CN101896992A - 放电灯 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Abstract
本发明的目的在于,提供一种在放电空间内不具有电极的介质阻挡放电灯或电容耦合型高频放电灯,在施加高电压时也不产生沿面放电。在石英制放电容器(1)的管壁内部,将带状的箔电极(3)埋入放电容器(1)中。放电容器(1)在石英制放电容器(1)的轴的两侧相对地配置箔电极(3)。可以配置成为使箔电极(3)的截面形状构成ハ状。在单管型的石英制放电容器(1)内,封入通过介质阻挡放电或电容耦合型高频放电而形成受激准分子的放电气体。
Description
技术领域
本发明主要涉及产业用灯,涉及介质阻挡放电灯(dielectric-barrierdischarge lamp)、电容耦合型高频放电灯。例如,涉及作为紫外线光源的受激准分子灯、低压水银灯等。
背景技术
例如,作为上述产业用紫外线光源的一种,有具备172nm发光波长的氙受激准分子灯,其经常在清洗基板等时使用。受激准分子灯经常采用双重管构造的灯。这些灯的发光部都呈轴向较长的管状。关于这种灯有专利文献1等,例如,封入了氙气的受激准分子灯经常在液晶面板用基板的干洗等时使用。在这种情况下,被照射对象物的基板以固定速度在传送带上移动,灯被设置在基板的稍微上方与传送带的流动方向正交的方向。对被照射对象物的宽度整体进行一次照射,同时使基板以固定速度移动,所以能够沿着整个基板进行均匀的处理。另一方面,例如在半导体工艺的领域中,往往在其各个工序中使用紫外光进行半导体晶片表面的加工、改性等。因此,往往采用来自氙受激准分子的发光即172nm、来自氪和氯的受激准分子的发光即222nm、水银共振线即254nm等紫外光。并且,也考虑了非双重管构造的、在单管的放电容器的两侧面配置电极的荧光灯。基于防止使用时的沿面放电、提高安全性的目的,该灯具有利用玻璃灯壳或陶瓷等耐热性部件形成的被覆层。下面,列举几个与此相关联的现有技术的示例。
专利文献1公开的双重管方式的“介质阻挡放电灯”,在内侧管的内侧面形成一个电极,在外侧管的外侧面形成另一个电极。当向这两个电极之间施加数千伏的高频电压时,在内侧管和外侧管之间的放电空间产生介质阻挡放电。由于向电极之间施加数千伏的高电压,所以在两个电极之间有可能沿着放电容器表面产生沿面放电。通过使放电容器的两端到电极端部的距离足够长、或者在放电容器端附加绝缘性物质,能够阻止沿面放电。在现有的受激准分子灯中,一般经常采用如上所述的双重管构造的管状灯。
专利文献2公开的“稀有气体放电灯”进行外壁电极的绝缘保护,防止沿面放电和触电事故。如图5(b)所示,在对内壁涂敷了荧光体膜的管状玻璃灯壳中,封入以氙气为主成分的稀有气体。在玻璃灯壳的外壁上沿着玻璃灯壳的大致整体长度配置一对带状电极。在包括带状电极的玻璃灯壳上涂敷硅酮树脂等绝缘性被膜。另外,在该绝缘性被膜上套装热收缩性绝缘管。
专利文献3公开的“稀有气体放电灯”对外壁电极进行绝缘保护,防止沿面放电。如图5(c)所示,在对内壁涂敷了荧光体膜的管状玻璃灯壳中,封入以氙气气体为主成分的稀有气体。在玻璃灯壳的外壁上配置一对带状电极。在玻璃灯壳的表面上形成透明的硅酮树脂的绝缘被膜。再在其上套装聚酯的热收缩性树脂管。这样,将带状电极双重绝缘进行保护。
专利文献4公开的“荧光灯”用于提高针对施加给外部电极的高电压的安全性。如图5(d)所示,在由玻璃灯壳构成的外围器具的内表面上被覆有发光层,以形成孔部。在该外围器具的外表面上,沿着轴向固定有彼此相对的由铝带构成的外部电极。在该外部电极的端部连接着与外部电路连接用的导线。在外围器具的外表面上形成有由玻璃灯壳构成的被覆层,用于被覆外部电极的主要部分。
