 1987-08-21 Method for purifying silicon tetrafluoride Pending JPS6451314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20655187A JPS6451314A (en) 1987-08-21 1987-08-21 Method for purifying silicon tetrafluoride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20655187A JPS6451314A (en) 1987-08-21 1987-08-21 Method for purifying silicon tetrafluoride

Publications (1)

Publication Number Publication Date
JPS6451314A true JPS6451314A (en) 1989-02-27

Family

ID=16525261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20655187A Pending JPS6451314A (en) 1987-08-21 1987-08-21 Method for purifying silicon tetrafluoride

Country Status (1)

Country Link
JP (1) JPS6451314A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438129A (en) * 1993-09-27 1995-08-01 Becton Dickinson And Company DNA purification by solid phase extraction using partially fluorinated aluminum hydroxide adsorbant
US6579347B1 (en) * 1998-04-28 2003-06-17 Matsushita Electric Industrial Co., Ltd. Method for removing sulfur compound present in city gas
US7666379B2 (en) 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides
JP2011504156A (en) * 2007-09-21 2011-02-03 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Method for purifying silicon tetrafluoride

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438129A (en) * 1993-09-27 1995-08-01 Becton Dickinson And Company DNA purification by solid phase extraction using partially fluorinated aluminum hydroxide adsorbant
US5625054A (en) * 1993-09-27 1997-04-29 Becton Dickinson And Company DNA purification by solid phase extraction using fluorinated celite
US6579347B1 (en) * 1998-04-28 2003-06-17 Matsushita Electric Industrial Co., Ltd. Method for removing sulfur compound present in city gas
US7666379B2 (en) 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides
JP2011504156A (en) * 2007-09-21 2011-02-03 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Method for purifying silicon tetrafluoride

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