CN101115998B - 用于远程缓冲测试通道的方法和装置 - Google Patents

用于远程缓冲测试通道的方法和装置 Download PDF

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Publication number
CN101115998B
CN101115998B CN2005800297017A CN200580029701A CN101115998B CN 101115998 B CN101115998 B CN 101115998B CN 2005800297017 A CN2005800297017 A CN 2005800297017A CN 200580029701 A CN200580029701 A CN 200580029701A CN 101115998 B CN101115998 B CN 101115998B
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Prior art keywords
buffer
test
delay
probe
isolation buffers
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Expired - Fee Related
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CN2005800297017A
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Chinese (zh)
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CN101115998A (zh
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C·A·米勒
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FormFactor Inc
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FormFactor Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G01R31/3008—Quiescent current [IDDQ] test or leakage current test

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
CN2005800297017A 2004-09-09 2005-09-08 用于远程缓冲测试通道的方法和装置 Expired - Fee Related CN101115998B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/937,470 2004-09-09
US10/937,470 US7453258B2 (en) 2004-09-09 2004-09-09 Method and apparatus for remotely buffering test channels
PCT/US2005/032202 WO2006029340A2 (en) 2004-09-09 2005-09-08 Method and apparatus for remotely buffering test channels

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201010536273XA Division CN102053221A (zh) 2004-09-09 2005-09-08 用于远程缓冲测试通道的方法和装置

Publications (2)

Publication Number Publication Date
CN101115998A CN101115998A (zh) 2008-01-30
CN101115998B true CN101115998B (zh) 2011-01-05

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CN2005800297017A Expired - Fee Related CN101115998B (zh) 2004-09-09 2005-09-08 用于远程缓冲测试通道的方法和装置
CN201010536273XA Pending CN102053221A (zh) 2004-09-09 2005-09-08 用于远程缓冲测试通道的方法和装置

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CN201010536273XA Pending CN102053221A (zh) 2004-09-09 2005-09-08 用于远程缓冲测试通道的方法和装置

Country Status (7)

Country Link
US (2) US7453258B2 (https=)
EP (1) EP1794607A2 (https=)
JP (1) JP4950051B2 (https=)
KR (1) KR101207090B1 (https=)
CN (2) CN101115998B (https=)
TW (1) TWI401447B (https=)
WO (1) WO2006029340A2 (https=)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7262611B2 (en) * 2000-03-17 2007-08-28 Formfactor, Inc. Apparatuses and methods for planarizing a semiconductor contactor
US7365556B2 (en) * 2004-09-02 2008-04-29 Texas Instruments Incorporated Semiconductor device testing
US7453258B2 (en) 2004-09-09 2008-11-18 Formfactor, Inc. Method and apparatus for remotely buffering test channels
US7262624B2 (en) * 2004-12-21 2007-08-28 Formfactor, Inc. Bi-directional buffer for interfacing test system channel
US7653356B2 (en) * 2005-09-15 2010-01-26 Silicon Laboratories Inc. System and method for reducing spurious emissions in a wireless communication device including a testing apparatus
US7890822B2 (en) * 2006-09-29 2011-02-15 Teradyne, Inc. Tester input/output sharing
US7852094B2 (en) * 2006-12-06 2010-12-14 Formfactor, Inc. Sharing resources in a system for testing semiconductor devices
JP2009071533A (ja) * 2007-09-12 2009-04-02 Advantest Corp 差動信号伝送装置および試験装置
US20090085598A1 (en) * 2007-09-28 2009-04-02 Qimonda Ag Integrated circuit test system and method with test driver sharing
JP2011226854A (ja) * 2010-04-16 2011-11-10 Advantest Corp 電圧を供給する装置
KR101133030B1 (ko) * 2010-12-08 2012-04-04 인텔릭스(주) 디스크리트 자가 진단 시스템
EP2726528B1 (en) 2011-06-29 2021-10-20 Dow Global Technologies LLC Flame resistant composition, fiber reinforced polyurethane based composite article comprising the flame resistant composition and its use
US8680888B2 (en) * 2011-12-15 2014-03-25 Micron Technologies, Inc. Methods and systems for routing in a state machine
US8928383B2 (en) * 2013-03-15 2015-01-06 Analog Devices, Inc. Integrated delayed clock for high speed isolated SPI communication
TWI467195B (zh) * 2013-06-17 2015-01-01 Ardentek Corp 測試系統之接觸界面檢測法
CN104931759B (zh) * 2014-03-21 2018-07-06 中芯国际集成电路制造(上海)有限公司 一种标准单元漏电流的测试电路及测试方法
US9696376B2 (en) * 2015-03-12 2017-07-04 Globalfoundries Inc. Leakage testing of integrated circuits using a logarithmic transducer and a voltmeter
US10302677B2 (en) * 2015-04-29 2019-05-28 Kla-Tencor Corporation Multiple pin probes with support for performing parallel measurements
KR102576210B1 (ko) 2016-07-05 2023-09-08 삼성전자주식회사 반도체 장치
JP6782134B2 (ja) * 2016-09-26 2020-11-11 ラピスセミコンダクタ株式会社 スキャン回路、集合スキャン回路、半導体装置、および半導体装置の検査方法
KR102336181B1 (ko) 2017-06-07 2021-12-07 삼성전자주식회사 누설 전류 측정 회로, 이를 포함하는 집적 회로 및 시스템
US20190250208A1 (en) * 2018-02-09 2019-08-15 Qualcomm Incorporated Apparatus and method for detecting damage to an integrated circuit
KR102549004B1 (ko) * 2018-06-22 2023-06-29 삼성디스플레이 주식회사 점등 검사 장치, 점등 검사 방법 및 점등 검사 시스템
KR102801426B1 (ko) * 2020-08-19 2025-04-29 삼성전자주식회사 수신 회로, 이를 포함하는 인쇄 회로 기판 및 인터페이스 회로
KR102849291B1 (ko) * 2020-09-22 2025-08-25 삼성전자주식회사 프로브 장치, 테스트 장치, 및 반도체 장치의 테스트 방법
US11313903B2 (en) * 2020-09-30 2022-04-26 Analog Devices, Inc. Pin driver and test equipment calibration
CN113866589A (zh) * 2021-09-03 2021-12-31 长江存储科技有限责任公司 芯片测试装置及芯片测试方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1176713A (zh) * 1995-12-28 1998-03-18 株式会社爱德万测试 具有延迟补正电路的集成电路装置
US5930188A (en) * 1995-08-04 1999-07-27 Micron Technology, Inc. Memory circuit for performing threshold voltage tests on cells of a memory array
US6094377A (en) * 1995-07-28 2000-07-25 Micron Technology, Inc. Memory circuit with switch for selectively connecting an input/output pad directly to a nonvolatile memory cell