专利文献5公开的“荧光放电管”利用绝缘被膜防止外部放电,利用辅助灯壳提高机械强度。如图5(e)所示,在向内部封入了稀有气体的玻璃灯壳的筒体外表面上,沿着轴向呈带状设置彼此相对的一对外部电极。利用绝缘被膜覆盖筒体的整个外表面。在玻璃灯壳上外装辅助灯壳,利用辅助灯壳覆盖绝缘被膜,而保护绝缘被膜。在将该荧光放电管设置在传真机等设备内部时,飞散的碳粉等不会附着在绝缘被膜上,能够防止外部放电。
专利文献6公开的“荧光灯”用于防止玻璃灯壳表面上的外部电极之间的绝缘电阻由于潮气的附着而降低。如图5(f)所示,在管状的玻璃灯壳的内表面形成荧光被膜。沿着灯壳的管轴方向,在灯壳外表面形成具有透光性的一对外部电极。在灯壳内部封入放电媒介。为了防止容易附着潮气的玻璃灯壳的绝缘下降,并防止两个外部电极之间的短路,在玻璃灯壳外表面的一对外部电极之间形成由硅酮树脂等构成的电气绝缘层。电气绝缘层不仅形成于外部电极之间,也可以沿着灯壳的全周形成。如果沿着全周形成,电极之间被绝缘,同时对于导线与电极连接的结构,能够实现牢靠的接合。在沿着灯壳全周的情况下,也可以套装聚乙烯等热收缩性管。
专利文献1:日本专利公报第3170952号
专利文献2:日本特开平04-087249号公报
专利文献3:日本特开平04-112449号公报
专利文献4:日本实开平05-090803号公报
专利文献5:日本特开平07-272691号公报
专利文献6:日本特开平09-092227号公报
但是,为了进行受激准分子发光,必须提高封入压力,尤其要提高施加电压,可知类似单纯利用绝缘性物质被覆的对策的可靠性很低。这是因为,例如,即使利用玻璃构成被覆层并实施过热、紧密接合,也有可能通过放电容器与被覆层之间的极小间隙而产生绝缘破坏。
在电极采用铝箔等的情况下,由于铝箔的熔点低,所以即使进行加热,温度也不能充分升高,因此很难根据电极形状实现无间隙被覆。并且,在放电容器与被覆层之间的热膨胀系数不同时,由于灯的点亮和熄灭而形成的受热经历,而产生应力,在界面处渐渐产生极小的间隙,可能导致绝缘破坏。在通过玻璃材料的喷镀等来进行被覆的情况下,有可能形成气泡和/或间隙,通过该气泡和/或间隙造成绝缘破坏。由于上述情况,在现有的采用单管的放电容器的灯中,不能施加足够高的电压,只能实现辐射输出较低的灯。
发明内容
本发明的目的在于,提供一种外部电极型放电灯,即使在为了获得高的辐射输出而施加足够高的电压时,也不会产生沿面放电,而且可靠性高。
为了解决上述问题,本发明提供一种放电灯的放电容器,该放电灯具有:被封入了放电气体的石英制的管状放电容器,该放电气体通过介质阻挡放电或电容耦合型高频放电而形成受激准分子;以及箔电极,其在放电容器两侧的管壁内部平行于轴向并相对地埋设在放电容器中,箔电极沿着放电容器的圆筒状侧面对称埋设,或者沿着放电容器的圆筒状侧面埋设而使其构成ハ状截面,或者箔电极为平行平板状并对称埋设,或者箔电极为平板状并埋设为构成ハ状截面。
另外,本发明提供一种放电灯的放电容器,该放电灯具有:在放电容器的管壁内部沿轴向埋设在放电容器中的箔电极;和在放电容器的外侧圆筒面上沿轴向设置的外部电极,箔电极沿着放电容器的圆筒状侧面埋设、或者呈平板状。在放电容器的外部设置金属板或多层电介质膜的光反射部件。
另外,设置在放电容器的管壁内部沿轴向埋设在放电容器中的箔电极、和在放电容器的管壁内部沿轴向埋设在放电容器中的网状电极、或者在放电容器的外侧圆筒面上沿轴向设置的网状电极。箔电极沿着放电容器的圆筒状侧面埋设、或者呈平板状。箔电极是以钼和钽和钨中的任一种为主成分的箔。
