CN100524774C - 存储器单元，存储器单元排列及制造方法 - Google Patents

存储器单元，存储器单元排列及制造方法 Download PDF

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Publication number
CN100524774C
CN100524774C CNB028125134A CN02812513A CN100524774C CN 100524774 C CN100524774 C CN 100524774C CN B028125134 A CNB028125134 A CN B028125134A CN 02812513 A CN02812513 A CN 02812513A CN 100524774 C CN100524774 C CN 100524774C
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China
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layer
memory
channel
memory cell
region
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Expired - Fee Related
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CNB028125134A
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Chinese (zh)
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CN1526170A (zh
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H·帕尔姆
J·威尔勒
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Infineon Technologies AG
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Infineon Technologies AG
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0413—Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having charge-trapping gate insulators, e.g. MNOS transistors

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  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
CNB028125134A 2001-06-21 2002-06-12 存储器单元，存储器单元排列及制造方法 Expired - Fee Related CN100524774C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10129958A DE10129958B4 (de) 2001-06-21 2001-06-21 Speicherzellenanordnung und Herstellungsverfahren
DE10129958.3 2001-06-21

Publications (2)

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CN1526170A CN1526170A (zh) 2004-09-01
CN100524774C true CN100524774C (zh) 2009-08-05

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CNB028125134A Expired - Fee Related CN100524774C (zh) 2001-06-21 2002-06-12 存储器单元，存储器单元排列及制造方法

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US (2) US6548861B2 (enExample)
EP (1) EP1399972A2 (enExample)
JP (1) JP3976729B2 (enExample)
KR (1) KR100629383B1 (enExample)
CN (1) CN100524774C (enExample)
DE (1) DE10129958B4 (enExample)
TW (1) TW567612B (enExample)
WO (1) WO2003001600A2 (enExample)

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US8338887B2 (en) 2005-07-06 2012-12-25 Infineon Technologies Ag Buried gate transistor
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US7468299B2 (en) * 2005-08-04 2008-12-23 Macronix International Co., Ltd. Non-volatile memory cells and methods of manufacturing the same
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Also Published As

Publication number Publication date
JP3976729B2 (ja) 2007-09-19
KR20040007749A (ko) 2004-01-24
KR100629383B1 (ko) 2006-09-29
DE10129958A1 (de) 2003-01-09
WO2003001600A3 (de) 2003-08-21
TW567612B (en) 2003-12-21
US20030006428A1 (en) 2003-01-09
CN1526170A (zh) 2004-09-01
WO2003001600A2 (de) 2003-01-03
US6794249B2 (en) 2004-09-21
DE10129958B4 (de) 2006-07-13
US20030151091A1 (en) 2003-08-14
US6548861B2 (en) 2003-04-15
EP1399972A2 (de) 2004-03-24
JP2004531084A (ja) 2004-10-07

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