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812529B2 (ja) * 1989-06-07 1996-02-07 キヤノン株式会社 定着装置
JP3005250B2 (ja) * 1989-06-30 2000-01-31 テキサス インスツルメンツ インコーポレイテツド バスモニター集積回路
JPH05172900A (ja) * 1991-12-20 1993-07-13 Yokogawa Electric Corp パルス伝送路
JPH0720206A (ja) * 1993-06-23 1995-01-24 Kawasaki Steel Corp 発振回路用出力回路
JP3080847B2 (ja) * 1994-10-05 2000-08-28 日本電気株式会社 半導体記憶装置
US6239604B1 (en) * 1996-10-04 2001-05-29 U.S. Philips Corporation Method for inspecting an integrated circuit by measuring a voltage drop in a supply line of sub-circuit thereof
US5966318A (en) * 1996-12-17 1999-10-12 Raytheon Company Nondestructive readout memory utilizing ferroelectric capacitors isolated from bitlines by buffer amplifiers
JPH11231022A (ja) * 1998-02-13 1999-08-27 Matsushita Electric Ind Co Ltd 半導体装置の検査方法および検査装置
JPH11326441A (ja) * 1998-05-20 1999-11-26 Advantest Corp 半導体試験装置
US6055287A (en) * 1998-05-26 2000-04-25 Mcewan; Thomas E. Phase-comparator-less delay locked loop
US6442674B1 (en) * 1998-12-30 2002-08-27 Intel Corporation Method and system for bypassing a fill buffer located along a first instruction path
US6157231A (en) 1999-03-19 2000-12-05 Credence System Corporation Delay stabilization system for an integrated circuit
EP1049167A3 (en) * 1999-04-30 2007-10-24 Sel Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US6377067B1 (en) * 2000-02-01 2002-04-23 Winbond Electronics Corporation Testing method for buried strap and deep trench leakage current
US6603323B1 (en) 2000-07-10 2003-08-05 Formfactor, Inc. Closed-grid bus architecture for wafer interconnect structure
JP4717295B2 (ja) * 2000-10-04 2011-07-06 株式会社半導体エネルギー研究所 ドライエッチング装置及びエッチング方法
US6445228B1 (en) * 2001-08-28 2002-09-03 Xilinx, Inc. Programmable even-number clock divider circuit with duty cycle correction and optional phase shift
JP2003279625A (ja) * 2002-03-27 2003-10-02 Toshiba Microelectronics Corp 半導体集積回路
JP3703794B2 (ja) * 2002-11-05 2005-10-05 日本電子材料株式会社 プローブおよびプローブカード
JP2004170079A (ja) * 2002-11-15 2004-06-17 Hitachi Electronics Eng Co Ltd 試験波形供給方法、半導体試験方法、ドライバ、及び半導体試験装置
US7250772B2 (en) * 2002-11-19 2007-07-31 University Of Utah Research Foundation Method and apparatus for characterizing a signal path carrying an operational signal
JP2004198269A (ja) * 2002-12-19 2004-07-15 Hitachi Ltd 半導体集積回路装置
US7154259B2 (en) 2003-10-23 2006-12-26 Formfactor, Inc. Isolation buffers with controlled equal time delays
US7453258B2 (en) 2004-09-09 2008-11-18 Formfactor, Inc. Method and apparatus for remotely buffering test channels

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6094377A (en) * 1995-07-28 2000-07-25 Micron Technology, Inc. Memory circuit with switch for selectively connecting an input/output pad directly to a nonvolatile memory cell
US5930188A (en) * 1995-08-04 1999-07-27 Micron Technology, Inc. Memory circuit for performing threshold voltage tests on cells of a memory array
CN1176713A (zh) * 1995-12-28 1998-03-18 株式会社爱德万测试 具有延迟补正电路的集成电路装置

Also Published As

Publication number Publication date
JP4950051B2 (ja) 2012-06-13
WO2006029340A3 (en) 2007-07-26
CN101115998A (zh) 2008-01-30
KR101207090B1 (ko) 2012-11-30
JP2008512682A (ja) 2008-04-24
US20090132190A1 (en) 2009-05-21
TW200624841A (en) 2006-07-16
WO2006029340A2 (en) 2006-03-16
US20060049820A1 (en) 2006-03-09
TWI401447B (zh) 2013-07-11
EP1794607A2 (en) 2007-06-13
KR20070100695A (ko) 2007-10-11
US7453258B2 (en) 2008-11-18
CN102053221A (zh) 2011-05-11
US7825652B2 (en) 2010-11-02

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Granted publication date: 20110105

Termination date: 20110908