另外,各个电极各自的供电线被配置在轴向的彼此相反的一侧。放电气体是稀有气体或者稀有气体与卤素气体的混合气体。在放电容器的轴向的一个端部设置光取出口。
通过形成如上所述的结构,能够可靠地防止沿面放电,所以能够实现可靠性高的灯。并且,能够使施加电压足够高,所以能够实现辐射输出较高的灯。并且,也能够构成为单管,所以能够实现小型、细且价廉的灯。
附图说明
图1是本发明的实施例1的放电灯的概念图。
图2是本发明的实施例2的放电灯的概念图。
图3是本发明的实施例3的放电灯的概念图。
图4是本发明的实施例4的放电灯的概念图。
图5是现有的放电灯的概念图。
标号说明
1石英制放电容器;2放电空间;3箔电极;4反射部件;5网状电极;6出射窗;7外部电极。
具体实施方式
下面,参照图1~图4具体说明用于实施本发明的最佳方式。
实施例1
本发明的实施例1是在放电容器两侧的管壁内部,将箔电极平行于轴向并相对地埋设在放电容器中的放电灯。
图1是本发明的实施例1的放电灯的概念图。图1(a)是放电灯的轴向剖面图。图1(b)是放电灯的径向剖面图。图1(c)是具有反射部件的放电灯的径向剖面图。图1(d)是具有ハ状截面的电极的放电灯的径向剖面图。图1(e)是具有轴向的光取出口的放电灯的径向剖面图。图1(f)、(g)是表示放电灯的制造方法的径向剖面图。
在图1中,石英制放电容器1是石英制的单管,也可以简称为放电容器。石英制放电容器1也可以是椭圆形或四边形、六边形等多边形等。放电容器不必一定是石英制成。虽然作为代表是石英制的管状放电容器,但是当然也包括相同特性的其它材质的放电容器。在封入氙气与氯气的混合气体而辐射308nm的光的介质阻挡放电灯中,能够使用硬质玻璃制容器作为放电容器。为了放电容器的玻璃脆化保护和防止玻璃与封入气体发生反应,适当在放电容器的表面形成氧化铝膜、二氧化钛膜、氧化镁膜等保护膜。在封入气体中包含卤素气体的情况下,形成氟化镁膜等。
放电空间2是放电容器内部的放电空间。放电空间内没有电极。在放电空间中封入了氙气、氪气与氯气的混合气体。封入到放电空间中的气体是产生受激准分子光的气体,或者是产生水银的特性紫外线即波长254nm和/或185nm的紫外线的气体。通过选择其他合适的封入物,能够获得与其对应的波长的光。作为其代表,有形成受激准分子的放电气体,但也包括同样发光的其他放电气体。
箔电极3是带状的箔电极,被埋入在放电容器1的壁的内部,并与轴对称地使上方和下方相对。箔电极3利用钼箔形成。钼箔的一个端部被取出到放电容器1的外部,另一个端部被完全埋入到放电容器壁的内部并终结。为了实现箔电极3与外部的电连接,使端部一直延伸到外部,但取出部位是分别相反的一侧。也可以将钼棒等电连接并取出到外部。箔电极3也可以是除钼箔之外的同样材质的箔电极。反射部件4是使光反射的部件。根据放电灯的使用目的,也可以没有反射部件4。出射窗6是沿轴向取出光的窗口。
说明如上所述构成的本发明的实施例1的放电灯的功能和动作。首先,参照图1(a)、(b)简要说明放电灯的功能。在石英制的管状的放电容器1的两侧的管壁内部,将箔电极3埋设在放电容器1中,并使其与轴向平行并相对。箔电极3沿着放电容器1的圆筒状侧面对称地埋设。箔电极3是以钼或钽或钨为主成分的箔。各个箔电极3各自的供电线被配置在轴向的彼此相反的一侧。把通过介质阻挡放电或电容耦合型高频放电而形成受激准分子的放电气体封入到放电容器1中。放电气体是稀有气体或者稀有气体与卤素气体的混合气体。
在向箔电极3之间施加高频电压时,产生介质阻挡放电。能够从箔电极3之间取出此时产生的氙的受激准分子光(波长172nm)。在放电气体是氪气和氯气时,能够取出波长222nm的受激准分子光。并且,在把封入物设为水银和起动用氩气时,进行低压水银的高频放电,也能够获得波长254nm和/或185nm的水银特有的紫外光。此时,为了使亮灯时的水银蒸汽压力保持最佳,进行控制将最冷部位冷却为合适温度。使用多个这种放电灯,能够照射比较大的范围。
下面,参照图1(c)说明设置有光反射部件的放电灯。在放电容器1的上方的外表面设置反射部件7。反射部件7利用氧化硅和氧化钛的多层膜构成,并通过蒸镀而形成。也可以只是金属板。在图1(b)所示的结构中,光的取出方向是与相对的箔电极3正交的方向。将在其中一方(上方)射出的光通过反射部件7取出到相反方向,提高下方的辐射照度。
下面,参照图1(d)说明具有ハ状截面的箔电极的放电灯。沿着放电容器1的圆筒状侧面埋设箔电极3,并使其成为ハ状截面。箔电极3的位置处于放电容器1的中心轴上方。因此,箔电极3的间隔上侧窄下侧宽。放电发生区域在相对电极之间,所以相比于中心靠近上方产生放电。由于箔电极3靠近上方,所以光被箔电极3自身遮挡的情况少,通过放电而产生的光被高效地取出到下方,能够获得较强的辐射输出。
下面,参照图1(e)说明沿轴向取出光的放电灯。在放电容器1的轴向的一个端部设置光取出口。放电容器1的一个端部成为出射窗6,在箔电极3、3之间发出的光被沿轴向取出。因此,射出光与轴向较长的放电区域的发光叠加,能够获得较强的光。并且,能够不受箔电极3的遮光影响地取出光。
下面,参照图1(f)、(g)说明放电灯的制造方法。如图1(f)所示,为了制造放电容器1,准备直径不同的两根石英管。将细的石英管插入到粗的石英管中使二者叠在一起,在这两根石英管之间插入钼箔。使粗的石英管与细的石英管的间隙成为减压状态,并从外侧进行加热。粗的石英管变形,与细的石英管紧密接合。在继续加热时,除钼箔之外的部分完全熔敷。两根石英管成为一体,形成如图1(g)所示的放电容器1。钼箔呈被埋入到放电容器1的壁中的状态,能够防止放电空间2之外的沿面放电等。
如上所述,在本发明的实施例1中,在放电容器的两侧的管壁内部,将箔电极与轴向平行并相对地埋设在放电容器中,所以能够可靠地防止沿面放电,能够实现可靠性高的灯。并且,由于能够使施加电压足够高,所以能够实现为辐射输出较高的灯。并且,由于也能够构成为单管,所以能够实现小型、细且价廉的灯。
实施例2
本发明的实施例2是在放电容器的管壁内部将箔电极沿轴向埋设在放电容器中,在放电容器的外侧圆筒面上沿轴向设置外部电极的放电灯。
图2是本发明的实施例2的放电灯的概念图。图2(a)是放电灯的轴向剖面图。图2(b)是放电灯的径向剖面图。图2(c)是具有反射部件的放电灯的径向剖面图。图2(d)是具有ハ状截面的电极的放电灯的径向剖面图。图2(e)是具有轴向的光取出口的放电灯的径向剖面图。图2(f)、(g)是表示放电灯的制造方法的径向剖面图。在图2中,外部电极7是在放电容器的外侧圆筒面上沿轴向设置的电极。其他基本结构与实施例1相同。对与实施例1相同的部分省略说明。
说明如上所述构成的本发明的实施例2的放电灯的功能和动作。首先,参照图2(a)、(b)简要说明放电灯的功能。在石英制的管状放电容器1的管壁内部,将箔电极3埋设在放电容器1中。在放电容器的外侧圆筒面上沿轴向设置外部电极7。
下面,参照图2(c)~(e)说明放电灯的变形例。图2(c)是设置有光辐射部件的放电灯。在放电容器1上方的外表面设置反射部件7。图2(d)是具有ハ状截面的电极的放电灯。沿着放电容器1的圆筒状侧面埋设箔电极3并设置外部电极7,使二者构成ハ状截面。图2(e)是沿轴向取出光的放电灯。在放电容器1的轴向的一端部设置光取出口。
下面,参照图2(f)、(g)说明放电灯的制造方法。为了制造放电容器1,准备直径不同的两根石英管。如图2(f)所示,将细的石英管插入到粗的石英管中使二者叠在一起,在这两根石英管之间插入钼箔。使粗的石英管与细的石英管的间隙成为减压状态,并从外侧进行加热。粗的石英管变形,与细的石英管紧密接合。在继续加热时,除钼箔之外的部分完全熔敷。两根石英管成为一体,形成如图2(g)所示的放电容器1。钼箔呈被埋入到放电容器1的壁中的状态,能够防止放电空间2之外的沿面放电等。
如上所述,在本发明的实施例2中,在放电容器的管壁内部,将箔电极沿轴向且无间隙地埋设在放电容器中,形成在放电容器的外侧圆筒面上沿轴向设置外部电极的结构,所以能够可靠地防止沿面放电,能够实现可靠性高的灯。并且,由于能够使施加电压足够高,所以能够实现为辐射输出较高的灯。并且,由于也能够构成为单管,所以能够实现小型、细且价廉的灯。
实施例3
本发明的实施例3是在放电容器两侧的管壁内部,将平板状的箔电极与轴向平行地相对地埋设在放电容器中的放电灯。
图3是本发明的实施例3的放电灯的概念图。图3(a)是放电灯的轴向剖面图。图3(b)是放电灯的径向剖面图。图3(c)是具有反射部件的放电灯的径向剖面图。图3(d)是具有ハ状截面的电极和反射部件的放电灯的径向剖面图。图3(e)是具有轴向的光取出口的放电灯的径向剖面图。基本结构与实施例1相同,因此对与实施例1相同的部分省略说明。
说明如上所述构成的本发明的实施例3的放电灯的功能和动作。首先,参照图3(a)、(b)简要说明放电灯的功能。在石英制的管状放电容器1的管壁内部,将箔电极3埋设在放电容器1中。箔电极3为平行平板状,并对称埋设。金属箔至灯内表面的厚度b较薄。为了使厚度b较薄,可以按照下面所述进行制造。将直径不同的石英管重叠,在这些石英管之间插入箔进行制造时,预先将内侧的管的两侧面削平。通过削平,能够防止金属箔移动,能够将金属箔封接在放电容器的期望位置。并且,通过削平,内侧的管的强度变弱,由此使原来的管(金属箔之外的部分)的厚度a变厚比较好。通过形成使厚度b较薄的结构,施加到电极之间的外部电压中、施加到放电空间中的电压部分增大。因此,能够降低用于获得相同光输出而施加的外部施加电压。
下面,参照图3(c)说明设置有光辐射部件的放电灯。在放电容器1的上方的外表面设置反射部件7。反射部件7利用氧化硅和氧化钛的多层膜构成,并通过蒸镀而形成。也可以只是金属板。在图1(b)所示的结构中,光的取出方向是与相对的箔电极3正交的方向。将向其中一方(上方)射出的光通过反射部件7取出到相反方向,提高下方的辐射照度。
下面,参照图3(d)说明使用平板状的ハ状截面的箔电极的示例。将箔电极3埋设在放电容器1中,使其构成ハ状截面。箔电极3处于放电容器1的中心轴上方,所以箔电极3的间隔是上侧窄下侧宽。由于箔电极3靠近上方,所以光被箔电极3自身遮挡的情况少,通过放电而产生的光被高效地取出到下方,能够获得较强的辐射输出。可以根据需要设置反射部件4。
下面,参照图3(e)说明沿轴向取出光的放电灯。在放电容器1的轴向的一个端部设置光取出口。放电容器1的一个端部成为出射窗6,在箔电极3、3之间发出的光被沿轴向取出。因此,出射光与轴向较长的放电区域的发光叠加,能够获得较强的光。并且,能够不受箔电极3的遮光影响地取出光。
如上所述,在本发明的实施例3中,在放电容器两侧的管壁内部,将平板状的箔电极与轴向平行并相对地埋设在放电容器中,所以能够可靠地防止沿面放电,能够实现可靠性高的灯。并且,由于能够使施加电压足够高,所以能够实现辐射输出较高的灯。并且,由于也能够构成为单管,所以能够实现小型、细且价廉的灯。
实施例4
本发明的实施例4是在放电容器的管壁内部将箔电极沿轴向埋设在放电容器中,在放电容器的外侧圆筒面上沿轴向设置网状电极的放电灯。
图4是本发明的实施例4的放电灯的概念图。图4(a)是在放电容器外部具有网状电极的放电灯的径向剖面图。图4(b)是在放电容器内部具有平板状的箔电极和网状电极的放电灯的径向剖面图。图4(c)是在放电容器内部具有平板状箔电极,在放电容器外部具有网状电极的放电灯的径向剖面图。图4(d)是平面型灯的示例。在图4中,网状电极5是网状的电极。基本结构与实施例1相同,因此对与实施例1相同的部分省略说明。
说明如上所述构成的本发明的实施例4的放电灯的功能和动作。首先,参照图4(a)简要说明放电灯的功能。在石英制的管状放电容器1的管壁内部,从放电容器1将箔电极3埋设在放电容器1中。在该示例中,只有一个箔电极3被埋设在放电容器1的壁内。金属制的网状电极5是与箔电极3成对的电极。网状电极5也可以在放电容器1上直接将导电性物质印制成网状而形成。网状电极5通常是接地电极。箔电极3被施加高频的高电压。在使用两个箔电极3的结构中,由于箔电极3的遮光,发出的光的一部分未被取出到外部。在使用网状电极5的结构中,被遮光的光的比率大幅减小,所以照射光量增多,能够实现发光效率高的放电灯。
下面,参照图4(b)说明放电灯的变形例。在石英制的管状放电容器1的管壁内部,将平板型的箔电极3埋设在放电容器1中。在放电容器1的管壁内部,将网状电极5埋设在放电容器1中。施加到电极之间的外部电压中、施加到放电空间中的电压部分增大,所以能够降低为了获得相同的光输出而从外部施加给电极的电压。
下面,参照图4(c)说明放电灯的另一个变形例。在石英制的管状放电容器1的管壁内部,将平板型的箔电极3埋设在放电容器1中。将与箔电极3成对的金属制的网状电极5设在放电容器1的外侧。施加到电极之间的外部电压中、施加到放电空间中的电压部分增大,所以能够降低为了获得相同的光输出而从外部施加给电极的电压。图4(d)是平面型灯的示例。
如上所述,在本发明的实施例4中,在放电容器的管壁内部,将箔电极沿轴向埋设在放电容器中,在放电容器的外侧圆筒面上沿轴向设置网状电极,所以能够可靠地防止沿面放电,能够实现可靠性高的灯。并且,由于能够使施加电压足够高,所以能够实现辐射输出较高的灯。并且,由于也能够构成为单管,所以能够实现小型、细且价廉的灯。
产业上的可利用性
本发明的放电灯最适合于产业用的紫外线光源。
Claims (11)
1.一种放电灯,其特征在于,在放电容器内封入有放电气体,在所述放电容器的相对的两个侧面配置电极,至少一侧的电极被埋设在放电容器的管壁内部。
2.根据权利要求1所述的放电灯,其特征在于,在所述放电容器内,通过介质阻挡放电或电容耦合型高频放电而形成受激准分子。
3.根据权利要求1或2所述的放电灯,其特征在于,所述放电容器的一部分至少是石英。
4.根据权利要求1~3中任一项所述的放电灯,其特征在于,所述相对配置的电极中被设置于放电容器管壁内部的电极是钼、钽、钨中任一单体的箔或者是以它们中的一种为主成分的箔。
5.根据权利要求1~4中任一项所述的放电灯,其特征在于,在管状放电容器中,所述相对配置的埋设在放电容器管壁内部的两个电极沿轴向细长,用于供给电力的供电线被配置在相反方向。
6.根据权利要求1~5中任一项所述的放电灯,其特征在于,所述放电气体是稀有气体、或者稀有气体与卤素气体的混合气体。
7.根据权利要求1~6中任一项所述的放电灯,其特征在于,在从相对配置的电极之间的放电空间中取出光的、与连接电极的方向正交的两个光取出方向中的一个光取出部分,配置有光反射部件。
8.根据权利要求7所述的放电灯,其特征在于,所述光反射部件设置在放电容器的外部,所述光反射部件是在金属板或者母材上蒸镀多层电介质膜而形成的。
9.根据权利要求7所述的放电灯,其特征在于,所述光反射部件是在放电容器的外表面上蒸镀金属膜或多层电介质膜而形成的。
10.根据权利要求1~9中任一项所述的放电灯,其特征在于,所述相对配置的电极中的一个电极被埋设在放电容器管壁的内部,另一个电极被设置在放电容器外部。
11.根据权利要求10所述的放电灯,其特征在于,所述被设置在放电容器外部的电极是网状金属。
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- 2008-11-21 WO PCT/JP2008/071217 patent/WO2009078249A1/ja active Application Filing
- 2008-11-21 US US12/747,323 patent/US20100259152A1/en not_active Abandoned
- 2008-11-21 CN CN200880120558.6A patent/CN101896992B/zh active Active
- 2008-11-21 JP JP2009546195A patent/JP5307029B2/ja active Active
- 2008-12-03 TW TW097146914A patent/TWI451471B/zh active
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CN105070640A (zh) * | 2015-07-30 | 2015-11-18 | 安徽中杰信息科技有限公司 | 真空无极紫外灯的激发方式 |
US11721539B2 (en) | 2020-11-24 | 2023-08-08 | Beijing E-town Semiconductor Technology Co., Ltd. | Arc lamp with forming gas for thermal processing systems |
Also Published As
Publication number | Publication date |
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JP5307029B2 (ja) | 2013-10-02 |
JPWO2009078249A1 (ja) | 2011-04-28 |
CN101896992B (zh) | 2013-01-30 |
WO2009078249A1 (ja) | 2009-06-25 |
US20100259152A1 (en) | 2010-10-14 |
TW200931485A (en) | 2009-07-16 |
TWI451471B (zh) | 2014-09-01 |
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